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Polishing performance and material removal mechanism in the solid-phase Fenton reaction based polishing process of SiC wafer using diamond gel disc 使用金刚石凝胶盘对基于固相 Fenton 反应的碳化硅晶片抛光过程中的抛光性能和材料去除机理
IF 6.7 2区 材料科学 Q1 ENGINEERING, INDUSTRIAL Pub Date : 2024-06-24 DOI: 10.1016/j.jmatprotec.2024.118486
Lanxing Xu , Kaiping Feng , Liang Zhao , Yanzhang Gu , Tianchen Zhao , Binghai Lyu

The use of SiC wafer is widespread in many fields, especially in aerospace, energy, 5 G communications, and microelectronics. Chemical-mechanical polishing (CMP) is the primary method used for achieving an ultra-smooth surface on SiC wafers. However, CMP suffers from low efficiency, leading to increased processing time and costs. To address this issue, we developed a novel diamond gel polishing disc that incorporates SiO2/Fe3O4 (S/F) powder. The disc enhances polishing efficiency through a solid-phase Fenton reaction between the disc and SiC. The research investigates the reaction mechanism and the material removal model of the polishing process using SEM, TEM, and XPS analysis. Experimental studies are conducted to assess the polishing performance and validate the effectiveness of the theoretical model. The findings indicate that SiC undergo a solid-phase Fenton reaction with polishing disc mixed S/F powder (SG-S/F disc) during polishing. The Fenton reaction generates hydroxyl radicals (·OH), which break the Si-C and Si-Si bonds in the crystal structure, leading to the formation of a softer nanoscale amorphous oxide layer on the SiC surface. The cyclic generation and removal of this oxide layer enable highly efficient polishing of SiC wafers. Compared to a gel disc without S/F (SG disc), SiC polished with the SG-S/F disc exhibits superior surface quality. Additionally, the material removal rate (MRR) of the SG-S/F disc reaches 1.42 μm/h, representing a 51.1 % improvement over that of the SG disc. These results clearly demonstrate that the solid-phase Fenton reaction significantly enhances the polishing performance of the gel polishing disc.

碳化硅晶片在许多领域得到广泛应用,尤其是在航空航天、能源、5 G 通信和微电子领域。化学机械抛光(CMP)是实现碳化硅晶片超光滑表面的主要方法。然而,CMP 的效率较低,导致加工时间和成本增加。为解决这一问题,我们开发了一种新型金刚石凝胶抛光盘,其中加入了 SiO2/Fe3O4 (S/F) 粉末。该抛光片通过抛光片与 SiC 之间的固相 Fenton 反应提高抛光效率。研究采用 SEM、TEM 和 XPS 分析方法研究了抛光过程的反应机制和材料去除模型。通过实验研究评估了抛光性能,并验证了理论模型的有效性。研究结果表明,在抛光过程中,SiC 与抛光片混合 S/F 粉末(SG-S/F 抛光片)发生了固相 Fenton 反应。Fenton 反应会产生羟基自由基 (-OH),羟基自由基会破坏晶体结构中的 Si-C 和 Si-Si 键,从而在 SiC 表面形成较软的纳米级无定形氧化物层。这种氧化层的循环生成和去除可实现对碳化硅晶片的高效抛光。与不含 S/F 的凝胶圆片(SG 圆片)相比,使用 SG-S/F 圆片抛光的碳化硅表面质量更好。此外,SG-S/F 研磨盘的材料去除率 (MRR) 达到 1.42 μm/h,比 SG 研磨盘提高了 51.1%。这些结果清楚地表明,固相 Fenton 反应大大提高了凝胶抛光片的抛光性能。
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引用次数: 0
Insights into Nb-silicide-based in-situ composite processed by electron beam powder bed fusion 对电子束粉末床熔融工艺加工的硅化铌基原位复合材料的深入研究
IF 6.7 2区 材料科学 Q1 ENGINEERING, INDUSTRIAL Pub Date : 2024-06-24 DOI: 10.1016/j.jmatprotec.2024.118488
Runqi Gao , Hui Peng , Hongbo Guo , Bo Chen

