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Tailoring single-crystal-like textures in a non-weldable Ni-based superalloy by controlling overlap behavior in laser powder bed fusion 通过控制激光粉末床熔合过程中的重叠行为,在不可焊接镍基高温合金中裁剪单晶状织构
IF 7.5 2区 材料科学 Q1 ENGINEERING, INDUSTRIAL Pub Date : 2025-11-07 DOI: 10.1016/j.jmatprotec.2025.119143
Fangxian Zhang , Chuanqiang Peng , Tao Zhu , Xinliang Xie , Liping Zhou , Yang Li , Qi Chao , Guohua Fan
Controlling the solidification behavior of Ni-based superalloys to achieve tailored crystallographic textures or single-crystal structures is essential for producing high-performance components for extreme-temperature applications. Additive manufacturing, particularly laser powder bed fusion (LPBF), offers unique capabilities for microstructural design. In this study, we present an overlapping-based strategy to produce single-crystal-like textures along arbitrary three-dimensional orientations in the non-weldable IN738LC superalloy via LPBF. By tuning melt pool geometry and overlapping rates- through adjustments in hatch space and layer thickness-we successfully engineered three distinct textures without altering scan strategy: < 001 > ∥building direction (BD), < 311 > ∥BD, and < 110 > ∥BD. The mechanisms driving texture development, including epitaxial growth and subsequent competitive grain selection, are analyzed using computational fluid dynamics simulations of the thermal field and temperature gradient distributions. This work provides a new pathway for fabricating single-crystal-like Ni-based superalloy components using LPBF, advancing the integration of texture control into additive manufacturing.
控制镍基高温合金的凝固行为,以实现定制的晶体结构或单晶结构,对于生产用于极端温度应用的高性能部件至关重要。增材制造,特别是激光粉末床熔融(LPBF),为微结构设计提供了独特的能力。在这项研究中,我们提出了一种基于重叠的策略,通过LPBF在不可焊接的IN738LC高温合金中沿任意三维方向产生单晶状织构。通过调整熔池几何和重叠率——通过调整孵化空间和层厚度是成功设计三种不同的纹理在不改变扫描策略:& lt; 001年  祝辞 ∥建筑方向(BD) & lt; 311年  祝辞 ∥BD, & lt; 110年  祝辞 ∥BD。利用热场和温度梯度分布的计算流体动力学模拟分析了驱动织构发展的机制,包括外延生长和随后的竞争性晶粒选择。本研究为利用LPBF制备类单晶镍基高温合金部件提供了新的途径,推进了织构控制与增材制造的集成。
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引用次数: 0
Multi-field coupling traceability method for non-metallic inclusion agglomeration in continuous casting under dual-mode electromagnetic control 双模电磁控制下连铸非金属夹杂物结块多场耦合溯源方法
IF 7.5 2区 材料科学 Q1 ENGINEERING, INDUSTRIAL Pub Date : 2025-11-07 DOI: 10.1016/j.jmatprotec.2025.119142
Siyuan Zhang , Yanwen Sun , Zeyi Liu , Meijia Sun , Tianyu Zhang , Xiaoming Liu , Wangzhong Mu , Tie Liu , Qiang Wang
The agglomeration of inclusions in continuous casting blooms destroys the continuity and compactness of the steel matrix, which seriously restricts the fatigue life and corrosion resistance of the steel. A novel traceability method for the distribution of inclusions was introduced to reveal the evolution of inclusion agglomeration. This method demonstrated the position evolution of inclusions when they passed through different planes by assigning colors for inclusions. In this study, a mathematical model coupled with electromagnetic field, flow, heat transfer, solidification, and non-metallic inclusion movement was developed to study the agglomeration behavior of inclusions under dual-mode electromagnetic field control modes (edge-to-center flow mode and the coupled mode of center-to-edge flow and edge-to-center flow). Numerical simulation revealed that the coupled mode significantly enhanced inclusion distribution uniformity in the solidified shell, with a 63.7 % reduction of the number in the localized agglomeration zone compared to the edge-to-center flow mode. Experimental measurements demonstrated a 46.7 % decrease in inclusion number density near the quarter position of the loose side under coupled mode compared to edge-to-center flow mode. Under coupled mode, the flow of molten steel at the center and the edge of the mold with the opposite directions helped to disperse the inclusions and promote the uniform distribution of inclusions in the cross-section. This study provides a new strategy to suppress inclusion agglomeration in continuous casting blooms by electromagnetic metallurgy technology.
