Zheng Gong, D. Huo, Zengyuan Niu, Wanqun Chen, K. Cheng
A fast tool servo (FTS) system can be used to efficiently manufacture optical freeform surfaces. This paper investigates the dynamic performance of an FTS system driven by a voice coil motor and guided by air bearings. A simulation model and testing platform are developed to evaluate the load capacity and stiffness of the air bearings. The mechanical dynamic performance of the designed FTS, including modal and harmonic analyses, is assessed using finite element analysis. A nonlinear relation between air-bearing stiffness and mechanical bandwidth is obtained. The working dynamic performance is tested through system runout, tracking performance, and closed-loop tests. Quantitative relations between air-bearing stiffness and the mechanical and working bandwidths are established and analyzed. Machining experiments verify the feasibility of the FTS system with 31.05 N/ μm stiffness air-bearings.
{"title":"Dynamic performance of a long-stroke fast tool servo system","authors":"Zheng Gong, D. Huo, Zengyuan Niu, Wanqun Chen, K. Cheng","doi":"10.1063/10.0011434","DOIUrl":"https://doi.org/10.1063/10.0011434","url":null,"abstract":"A fast tool servo (FTS) system can be used to efficiently manufacture optical freeform surfaces. This paper investigates the dynamic performance of an FTS system driven by a voice coil motor and guided by air bearings. A simulation model and testing platform are developed to evaluate the load capacity and stiffness of the air bearings. The mechanical dynamic performance of the designed FTS, including modal and harmonic analyses, is assessed using finite element analysis. A nonlinear relation between air-bearing stiffness and mechanical bandwidth is obtained. The working dynamic performance is tested through system runout, tracking performance, and closed-loop tests. Quantitative relations between air-bearing stiffness and the mechanical and working bandwidths are established and analyzed. Machining experiments verify the feasibility of the FTS system with 31.05 N/ μm stiffness air-bearings.","PeriodicalId":35428,"journal":{"name":"Nami Jishu yu Jingmi Gongcheng/Nanotechnology and Precision Engineering","volume":" ","pages":""},"PeriodicalIF":3.7,"publicationDate":"2022-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"47068217","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Chunxue Hao, Shoujin Wang, S. Yuan, Boyu Wu, Peng Yu, Jialin Shi
The atomic force microscope (AFM) can measure nanoscale morphology and mechanical properties and has a wide range of applications. The traditional method for measuring the mechanical properties of a sample does so for the longitudinal and transverse properties separately, ignoring the coupling between them. In this paper, a data processing and multidimensional mechanical information extraction algorithm for the composite mode of peak force tapping and torsional resonance is proposed. On the basis of a tip–sample interaction model for the AFM, longitudinal peak force data are used to decouple amplitude and phase data of transverse torsional resonance, accurately identify the tip–sample longitudinal contact force in each peak force cycle, and synchronously obtain the corresponding characteristic images of the transverse amplitude and phase. Experimental results show that the measured longitudinal mechanical characteristics are consistent with the transverse amplitude and phase characteristics, which verifies the effectiveness of the method. Thus, a new method is provided for the measurement of multidimensional mechanical characteristics using the AFM.
{"title":"Extraction algorithm for longitudinal and transverse mechanical information of AFM","authors":"Chunxue Hao, Shoujin Wang, S. Yuan, Boyu Wu, Peng Yu, Jialin Shi","doi":"10.1063/10.0010252","DOIUrl":"https://doi.org/10.1063/10.0010252","url":null,"abstract":"The atomic force microscope (AFM) can measure nanoscale morphology and mechanical properties and has a wide range of applications. The traditional method for measuring the mechanical properties of a sample does so for the longitudinal and transverse properties separately, ignoring the coupling between them. In this paper, a data processing and multidimensional mechanical information extraction algorithm for the composite mode of peak force tapping and torsional resonance is proposed. On the basis of a tip–sample interaction model for the AFM, longitudinal peak force data are used to decouple amplitude and phase data of transverse torsional resonance, accurately identify the tip–sample longitudinal contact force in each peak force cycle, and synchronously obtain the corresponding characteristic images of the transverse amplitude and phase. Experimental results show that the measured longitudinal mechanical characteristics are consistent with the transverse amplitude and phase characteristics, which verifies the effectiveness of the method. Thus, a new method is provided for the measurement of multidimensional mechanical characteristics using the AFM.","PeriodicalId":35428,"journal":{"name":"Nami Jishu yu Jingmi Gongcheng/Nanotechnology and Precision Engineering","volume":" ","pages":""},"PeriodicalIF":3.7,"publicationDate":"2022-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"48592427","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Hang Wu, Zifan Tang, Rui You, S. Pan, Wenpeng Liu, Hongxiang Zhang, Tiechuan Li, Yang Yang, Chongling Sun, W. Pang, X. Duan
Contactless acoustic manipulation of micro/nanoscale particles has attracted considerable attention owing to its near independence of the physical and chemical properties of the targets, making it universally applicable to almost all biological systems. Thin-film bulk acoustic wave (BAW) resonators operating at gigahertz (GHz) frequencies have been demonstrated to generate localized high-speed microvortices through acoustic streaming effects. Benefitting from the strong drag forces of the high-speed vortices, BAW-enabled GHz acoustic streaming tweezers (AST) have been applied to the trapping and enrichment of particles ranging in size from micrometers to less than 100 nm. However, the behavior of particles in such 3D microvortex systems is still largely unknown. In this work, the particle behavior (trapping, enrichment, and separation) in GHz AST is studied by theoretical analyses, 3D simulations, and microparticle tracking experiments. It is found that the particle motion in the vortices is determined mainly by the balance between the acoustic streaming drag force and the acoustic radiation force. This work can provide basic design principles for AST-based lab-on-a-chip systems for a variety of applications.