This is the first report introducing the idea of processing Nb-silicide-based in-situ composite through electron beam powder bed fusion (PBF-EB). A high energy input together with a line order strategy resulted in cracking, whilst a lower energy input without the line order led to microstructural inhomogeneity characterised by alternating dark- and bright-contrast bands. In samples printed using the line order strategy, long cracks initiated close to the melt pool boundary and propagated into the previous layer. These cracks were due to the weak interface between the primary Nb3Si columnar grains and the equiaxed (Nb,Ti) solid solution phase or Nb3Si-(Nb,Ti) solid solution eutectic structure. The porosity level increased from 0.122 % to 0.547 % with the increase of area average energy input from 2.22 J/mm2 to 6.67 J/mm2. The density decreased to 6.80 g/cm³ in the line order strategy samples due to the presence of cracks, compared to 6.84 g/cm³ in samples without employing the line order strategy. The dark-contrast band consisted of (Nb,Ti) solid solution, Nb3Si and Nb5Si3, while the bright-contrast band was composed of (Nb,Ti) solid solution and Nb3Si. Within the bright-contrast band, a recurring layered microstructural inhomogeneity appeared, with columnar grains at the bottom, whilst fine- and coarse-grained eutectic networks in the middle and upper regions. The Nb3Si phase exhibited a pronounced {001} texture, whereas the (Nb,Ti) solid solution phase displayed a weaker texture. The Nb-silicide-based in-situ composite fabricated through PBF-EB had a microhardness of ∼700 HV0.5. This value is higher than that achieved through conventional means but falls within the mid-range for laser-based additive manufacturing counterparts.

这是第一篇介绍通过电子束粉末床熔融(PBF-EB)加工铌硅基原位复合材料的报告。高能量输入和线序策略会导致开裂,而无线序的低能量输入则会导致微观结构不均匀,表现为深色和亮色对比带交替出现。在使用线序策略打印的样品中,长裂纹在靠近熔池边界处产生,并扩展到上一层。这些裂纹是由于原生 Nb3Si 柱状晶粒与等轴(Nb,Ti)固溶体相或 Nb3Si-(Nb,Ti) 固溶体共晶结构之间的界面薄弱造成的。随着输入的面积平均能量从 2.22 J/mm2 增加到 6.67 J/mm2,孔隙率从 0.122 % 增加到 0.547 %。由于裂纹的存在,采用线序策略的样品密度下降到 6.80 g/cm³,而未采用线序策略的样品密度为 6.84 g/cm³。暗对比带由(Nb,Ti)固溶体、Nb3Si 和 Nb5Si3 组成,而亮对比带由(Nb,Ti)固溶体和 Nb3Si 组成。在亮对比带内,出现了反复出现的分层微观结构不均匀性,底部为柱状晶粒,中间和上部区域为细粒和粗粒共晶网络。Nb3Si 相具有明显的 {001} 纹理,而(Nb,Ti)固溶体相的纹理较弱。通过 PBF-EB 制造的铌硅基原位复合材料的显微硬度为 ∼ 700 HV0.5。该值高于通过传统方法获得的值,但在激光增材制造的同类产品中处于中等水平。
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引用次数: 0
Deformation behavior and microstructure evolution of Al-Zn-Mg-Cu alloy under low-frequency vibration-assisted compression: Considering the relative amplitude 铝-锌-镁-铜合金在低频振动辅助压缩下的变形行为和微观结构演变:考虑相对振幅
IF 6.7 2区 材料科学 Q1 ENGINEERING, INDUSTRIAL Pub Date : 2024-06-22 DOI: 10.1016/j.jmatprotec.2024.118487
Han Sun , Wen Zhang , Qi Li , Xincun Zhuang , Zhen Zhao