连铸坯中夹杂物的结块破坏了钢基体的连续性和致密性,严重制约了钢的疲劳寿命和耐腐蚀性能。提出了一种新的包裹体分布溯源方法,揭示了包裹体团聚的演化过程。该方法通过为内含物分配颜色来显示内含物穿过不同平面时的位置演化。本文建立了电磁场、流动、传热、凝固和非金属夹杂物运动耦合的数学模型,研究了夹杂物在双模电磁场控制模式下(边向中心流动模式和中心向边缘流动与边向中心流动耦合模式)的团聚行为。数值模拟结果表明,耦合模式显著提高了凝固壳内夹杂物分布的均匀性,与边向中心流动模式相比,局部集聚区夹杂物数量减少了63.7 %。实验测量表明,与边到中心流动模式相比,耦合模式下松散侧四分之一位置附近的夹杂物数密度降低了46.7 %。在耦合模式下,钢水在模具中心和边缘方向相反的流动有助于夹杂物的分散,促进夹杂物在截面上的均匀分布。本研究为利用电磁冶金技术抑制连铸坯中夹杂物结块提供了一种新策略。
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引用次数: 0
Dynamic behaviors of keyhole and weld pool during the digging stage in variable polarity plasma arc welding of thick aluminum alloy 厚铝合金变极性等离子弧焊开挖阶段锁孔和熔池的动态行为
IF 7.5 2区 材料科学 Q1 ENGINEERING, INDUSTRIAL Pub Date : 2025-11-07 DOI: 10.1016/j.jmatprotec.2025.119139
Wenlong Li , Fan Jiang , Bin Xu , Jiankang Song , Haowen Suo , Wei Cheng , Xinqiang Ma , Zhenzhen Zhang , Di Yang , Shujun Chen
Variable polarity plasma arc welding (VPPAW) is a high-energy-density keyhole welding technique with considerable potential for the efficient and defect-free joining of thick aluminum alloy. However, the extended digging depth in thick workpieces intensifies the complexity of the welding process, as torch travel at different digging depths, even under optimized parameter, results in distinct variations in weld quality. In this study, a transparent observation system was established by butt-jointing a thick aluminum alloy plate with a quartz glass sheet, enabling direct visualization of the dynamic behaviors of the keyhole and weld pool during the digging stage. A deep learning-based image processing approach utilizing the SegFormer architecture was developed to extract these dynamic features. The findings reveal that the weld pool depth evolution is a highly dynamic multi-phase process, progressing through three alternating cycles of rapid growth and quasi-steady behavior, ultimately reaching a blasting-type penetration. The mechanism involves the establishment of thermal-force equilibrium when the molten metal reaches a critical thickness, halting the digging process. Arc-induced oscillations break this equilibrium, triggering molten metal outflow and keyhole deepening, which reflects the transient and non-equilibrium characteristics of energy transfer in plasma-metal coupling. Molten metal droplet cluster represents a distinctive phenomenon during the digging stage, arising from the continuous outflow of molten metal from the interior of keyhole. The externally observable weld pool and droplet cluster areas effectively indicate the internal digging stage, offering characteristic features to guide torch travel and ensure weld quality. Observations under varying welding parameters demonstrate that the dynamic, multi-phase digging process persists, confirming its governance by transient, non-equilibrium energy transfer mechanisms. The timing of droplet cluster detachment serves as a crucial indicator for assessing the suitability of welding parameter. This work provides a solid foundation for intelligent control in advanced VPPAW of thick aluminum alloy.