{"title":"Manipulations of micro/nanoparticles using gigahertz acoustic streaming tweezers","authors":"Hang Wu, Zifan Tang, Rui You, S. Pan, Wenpeng Liu, Hongxiang Zhang, Tiechuan Li, Yang Yang, Chongling Sun, W. Pang, X. Duan","doi":"10.1063/10.0009954","DOIUrl":"https://doi.org/10.1063/10.0009954","url":null,"abstract":"Contactless acoustic manipulation of micro/nanoscale particles has attracted considerable attention owing to its near independence of the physical and chemical properties of the targets, making it universally applicable to almost all biological systems. Thin-film bulk acoustic wave (BAW) resonators operating at gigahertz (GHz) frequencies have been demonstrated to generate localized high-speed microvortices through acoustic streaming effects. Benefitting from the strong drag forces of the high-speed vortices, BAW-enabled GHz acoustic streaming tweezers (AST) have been applied to the trapping and enrichment of particles ranging in size from micrometers to less than 100 nm. However, the behavior of particles in such 3D microvortex systems is still largely unknown. In this work, the particle behavior (trapping, enrichment, and separation) in GHz AST is studied by theoretical analyses, 3D simulations, and microparticle tracking experiments. It is found that the particle motion in the vortices is determined mainly by the balance between the acoustic streaming drag force and the acoustic radiation force. This work can provide basic design principles for AST-based lab-on-a-chip systems for a variety of applications.","PeriodicalId":35428,"journal":{"name":"Nami Jishu yu Jingmi Gongcheng/Nanotechnology and Precision Engineering","volume":"1 1","pages":""},"PeriodicalIF":3.7,"publicationDate":"2022-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"59872601","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Zhensheng Chen, Jiahao Yu, Xiaoxi Zhang, Haozhe Zeng, Yunjia Li, Jin Wu, K. Tao
The capability to sense complex pressure variations comprehensively is vital for wearable electronics and flexible human–machine interfaces. In this paper, inspired by button switches, a duplex tactile sensor based on the combination of triboelectric and piezoresistive effects is designed and fabricated. Because of its excellent mechanical strength and electrical stability, a double-networked ionic hydrogel is used as both the conductive electrode and elastic current regulator. In addition, micro-pyramidal patterned polydimethylsiloxane (PDMS) acts as both the friction layer and the encapsulation elastomer, thereby boosting the triboelectric output performance significantly. The duplex hydrogel sensor demonstrates comprehensive sensing ability in detecting the whole stimulation process including the dynamic and static pressures. The dynamic stress intensity (10–300 Pa), the action time, and the static variations (increase and decrease) of the pressure can be identified precisely from the dual-channel signals. Combined with a signal processing module, an intelligent visible door lamp is achieved for monitoring the entire “contact–hold–release–separation” state of the external stimulation, which shows great application potential for future smart robot e-skin and flexible electronics.
