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Application of mosaic pixel microbolometer technology to very high-performance, low-cost thermography and pedestrian detection 马赛克像素微辐射热计技术在高性能、低成本热成像和行人检测中的应用
Pub Date : 2013-06-18 DOI: 10.1117/12.2018593
K. Liddiard
Mosaic pixel FPA technology comprises a novel microbolometer array design which, together with advanced packaging and integrated optics, can provide enhanced performance in short range sensing applications. Initially developed for passive infrared (PIR) security sensors, the technology can be applied to other non-military applications where a large pixel size is acceptable and a high detective performance is required. In this paper we discuss to two applications in depth: low cost thermography and non-imaging cheap sensors for pedestrian detection and other applications. Both have the advantage of very low NETD. We also discuss development of miniaturised IR sensors, as initially conceived for mosaic pixel technology.
马赛克像素FPA技术包括一种新颖的微测热计阵列设计,结合先进的封装和集成光学,可以在短距离传感应用中提供增强的性能。最初是为被动红外(PIR)安全传感器开发的,该技术可以应用于其他非军事应用,其中可以接受大像素尺寸并且需要高探测性能。本文深入讨论了低成本热成像和非成像廉价传感器在行人检测等方面的应用。两者都具有非常低的NETD的优点。我们还讨论了小型化红外传感器的发展,最初设想为马赛克像素技术。
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引用次数: 7
Room temperature SWIR sensing from colloidal quantum dot photodiode arrays 胶体量子点光电二极管阵列室温SWIR传感
Pub Date : 2013-06-18 DOI: 10.1117/12.2019521
E. Klem, Jay S. Lewis, C. Gregory, Garry B. Cunningham, D. Temple, A. D'Souza, E. Robinson, P. Wijewarnasuriya, N. Dhar
While InGaAs-based focal plane arrays (FPAs) provide excellent detectivity and low noise for SWIR imaging applications, wider scale adoption of systems capable of working in this spectral range is limited by high costs, limited spectral response, and costly integration with Si ROIC devices. RTI has demonstrated a novel photodiode technology based on IR-absorbing solution-processed PbS colloidal quantum dots (CQD) that can overcome these limitations of InGaAs FPAs. The most significant advantage of the CQD technology is ease of fabrication. The devices can be fabricated directly onto the ROIC substrate at low temperatures compatible with CMOS, and arrays can be fabricated at wafer scale. Further, device performance is not expected to degrade significantly with reduced pixel size. We present results for upward-looking detectors fabricated on Si substrates with sensitivity from the UV to ~1.7 µm. We further show devices fabricated with larger size CQDs that exhibit spectral sensitivity that extends from UV to 2 µm.
虽然基于ingaas的焦平面阵列(fpa)为SWIR成像应用提供了出色的探测性和低噪声,但能够在该光谱范围内工作的系统的更广泛采用受到高成本,有限的光谱响应以及与Si ROIC器件的昂贵集成的限制。RTI已经展示了一种基于红外吸收溶液处理的PbS胶体量子点(CQD)的新型光电二极管技术,该技术可以克服InGaAs fpa的这些局限性。CQD技术最大的优点是易于制造。该器件可以在与CMOS兼容的低温下直接在ROIC衬底上制造,并且可以在晶圆规模上制造阵列。此外,设备性能不会随着像素尺寸的减小而显著降低。我们展示了在Si衬底上制作的向上看探测器的结果,其灵敏度从UV到~1.7µm。我们进一步展示了用更大尺寸的CQDs制造的器件,其光谱灵敏度从UV延伸到2 μ m。
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引用次数: 6
A fully digital readout employing extended counting method to achieve very low quantization noise 采用扩展计数方法的全数字读出器,实现极低的量化噪声
Pub Date : 2013-06-18 DOI: 10.1117/12.2018518
Huseyin Kayahan, Ömer Ceylan, M. Yazici, Y. Gurbuz
This paper presents a digital ROIC for staring type arrays with extending counting method to realize very low quantization noise while achieving a very high charge handling capacity. Current state of the art has shown that digital readouts with pulse frequency method can achieve charge handling capacities higher than 3Ge- with quantization noise higher than 1000e-. Even if the integration capacitance is reduced, it cannot be lower than 1-3 fF due to the parasitic capacitance of the comparator. For achieving a very low quantization noise of 200 electrons in a power efficient way, a new method based on measuring the time to measure the remaining charge on the integration capacitor is proposed. With this approach SNR of low flux pixels are significantly increased while large flux pixels can store electrons as high as 2.33Ge-. A prototype array of 32x32 pixels with 30μm pitch is implemented in 90nm CMOS process technology for verification. Simulation results are given for complete readout.