The effect of superimposed low-frequency vibration (LFV) during deformation is somewhat similar to that of ultrasonic-vibration, however its mechanism is still unclear. In order to clarify the mechanism of LFV, the LFV-assisted compression experiments of Al-Zn-Mg-Cu alloy with different amplitudes were conducted. The length of the elastic deformation zone (LE) of the material was considered when selecting the relative amplitude parameters. The macro-mechanical response, distribution of secondary phases, dislocation evolution and microhardness were determined. The results show that LFV with different amplitudes exerted different effects on the material. LFV at vibration amplitude < LE exerted a superimposed effect on the elastic stress. The proportion of micron-diameter secondary phases with an equivalent diameter < 3 μm increased by 16.67 % and dislocation proliferation was promoted. LFV at amplitude > LE exerted the coupling effects of elastic stress superposition and plastic vibration softening. The proportion of micron-diameter secondary phases with an equivalent diameter < 3 μm increased by 42.77 %, the proportion of nanoscale precipitates with an equivalent diameter < 2.5 nm decreased by 63.21 %, and dislocation annihilation was accelerated. This study reveals the amplitude correlation to LFV mechanism and provides a new idea for the application of vibration-assisted forming.

变形过程中的叠加低频振动(LFV)效应与超声振动的效应有些相似,但其机理仍不清楚。为了弄清低频振动的机理,我们对 Al-Zn-Mg-Cu 合金进行了不同振幅的低频振动辅助压缩实验。在选择相对振幅参数时,考虑了材料弹性变形区(LE)的长度。测定了宏观力学响应、次生相分布、位错演变和显微硬度。结果表明,不同振幅的低频振动对材料产生了不同的影响。振幅< LE的低频振动对弹性应力产生了叠加效应。等效直径为 < 3 μm 的微米直径次生相比例增加了 16.67 %,并促进了位错增殖。振幅为 > LE 的低频振动发挥了弹性应力叠加和塑性振动软化的耦合效应。等效直径为 < 3 μm 的微米直径次生相比例增加了 42.77 %,等效直径为 < 2.5 nm 的纳米级析出物比例减少了 63.21 %,位错湮灭加速。这项研究揭示了振幅与 LFV 机制的相关性,为振动辅助成形的应用提供了新思路。
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引用次数: 0
A VFM-based identification method for anisotropic thermal-mechanical properties of sheet metals using the digital image correlation and infrared thermography assisted heterogeneous test 利用数字图像相关性和红外热成像辅助异质测试,基于 VFM 的金属板各向异性热机械性能识别方法
IF 6.7 2区 材料科学 Q1 ENGINEERING, INDUSTRIAL Pub Date : 2024-06-20 DOI: 10.1016/j.jmatprotec.2024.118490
Jiawei Fu , Yahui Cai , Bowen Zhang , Zengxiang Qi , Fanhui Liu , Lehua Qi

The accurate characterization of the anisotropic thermal-mechanical constitutive properties of structural sheet metals at elevated temperatures and under nonuniform stress/strain states is crucial for the precise hot plastic forming and structural behavior evaluation of an engineering sheet part. Traditional thermal-mechanical testing methods rely on the assumption of states homogeneity, leading to a large number of tests required for the characterization of material anisotropy and nonlinearity at various high temperatures. In this work, a highly efficient identification method is proposed that allows the simultaneous characterization of the anisotropic yielding, strain hardening and elasto-plasticity thermal softening material properties using the minimum number of tests, releasing the limitations of traditional identification methods. This is implemented by performing a digital image correlation and infrared thermography assisted heterogeneous high temperature test and processing the full-field measurement data based on the principle of virtual work. A double-notched tensile specimen configuration combined with a center-to-periphery temperature gradient is designed first to enable the high heterogeneity of stress/temperature states. Simulations of the heterogeneous tests are then performed to supply idealized reference data that can be used to evaluate the identification sensitivity of the proposed identification algorithm. After the numerical validation of the methodology, it is then applied to the TC4 titanium alloy sheet specimen using the self-developed experimental setup. The experimental identification results verify that the multiple anisotropic thermal-mechanical elasto-plasticity constitutive parameters can be accurately identified from the heterogeneous test with high computation efficiency, significantly simplifying the testing process in comparison to applying multiple traditional homogeneous tests. The current work provides an effective and convenient alternative to high temperature identification strategies used by the material processing community.

