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Acoustic Microscopy of Ceramic Surfaces 陶瓷表面声学显微镜
Pub Date : 1985-03-01 DOI: 10.1109/T-SU.1985.31597
K. Yamanaka, Y. Enomoto, Y. Tsuya
Mechanical properties of ceramic surfaces such as hard- ness, indentation fracture toughness, and wear resistance are largely influenced by the behavior of small flaws and defects, such as micro- cracks, delaminations, voids, and inclusion located beneath the sur- face. Acoustic microscopy is particularly suited to study this phenom- enon because it can image microscopic subsurface features without sectioning. Furthermore, it has been revealed that the velocity and at- tenuation of the leaky surface wave can be measured; these are ex- pected to have close correlation with the mechanical properties of ma- terials. New results on the nondestructive observation of subsurface cracks of Si,N, and ZrO, and delamination of TIN coatings introduced by Vickers indentation or sliding contacts are presented. The mecha- nism of delamination and wear of these materials is discussed. It is shown that the velocity and attenuation of the leaky surface wave of TIN coatings and sintered AlzOn actually have close correlation with the hardness and wear resistance of these materials. The reason for these correlations is also discussed.
陶瓷表面的机械性能,如硬度、压痕断裂韧性和耐磨性在很大程度上受表面下的小缺陷和缺陷的影响,如微裂纹、分层、空洞和夹杂。声学显微镜特别适合研究这种现象,因为它可以成像微观的地下特征而无需切片。此外,还揭示了泄漏表面波的速度和衰减可以测量;预计这些与材料的力学性能密切相关。本文介绍了Si、N和ZrO的亚表面裂纹的无损观察以及由维氏压痕或滑动接触引起的TIN涂层分层的新结果。讨论了这些材料的分层和磨损机理。结果表明,TIN涂层和烧结AlzOn泄漏表面波的速度和衰减实际上与材料的硬度和耐磨性密切相关。本文还讨论了产生这些相关性的原因。
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引用次数: 26
Acoustic Micro-Metrology 声Micro-Metrology
Pub Date : 1985-03-01 DOI: 10.1109/T-SU.1985.31588
R. D. Weglein
Abstmct-The ability to measure elastic properties of materials and layered structures nondestructively on a microscopic scale gives rise to a new field of metrology via the reflection acoustic microscope. Acoustic micro-metrology accomplishes this task via the acoustic material signature (AMS), which is obtained from planar and curved surface specimens alike. The AMS constitutes a unique function that arises from interference of elastic propagating modes. These are simultaneously and coherently excited in the wide-angle lens ensembles that distinguish the acoustic microscope from other forms of ultrasonic pulse-echo systems. Several potential applications taken from diverse fields are described with experimental case studies. Examples of both materials and layered structures are described. Distinguishing features of different crystal orientations of single crystals may be readily detected. It is shown that the film thickness measurement of a wide variety of opaque materials is readily accomplished nondestructively and without a step. Machining damage in a Be surface may also be determined nondestructively. The AMS limitations imposed by frequency and material combinations, as presently viewed, are treated in the concluding section.