变极性等离子弧焊(VPPAW)是一种高能量密度的锁孔焊接技术,在厚铝合金的高效、无缺陷连接方面具有很大的潜力。然而,随着厚件挖掘深度的增加,焊接过程的复杂性增加,即使在优化参数下,在不同挖掘深度下炬的行程也会导致焊接质量的明显变化。本研究采用厚铝合金板与石英玻璃板对接的方式建立透明观测系统,可直接可视化挖掘阶段钥匙孔和熔池的动态行为。开发了一种基于深度学习的图像处理方法,利用SegFormer架构提取这些动态特征。研究结果表明,熔池深度演变是一个高度动态的多阶段过程,经历了快速增长和准稳定行为的三个交替循环,最终达到爆破式侵彻。该机制涉及当熔融金属达到临界厚度时建立热力平衡,从而停止挖掘过程。电弧引起的振荡打破了这种平衡,引发金属液外流和锁孔加深,这反映了等离子体-金属耦合中能量传递的瞬态和非平衡特性。金属熔滴团簇是挖掘阶段的一种特殊现象,是金属熔液从锁孔内部不断流出造成的。外部可观察到的焊池和熔滴聚集区域有效地指示了内部挖掘阶段,为指导火炬运动和确保焊接质量提供了特征。在不同焊接参数下的观察表明,动态、多相的挖掘过程持续存在,证实了其受瞬态、非平衡能量传递机制的控制。熔滴簇脱离的时机是评价焊接参数适宜性的重要指标。为厚铝合金先进VPPAW的智能化控制提供了坚实的基础。
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引用次数: 0
Thermal fracture phenomenon in laser-assisted direct glass imprinting (LADGI) 激光辅助直接玻璃压印(LADGI)中的热断裂现象
IF 7.5 2区 材料科学 Q1 ENGINEERING, INDUSTRIAL Pub Date : 2025-11-05 DOI: 10.1016/j.jmatprotec.2025.119131
Takehiro Mitsuda , Keisuke Nagato , Masayuki Nakao
This study proposes a laser-assisted direct glass imprinting (LADGI) process. In LADGI, laser irradiation is used to directly heat the microstructures on a mold, and a glass surface is locally heated and softened through thermal conduction, which enables rapid imprinting. However, this process involves rapid heating and cooling, which can induce local tensile stress and increases the risk of thermal fractures in the glass. Therefore, the ability to replicate microstructures while preventing thermal fractures is required. Model experiments with laser spot irradiation and coupled thermal stress analysis were conducted using the finite element method to investigate the temperature conditions required for imprinting and the thermal fracture phenomenon. During LAGDI, imprinting occurred at temperatures above the yield point of the glass. After laser irradiation, thermal fractures initiated in areas of the glass surface near the annealing point because the coefficient of linear expansion of the glass changed rapidly around the annealing point; hence, the volumetric expansion rate at the boundary between the high-temperature region and surrounding low-temperature regions was in a non-equilibrium state. This generated local tensile stress during cooling. This study showed that the relative risk of thermal fractures can be evaluated based on the rate at which the glass volume increased when it was heated above the annealing point. Based on these findings, new indicators Ei and Ispot were defined to evaluate the LADGI process conditions. These indicators can be used to quantify the efficiency of the process conditions and guide the optimization of the LADGI process.
本研究提出一种激光辅助直接玻璃压印(LADGI)工艺。在LADGI中,使用激光照射直接加热模具上的微结构,并通过热传导局部加热和软化玻璃表面,从而实现快速压印。然而,这个过程涉及快速加热和冷却,这可能会引起局部拉伸应力,增加玻璃热断裂的风险。因此,需要在防止热裂缝的同时复制微观结构。采用有限元法进行激光光斑辐照模型实验和耦合热应力分析,研究印迹所需的温度条件和热断裂现象。在LAGDI过程中,印迹发生在高于玻璃屈服点的温度下。激光辐照后,由于玻璃的线膨胀系数在退火点附近变化迅速,在玻璃表面靠近退火点的区域产生热断裂;因此,高温区域与周围低温区域边界处的体积膨胀率处于非平衡状态。这在冷却过程中产生了局部拉伸应力。这项研究表明,热断裂的相对风险可以根据玻璃体积在退火点以上加热时的增加速率来评估。基于这些发现,定义了新的指标Ei和Ispot来评价LADGI过程条件。这些指标可以用来量化工艺条件的效率,指导LADGI工艺的优化。
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引用次数: 0
Recrystallization and pore inhibition mechanisms of laser directed energy deposited FCC alloy assisted by synchronous ultrasonic micro-forging 同步超声微锻造辅助下激光定向能沉积FCC合金的再结晶及孔抑制机理
IF 7.5 2区 材料科学 Q1 ENGINEERING, INDUSTRIAL Pub Date : 2025-11-04 DOI: 10.1016/j.jmatprotec.2025.119130
Zubin Chen , Xiyun Yang , Guorui Jiang , Chuanming Liu , Haixin Li , Wenyao Sun , Xianglin Cui , Faquan Liu , Zhenlin Yang , Lilong Zhu
In this work, ultrasonic micro-forging device was creatively designed and proposed to improve the microstructure and enhance the mechanical property of laser directed energy deposited high-entropy alloy based on the dual regulation effect on molten pool and high temperature deposited layer. Multi-scale characterization and simulation were employed to elucidate the effects of ultrasonic micro-forging on porosity reduction, recrystallization behavior and strengthening mechanisms. Finite element simulation revealed that acoustic streaming facilitated bubble escape from the molten pool and reduced porosity by 84.6 % when synchronous ultrasonic vibration was conducted. Meanwhile, due to the deformation strain induced by ultrasonic impact, apart