本文提出了一种适用于凝视型阵列的数字ROIC,采用扩展计数方法,在实现极低量化噪声的同时,还能获得很高的电荷处理能力。目前的技术水平表明,采用脉冲频率方法的数字读出可以实现高于3Ge-的电荷处理能力,量化噪声高于1000e-。即使降低积分电容,由于比较器的寄生电容,也不能低于1-3 fF。为了在功率效率高的情况下实现200个电子的极低量化噪声,提出了一种基于测量时间的积分电容剩余电荷测量新方法。该方法显著提高了低通量像元的信噪比,而大通量像元可存储高达2.33Ge-的电子。采用90nm CMOS工艺技术实现了32 × 32像素、30μm间距的原型阵列进行验证。给出了完整读出的仿真结果。
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引用次数: 5
Room-temperature micro-photonic bolometer based on dielectric optical resonators 基于介电光学谐振腔的室温微光子测热计
Pub Date : 2013-06-18 DOI: 10.1117/12.2016303
T. Ioppolo, E. Rubino
In this paper we present a room-temperature micro-photonic bolometer that is based on the whispering gallery mode of dielectric resonator (WGM). The sensing element is a hollow micro-spherical optical polymeric resonator. The hollow resonator is filled with a fluid (gas or liquid) that has a large thermal expansion. When an incoming radiation impinges on the resonator is absorbed by the absorbing fluid leading to a thermal expansion of the micro-resonator. The thermal expansion induces changes in the morphology of the resonator (size and index of refraction), that in turn lead to a shift of the optical resonances (WGM). The optical resonances are typically excited using a single mode optical fiber. The preliminary analysis presented in this paper, shows that these sensors can measure energies of the order of 0.1J/m2.
本文提出了一种基于介电谐振腔低语通道模式的室温微光子测热计。传感元件为空心微球光学聚合物谐振器。空心谐振腔内填充有热膨胀大的流体(气体或液体)。当入射辐射撞击谐振器时,被吸收流体吸收,导致微谐振器的热膨胀。热膨胀引起谐振腔形态(尺寸和折射率)的变化,进而导致光学共振(WGM)的移位。光学共振通常是用单模光纤激发的。初步分析表明,这些传感器可以测量0.1J/m2量级的能量。
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引用次数: 5
IR and visible images registration method based on cross cumulative residual entropy 基于交叉累积残差熵的红外与可见光图像配准方法
Pub Date : 2013-06-18 DOI: 10.1117/12.2014267
Chaowei Li, Qian Chen, G. Gu, Tian Man
This paper presents a method which combines with Bilateral Filter and cross cumulative residual entropy. It will be applied to infrared and visible registration. In this algorithm, firstly, according to infrared image and optical image characteristics, we put forward edge extraction algorithm based on the Bilateral Filter. Secondly, we use Cross Cumulative Residual Entropy (CCRE) as the similarity measure to match the reference images and transformed images effectively. Finally, we introduce the idea of calibration to reduce operation time. Bilateral filter can reduce noise and protect edge, and cross cumulative residual entropy uses cumulative distribution function instead of probability density function to overcome the noise on the local minima. The experiment proved that registration is effective.