在高温和非均匀应力/应变状态下,准确表征结构性金属板材的各向异性热机械组成特性,对于工程板材零件的精确热塑性成形和结构行为评估至关重要。传统的热机械测试方法依赖于状态均匀性假设,导致在各种高温条件下表征材料各向异性和非线性时需要进行大量测试。在这项工作中,提出了一种高效的识别方法,该方法允许使用最少的测试次数同时表征各向异性屈服、应变硬化和弹塑性热软化材料特性,摆脱了传统识别方法的限制。具体做法是执行数字图像相关和红外热成像辅助异质高温试验,并根据虚拟工作原理处理全场测量数据。首先设计了一种双缺口拉伸试样配置,结合中心到外围的温度梯度,以实现应力/温度状态的高度异质性。然后对异质试验进行模拟,以提供理想化的参考数据,用于评估所提出的识别算法的识别灵敏度。在对该方法进行数值验证后,使用自主开发的实验装置将其应用于 TC4 钛合金板试样。实验识别结果验证了多种各向异性热-力学弹塑性组成参数可以从异质试验中准确识别出来,且计算效率高,与应用多种传统同质试验相比,大大简化了试验过程。目前的工作为材料加工领域使用的高温识别策略提供了一种有效、便捷的替代方案。
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引用次数: 0
Preparing bulk nanocrystalline Cu–Al alloys via rotary swaging 通过旋转锻造制备块状纳米晶铜铝合金
IF 6.7 2区 材料科学 Q1 ENGINEERING, INDUSTRIAL Pub Date : 2024-06-20 DOI: 10.1016/j.jmatprotec.2024.118489
Kaixuan Zhou , Yonghao Zhao , Qingzhong Mao , Binpeng Zhu , Guosheng Sun , Shunqiang Li , Jizi Liu

Although nanocrystalline (NC) metals and alloys have been studied for nearly 40 years, their preparation is limited to the laboratory as large-scale; low-cost commercial production remains a challenge. In this study, high-strength bulk NC Cu–Al alloys were prepared from coarse-grained Cu–Al alloy rods via rotary swaging. Rotary swaging is characterized by the low cost and infinite length of the processed samples; therefore, it can advance the industrial application of bulk NC alloys. Core–shell-structured Cu–Al alloy rods with a hard NC core (diameter of 2.2 mm) wrapped in a soft ultrafine-grained (UFG) shell with a thickness of 1.75 mm were prepared using a rotary swage. Tensile tests revealed that the hard NC Cu–Al alloy core exhibited an ultimate tensile strength of 1034 MPa, which surpassed current strength records. Microstructural characterization showed that the hard NC core was composed of NC fiber grains with widths of 45 nm and lengths of 190 nm. The edge of the rod contained numerous low-angle grain boundaries and shear bands, which provided it with a lower strength and higher elongation than those of the center. During swaging, strong (200) and (111) fiber textures perpendicular to the cross-section were produced during the early stages of deformation. In the latter deformation stages, the polar densities of the (200) and (111) textures weakened, and some complex textures were formed along with high-angle grain boundaries. The grain refinement mechanisms were dominated by multiple deformation twinning, stacking faults, and dislocation slips. Finite elemental analysis showed that triaxial compressive stress and a high strain rate were applied to grain refinement. In addition, the softer shell protects the harder core during deformation, preventing fracture. This study verified an effective preparation technique for bulk NC materials via rotary swaging because it is a simple process with low cost and broad industrial prospects.