{"title":"A button switch inspired duplex hydrogel sensor based on both triboelectric and piezoresistive effects for detecting dynamic and static pressure","authors":"Zhensheng Chen, Jiahao Yu, Xiaoxi Zhang, Haozhe Zeng, Yunjia Li, Jin Wu, K. Tao","doi":"10.1063/10.0010120","DOIUrl":"https://doi.org/10.1063/10.0010120","url":null,"abstract":"The capability to sense complex pressure variations comprehensively is vital for wearable electronics and flexible human–machine interfaces. In this paper, inspired by button switches, a duplex tactile sensor based on the combination of triboelectric and piezoresistive effects is designed and fabricated. Because of its excellent mechanical strength and electrical stability, a double-networked ionic hydrogel is used as both the conductive electrode and elastic current regulator. In addition, micro-pyramidal patterned polydimethylsiloxane (PDMS) acts as both the friction layer and the encapsulation elastomer, thereby boosting the triboelectric output performance significantly. The duplex hydrogel sensor demonstrates comprehensive sensing ability in detecting the whole stimulation process including the dynamic and static pressures. The dynamic stress intensity (10–300 Pa), the action time, and the static variations (increase and decrease) of the pressure can be identified precisely from the dual-channel signals. Combined with a signal processing module, an intelligent visible door lamp is achieved for monitoring the entire “contact–hold–release–separation” state of the external stimulation, which shows great application potential for future smart robot e-skin and flexible electronics.","PeriodicalId":35428,"journal":{"name":"Nami Jishu yu Jingmi Gongcheng/Nanotechnology and Precision Engineering","volume":" ","pages":""},"PeriodicalIF":3.7,"publicationDate":"2022-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"43902474","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Comparison of enhancement techniques based on neural networks for attenuated voice signal captured by flexible vibration sensors on throats","authors":"Shenghan Gao, Changyan Zheng, Yicong Zhao, Ziyue Wu, Jiao Li, Xian Huang","doi":"10.1063/10.0009187","DOIUrl":"https://doi.org/10.1063/10.0009187","url":null,"abstract":"","PeriodicalId":35428,"journal":{"name":"Nami Jishu yu Jingmi Gongcheng/Nanotechnology and Precision Engineering","volume":" ","pages":""},"PeriodicalIF":3.7,"publicationDate":"2022-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"43787049","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
This paper proposes an air-coupled piezoelectric micromachined ultrasonic transducer (PMUT) for detection and imaging of surface stains. A 508 kHz PMUT array is designed, fabricated, and characterized in terms of its electrical and acoustic properties, and it is used in a pulse echo validation test. Imaging of stains on metal blocks is successfully demonstrated. Compared with existing optical methods for stain detection, the proposed approach can work in a dark environment without color requirements. This work provides a new and promising route for the development of miniaturized stain detection systems.
{"title":"Air-coupled piezoelectric micromachined ultrasonic transducers for surface stain detection and imaging","authors":"Sheng Sun, Jianyuan Wang, Yuan Ning, Menglun Zhang","doi":"10.1063/10.0009632","DOIUrl":"https://doi.org/10.1063/10.0009632","url":null,"abstract":"This paper proposes an air-coupled piezoelectric micromachined ultrasonic transducer (PMUT) for detection and imaging of surface stains. A 508 kHz PMUT array is designed, fabricated, and characterized in terms of its electrical and acoustic properties, and it is used in a pulse echo validation test. Imaging of stains on metal blocks is successfully demonstrated. Compared with existing optical methods for stain detection, the proposed approach can work in a dark environment without color requirements. This work provides a new and promising route for the development of miniaturized stain detection systems.","PeriodicalId":35428,"journal":{"name":"Nami Jishu yu Jingmi Gongcheng/Nanotechnology and Precision Engineering","volume":" ","pages":""},"PeriodicalIF":3.7,"publicationDate":"2022-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"45262215","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Differential reflectance spectroscopy (DRS) is a powerful tool to study processes during thin-film growth, especially that of transition metal dichalcogenides and organic thin films. To satisfy the requirements for in situ and real-time monitoring of film growth, including spectral resolution and sensitivity at the level of monolayers and even sub-monolayers, the most challenging technical task in DRS is to reduce noise to an extremely low level so that the best possible signal-to-noise ratio can be achieved. In this paper, we present a simplified and cost-effective DRS apparatus, with which we show that the measurement noise is mainly composed of thermal drift noise and explore the temperature-dependence of the DRS signal. Based on the results obtained, we propose an easily realized and effective scheme aiming to reduce the noise. Experimental results demonstrate that this scheme is effective in stabilizing reliable signals for a long period of several hours. Significant noise reduction is achieved, with the typical average noise of the DRS system being decreased to 0.5‰ over several hours. The improved DRS system is applied to study the growth of an organic semiconductor layer for an organic field-effect transistor device. The results indicate that the apparatus proposed in this paper has potential applications in fabrication of devices on the nanoscale and even the sub-nanoscale.