from the static recrystallization and twinning that occurred during the subsequent laser deposition process, dynamic recrystallization also took place simultaneously within the high-temperature deposited layer under ultrasonic micro-forging, resulting in the formation of interlayer gradient structures and 88.8 % reduction in average grain size. Owing to grain boundary strengthening, dislocation strengthening and twinning strengthening with contribution values of 85.7 MPa, 75.8 MPa and 28.5 MPa, respectively, the ultimate tensile strength and yield strength of alloys were remarkably enhanced while still maintaining good ductility after ultrasonic micro-forging conducted. Related strength values and elongation reached 713.1 MPa, 491.6 MPa, and 35.1 %, respectively. The advancement lies in demonstrating that ultrasonic micro-forging device can be used to realize the dual regulation effect of ultrasonic on liquid molten pool and solid deposited layer synchronously during laser deposition, the acoustic streaming effect of ultrasonic energy field in liquid molten pool promotes the pore inhibition while dynamic recrystallization and static recrystallization can be induced by the plastic deformation of high temperature solid deposited layer via ultrasonic impact. It provides a novel approach to improving the microstructure and mechanical properties of high-entropy alloy as well as other FCC alloys by laser directed energy deposition via the synchronous control of molten pool regulation and thermal deformation of deposited layers.
本文创造性地设计并提出了基于熔池和高温沉积层的双重调节作用,改善激光定向能沉积高熵合金的微观组织,提高其力学性能的超声微锻造装置。采用多尺度表征和模拟的方法研究了超声微锻造对材料孔隙率降低、再结晶行为和强化机理的影响。有限元模拟结果表明,在超声同步振动下,声流有利于气泡从熔池中逃逸,孔隙率降低84.6 %。同时,由于超声冲击引起的变形应变,在后续激光沉积过程中,除了发生静态再结晶和孪晶外,超声微锻压下高温沉积层内还同时发生动态再结晶,导致层间梯度结构的形成,平均晶粒尺寸减小88.8% %。由于晶界强化、位错强化和孪晶强化作用的贡献值分别为85.7 MPa、75.8 MPa和28.5 MPa,超声微锻后合金的极限抗拉强度和屈服强度得到了显著提高,同时仍保持了良好的延性。相关强度值为713.1 MPa,延伸率为491.6 MPa,延伸率为35.1% %。该研究的进展在于证明了在激光沉积过程中,超声波微锻造装置可以同时实现超声波对液体熔池和固体沉积层的双重调节作用;液体熔池中超声能量场的声流效应促进了孔隙抑制作用,而高温固相沉积层在超声冲击下的塑性变形可诱发动态再结晶和静态再结晶。通过同步控制熔池调节和沉积层热变形,为提高高熵合金及其他FCC合金的显微组织和力学性能提供了一条新途径。
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引用次数: 0
An enhanced characteristic time-based heat input model for simulating laser heating in additive manufacturing 一种基于增强特征时间的增材制造激光加热模拟热输入模型
IF 7.5 2区 材料科学 Q1 ENGINEERING, INDUSTRIAL Pub Date : 2025-11-03 DOI: 10.1016/j.jmatprotec.2025.119129
Mahsa Heidari , Louis N.S. Chiu , Ming Liu , Aijun Huang , Bernard Rolfe , Wenyi Yan
The Characteristic Time-Based Heat Input (CTI) model is an efficient agglomerated laser approach for simulating a heat source in additive manufacturing, significantly reducing computational costs while maintaining accuracy. In the CTI model, Goldak's moving heat source is applied to laser tracks using a characteristic heating time, based on the ratio of the heat source axis to the scanning speed. However, this characteristic heating time is valid only for material points along the central line of the deposited track, which may lead to applying inaccurate power density distribution at other points within the track. This study enhances the CTI model by reformulating the characteristic heating time through volume averaging the laser exposure time for all points within the semi-elliptical cylinder, achieving more precise temperature predictions while preserving computational efficiency. The improvements of the enhanced CTI (ECTI) model are evaluated through a comparative study with experimental data, the detailed Goldak model, and the original CTI model, focusing on laser-directed energy deposition (DED) of two Ti-6Al-4V components: a thin-wall and a cone. The refined characteristic heating time in the ECTI model demonstrates significant mitigation of temperature history deviation for DED (>7.6 % error reduction). The ECTI model shows close agreement with Goldak for residual stress predictions, validated experimentally using the contour method on the cone, and aligns well with experimental measurements of distortion. Additionally, the computational time for the ECTI model is only 23 % of that for the Goldak model in the thin-wall geometry and 19.3 % in the cone geometry.