尽管对纳米晶(NC)金属和合金的研究已有近 40 年的历史,但其制备仅限于实验室,大规模、低成本的商业生产仍是一项挑战。在本研究中,通过旋转锻造法从粗晶铜铝合金棒制备了高强度块状数控铜铝合金。旋转锻造具有成本低和加工样品长度无限的特点,因此可以推进块状数控合金的工业应用。使用旋转锻造法制备了芯壳结构的铜铝合金棒,该棒具有坚硬的数控内核(直径为 2.2 毫米),外层包裹着厚度为 1.75 毫米的超细晶粒(UFG)软壳。拉伸试验显示,硬质数控铜铝合金芯的极限拉伸强度为 1034 兆帕,超过了目前的强度记录。微观结构表征显示,硬 NC 内核由宽度为 45 纳米、长度为 190 纳米的 NC 纤维晶粒组成。棒材边缘含有大量低角度晶界和剪切带,与中心相比,强度较低,伸长率较高。在锻造过程中,变形的早期阶段会产生垂直于横截面的强(200)和(111)纤维纹理。在变形后期,(200)和(111)纹理的极性密度减弱,并与高角度晶界一起形成了一些复杂纹理。晶粒细化机制主要是多重变形孪晶、堆积断层和位错滑移。有限元分析表明,三轴压应力和高应变速率作用于晶粒细化。此外,较软的外壳在变形过程中保护了较硬的内核,防止了断裂。这项研究验证了通过旋转锻造制备块状数控材料的有效技术,因为它工艺简单、成本低廉,具有广阔的工业前景。
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引用次数: 0
Numerical study on the effect of actuation parameters on the formation characteristics of metal droplets in magnetohydrodynamic drop-on-demand (DOD) jetting 关于驱动参数对磁流体液滴按需喷射(DOD)过程中金属液滴形成特性影响的数值研究
IF 6.7 2区 材料科学 Q1 Computer Science Pub Date : 2024-06-19 DOI: 10.1016/j.jmatprotec.2024.118483
Xiao-Chen Lin , Hai-Xing Wang , Sheng-Wei Tian , Jin-Yue Geng , He-Ji Huang , Su-Rong Sun , Jin-Wen Cao , Xian Meng , Cong Yan

Numerical simulations have investigated the effects of electromagnetic drive waveform amplitude and pulse width on the state of metal droplet generation during drop-on-demand printing of molten metal aluminum by electromagnetic drive. It indicates that positive and negative pulses of magnetohydrodynamic(MHD) actuation applied to the molten metal in the crucible can form a so-called “push-pull” effect, which is the main mechanism affecting droplet generation and breakup. The positive pressure pulse causes the liquid metal to be extruded outward, and the negative pressure pulse promotes the fluid retraction at the nozzle to promoting the thinning of the liquid bridge and the generation of liquid droplets. With the increase in the amplitude of the applied current, the ejected molten aluminum from the crucible experiences three states: no droplet, single droplet, and droplet with satellite droplets. In the single drop state, the droplet formation time is shortened as the current peak increases and the droplet volume increases with the increase of pulse width. The energy conversion and force changes during droplet formation and falling are analyzed. When the peak kinetic energy of the ejected molten metal exceeds its surface energy, the jet breaks up and generates a single droplet. For the actuation with constant amplitude and duration for positive pulses, extending the duration of negative pulses weakens the "pull" effect, leading to a transition from the generation of a single droplet to multiple droplets. The numerical simulation results provide information on the current amplitude, pulse width, and Weber number range necessary for stable single droplet generation.