{"title":"A practical and effective method for reducing differential reflectance spectroscopy noise","authors":"Hui Qi, Xing Fu","doi":"10.1063/10.0009680","DOIUrl":"https://doi.org/10.1063/10.0009680","url":null,"abstract":"Differential reflectance spectroscopy (DRS) is a powerful tool to study processes during thin-film growth, especially that of transition metal dichalcogenides and organic thin films. To satisfy the requirements for in situ and real-time monitoring of film growth, including spectral resolution and sensitivity at the level of monolayers and even sub-monolayers, the most challenging technical task in DRS is to reduce noise to an extremely low level so that the best possible signal-to-noise ratio can be achieved. In this paper, we present a simplified and cost-effective DRS apparatus, with which we show that the measurement noise is mainly composed of thermal drift noise and explore the temperature-dependence of the DRS signal. Based on the results obtained, we propose an easily realized and effective scheme aiming to reduce the noise. Experimental results demonstrate that this scheme is effective in stabilizing reliable signals for a long period of several hours. Significant noise reduction is achieved, with the typical average noise of the DRS system being decreased to 0.5‰ over several hours. The improved DRS system is applied to study the growth of an organic semiconductor layer for an organic field-effect transistor device. The results indicate that the apparatus proposed in this paper has potential applications in fabrication of devices on the nanoscale and even the sub-nanoscale.","PeriodicalId":35428,"journal":{"name":"Nami Jishu yu Jingmi Gongcheng/Nanotechnology and Precision Engineering","volume":" ","pages":""},"PeriodicalIF":3.7,"publicationDate":"2022-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"48848101","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
The presence of chemical warfare agents (CWAs) in the environment is a serious threat to human safety, but there are many problems with the currently available detection methods for CWAs. For example, gas chromatography–mass spectrometry cannot be used for in-field detection owing to the rather large size of the equipment required, while commercial sensors have the disadvantages of low sensitivity and poor selectivity. Here, we develop a portable gas sensing instrument for CWA detection that consists of a MEMS-fabricated micro-preconcentrator (μPC) and a film bulk acoustic resonator (FBAR) gas sensor. The μPC is coated with a nanoporous metal–organic framework material to enrich the target, while the FBAR provides rapid detection without the need for extra carrier gas. Dimethyl methylphosphonate (DMMP), a simulant of the chemical warfare agent sarin, is used to test the performance of the instrument. Experimental results show that the μPC provides effective sample pretreatment, while the FBAR gas sensor has good sensitivity to DMMP vapor. The combination of μPC and FBAR in one instrument gives full play to their respective advantages, reducing the limit of detection of the analyte. Moreover, both the μPC and the FBAR are fabricated using a CMOS-compatible approach, and the prototype instrument is compact in size with high portability and thus has potential for application to in-field detection of CWAs.
{"title":"A prototype portable instrument employing micro-preconcentrator and FBAR sensor for the detection of chemical warfare agents","authors":"Xu Yan, H. Qu, Ye Chang, W. Pang, X. Duan","doi":"10.1063/10.0009664","DOIUrl":"https://doi.org/10.1063/10.0009664","url":null,"abstract":"The presence of chemical warfare agents (CWAs) in the environment is a serious threat to human safety, but there are many problems with the currently available detection methods for CWAs. For example, gas chromatography–mass spectrometry cannot be used for in-field detection owing to the rather large size of the equipment required, while commercial sensors have the disadvantages of low sensitivity and poor selectivity. Here, we develop a portable gas sensing instrument for CWA detection that consists of a MEMS-fabricated micro-preconcentrator (μPC) and a film bulk acoustic resonator (FBAR) gas sensor. The μPC is coated with a nanoporous metal–organic framework material to enrich the target, while the FBAR provides rapid detection without the need for extra carrier gas. Dimethyl methylphosphonate (DMMP), a simulant of the chemical warfare agent sarin, is used to test the performance of the instrument. Experimental results show that the μPC provides effective sample pretreatment, while the FBAR gas sensor has good sensitivity to DMMP vapor. The combination of μPC and FBAR in one instrument gives full play to their respective advantages, reducing the limit of detection of the analyte. Moreover, both the μPC and the FBAR are fabricated using a CMOS-compatible approach, and the prototype instrument is compact in size with high portability and thus has potential for application to in-field detection of CWAs.","PeriodicalId":35428,"journal":{"name":"Nami Jishu yu Jingmi Gongcheng/Nanotechnology and Precision Engineering","volume":" ","pages":""},"PeriodicalIF":3.7,"publicationDate":"2022-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"44982319","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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