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Low-dark current structures for long-wavelength Type-II strained layer superlattice photodiodes 长波长ii型应变层超晶格光电二极管的低暗电流结构
Pub Date : 2013-06-11 DOI: 10.1117/12.2015489
Z. Tian, E. Decuir, P. Wijewarnasuriya, J. Pattison, N. Gautam, S. Krishna, N. Dhar, R. Welser, A. Sood
This paper describes our efforts on the development of low dark current long-wave infrared (LWIR) photodetectors based on type-II InAs/GaSb strained superlattices. By adopting a so-called pBiBn structure, a hybrid between the conventional PIN structure and unipolar barrier concepts, suppressed dark current and near-zero-bias operation are obtained, respectively. The LWIR photodetector has a dark current density as low as 1.42×10-5 A/cm2 at -60 mV, and R0A of 5365 Ωcm2 at 76 K. The measured peak detectivity at 10.2 µm of 8.7×1010 cmHz1/2W-1 is obtained at -60 mV at 76 K. To further improve the device performances, a newer design with longer cut-off wavelength targeted for near zero-bias was also realized. This 2-µm-thick device exhibits a quantum efficiency of 20% at 10 µm under zero-bias.
本文介绍了基于ii型InAs/GaSb应变超晶格的低暗电流长波红外(LWIR)光电探测器的研制工作。通过采用所谓的pBiBn结构,将传统PIN结构与单极势垒概念相结合,分别获得了抑制暗电流和近零偏置操作。LWIR光电探测器在-60 mV时的暗电流密度低至1.42×10-5 a /cm2,在76 K时的R0A为5365 Ωcm2。在-60 mV、76 K条件下,8.7×1010 cmHz1/2W-1测得10.2µm的探测峰。为了进一步提高器件性能,还实现了一种针对近零偏置的较长截止波长的新设计。该器件厚度为2 μ m,在零偏压下,在10 μ m处的量子效率为20%。
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引用次数: 5
Vertically integrated pixel microbolometers for IR imaging using high-resistivity VOx 用于高电阻率VOx红外成像的垂直集成像素微辐射热计
Pub Date : 2013-06-11 DOI: 10.1117/12.2016292
Hitesh A. Basantani, Hang-Beum Shin, T. Jackson, M. Horn
Uncooled IR bolometers form an integral part of thermal imaging cameras. Vanadium oxide material currently used for IR imaging has a resistivity between 0.1 and 1 ohm-cm and a temperature coefficient of resistance (TCR) between -1.4%K-1 to -2.4%K-1. Higher TCR materials are desired, however, such materials inevitably have higher resistivity and therefore higher electrical resistance in a lateral resistor configuration. A high resistance leads to an increase in the Johnson-Nyquist noise of the bias-induced current, thereby limiting the performance of bolometers using high resistivity material. In this work, we demonstrate high resistivity, high TCR VOx and propose the use of a vertically integrated resistor configuration an alternate pixel structure design with lower Johnson noise when compared with the conventional lateral pixel design. Biased Target Ion Beam Deposition was used to deposit high resistivity vanadium oxide thin-films (~85 nm thick). Electrical characterization of lateral resistor structures showed resistivities ranging from 2 ⨯ 103 ohm-cm to 2.1 ⨯ 104 ohm-cm, TCR varying from -2.6%K-1 to -5%K-1, Johnson noise (pixel resistance of 1.3GΩ) of 4.7 to 6μV/√Hz and 1/f noise (normalized Hooge’s parameter (α/n)) of 5 ⨯ 10-21 to 5 ⨯ 10-18 cm-3. In contrast, the through-film resistor structures showed significantly higher resistivities at 3 ⨯ 104 Ohm-cm to 1.55 ⨯ 105 Ohm-cm, TCR similar to lateral resistive structure between -2.6%K-1 to -5.1%K-1, immeasurably low Johnson noise (pixel resistance of 48KΩ) and normalized Hooge’s parameter ranging from to 5⨯10-21 to 1⨯10-18 cm-3. These results indicate the possible use of through-film resistors as an alternative to the conventional lateral-resistor design currently used in uncooled imaging microbolometers.