摘要:反射声显微镜能够在微观尺度上无损地测量材料和层状结构的弹性特性,从而开辟了一个新的计量领域。声学微测量通过声学材料特征(AMS)来完成这项任务,声学材料特征可以从平面和曲面样品中获得。AMS是一种独特的由弹性传播模干涉产生的函数。这些在广角透镜集合中同时和相干地激发,使声学显微镜与其他形式的超声脉冲回波系统区别开来。从不同的领域采取了几个潜在的应用描述与实验案例研究。描述了材料和分层结构的实例。可以很容易地检测到单晶的不同晶体取向的区别特征。结果表明,各种不透明材料的薄膜厚度测量是容易完成无损和无步骤的。Be表面的加工损伤也可以用非破坏性的方法来确定。频率和材料组合所带来的AMS限制,如目前所见,将在结论部分进行处理。
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引用次数: 55
An Acoustic Microscope for Subsurface Defect Characterization 声学显微镜用于亚表面缺陷的表征
Pub Date : 1985-03-01 DOI: 10.1109/T-SU.1985.31599
I. Ishikawa, H. Kanda, K. Katakura
Abstmct-A scanning acoustic microscope operating in the frequency range 0.1 - L GHz has been developed. The acoustic micrographs obtained have clearly demonstrated that this device can be used nondestructively to observe spike defects at the edge of the local oxidation of silicon structures in semiconductor devices and hydrogenion-doped regions in silicon crystals. The acoustic data have been compared with results obtained through the scanning electron microscope and the optical microscope. ICROANALYSIS techniques used to measure and examine microscopic regions in materials with highfrequency ultrasound waves have recently received a great deal of attention as a new and highly promising means for measurement and observation. Typical of these new methods is the mechanical scanning acoustic microscope developed by Professor C. F. Quate at Stanford University in 1973 [l]. This device directs a narrow focused acoustic beam at a specimen being scanned two-dimensionally, and detects acoustic waves that are reflected from or transmitted through the specimen to obtain a two-dimensional image. The image contrast obtained reflects changes in the mechanical properties of materials in the specimen, such as elasticity, density, and viscosity. Applications of the acoustic microscope include, for example, fault detection in materials, the examination of semiconductor devices, and materials evaluation using surface acoustic waves [2]-161. In this paper we report the results of studies conducted on spike defects that arise in isolation regions between elements in semiconductor devices and regions bombarded by hydrogen ions on silicon substrates. 11. CONSTRUCTION OF THE ACOUSTIC MICROSCOPE The operating principles and construction of acoustic microscopes in general have already been described in a number of papers and will be omitted here. We intend to discuss here only several specific features particular to our reflection scanning acoustic microscope. The most important technical problems that had to solved during development of this device were the development of a process for forming high-performance piezoelectric film; a process for fabricating microspherical
摘要研制了一种工作频率为0.1 ~ L GHz的扫描声显微镜。所获得的声学显微照片清楚地表明,该装置可以无损地观察半导体器件中硅结构局部氧化边缘的尖峰缺陷和硅晶体中氢掺杂区域。并将声学数据与扫描电镜和光学显微镜所得结果进行了比较。使用高频超声波测量和检查材料微观区域的显微分析技术作为一种新的、极具前景的测量和观察手段,最近受到了广泛的关注。这些新方法的典型代表是1973年斯坦福大学C. F. Quate教授开发的机械扫描声学显微镜[1]。该装置将窄聚焦声束对准被二维扫描的样品,并检测从样品反射或透射的声波,以获得二维图像。获得的图像对比度反映了试样中材料力学性能的变化,如弹性、密度和粘度。声学显微镜的应用包括,例如,材料中的故障检测,半导体器件的检查,以及使用表面声波[2]-161对材料进行评估。在本文中,我们报告了对半导体器件中元件之间的隔离区域和硅衬底上氢离子轰击区域中产生的尖峰缺陷的研究结果。11. 声学显微镜的构造声学显微镜的工作原理和构造一般已经在许多论文中描述过,在这里略去。我们打算在这里只讨论我们的反射扫描声显微镜特有的几个特点。在研制过程中需要解决的最重要的技术问题是高性能压电薄膜的形成工艺的开发;一种制造微球面的方法
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引用次数: 13
Applications of Scanning Acoustic Microscopy - Survey and New Aspects 扫描声学显微镜的应用——综述及新进展
Pub Date : 1985-03-01 DOI: 10.1109/T-SU.1985.31595
M. Hoppe, J. Bereiter-Hahn