基于特征时间的热输入(CTI)模型是一种有效的聚束激光方法,用于模拟增材制造中的热源,在保持精度的同时显着降低了计算成本。在CTI模型中,根据热源轴与扫描速度的比值,利用特征加热时间将Goldak的移动热源应用于激光轨迹。然而,这种特征加热时间仅对沿沉积轨道中心线的材料点有效,这可能导致在轨道内的其他点应用不准确的功率密度分布。本研究通过对半椭圆圆柱体内所有点的激光照射时间进行体积平均,重新制定了特征加热时间,从而增强了CTI模型,在保持计算效率的同时实现了更精确的温度预测。通过与实验数据、详细的Goldak模型和原始CTI模型的比较研究,评估了增强CTI (ECTI)模型的改进,重点研究了两种Ti-6Al-4V组件(薄壁和锥形)的激光定向能沉积(DED)。ECTI模型中改进的特征加热时间表明,DED的温度历史偏差显著降低(误差降低>;7.6 %)。ECTI模型与Goldak的残余应力预测结果非常吻合,该模型在锥体上使用轮廓法进行了实验验证,并与实验测量的变形结果很好地吻合。此外,ECTI模型在薄壁几何条件下的计算时间仅为Goldak模型的23 %,在锥形几何条件下的计算时间仅为19.3 %。
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引用次数: 0
Corrigendum to “Scanner-based laser welding of additively manufactured titanium lattice structures—Melt pool characteristics and joint performance control” [J. Mater. Process. Technol. 346 (2025) 119112] “增材制造钛晶格结构的扫描激光焊接——熔池特性及接头性能控制”的修正[J]。板牙。的过程。科技. 346 (2025)[119112]
IF 7.5 2区 材料科学 Q1 ENGINEERING, INDUSTRIAL Pub Date : 2025-10-30 DOI: 10.1016/j.jmatprotec.2025.119127
Cheng Liu , Ming Lou , Han Yu , Bowen Zhang , Qiyao Yan , Zixuan Chen , Yunwu Ma , Yongbing Li
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引用次数: 0
The precise co-rotating electrochemical machining of inner surface mesh structures using open flow fields 开放流场内表面网格结构的精密共旋转电化学加工
IF 7.5 2区 材料科学 Q1 ENGINEERING, INDUSTRIAL Pub Date : 2025-10-28 DOI: 10.1016/j.jmatprotec.2025.119126
Yuxin Liu , Dengyong Wang , Shuofang Zhou , Feiji Kong , Shuaidong Chen , Jingyu Zhao , Hongchang Ni
In-wall co-rotating electrochemical machining (ICRECM) is an innovative electrochemical method primarily applied to manufacturing of thin-walled annular components in the aerospace field. However, during the electrochemical forming process, relative motion causes the electrolyte flow channels to gradually become tortuous and irregular. This reduces the forming accuracy of the inner surface grid structure. To address this issue, this paper proposes an open flow field mode with a cathode internal liquid supply and establishes a corresponding flow field simulation model. Through this simulation model, the locality of the flow field mode and the influence of rotational position on the flow field distribution are analyzed and experimentally verified. A processing strategy that periodically reverses the rotation direction is proposed to improve the forming accuracy and symmetry of the inner surface grid. Experimental results show that under this flow field mode and processing strategy, grid structures with a depth of 10 mm can be stably machined, with a grid symmetry deviation within 0.1 mm and a grid wall thickness uniformity within 0.1 mm in most areas. This demonstrates that the open flow field pattern and processing strategy effectively overcome the limitations of closed flow channels and structural factors during the machining process, thereby enhancing the types of structures that ICRECM can process, making it a highly promising technology for the aerospace industry.