非制冷红外热辐射计是热成像仪的组成部分。目前用于红外成像的氧化钒材料的电阻率在0.1至1欧姆-厘米之间,电阻温度系数(TCR)在-1.4%K-1至-2.4%K-1之间。需要更高的TCR材料,然而,这种材料不可避免地具有更高的电阻率,因此在横向电阻配置中具有更高的电阻。高电阻导致偏置电流的Johnson-Nyquist噪声增加,从而限制了使用高电阻材料的测热计的性能。在这项工作中,我们展示了高电阻率,高TCR VOx,并提出使用垂直集成电阻配置,与传统的横向像素设计相比,具有更低约翰逊噪声的替代像素结构设计。采用偏靶离子束沉积法沉积高电阻率氧化钒薄膜(~85 nm厚)。横向电阻结构的电阻率为2 ~ 103欧姆-厘米,TCR为-2.6%K-1 ~ -5%K-1, Johnson噪声(像素电阻1.3GΩ)为4.7 ~ 6μV/√Hz, 1/f噪声(归一化胡格参数(α/n))为5 ~ 10 ~ 18 μ v -3。相比之下,透膜电阻结构在3 - 104欧姆-厘米范围内的电阻率明显高于1.55欧姆-厘米,TCR与横向电阻结构相似,在-2.6%K-1至-5.1%K-1之间,约翰逊噪声极低(像素电阻为48KΩ),归一化的胡格参数范围为-5 - 10-21 -1。这些结果表明,可以使用透膜电阻器来替代目前用于非冷却成像微辐射热计的传统侧电阻设计。
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引用次数: 9
Exploring optimum growth window for high quality InAs/GaInSb superlattice materials 探索高质量InAs/GaInSb超晶格材料的最佳生长窗口
Pub Date : 2013-06-11 DOI: 10.1117/12.2015314
H. Haugan, G. Brown, M. Kim, K. Mahalingam, S. Elhamri, W. Mitchel, L. Grazulis
We report ternary growth studies to develop a largely strained InAs/InGaSb superlattice (SL) material for very long wavelength infrared (VLWIR) detection. We select a SL structure of 47.0 Å InAs/21.5 Å In0.25Ga0.75Sb that theoretically designed for the greatest possible detectivity, and tune growth conditions for the best possible material quality. Since material quality of grown SLs is largely influenced by extrinsic defects such as nonradiative recombination centers and residual background dopings in the grown layers, we investigate the effect of growth temperature (Tg) on the spectral responses and charge carrier transports using photoconductivity and temperature-dependent Hall effect measurements. Results indicate that molecular beam epitaxy (MBE) growth process we developed produces a consistent gap near 50 meV within a range of few meV, but SL spectral sensing determined by photoresponse (PR) intensity is very sensitive to the minor changes in Tg. For the SLs grown from 390 to 470 °C, a PR signal gradually increases as Tg increases from 400 to 440 °C by reaching a maximum at 440 °C. Outside this growth window, the SL quality deteriorates very rapidly. All SLs grown for this study were n-type, but the mobility varied in a variety of range between 11,300 and 21 cm2/Vs. The mobility of the SL grown at 440 °C was approximately 10,000 V/cm2 with a sheet carrier concentration of 5 × 1011 cm-2, but the mobility precipitously dropped to 21 cm2/Vs at higher temperatures. Using the knowledge we learned from this growth set, other growth parameters for the MBE ternary SL growth should be further adjusted in order to achieve high performance of InAs/InGaSb materials suitable for VLWIR detection.
我们报道了一种用于超长波长红外(VLWIR)探测的大应变InAs/InGaSb超晶格(SL)材料的三元生长研究。我们选择了47.0 Å InAs/21.5 Å In0.25Ga0.75Sb的SL结构,理论上设计了最大的探测率,并调整了生长条件以获得最佳的材料质量。由于生长SLs的材料质量在很大程度上受到生长层中非辐射复合中心和残余背景掺杂等外在缺陷的影响,我们利用光电导率和温度相关的霍尔效应测量研究了生长温度(Tg)对光谱响应和载流子输运的影响。结果表明,我们开发的分子束外延(MBE)生长工艺在几个meV的范围内,在50 meV附近产生一致的间隙,但由光响应(PR)强度确定的SL光谱感知对Tg的微小变化非常敏感。从390℃到470℃生长的SLs, PR信号随着Tg从400℃到440℃的增加而逐渐增加,在440℃达到最大值。在这个生长窗口之外,SL质量迅速恶化。本研究中生长的所有SLs均为n型,但迁移率在11,300 - 21 cm2/Vs之间变化。当载流子浓度为5 × 1011 cm-2时,在440℃下生长的SL迁移率约为10,000 V/cm2,但在较高温度下迁移率急剧下降至21 cm2/Vs。利用我们从这个生长集中学到的知识,应该进一步调整MBE三元SL生长的其他生长参数,以实现适合VLWIR检测的InAs/InGaSb材料的高性能。
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引用次数: 5
Crosstalk analysis in large-area low-capacitance InGaAs quad photodiodes 大面积低电容InGaAs四极光电二极管串扰分析
Pub Date : 2013-06-11 DOI: 10.1117/12.2015609
S. Datta, A. Joshi, J. Rue
We report crosstalk in 1 mm diameter and 2 mm diameter quad InGaAs photodiodes having quadrant-to-quadrant separation of 15 μm, 20 μm, and 25 μm. This crosstalk is a combination of resistive and capacitive coupling between the photodiode quadrants and varies widely on the combination on device diameter, quadrant-to-quadrant separation, illumination conditions, and modulation frequency. Thus, the position sensing accuracy is heavily influenced by the operating conditions of the quad photodiode.