Although the technique of scanning acoustic microscopy was introduced more than a decade ago, there still is a general lack of wide-spread applications research due to the limited number of instru- ments worldwide. To enlarge the spectrum of applications, this contri- bution presents selected results of work in materials science (ceramics, single crystals, polymers, thin ams, and integrated circuits) and biol- ogy (living cells, mucous coats, and cuticle structures). and an opening angle of 100" are used. The broadband design of the matching network and transducer and anti- reflection coating enables the frequency range to be cov- ered by two acoustic objectives, operating from 0.8 to 1.3 and 1.3 to 2.0 GHz, respectively. The x- and y-scanning is performed by electromagnetic coil systems driving the objective in a raster mode (x-scanning frequency locked
扫描声显微镜技术虽已问世十多年,但由于仪器数量有限,在世界范围内仍普遍缺乏广泛的应用研究。为了扩大应用范围,本贡献介绍了材料科学(陶瓷,单晶,聚合物,薄薄膜和集成电路)和生物学(活细胞,粘膜层和角质层结构)方面的精选成果。开口角度为100”。匹配网络和换能器的宽带设计以及抗反射涂层使两个声学目标分别覆盖0.8至1.3 GHz和1.3至2.0 GHz的频率范围。x和y扫描是由电磁线圈系统在光栅模式下驱动物镜(x扫描频率锁定)
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引用次数: 52
Speed of Sound in Mammalian Tendon Threads Using Various Reference Media 使用不同参考介质的哺乳动物肌腱螺纹的声速
Pub Date : 1985-03-01 DOI: 10.1109/T-SU.1985.31602
C. A. Edwards, W. O’Brien
Abstmcl-Acoustic microscopy has now made it possible to characterize biological materials on the microscopic level ultrasonically. The importance of the environmental conditions of the material being examined on its acoustic properties is demonstrated. Mammalian tendon threads (on the order of 150 pm in diameter) were examined with the scanning laser acoustic microscope while varying the media in which they were bathed. A relation between the osmolarity of the reference solution in which the tendon is bathed and the speed of sound of the thread under examination is suggested.
声学显微镜已经使在微观水平上对生物材料进行超声表征成为可能。证明了被测材料的环境条件对其声学性能的重要性。用扫描激光声学显微镜观察哺乳动物肌腱螺纹(直径约为150pm),同时改变其浸泡的介质。提出了浸泡肌腱的参考溶液的渗透压与被测线的声速之间的关系。
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引用次数: 17
Low-Temperature Acoustic Microscopy 低温声学显微镜
Pub Date : 1985-03-01 DOI: 10.1109/T-SU.1985.31581
J. Foster, D. Rugar
Abstmt-The resolution of the acoustic microscope is presently limited by the sound wavelength in the coupling fluid between the lens and sample. Cryogenic fluids offers two advantages over room temperature fluids for use in acoustic microscopy: low sound speed and low acoustic attenuation. Liquid nitrogen, argon, and helium have been used for microscopy, and they are all described. In liquid nitrogen and liquid argon, images have been obtained at frequencies as high as 2.8 GHz with a corresponding wavelength of 3000 A . A nonlinear effect was discovered in these liquids (as well as water) that improves the resolution of the microscope beyond the linear diffraction limit. Liquid helium emerges as the “ultimate” fluid for high-resolution acoustic microscopy because of its near zero acoustic attenuation at very low temperatures. Operating at temperatures less than 0.2 K, imaging with 300-A wavelength sound has been achieved. Applications include detection of thermal phonon emission from surfaces and general purpose high-resolution imaging with excellent sensitivity to slight topographical features.
摘要:目前声显微镜的分辨率受限于透镜与样品之间耦合流体中的声波波长。低温流体比室温流体在声学显微镜中使用有两个优点:低声速和低声衰减。液氮、氩气和氦气已被用于显微镜,它们都被描述过。在液氮和液态氩气中,获得的图像频率高达2.8 GHz,对应波长为3000 a。在这些液体(以及水)中发现了一种非线性效应,它提高了显微镜在线性衍射极限以外的分辨率。液氦成为高分辨率声学显微镜的“终极”流体,因为它在非常低的温度下几乎为零的声学衰减。在低于0.2 K的工作温度下,已经实现了300-A波长声波成像。应用包括检测表面的热声子发射和对轻微地形特征具有优异灵敏度的通用高分辨率成像。
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引用次数: 16
Imaging with Optically Generated Thermal Waves 光学产生的热波成像
Pub Date : 1985-03-01 DOI: 10.1098/rsta.1986.0109
G. Busse
By absorption of modulated optical power, a thermal wave is generated that interacts with thermal discontinuities. Imaging with scanned local thermal-wave probing is suited for non-contacting and non-destructive inspection of thermal structures in solids.
