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2000 IEEE Ultrasonics Symposium. Proceedings. An International Symposium (Cat. No.00CH37121)最新文献

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An integrated optical detection method for capacitive micromachined ultrasonic transducers 电容式微加工超声换能器的集成光学检测方法
N. Hall, F. Degertekin
Capacitive micromachined ultrasonic transducers (cMUTs) have so far relied on traditional detection methods where the capacitance change due to membrane deflection is measured under constant voltage. Sensitivity of this method is proportional to the frequency of the acoustic signal and the capacitance of the device. This limits the low-frequency operation and the maximum power output of the cMUTs. This paper describes an integrated optical detection method, which offers electrical isolation between transmit-receive electronics and displacement sensitivity independent of the gap thickness and acoustic frequency. These features alleviate the limitations on the transmit signal and DC bias levels. The method is demonstrated on a cMUT made of 1.3 /spl mu/m thick, 100 /spl mu/m diameter aluminum membranes fabricated on a fused quartz substrate. The aluminum back electrode of each membrane is shaped in the form of an optical diffraction grating. Thus the cMUT membrane and the diffraction fingers on the substrate form a phase sensitive diffraction grating. For displacement detection, the grating is illuminated through the quartz substrate by a laser and the intensity of reflected diffraction orders are monitored to provide the sensitivity of an optical interferometer. Displacement measurements on the cMUT array elements and ultrasonic pulse-echo experiments in air at 1.87 MHz are presented.
电容式微机械超声换能器(cMUTs)迄今依赖于传统的检测方法,即在恒电压下测量薄膜偏转引起的电容变化。这种方法的灵敏度与声信号的频率和器件的电容成正比。这限制了cmut的低频工作和最大功率输出。本文介绍了一种集成光学检测方法,该方法提供了发射-接收电子之间的电气隔离和独立于间隙厚度和声波频率的位移灵敏度。这些特性减轻了对发射信号和直流偏置电平的限制。在熔融石英衬底上制成1.3 /spl μ m厚、100 /spl μ m直径的铝膜的cMUT上验证了该方法。每个膜的铝背电极被塑造成光学衍射光栅的形式。因此,cMUT膜和衬底上的衍射指形成相敏衍射光栅。对于位移检测,光栅通过石英衬底的激光照射和反射的衍射顺序的强度监测,以提供光学干涉仪的灵敏度。介绍了cMUT阵列元件的位移测量和1.87 MHz空气中超声脉冲回波实验。
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引用次数: 10
A first experimental verification of micromachined capacitive Lamb wave transducers 微机械电容式兰姆波换能器的首次实验验证
M. H. Badi, G. Yaralioglu, A. Sanli Ergun, F. Levent Degertekin, C. Cheng, B. Khuri-Yakub
Capacitive Micromachined Ultrasonic Transducers (cMUTs) are generally used to transmit and receive ultrasound in both air and water. These devices can be made on silicon and manufactured using standard CMOS processing techniques. When cMUTs are used in this way, significant effort is made to minimize energy loss into the substrate. If this loss is instead exploited so that the devices are optimized to couple energy into the silicon bulk, Lamb waves and Rayleigh waves are generated with high efficiency. These waves can then be detected using a similar device structure. With this method it is possible to fabricate Lamb wave devices on silicon using conventional integrated circuit processing techniques. This paper discusses the manufacturing and characterization of the first of these devices: a 1 MHz Lamb wave transducer that is fundamentally based on cMUT technology. The characterization of this device demonstrates that the energy coupled into the substrate results in a Lamb Wave where the lowest order anti-symmetric mode (A/sub 0/) is dominant. The insertion loss of this device in air is 43.06 dB.
电容式微机械超声换能器(cMUTs)通常用于传输和接收空气和水中的超声波。这些器件可以在硅上制造,并使用标准的CMOS加工技术制造。当以这种方式使用cMUTs时,需要做出重大努力以尽量减少进入基板的能量损失。如果利用这种损耗,使器件优化到将能量耦合到硅体中,则可以高效率地产生兰姆波和瑞利波。然后可以使用类似的设备结构检测这些波。利用这种方法,可以使用传统的集成电路加工技术在硅上制造兰姆波器件。本文讨论了第一个器件的制造和特性:基于cMUT技术的1 MHz兰姆波换能器。该器件的特性表明,耦合到衬底的能量导致兰姆波,其中最低阶反对称模式(a /sub 0/)占主导地位。该装置在空气中的插入损耗为43.06 dB。
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引用次数: 8
Investigation on interaction of Lamb waves and circumferential notch in pipe by means of wavelet transform 用小波变换研究兰姆波与管道周向缺口的相互作用
Zong-qi Sun, Y. Mao, Wen‐hua Jiang, D. Zhang
Mode analysis of Lamb waves propagating in an aluminum alloyed pipe is carried out using wavelet transform (WT). With the aid of the technique the interaction of Lamb waves with a circumferential notch is investigated. It is found that different Lamb wave modes propagating in the pipe can be distinguished clearly by means of wavelet transformation. Therefore, the mode conversion caused by existence of the notch has been unambiguously observed.