我们报道了直径为1mm和2mm的四象限InGaAs光电二极管的串扰,其象限间距分别为15 μm、20 μm和25 μm。这种串扰是光电二极管象限之间的电阻和电容耦合的组合,并且在器件直径、象限到象限的分离、照明条件和调制频率的组合上变化很大。因此,四极光电二极管的工作条件对位置传感精度有很大影响。
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引用次数: 3
High quantum efficiency Type-II superlattice N-structure photodetectors with thin intrinsic layers 具有薄本征层的高量子效率ii型超晶格n结构光电探测器
Pub Date : 2013-06-11 DOI: 10.1117/12.2016133
Y. Ergun, M. Hoştut, T. Tansel, A. Muti, A. Kılıç, R. Turan, A. Aydinli
We report on the development of InAs/AlSb/GaSb based N-structure superlattice pin photodiode. In this new design, AlSb layer in between InAs and GaSb layers acts as an electron barrier that pushes electron and hole wave functions towards the GaSb/InAs interface to perform strong overlap under reverse bias. Experimental results show that, with only 20 periods of intrinsic layers, dark current density and dynamic resistance at -50 mV bias are measured as 6x10-3 A/cm2 and 148 Ωcm2 at 77K, respectively. Under zero bias, high spectral response of 1.2A/W is obtained at 5 μm with 50% cut-off wavelengths (λc) of 6 μm. With this new design, devices with only 146 nm thick i-regions exhibit a quantum efficiency of 42% at 3 μm with front-side illimunation and no anti-reflection coatings.
本文报道了基于InAs/AlSb/GaSb的n结构超晶格光电二极管的研制。在这种新设计中,InAs和GaSb层之间的AlSb层充当电子屏障,将电子和空穴波函数推向GaSb/InAs界面,在反向偏置下实现强重叠。实验结果表明,仅20个本禀层周期,在-50 mV偏置下的暗电流密度和动态电阻在77K下分别为6x10-3 A/cm2和148 Ωcm2。在零偏置下,在5 μm波长处获得1.2A/W的高光谱响应,50%截止波长(λc)为6 μm。采用这种新设计,仅146 nm厚i区的器件在3 μm处具有42%的量子效率,且采用正面照明且无增透涂层。
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引用次数: 0
A low-noise silicon-based 20μm*20μm uncooled thermoelectric infrared detector 低噪声硅基20μm*20μm非制冷热电红外探测器
Pub Date : 2013-06-11 DOI: 10.1117/12.2016283
M. Modarres-Zadeh, R. Abdolvand
Presented is an uncooled surface-micromachined thermoelectric (TE) infrared detector that features P-doped and N-doped polysilicon wires as the thermocouple pair and an umbrella like optical cavity as the absorber to achieve a high fill factor. A responsivity as high as1800V/W @5Hz and a response time of smaller than ~10ms are measured in vacuum when viewing a 500K blackbody with no concentrating optics at room temperature. The reported responsivity is more than 10 times higher than the value reported earlier [1] from similar structures due to the improvement in the thermoelectric coefficient and the thermal isolation of the cell. Finite Element Analysis is used to predict the detector’s performance and the results are in a good agreement with the measurements. The dominant source of noise is also investigated in these thermoelectric IR detectors and it is believed to be Johnson noise when they are operated under an open circuit condition. The fabricated detectors have resistances in the range of 20 to 70KOhm resulting in a Johnson noise of about 20 to 36 nV/Hz^0.5. The specific detectivity (D*) is calculated to be higher than 10^8cmHz^0.5/W. To the best of our knowledge, this is the highest reported D* for such small thermoelectric IR sensors. The measured NETD is 120mK with an f/1.5 lens.