通过吸收调制光功率,产生与热不连续相互作用的热波。扫描局部热波探测成像适用于固体热结构的非接触和非破坏性检测。
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引用次数: 48
Pulse Compression Acoustic Microscopy Using SAW Filters 脉冲压缩声学显微镜使用SAW滤波器
Pub Date : 1985-03-01 DOI: 10.1109/T-SU.1985.31582
M. Nikoonahad, Guang-Qi Yue, E. Ash
The basic principles of surface-acoustic.,wave pulse compression acoustic microscopy is described and demonstrated by re- sults obtained at 60 and 750 MHz. A theoretical analysis discusses the behavior of such a system in terms of the required signal processing and the attainable imaging resolution. advantageous. At sufficiently high intensities, the imaging of the microscope will be affected by harmonic genera- tion, sometimes beneficially (g) but more usually in the sense of a large increase in effective attenuation loss (lo). It is clear that we can choose to use extended coded pulses to reduce the intensity at a constant illumination energy and hence the incidence of harmonic effects. We will describe the principles of operation of a pulse- compression microscope, based on surface acoustic wave (SAW) generated chirp pulses and illustrate the advan- tages of such a system by means of results from test sam- ples. A range of micrographs obtained at 60 MHz from metal-metal and metal-ceramic bonds with a processing gain of 17 dB is presented. At higher frequencies, the fre- quency-dependent attenuation in the coupling liquid im- poses two fundamental limitations on the performance of the pulse compression microscope: 1) reduction in the processing gain and 2) reduction in the imaging resolu- tion. Analysis shows, however, that even at high frequen- cies there can be a considerable advantage in using pulse compression. Experimental results at 750 MHz with a chirp bandwidth of 150 MHz have been obtained. We will show that the effective attainable resolution with such a coherent broadband system is in accord with a simple in- tuitive concept, based on monochromatic excitation, at a suitable averaged frequency. The reduction in processing gain due to loss dispersion, which we will calculate, is of course related to the partic- ular choice of coded pulse. However, the loss of resolution is a phenomenon that depends primarily on the spectrum of the pulse; for a pulse of a given spectral width one would not expect any significant differences between the effective resolution using a chirp or a rectangular RF pulse.
表面声学的基本原理。在60和750兆赫下获得的结果描述和证明了波脉冲压缩声学显微镜。理论分析讨论了这种系统在所需的信号处理和可实现的成像分辨率方面的行为。有利。在足够高的强度下,显微镜的成像将受到谐波产生的影响,有时是有益的(g),但更常见的是有效衰减损失(lo)的大幅增加。很明显,我们可以选择使用扩展编码脉冲来降低恒定照明能量下的强度,从而降低谐波效应的发生率。我们将描述一种基于表面声波(SAW)产生的啁啾脉冲的脉冲压缩显微镜的工作原理,并通过测试样品的结果说明这种系统的优点。在60兆赫下,从金属-金属和金属-陶瓷键获得了一系列显微照片,处理增益为17 dB。在较高的频率下,耦合液体中的频率相关衰减对脉冲压缩显微镜的性能造成了两个基本限制:1)处理增益降低和2)成像分辨率降低。然而,分析表明,即使在高频下,使用脉冲压缩也有相当大的优势。实验结果表明,在750兆赫时,啁啾带宽为150兆赫。我们将证明,在合适的平均频率下,这种相干宽带系统的有效可达到的分辨率与基于单色激励的简单直观概念是一致的。由于损耗色散造成的处理增益的降低,我们将加以计算,这当然与特定的编码脉冲选择有关。然而,分辨率的损失是一种主要取决于脉冲频谱的现象;对于给定谱宽的脉冲,使用啁啾和矩形射频脉冲的有效分辨率之间不会有显著差异。
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引用次数: 13
Attenuation Coefficient Measurement Technique at 100 MHz with the Scanning Laser Acoustic Microscope 扫描激光声显微镜100 MHz衰减系数测量技术
Pub Date : 1985-03-01 DOI: 10.1109/T-SU.1985.31592
K. Tervola, S. Foster, W. O’Brien