利用小波变换对在铝合金管道中传播的兰姆波进行了模态分析。利用该技术研究了兰姆波与周向缺口的相互作用。结果表明,利用小波变换可以很好地区分在管道中传播的不同兰姆波模态。因此,由缺口的存在引起的模式转换已被明确地观察到。
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引用次数: 12
A study on the Q-factor of STW resonators by a COM theory 用COM理论研究STW谐振器的q因子
V. Yanchev, V.L. Strashilov
Surface transverse wave (STW) resonators exhibit substantial advantages over conventional SAW resonators. However, their analysis is more involved due to the complicated nature of the STW. Among a number of parameters the important Q-factor has faced serious difficulties. At present, none of the theoretical models is concerned with quantitative loss consideration and the establishment of reliable design rules is difficult. We present a theoretical study that permits us to conduct STW loss analysis and predict the resonator Q from the material and layout data. The coupling-of-modes (COM) transmission coefficient is derived by Floquet analysis. Its imaginary part is a measure of STW propagation loss that adds to grating reflection loss. As the overall loss is extremely sensitive to parameter choice, the full numerical search for the optimum design presently discussed can save considerable experimental effort.
表面横波(STW)谐振器表现出比传统SAW谐振器更大的优势。然而,由于STW的复杂性,他们的分析更加复杂。在许多参数中,重要的q因子面临着严重的困难。目前的理论模型都没有考虑到定量的损失,建立可靠的设计规则比较困难。我们提出了一项理论研究,允许我们进行STW损耗分析,并从材料和布局数据预测谐振器Q。利用Floquet分析方法推导了模式耦合(COM)传输系数。它的虚部是增加光栅反射损耗的STW传播损耗的度量。由于总损失对参数的选择极为敏感,因此目前讨论的全数值搜索优化设计可以节省大量的实验工作。
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引用次数: 2
Green's function and network analysis of quasi-2D SAW ID-tags 准二维SAW身份标签的Green功能及网络分析
E.L. Tan, Y. Chia
A rigorous analysis of surface acoustic wave tags for wireless identification (ID) systems is developed based on Green's function technique and method of moments. The SAW ID-tags can be fabricated using arbitrary finite reflector structures placed in multiple tracks and channels. From the Green's function solutions, the P matrix parameters for the reflector bits and coupling transducer are deduced. These P matrices are cascaded and interconnected using network analysis to account for the resulting quasi-2D structure. To provide more physical insights into the scattering mechanism, the cascaded network is described in terms of the more illuminating global reflection and transmission coefficients. Simulation of prototype SAW tag configuration is carried out. Response in time domain is presented to show the spurious signals due to multiple reflections.
基于格林函数技术和矩量法,对无线识别系统中的表面声波标签进行了严密的分析。SAW id标签可以使用放置在多个轨道和通道中的任意有限反射结构来制造。从格林函数解出发,推导出了反射位和耦合换能器的P矩阵参数。这些P矩阵级联和互连使用网络分析,以说明所产生的准二维结构。为了对散射机制提供更多的物理见解,用更有启发性的全局反射和透射系数来描述级联网络。对原型SAW标签的构型进行了仿真。提出了时域响应来显示多重反射引起的杂散信号。
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引用次数: 3
Cross-sectional area changes in peripheral vein grafts monitored by three-dimensional ultrasound imaging 三维超声成像监测外周静脉移植物横截面积变化
D. Leotta, J. Primozich, K. Beach, R. Bergelin, K. Gibson, D. Strandness
Vein grafts are placed to bypass diseased arteries in the lower limb when symptoms such as pain during walking, rest pain, and tissue necrosis occur. Frequent surveillance of these grafts is recommended since early detection and revision of stenoses improves the likelihood of long-term patency. We are using three-dimensional (3D) ultrasound imaging to measure progressive changes in vein graft geometry. Cross-sectional area measurements in planes normal to the vessel center axis are calculated from 3D surface reconstructions. Data sets from serial studies are registered in a common coordinate system using anatomical reference points and cross-sectional area measurements are compared at matched sites. Extended studies have tracked patients requiring surgical revision to enlarge the vessel lumen in stenotic regions of their grafts. Follow-up periods on 5 cases range from 30 to 79 weeks to date. Each revised graft segment demonstrated a decrease in cross-sectional area over time, ranging from 25% to 77%, averaged over the length of the revision. The sequential area measurements, combined with 3D surface displays, provide a record of remodeling patterns and rates at specific sites within the grafts.