本文提出了一种结合双边滤波和交叉累积残差熵的方法。它将应用于红外和可见光配准。在该算法中,首先根据红外图像和光学图像的特点,提出了基于双边滤波的边缘提取算法。其次,利用交叉累积残差熵(Cross Cumulative Residual Entropy, CCRE)作为相似度度量,对参考图像和变换后的图像进行有效匹配;最后,我们引入了校准的思想,以减少操作时间。双边滤波可以降低噪声并保护边缘,交叉累积残差熵用累积分布函数代替概率密度函数克服局部极小值上的噪声。实验证明,配准是有效的。
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引用次数: 1
High-resistivity and high-TCR vanadium oxide thin films for infrared imaging prepared by bias target ion-beam deposition 偏置靶离子束沉积制备红外成像用高电阻率、高tcr氧化钒薄膜
Pub Date : 2013-06-18 DOI: 10.1117/12.2016277
Yao O. Jin, Hitesh A. Basantani, Adem Ozcelik, Tom Jackson, M. Horn
Vanadium oxide (VOx) thin films have been intensively studied as an imaging material for uncooled microbolometers due to their low resistivity, high temperature coefficient of resistivity (TCR), and low 1/f noise. Our group has studied pulsed DC reactive sputtered VOx thin films while reactive ion beam sputtering has been exclusively used to fabricate the VOx thin films for commercial thermal imaging cameras. The typical resistivity of imaging-grade VOx thin films is in the range of 0.1 to 10 ohm-cm with a TCR from -2%/K to -3%/K. In this work, we report for the first time the use of a new biased target ion beam deposition tool to prepare vanadium oxide thin films. In this BTIBD system, ions with energy lower than 25ev are generated remotely and vanadium targets are negatively biased independently for sputtering. High TCR (<-4.5%/K) VOx thin films have been reproducibly prepared in the resistivity range of 103-104 ohm-cm by controlling the oxygen partial pressure using real-time control with a residual gas analyzer. These high resistivity films may be useful in next generation uncooled focal plane arrays for through film rather than lateral thermal resistors. This will improve the sensitivity through the higher TCR without increasing noise accompanied by higher resistance. We report on the processing parameters necessary to produce these films as well as details on how this novel deposition tool operates. We also report on controlled addition of alloy materials and their effects on VOx thin films’ electrical properties.
钒氧化物(VOx)薄膜由于其低电阻率、高电阻率温度系数(TCR)和低1/f噪声而被广泛研究作为非冷却微热计的成像材料。本课题组研究了脉冲直流反应溅射VOx薄膜,而反应离子束溅射已专门用于制作商用热像仪用VOx薄膜。成像级VOx薄膜的典型电阻率为0.1 ~ 10欧姆-cm, TCR为-2% ~ -3%/K。在这项工作中,我们首次报道了使用一种新的偏置目标离子束沉积工具来制备氧化钒薄膜。在BTIBD系统中,远端产生能量低于25ev的离子,钒靶独立负偏置进行溅射。利用残余气体分析仪实时控制氧分压,可在103 ~ 104欧姆-cm电阻率范围内制备高TCR (<-4.5%/K)的VOx薄膜。这些高电阻率薄膜可用于下一代非冷却焦平面阵列的透膜而不是横向热电阻。这将通过更高的TCR提高灵敏度,而不会增加伴随着更高电阻的噪声。我们报告了生产这些薄膜所需的加工参数以及这种新型沉积工具如何操作的细节。我们还报道了合金材料的可控添加及其对VOx薄膜电性能的影响。
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引用次数: 15
Surface states characterization and simulation of Type-II In(Ga)Sb quantum dot structures for processing optimization of LWIR detectors 用于LWIR探测器工艺优化的ii型In(Ga)Sb量子点结构表面态表征与模拟
Pub Date : 2013-06-18 DOI: 10.1117/12.2015966
Qin Wang, M. Rajabi, A. Karim, S. Almqvist, M. Bakowski, S. Savage, J. Andersson, M. Göthelid, Shun Yu, O. Gustafsson, M. Hammar, C. Asplund
Quantum structures base on type-II In(Ga)Sb quantum dots (QDs) embedded in an InAs matrix were used as active material for achieving long-wavelength infrared (LWIR) photodetectors in this work. Both InAs and In(Ga)Sb are narrow band semiconductor materials and known to possess a large number of surface states, which apparently play significant impact for the detector’s electrical and optical performance. These surface states are caused not only by material or device processing induced defects but also by surface dangling bonds, oxides, roughness and contaminants. To experimentally analyze the surface states of the QD structures treated by different device fabrication steps, atomic force microscopy (AFM), scanning electron microscopy (SEM), energy-dispersive X-ray spectroscopy (EDX) and X-ray photoelectron spectroscopy (XPS) measurements were performed. The results were used to optimize the fabrication process of the LWIR photodetectors in our ongoing project. The dark current and its temperature dependence of the fabricated IR photodetectors were characterized in temperature range 10 K to 300 K, and the experiment results were analyzed by a theoretic modeling obtained using simulation tool MEDICI.