提出了一种非冷却表面微机械热电红外探测器,该探测器采用p掺杂和n掺杂多晶硅线作为热电偶对,伞形光学腔作为吸收器,以实现高填充系数。在室温下观察500K无聚光的黑体时,在真空条件下测得的响应率高达1800v /W @5Hz,响应时间小于~10ms。由于热电系数的提高和电池的热隔离性,报告的响应率比先前报道的类似结构的值高出10倍以上。利用有限元方法对探测器的性能进行了预测,结果与实测结果吻合较好。对这些热电红外探测器的主要噪声源也进行了研究,认为当它们在开路条件下工作时,噪声源是约翰逊噪声。制造的探测器具有20至70KOhm范围内的电阻,导致约翰逊噪声约为20至36 nV/Hz^0.5。计算得到比探测率(D*)大于10^8cmHz^0.5/W。据我们所知,这是此类小型热电红外传感器报道的最高D*。在f/1.5镜头下测得的NETD为120mK。
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引用次数: 4
Overview of benefits, challenges, and requirements of wheeled-vehicle mounted infrared sensors 轮式车载红外传感器的优势、挑战和要求概述
Pub Date : 2013-06-11 DOI: 10.1117/12.2018866
J. L. Miller, P. Clayton, Stefan Olsson
Requirements for vehicle mounted infrared sensors, especially as imagers evolve to high definition (HD) format will be detailed and analyzed. Lessons learned from integrations of infrared sensors on armored vehicles, unarmored military vehicles and commercial automobiles will be discussed. Comparisons between sensors for driving and those for situation awareness, targeting and other functions will be presented. Conclusions will be drawn regarding future applications and installations. New business requirements for more advanced digital image processing algorithms in the sensor system will be discussed. Examples of these are smarter contrast/brightness adjustments algorithms, detail enhancement, intelligent blending (IR-Vis) modes, and augmented reality.
对车载红外传感器的需求,特别是随着成像仪向高清(HD)格式的发展,将进行详细分析。将讨论在装甲车、非装甲军用车辆和商用车辆上集成红外传感器的经验教训。将介绍用于驾驶的传感器与用于态势感知、目标定位和其他功能的传感器之间的比较。将得出关于未来应用和安装的结论。将讨论传感器系统中对更先进的数字图像处理算法的新业务需求。这些例子包括更智能的对比度/亮度调整算法、细节增强、智能混合(IR-Vis)模式和增强现实。
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引用次数: 1
BAE Systems' 17μm LWIR camera core for civil, commercial, and military applications BAE系统公司用于民用、商业和军事应用的17μm LWIR相机核心
Pub Date : 2013-06-11 DOI: 10.1117/12.2018090
Jeffrey Lee, Christian Rodriguez, R. Blackwell
Seventeen (17) µm pixel Long Wave Infrared (LWIR) Sensors based on vanadium oxide (VOx) micro-bolometers have been in full rate production at BAE Systems’ Night Vision Sensors facility in Lexington, MA for the past five years.[1] We introduce here a commercial camera core product, the Airia-MTM imaging module, in a VGA format that reads out in 30 and 60Hz progressive modes. The camera core is architected to conserve power with all digital interfaces from the readout integrated circuit through video output. The architecture enables a variety of input/output interfaces including Camera Link, USB 2.0, micro-display drivers and optional RS-170 analog output supporting legacy systems. The modular board architecture of the electronics facilitates hardware upgrades allow us to capitalize on the latest high performance low power electronics developed for the mobile phones. Software and firmware is field upgradeable through a USB 2.0 port. The USB port also gives users access to up to 100 digitally stored (lossless) images.