内壁共旋转电化学加工(ICRECM)是一种创新的电化学加工方法,主要应用于航空航天领域薄壁环形部件的制造。然而,在电化学成形过程中,相对运动使电解质流动通道逐渐变得曲折和不规则。这降低了内表面网格结构的成形精度。针对这一问题,本文提出了一种具有阴极内供液的开放式流场模式,并建立了相应的流场仿真模型。通过该仿真模型,分析了流场模式的局部性以及旋转位置对流场分布的影响,并进行了实验验证。为了提高内表面网格的成形精度和对称性,提出了一种周期性反转旋转方向的加工策略。实验结果表明,在该流场模式和加工策略下,可稳定加工深度为10 mm的网格结构,大部分区域网格对称偏差在0.1 mm以内,网格壁厚均匀性在0.1 mm以内。这表明,开放流场模式和加工策略有效地克服了加工过程中封闭流道和结构因素的限制,从而增加了ICRECM可以加工的结构类型,使其在航空航天工业中具有很高的应用前景。
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引用次数: 0
Competitive behaviors and oriented control strategies of metal flow in profiled ring rolling 异型环件轧制中金属流动的竞争行为及定向控制策略
IF 7.5 2区 材料科学 Q1 ENGINEERING, INDUSTRIAL Pub Date : 2025-10-28 DOI: 10.1016/j.jmatprotec.2025.119125
Haotian Li , Lianggang Guo , Heng Li , Yunpeng Xin , Yanwei Wang , Shuai Zhu , Xiangdong Hu
Profiled ring rolling (PRR) is a local-loading forming process for manufacturing profiled rings. Limited understanding of metal flow laws and competitive behaviors during PRR hinders effective metal flow control, challenging precision forming. This study investigates a representative profiled ring with inner and outer grooves (PRIOG), revealing competitive behaviors of metal flow and proposing oriented control strategies to achieve precision forming. First, the cross-section forming mechanism of the PRIOG is analyzed based on deformation modes and metal flow in the active and passive deformation zones (ADZ and PDZ). Uneven axial metal flow, resulting from differing deformation modes between the inner and outer ADZs, critically affects cross-section forming. Outer groove forming is driven by axial flow in the outer ADZ, whereas inner groove forming arises from radial bending of the blank induced by uneven axial flow. Second, competitive behaviors between axial and circumferential metal flow, inner/outer groove forming, and cross-section forming versus diameter growth under varying PRR parameters are clarified. Embedding this knowledge into a neural network model enables the establishment of a precision forming criterion. Based on these, oriented control strategies, including forging design, blank design, roller motion design, and multi-step PRR, are proposed to enhance the competitive advantage of axial metal flow in the outer ADZ, ensuring precision forming. Finally, the application of these strategies to an industrial-scale PRIOG successfully achieved precision forming in production trials. The results provide critical insights into metal flow competition during PRR, offering a theoretical foundation and technical support for the process design.