Absrmcf-There has been a lack of an accurate procedure for the measurement of an attenuation coefficient for biological tissues at 100 MHz with the scanning laser acoustic microscope (SLAM). The solution to this problem has been approached with two general schemes. One involved a calibrated look-up table, and the other utilized the measurement of insertion loss. For the latter a procedure has been developed and verified using known biological solutions. The insertion loss procedure yields an attenuation coefficient uncertainty to within five percent, a dynamic range from 4 to 28 dB/mm. and an insertion loss sensitivity of 0.2 dB. N IMPORTANT tissue characterization property is the ultrasonic attenuation coefficient, which is the decrease in energy of the sound wave when it propagates through a material. The attenuation includes absorption and scattering. Absorption represents the loss of energy into heat within the specimen. Scattering is a redirection of the energy due to the inhomogeneities of the specimen and includes reflection, refraction, and diffraction. The scanning laser acoustic microscope (SLAM) is a useful tool for providing at 100 MHz, the ultrasonic attenuation coefficient of tissue. A number of techniques have been developed to perform this measurement with the SLAM, and this report details and evaluates these techniques. Details of ultrasonic velocity measurements are found in companion papers [l], [2].
摘要:目前还没有一种精确的方法来测量生物组织在100兆赫下的衰减系数。解决这一问题的方法有两种。一个涉及校准的查找表,另一个利用插入损耗的测量。对于后者,已经开发了一个程序,并使用已知的生物溶液进行了验证。插入损耗过程产生的衰减系数不确定度在5%以内,动态范围为4至28 dB/mm。插入损耗灵敏度为0.2 dB。N重要的组织表征特性是超声衰减系数,即声波通过材料传播时能量的减少。衰减包括吸收和散射。吸收表示能量在试样内转化为热量的损失。散射是由于样品的不均匀性引起的能量的重定向,包括反射、折射和衍射。扫描激光声显微镜(SLAM)是提供100 MHz下组织超声衰减系数的有用工具。已经开发了许多技术来使用SLAM执行此测量,本报告详细介绍并评估了这些技术。超声速度测量的细节可在相关论文[1],[2]中找到。
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引用次数: 22
An Acoustic Microscope for Industrial Applications 工业用声学显微镜
Pub Date : 1985-03-01 DOI: 10.1109/T-SU.1985.31594
I. R. Smith, R. Harvey, D. Fathers
Absfmct-The design and industrial applications of a Quate-Lemons scanning acoustic microscope are described. The microscope is based on a conventional optical microscope, and so comparisons between the two modes are easily made; the instrument is simple to set up and operates routinely in an industrial environment. The basis of the instrument is a miniature lens scanner, little larger than an optical objective lens, which mounts on the turret of an optical microscope. Selection between modes is simply achieved by turret rotation, ensuring good registration between images. An integrated computer system is used to control the instrument, recording images and V(z) curves into a 512point square digital frame store, and this is also used for image processing. The design of the microwave electronics is explained, and emphasis is put on the low frequency performance of the system. This is illustrated with interior images of production components.
摘要:介绍了Quate-Lemons扫描声显微镜的设计和工业应用。该显微镜是在传统光学显微镜的基础上研制的,因此很容易对两种模式进行比较;该仪器设置简单,可在工业环境中常规操作。该仪器的基础是一个微型透镜扫描仪,比光学物镜稍大,安装在光学显微镜的转塔上。模式之间的选择是简单地实现炮塔旋转,确保良好的图像之间的配准。采用集成的计算机系统控制仪器,将图像和V(z)曲线记录到512点正方形数字帧存储器中,并用于图像处理。介绍了微波电子学的设计,重点介绍了系统的低频性能。这是用生产组件的内部图像说明的。
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引用次数: 19
期刊
IEEE Transactions on Sonics and Ultrasonics
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