在过去的五年里,基于氧化钒(VOx)微辐射热计的17µm像素长波红外(LWIR)传感器已经在BAE系统公司位于马萨诸塞州列克星敦的夜视传感器工厂全速生产。[1]我们在这里介绍一款商用相机核心产品,Airia-MTM成像模块,采用VGA格式,以30和60Hz的渐进模式读取。相机核心的设计是为了节省从读出集成电路到视频输出的所有数字接口的电力。该架构支持多种输入/输出接口,包括Camera Link、USB 2.0、微显示驱动程序和可选的RS-170模拟输出支持传统系统。电子产品的模块化板架构便于硬件升级,使我们能够利用为移动电话开发的最新高性能低功耗电子产品。软件和固件可通过USB 2.0端口进行现场升级。USB接口还允许用户访问多达100个数字存储(无损)图像。
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引用次数: 6
Large-format 17μm high-end VOx μ-bolometer infrared detector 大画幅17μm高端VOx μ-测热红外探测器
Pub Date : 2013-06-11 DOI: 10.1117/12.2015653
U. Mizrahi, N. Argaman, S. Elkind, A. Giladi, Y. Hirsh, M. Labilov, I. Pivnik, N. Shiloah, M. Singer, A. Tuito, M. Ben-Ezra, I. Shtrichman
Long range sights and targeting systems require a combination of high spatial resolution, low temporal NETD, and wide field of view. For practical electro-optical systems it is hard to support these constraints simultaneously. Moreover, achieving these needs with the relatively low-cost Uncooled μ-Bolometer technology is a major challenge in the design and implementation of both the bolometer pixel and the Readout Integrated Circuit (ROIC). In this work we present measured results from a new, large format (1024×768) detector array, with 17μm pitch. This detector meets the demands of a typical armored vehicle sight with its high resolution and large format, together with low NETD of better than 35mK (at F/1, 30Hz). We estimate a Recognition Range for a NATO target of better than 4 km at all relevant atmospheric conditions, which is better than standard 2nd generation scanning array cooled detector. A new design of the detector package enables improved stability of the Non-Uniformity Correction (NUC) to environmental temperature drifts.
远程瞄准具和瞄准系统需要高空间分辨率、低时间NETD和宽视场的组合。在实际的光电系统中,很难同时满足这些约束条件。此外,用相对低成本的非冷却μ-辐射热计技术来实现这些需求是设计和实现辐射热计像素和读出集成电路(ROIC)的主要挑战。在这项工作中,我们展示了一种新的大格式(1024×768)探测器阵列的测量结果,其间距为17μm。该探测器具有高分辨率和大画幅的特点,且NETD小于35mK (F/ 1,30 hz),满足了典型装甲车瞄准具的要求。我们估计在所有相关大气条件下,北约目标的识别距离优于4公里,优于标准的第二代扫描阵列冷却探测器。探测器封装的新设计提高了非均匀性校正(NUC)对环境温度漂移的稳定性。
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引用次数: 17
A low-noise, extended dynamic range 1.3 megapixel InGaAs array 低噪声,扩展动态范围130万像素InGaAs阵列
Pub Date : 2013-06-11 DOI: 10.1117/12.2019030
W. Vereecken, Urbain Van Bogget, T. Colin, R. Vinella, J. Das, P. Merken, J. Vermeiren
Xenics has designed and manufactured a 1280*1024 pixel, 17 µm pitch InGaAs array for SWIR imaging in the [0.9 - 1.7 µm] range. It will report on the first characterization results of the device. As usual for this type of room temperature operated SWIR image sensors, the detector interface is based on a CTIA stage, yielding excellent linearity, a low detector bias and hence a low and stable dark current combined with low image lag. The charge to voltage conversion factor is 40 µV/e-. The pixel interface scheme contains a CDS circuit in order to reduce the kTC noise and common mode effects. The noise is expected to be below 30 e-rms in linear mode, resulting in a dynamic range < 60 dB. Additionally the linear dynamic range is complemented with a high dynamic range logarithmic response with a saturation level < 5 nA/pixel. The information in the pixel matrix can be read via 2, 4 or 8 outputs, yielding a maximum full frame rate between 50 and 200 Hz. Each output is operating at 40 MHz pixel rate. The outputs are differential with a common mode voltage of 0.9 V and an adjustable output swing of 2 Vptp. Nevertheless the power dissipation shall be below 330 mW.
Xenics设计并制造了1280*1024像素,17µm间距的InGaAs阵列,用于[0.9 - 1.7µm]范围内的SWIR成像。它将报告该器件的第一个表征结果。通常对于这种类型的室温操作SWIR图像传感器,探测器接口基于CTIA级,产生出色的线性度,低探测器偏置,因此具有低而稳定的暗电流和低图像滞后。充电电压转换系数为40µV/e-。像素接口方案包含一个CDS电路,以降低kTC噪声和共模效应。在线性模式下,噪声预计低于30 e-rms,从而导致动态范围< 60 dB。此外,线性动态范围补充了一个高动态范围的对数响应与饱和度水平< 5 nA/像素。像素矩阵中的信息可以通过2、4或8个输出读取,产生50到200 Hz之间的最大全帧速率。每个输出以40 MHz像素率工作。输出差分,共模电压为0.9 V,可调输出摆幅为2 Vptp。然而,功耗应低于330mw。
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引用次数: 4
期刊
Defense, Security, and Sensing
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