数值模拟研究了电磁驱动波形振幅和脉冲宽度对电磁驱动按需滴印熔融金属铝时金属液滴生成状态的影响。结果表明,施加在坩埚中熔融金属上的磁流体动力(MHD)正负脉冲可形成所谓的 "推拉 "效应,这是影响液滴生成和破裂的主要机制。正压脉冲使液态金属向外挤压,负压脉冲促进流体在喷嘴处回缩,从而推动液桥变薄并产生液滴。随着外加电流振幅的增大,从坩埚中喷射出的熔融铝经历了三种状态:无液滴、单液滴和带卫星液滴的液滴。在单液滴状态下,液滴形成时间随着电流峰值的增加而缩短,液滴体积随着脉冲宽度的增加而增大。分析了液滴形成和下落过程中的能量转换和力的变化。当喷射出的熔融金属的峰值动能超过其表面能时,射流破裂并产生单个液滴。在正脉冲的振幅和持续时间不变的情况下,延长负脉冲的持续时间会减弱 "拉 "效应,导致从生成单个液滴过渡到生成多个液滴。数值模拟结果提供了稳定生成单液滴所需的电流振幅、脉冲宽度和韦伯数范围的信息。
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引用次数: 0
Improving the uniform elongation of ultrafine-grained pure titanium through judicious allocation of work hardening 通过合理分配加工硬化提高超细晶粒纯钛的均匀伸长率
IF 6.7 2区 材料科学 Q1 Computer Science Pub Date : 2024-06-16 DOI: 10.1016/j.jmatprotec.2024.118484
Jiajun Hu , Dongmei Zhang , Zhaohua Hu , Shuaizhuo Wang , Lirong Xiao , Bo Gao , Dongdi Yin , Hao Zhou , Yonghao Zhao

Improving uniform elongation in metals typically involves enhancing the work hardening rate, as elevated work hardening can delay necking and fracture. However, our investigation into commercial pure titanium reveals a counterintuitive relationship between these properties. We find that high uniform elongation correlates with low work hardening capability, while a high work hardening rate results in reduced ductility. Two types of ultrafine-grained pure titanium, prepared by rotary swaging, subsequent rolling, and annealing, exhibit different mechanical properties. Microstructural and deformation mechanism analyses reveal that the difference arise from variations in texture. Specifically, extensive activation of <c+a> dislocations in the former sample leads to premature, intense work hardening that is quickly exhausted, while the latter sample shows a steady, uniform work hardening progression that delays necking. Our findings challenge the conventional understanding that high work hardening rates ensure high uniform elongation. Instead, we propose that optimizing ductility requires a strategic allocation of work hardening throughout the tensile deformation to delay necking. This study reveals the intrinsic relationship between work hardening and ductility, offering new strategies for designing stronger and tougher materials.

提高金属的均匀伸长率通常需要提高加工硬化率,因为提高加工硬化率可以延迟缩颈和断裂。然而,我们对商用纯钛的研究发现,这些性能之间存在着一种反直觉的关系。我们发现,高均匀伸长率与低加工硬化能力相关,而高加工硬化率会导致延展性降低。通过旋转锻造、后续轧制和退火制备的两种超细晶粒纯钛表现出不同的机械性能。微观结构和变形机理分析表明,差异源于质地的变化。具体来说,前一种样品中位错的广泛激活导致了过早、强烈的加工硬化,并很快耗尽,而后一种样品则表现出稳定、均匀的加工硬化过程,从而延迟了缩颈现象的发生。我们的研究结果对认为高加工硬化率可确保高均匀伸长率的传统认识提出了质疑。相反,我们提出,要优化延展性,就必须在整个拉伸变形过程中战略性地分配加工硬化,以延迟缩颈。这项研究揭示了加工硬化与延展性之间的内在关系,为设计更强更韧的材料提供了新的策略。
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引用次数: 0
Line distributed pores in laser powder bed fusion manufactured dies: A critical factor in die failure for high pressure die casting 激光粉末床熔融制造模具中的线状分布孔隙:高压压铸模具失效的关键因素
IF 6.7 2区 材料科学 Q1 ENGINEERING, INDUSTRIAL Pub Date : 2024-06-14 DOI: 10.1016/j.jmatprotec.2024.118480
Xin He , Corey Vian , Xiaoming Wang

Additive manufacturing technologies, such as laser powder bed fusion (LPBF), have attracted a significant amount of attention for their capability in fabricating components of complex geometries with improved efficiency and design flexibility. However, the presence of pores in additively manufactured high pressure die casting dies has emerged as a critical issue affecting the performance and reliability of the dies. A numerical model for the formation of pores due to the instability of the keyhole and molten pool in a 18Ni300 steel is created. Computational fluid dynamic (CFD) simulation revealed that the keyhole in the molten pool undergoes inward ebbing and is wrapped by the liquid interface behind the laser beam, forming gas bubbles along the laser tracks. Some of the bubbles will either coalesce or breakup in remelting by the laser beam above in building the next layer forming a string of pores along the LPBF build direction, while others remain unchanged. The line distributed pores are the primary sites for cracking, and the cracks grow along the LPBF build direction. As a result, these longitudinal cracks cause the premature failure of dies with conformal cooling channels (CCC).