异型环件轧制是制造异型环件的一种局部加载成形工艺。对PRR过程中金属流动规律和竞争行为的理解有限,阻碍了有效的金属流动控制,给精密成形带来了挑战。研究了具有代表性的内、外槽异型环(PRIOG),揭示了金属流动的竞争行为,并提出了定向控制策略,以实现精密成形。首先,基于主动变形区和被动变形区(ADZ和PDZ)的变形模式和金属流动,分析了PRIOG的截面形成机理。由于内外adz之间的变形模式不同,导致金属轴向流动不均匀,严重影响截面成形。外槽的形成是由外ADZ的轴向流动驱动的,而内槽的形成是由不均匀轴向流动引起的毛坯径向弯曲引起的。其次,在不同的PRR参数下,阐明了轴向和周向金属流动、内/外槽成形和截面成形与直径增长之间的竞争行为。将这些知识嵌入到神经网络模型中,可以建立精确成形准则。在此基础上,提出了锻件设计、毛坯设计、滚子运动设计和多步PRR等定向控制策略,以增强外ADZ轴向金属流的竞争优势,保证成形精度。最后,将这些策略应用于工业规模的PRIOG,成功地实现了生产试验中的精密成形。研究结果为PRR过程中的金属流动竞争提供了重要的见解,为工艺设计提供了理论基础和技术支持。
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引用次数: 0
Direct removal of ultrafine surface contaminants using polymeric brushes with controlled pore sizes 使用控制孔径的聚合物刷直接去除超细表面污染物
IF 7.5 2区 材料科学 Q1 ENGINEERING, INDUSTRIAL Pub Date : 2025-10-28 DOI: 10.1016/j.jmatprotec.2025.119128
Somin Shin, Hyun Jun Ryu, Seong Jae Kim, Dong Geun Kim, Sanha Kim
In integrated device manufacturing, the demand for ultrafine polished surfaces without defects continues to increase as the device geometries scale down. Residual particles remaining on wafer surfaces after abrasive polishing can lead to considerable yield losses, especially as nanoscale contaminants increasingly act as killer defects in advanced devices. Polyvinyl alcohol (PVA) brushes, characterized by their soft, flexible, and porous nature, are widely adopted after surface polishing to remove such contaminants via direct contact with the substrate. However, when it comes to removing ultrafine particles smaller than a micrometer, conventional brushes exhibit much lower cleaning efficiency, limited by the length scale of their pore structures. To address this challenge, we first study the correlation between brush pore size and particle removal efficiency based on contact mechanics theory. The model suggests that brushes featuring reduced pore sizes possess high density of surface asperities, therefore enhancing the probability of physical contact with the contaminants. Furthermore, the removal force generated by the finer-pored brush is more likely to exceed the detachment threshold of surface particles. To realize the downsized porous PVA brush, we employed sodium chloride particles as the sacrificial material during PVA brush synthesis which allows miniaturized pore sizes down to 12.5 μm. Experiments using particles ranging from tens of nanometers to several micrometers validate the model’s predictions and demonstrate that downsizing brush pores from a hundred micrometers to tens of micrometers significantly improves the removal efficiency, particularly for submicron particles, where the effect of pore scale becomes increasingly dominant. This research contributes to a deeper understanding of physical particle removal mechanisms in brush scrubbing and provides practical insights for designing pore-scale-optimized brushes that enhance cleaning performance, minimize surface defects, and ultimately support yield enhancement in future integrated 3D device manufacturing.
在集成器件制造中,随着器件几何尺寸的缩小,对无缺陷超细抛光表面的需求不断增加。磨料抛光后残留在晶圆表面的残留颗粒会导致相当大的产量损失,特别是随着纳米级污染物越来越多地成为先进设备的致命缺陷。聚乙烯醇(PVA)刷具有柔软、柔韧和多孔的特性,在表面抛光后被广泛采用,通过与基材直接接触来去除此类污染物。然而,当涉及到去除小于一微米的超细颗粒时,传统刷子的清洁效率要低得多,这受限于其孔隙结构的长度尺度。为了解决这一挑战,我们首先基于接触力学理论研究了电刷孔径与颗粒去除效率之间的关系。该模型表明,孔径减小的刷子具有高密度的表面凹凸不平,因此增加了与污染物物理接触的可能性。此外,细孔刷产生的去除力更有可能超过表面颗粒的剥离阈值。为了实现小尺寸多孔PVA刷,我们在PVA刷的合成过程中使用氯化钠作为牺牲材料,将PVA刷的孔径缩小到12.5 μm。使用从几十纳米到几微米的颗粒进行的实验验证了模型的预测,并表明将刷孔从100微米缩小到几十微米显著提高了去除效率,特别是对于亚微米颗粒,其中孔隙尺度的影响越来越占主导地位。该研究有助于更深入地了解刷刷擦洗中的物理颗粒去除机制,并为设计孔隙尺度优化的刷刷提供实用见解,从而提高清洁性能,最大限度地减少表面缺陷,并最终支持未来集成3D设备制造中的良率提高。
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Journal of Materials Processing Technology
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