当出现行走疼痛、休息疼痛和组织坏死等症状时,将静脉移植物放置在下肢病变动脉旁。建议经常监测这些移植物,因为早期发现和修复狭窄可以提高长期通畅的可能性。我们正在使用三维(3D)超声成像来测量静脉移植几何形状的渐进变化。在垂直于容器中心轴的平面上的横截面积测量是通过三维表面重建计算的。来自系列研究的数据集使用解剖学参考点在一个共同的坐标系中注册,并在匹配的位置比较横截面积测量值。进一步的研究跟踪了需要手术翻修以扩大移植物狭窄区域血管管腔的患者。迄今为止,5例病例的随访期为30至79周。随着时间的推移,每个修复的移植物节段的横截面积都减少了25%到77%,在修复期间平均减少了25%到77%。连续的面积测量,结合3D表面显示,提供了移植物内特定部位的重塑模式和速率的记录。
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引用次数: 1
Hydrophone spatial averaging corrections from 1-40 MHz 1-40 MHz的水听器空间平均校正
E. Radulescu, P. A. Lewin, A. Goldstein, Andrzej Nowicki
The spatial averaging model was developed and experimentally verified in the frequency range 1-40 MHz. The model is applicable to focused sources of circular geometry, accounts for the effects of hydrophone finite aperture and allows calibration by substitution to be performed when the active elements of reference and tested hydrophone differ significantly. The effective diameters of the ultrasonic hydrophone probes calibrated in the focal plane of the sources with different f-numbers ranged from 150-500 /spl mu/m. The probes with diameters smaller than that of the reference hydrophone exhibited experimentally determined absolute sensitivity higher than the true one. The model was capable of predicting the correct sensitivity with an overall uncertainty of +1 dB. It is now being extended to be applicable to frequencies beyond 40 MHz and rectangular acoustic sources.
建立了空间平均模型,并在1 ~ 40 MHz频率范围内进行了实验验证。该模型适用于圆形几何形状的聚焦源,考虑了水听器有限孔径的影响,并允许在参考源和被测水听器的有效单元差异显著时进行代入校准。在不同f值源的焦平面上标定的超声水听器探头的有效直径范围为150 ~ 500 /spl mu/m。直径小于参考水听器的探头在实验中表现出比真实探头高的绝对灵敏度。该模型能够以+1 dB的总体不确定度预测正确的灵敏度。它现在被扩展到适用于超过40兆赫的频率和矩形声源。
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引用次数: 16
Use of laser generated creeping longitudinal waves to determine residual stresses 利用激光产生的蠕变纵波来确定残余应力
M. Doxbeck, M. A. Hussain, J. Frankel, A. Abbate
The intent of this work is to obtain creeping longitudinal wave (P wave) delays due to residual stresses on a known specimen and thus to study the procedures for obtaining residual stresses by laser ultrasonics.
本工作的目的是获得由已知样品上的残余应力引起的蠕变纵波(P波)延迟,从而研究激光超声获得残余应力的程序。
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引用次数: 7
Application of multiple scattering theories to the evaluation of granular distributions based on phase velocity measurements 多重散射理论在基于相速度测量的颗粒分布评价中的应用
F. Vander Meulen, G. Feuillard, O. Bou Matar, L. Tran Huu Hue, M. Lethiecq
Using multiple scattering theories, the influence of granular distribution on acoustic phase velocity in particle-loaded liquids was studied. Theoretical results were compared to measurements in suspensions of acrylic spheres in ethylene glycol. It appears that the phase velocity versus frequency shows a minimum, the position and sharpness of which are related to the mean diameter of particles and to the standard deviation of the diameter distribution. Its amplitude is only influenced by the concentration. Therefore, it is shown that granulometric properties of suspensions can be determined by an ultrasonic method, through the behavior of phase velocity versus frequency.
利用多重散射理论,研究了颗粒分布对含颗粒液体中声相速度的影响。将理论结果与丙烯酸球在乙二醇中的悬浮液的测量结果进行了比较。相速度随频率的变化呈现最小值,其位置和锐度与粒子的平均直径和直径分布的标准差有关。它的振幅只受浓度的影响。因此,研究表明,通过相速度与频率的关系,超声方法可以确定悬浮液的粒度特性。
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引用次数: 1
Effects of uniaxial stress and DC bias field on the piezoelectric, dielectric, and elastic properties of piezoelectric ceramics 单轴应力和直流偏压场对压电陶瓷压电、介电和弹性性能的影响
G. Yang, W. Ren, S-F. Liu, A. Masys, B. K. Mukherjee
We have measured some of the dielectric, elastic, and piezoelectric constants of several types of PZT piezoelectric ceramics, manufactured by EDO Corporation, as a function of applied electric field and mechanical stress. Both the high frequency impedance resonance method and the low frequency response of the material under electrical and mechanical excitations were employed to determine these constants. We present the dependence of these material constants on an applied DC bias voltage and on an applied mechanical stress. Most of the results can be understood on the basis of the extrinsic contributions to the piezoelectric response that arises from the existence of domains in the materials.
我们测量了EDO公司生产的几种PZT压电陶瓷的介电常数、弹性常数和压电常数与外加电场和机械应力的关系。采用高频阻抗共振法和材料在电和机械激励下的低频响应来确定这些常数。我们提出了这些材料常数对施加的直流偏置电压和施加的机械应力的依赖。大多数结果可以理解为压电响应的外在贡献的基础上,产生于材料中的域的存在。
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引用次数: 28
期刊
2000 IEEE Ultrasonics Symposium. Proceedings. An International Symposium (Cat. No.00CH37121)
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