激光粉末床熔融(LPBF)等快速成型制造技术在制造复杂几何形状的部件方面具有更高的效率和设计灵活性,因此吸引了大量关注。然而,增材制造高压压铸模具中存在的气孔已成为影响模具性能和可靠性的关键问题。本研究建立了一个数值模型,用于分析由于 18Ni300 钢的锁孔和熔池不稳定而形成的气孔。计算流体动力学(CFD)模拟显示,熔池中的键孔会向内退缩,并被激光束后方的液体界面包裹,沿激光轨迹形成气泡。在建造下一层时,部分气泡会在上方激光束的重熔作用下凝聚或破裂,形成沿 LPBF 建造方向的一串气孔,而其他气孔则保持不变。线状分布的孔隙是产生裂纹的主要部位,裂纹沿着 LPBF 的成型方向生长。因此,这些纵向裂缝会导致带有保形冷却通道(CCC)的模具过早失效。
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引用次数: 0
Mechanism and characterization of laser-assisted hybrid processing for chemical vapor deposited diamond micro milling cutters 化学气相沉积金刚石微铣刀激光辅助混合加工的机理和特性分析
IF 6.3 2区 材料科学 Q1 Computer Science Pub Date : 2024-06-14 DOI: 10.1016/j.jmatprotec.2024.118476
Yang Wu, Ning He, Ni Chen, Huiwen Chen, Xianzi Chen, Bo Yan, Liang Li

The fabrication of superhard micro milling cutters with extreme sharpness is highly demanded to meet the strict requirements of micro structures in terms of machining accuracy, surface roughness and burr height. In this study, nanosecond laser induced graphitization assisted grinding was proposed by considering machining efficiency and machining quality simultaneously for chemical vapor deposited (CVD) diamond micro flat-end milling cutters. An optimal cut-section was obtained by adopting moderate laser cutting energy and avoiding unstable thermodynamic coupling effect. The following laser induced graphitization mechanism on the cut-section was studied by analysing the different graphitization behaviours. The extensive graphitization caused sintered and banded graphite while the weak graphitization could not eliminate the defects caused by laser cutting. The uniform and dense graphitization resulted from appropriate energy distribution contributed to the smooth transition layer which was the significant factor in subsequent grinding. Moreover, the subsequent grinding behaviours of different transition layers were investigated, the grooved defects on transition layer caused the unstable grinding and fracture removal model, leading to the cracked ground surface and blunt cutting edge. Nevertheless, the grinding model of smooth transition layer was scratching without transcrystalline cracks, resulting in the smooth ground surface and sharp cutting edge. Thus, the laser parameters were finally optimized based on the feedback. Furthermore, the even graphitization, undamaged transition layer, scratching, as well as less material stress resulted in the extreme sharpness. In this way, the CVD diamond micro flat-end milling cutter (CVDM) with a diameter of 200 μm, surface roughness Sa of 30 nm, aspect ratio of 3, and edge radius of around 0.12 μm was prepared, the extreme sharpness was indicated by comparing with the edge radius of 1–5 μm reported heretofore. Finally, the micro grooves with surface roughness Sa of 17.8 nm and tiny burrs were machined on Ti-6Al-4 V by the homemade CVDM, which thereby indicated the outstanding cutting performance of the CVDM in micro-milling.