基于嵌入InAs矩阵的ii型In(Ga)Sb量子点(QDs)的量子结构被用作实现长波红外(LWIR)光电探测器的活性材料。InAs和In(Ga)Sb都是窄带半导体材料,已知具有大量表面态,这显然对探测器的电学和光学性能产生重大影响。这些表面状态不仅由材料或器件加工引起的缺陷引起,而且还由表面悬垂键、氧化物、粗糙度和污染物引起。通过原子力显微镜(AFM)、扫描电子显微镜(SEM)、能量色散x射线能谱(EDX)和x射线光电子能谱(XPS)测量,实验分析了不同器件制备步骤处理后的QD结构的表面态。研究结果被用来优化我们正在进行的项目中LWIR光电探测器的制作工艺。在10 ~ 300 K的温度范围内,对制备的红外探测器的暗电流及其温度依赖性进行了表征,并利用仿真工具MEDICI建立了理论模型,对实验结果进行了分析。
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引用次数: 0
Dewar-cooler-integrated high sensitivity MWIR wave front sensor 集成杜瓦-冷却器的高灵敏度MWIR波前传感器
Pub Date : 2013-06-18 DOI: 10.1117/12.2015905
S. Velghe, S. Magli, G. Aubry, N. Guerineau, S. Rommeluère, J. Jaeck, B. Wattellier
Recent developments in the Mid Wave InfraRed (MWIR) optical domain were made on materials, optical design and manufacturing. They answer increasing demands for more compact, less temperature dependent optical systems with increased optical performances and complexity (multi- or hyper- spectral imagery). At the same time, the characterization of these components has become strategic and requires solutions with higher performance. The optical quality of such devices is measured by wave front sensing techniques. PHASICS previously developed wave front sensors based on Quadri-Wave Lateral Shearing Interferometry (QWLSI) using broadband microbolometers cameras for infrared measurements. However they suffer from reduced light sensitivity in the MWIR domain, which limits their use with broadband sources such as black bodies. To meet metrology demands, we developed an innovative wave front sensor. This instrument combines the metrological qualities of QWLSI with the radiometric performances of a last generation detection block (Infrared Detector Dewar Cooler Assembly, IDDCA) with a quantum infrared focal plane array (IRFPA) of HgCdTe technology. The key component of QWLSI is a specific diffractive grating placed a few millimeters from the focal plane array. This requirement implies that this optics should be integrated inside the IDDCA. To achieve this, we take advantage of the experience acquired from recent developments with optics integrated in IDDCA. Thanks to this approach, we developed a high spatial resolution MWIR wave front sensor (160x128 points) with a high sensitivity for accurate measurements under low-flux conditions. This paper will present the instrument technological solutions, the development key steps and experimental results on various metrology applications.