为了满足微型结构对加工精度、表面粗糙度和毛刺高度的严格要求,制造具有极高锋利度的超硬微型铣刀是非常必要的。本研究提出了纳秒激光诱导石墨化辅助磨削技术,同时考虑了化学气相沉积(CVD)金刚石微型平端铣刀的加工效率和加工质量。通过采用适度的激光切割能量和避免不稳定的热力学耦合效应,获得了最佳的切割截面。通过分析不同的石墨化行为,研究了切割截面上的激光诱导石墨化机制。广泛的石墨化会造成烧结和带状石墨,而微弱的石墨化则无法消除激光切割造成的缺陷。适当的能量分布所产生的均匀致密的石墨化有助于形成光滑的过渡层,这也是影响后续研磨的重要因素。此外,还研究了不同过渡层的后续磨削行为,过渡层上的沟槽缺陷导致磨削和断裂去除模型不稳定,导致磨削表面开裂和切削刃变钝。然而,光滑过渡层的磨削模型是划痕,没有晶间裂纹,因此磨削表面光滑,切削刃锋利。因此,根据反馈信息最终优化了激光参数。此外,均匀的石墨化、无损的过渡层、划痕以及较小的材料应力也造就了极高的锋利度。这样,就制备出了直径为 200 μm、表面粗糙度 Sa 为 30 nm、纵横比为 3、边缘半径约为 0.12 μm 的 CVD 金刚石微平端铣刀 (CVDM)。最后,利用自制的 CVDM 在 Ti-6Al-4 V 上加工出了表面粗糙度 Sa 为 17.8 nm 且毛刺极小的微凹槽,这表明 CVDM 在微铣削方面具有出色的切削性能。
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引用次数: 0
Ultrarapid soldering Cf/Al by inactive solder by ultrasonic assistance 通过超声波辅助非活性焊料超快速焊接 Cf/Al
IF 6.3 2区 材料科学 Q1 Computer Science Pub Date : 2024-06-13 DOI: 10.1016/j.jmatprotec.2024.118481
Zhengwei Li , Zhiwu Xu , Zhongwei Ma , Shu Chen , He Zhang , Tengying Guo , Jiuchun Yan

Ultrasonic vibration was applied when soldering carbon fiber-reinforced aluminum composites (Cf/Al) in this work. The effects of ultrasonic action time on joint formation, carbon fiber distribution, and mechanical properties of the joints were studied. Results show that, with the assistance of ultrasonic vibration, inactive solder can wet the carbon fiber within dozens of seconds at low temperature (250 °C). Short ultrasonic action time leads to minor erosion of aluminum substrate, thereby restricting the movement of carbon fibers into joint. Extensive erosion of the aluminum occurs with prolonged ultrasonic action time. A uniform distribution of carbon fibers in joint is achieved at 60 s. Wetting of carbon fiber is characterized by amorphous-nanocrystalline oxides on its surface, which can be attributed to the elevated temperature and pressure induced by the cavitation of the solder. Extending ultrasonic time enhances the hardness and the shear strength of the joint. The failure cracks propagate through the substrate when ultrasonic time exceeds 15 s. This work provides referential value when soldering materials with low surface energies.

本研究在焊接碳纤维增强铝复合材料(Cf/Al)时采用了超声波振动。研究了超声波作用时间对焊点形成、碳纤维分布和焊点机械性能的影响。结果表明,在超声波振动的帮助下,非活性焊料可在低温(250 °C)下几十秒内润湿碳纤维。较短的超声波作用时间会导致铝基材受到轻微侵蚀,从而限制碳纤维进入接合处。如果超声波作用时间过长,则会对铝造成大面积侵蚀。60 秒后,接缝中的碳纤维分布均匀。碳纤维润湿的特点是其表面出现非晶-非晶氧化物,这可能是由于焊料空化引起的温度和压力升高所致。延长超声波时间可提高接头的硬度和剪切强度。当超声波时间超过 15 秒时,失效裂纹会在基底上扩展。这项研究为焊接表面能较低的材料提供了参考价值。
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引用次数: 0
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Journal of Materials Processing Technology
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