介绍了中波红外(MWIR)光学领域在材料、光学设计和制造等方面的最新进展。他们满足日益增长的需求,更紧凑,更少的温度依赖光学系统,提高光学性能和复杂性(多光谱或高光谱图像)。同时,这些组件的特性已成为战略性的,需要具有更高性能的解决方案。这种器件的光学质量是通过波前传感技术来测量的。PHASICS先前开发了基于四次波横向剪切干涉(QWLSI)的波前传感器,使用宽带微辐射热计相机进行红外测量。然而,它们在MWIR域中的光灵敏度降低,这限制了它们与黑体等宽带光源的使用。为了满足计量需求,我们开发了一种创新的波前传感器。该仪器将QWLSI的计量特性与上一代检测块(红外探测器杜瓦冷却器组件,IDDCA)的辐射性能与HgCdTe技术的量子红外焦平面阵列(IRFPA)相结合。QWLSI的关键部件是放置在距焦平面阵列几毫米处的特定衍射光栅。这一要求意味着该光学器件应集成在IDDCA内部。为了实现这一目标,我们充分利用了IDDCA集成光学器件的最新开发经验。由于这种方法,我们开发了高空间分辨率的MWIR波前传感器(160 × 128点),具有高灵敏度,可以在低通量条件下进行精确测量。本文将介绍该仪器的技术方案、开发关键步骤和在各种计量应用中的实验结果。
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引用次数: 0
Precise opto-mechanical characterization of assembled infrared optics 组装红外光学元件的精确光力学特性
Pub Date : 2013-06-18 DOI: 10.1117/12.2015679
D. Winters, P. Langehanenberg, J. Heinisch, E. Dumitrescu
The imaging quality of assembled optical systems is strongly influenced by the alignment errors of the individual lenses in the assembly. Although instrumentation for characterizing centering errors for the visual spectral range existed for some time, the technology to include the LWIR (8-12µm) and the MWIR (3-5µm) spectral ranges was only recently developed. Here, we report on the development and performance of such a measurement system that is capable of fully characterizing the alignment of all individual elements of an IR lens assembly in a non-contact and non-destructive fashion. The main component of the new instrument is an autocollimator working in the LWIR that determines the position of the center of curvature of each individual IR lens surface with respect to the instruments reference axis. This position data are used to calculate the shift and tilt of the individual lenses with respect to each other or a user-defined reference axis like e.g. the assembly housing. Finally, to complete the whole picture, the thicknesses and air gaps between individual lenses are measured with a low coherence interferometer built into the instrument. In order to obtain precise data, the instrument software takes the measured real centering error into account and directs the user to optimally align the assembly with respect of the interferometer reference axis, which then determines the position of the vertex positions along the optical axis and from these the center thicknesses of each lens and the air gaps between lenses with an accuracy below one micrometer.
装配光学系统的成像质量受到装配中单个透镜的对准误差的强烈影响。虽然用于表征视觉光谱范围定心误差的仪器已经存在了一段时间,但包括LWIR(8-12µm)和MWIR(3-5µm)光谱范围的技术直到最近才发展起来。在这里,我们报告了这种测量系统的开发和性能,该系统能够以非接触和非破坏性的方式完全表征红外透镜组件的所有单个元素的对准。新仪器的主要组成部分是在LWIR中工作的自准直仪,它确定每个单独的红外透镜表面相对于仪器参考轴的曲率中心的位置。该位置数据用于计算单个镜头相对于彼此或用户定义的参考轴(例如组装外壳)的移位和倾斜。最后,为了完成整个图像,用仪器内置的低相干干涉仪测量单个透镜之间的厚度和气隙。为了获得精确的数据,仪器软件将测量到的实际定心误差考虑在内,并指导用户根据干涉仪参考轴对组件进行最佳对齐,然后确定沿光轴的顶点位置的位置,并从这些位置确定每个透镜的中心厚度和透镜之间的气隙,精度低于1微米。
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引用次数: 2
A practical approach to LWIR wafer-level optics for thermal imaging systems 用于热成像系统的LWIR晶圆级光学的实用方法
Pub Date : 2013-06-18 DOI: 10.1117/12.2015254
Alan Symmons, R. Pini
The development and implementation of wafer level packaging for commercial microbolometers has opened the pathway towards full wafer-based thermal imaging systems. The next challenge in development is moving from discrete element LWIR imaging systems to a wafer based optical system, similar to lens assemblies found in cell phone cameras. This paper will compare a typical high volume thermal imaging design manufactured from discrete lens elements to a similar design optimized for manufacture through a wafer based approach. We will explore both performance and cost tradeoffs as well as review the manufacturability of all designs.
商业微辐射热计的晶圆级封装的开发和实施为全晶圆热成像系统开辟了道路。研发中的下一个挑战是从离散元件LWIR成像系统转向基于晶圆的光学系统,类似于手机相机中的镜头组件。本文将比较由离散透镜元件制造的典型大批量热成像设计与通过基于晶圆的方法优化制造的类似设计。我们将探讨性能和成本的权衡,以及审查所有设计的可制造性。
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引用次数: 8
期刊
Defense, Security, and Sensing
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