Piezo actuators are widely used for precision positioning purposes where a submicron resolution is needed. Among the possible means to increase the working range of those actuators whose stroke is, depending on the material, usually limited to a small fraction of the actuator length, is a stepping motion of the actuator. We use a stepping motion based on the stick and slip effect in order to achieve a long range while maintaining the advantage of a virtually unlimited resolution. In this paper we introduce miniature x-y-stages dedicated to the manipulation of samples under a microscope. As previous setups and experiments have shown, a parallel kinematic structure for positioning purposes in microscopy or micro assembly is not well suited because x and y motion of the actuators have an influence on each other. A system with a serial kinematic structure has therefore been developed. The proposed device will provide the same capabilities as existing motorized stages, but at a lower cost than manual positioning stages and at a very compact size.
{"title":"Micropositioners for microscopy applications based on the stick-slip effect","authors":"A. Bergander, J. Breguet, C. Schmitt, R. Clavel","doi":"10.1109/MHS.2000.903315","DOIUrl":"https://doi.org/10.1109/MHS.2000.903315","url":null,"abstract":"Piezo actuators are widely used for precision positioning purposes where a submicron resolution is needed. Among the possible means to increase the working range of those actuators whose stroke is, depending on the material, usually limited to a small fraction of the actuator length, is a stepping motion of the actuator. We use a stepping motion based on the stick and slip effect in order to achieve a long range while maintaining the advantage of a virtually unlimited resolution. In this paper we introduce miniature x-y-stages dedicated to the manipulation of samples under a microscope. As previous setups and experiments have shown, a parallel kinematic structure for positioning purposes in microscopy or micro assembly is not well suited because x and y motion of the actuators have an influence on each other. A system with a serial kinematic structure has therefore been developed. The proposed device will provide the same capabilities as existing motorized stages, but at a lower cost than manual positioning stages and at a very compact size.","PeriodicalId":372317,"journal":{"name":"MHS2000. Proceedings of 2000 International Symposium on Micromechatronics and Human Science (Cat. No.00TH8530)","volume":"185 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-10-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123480685","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
I. Yajima, T. Toriyama, S. Sugiyama, K. Fukumasu, S. Konishi
A prototype self-supporting polysilicon-metal junction thermopile has been developed. In order to realize ideal higher thermal isolation, a thermopile without a membrane and having self-supporting structure is proposed. The hot and cold contacts in the proposed thermopile are reversible. The thermopile can be widely used for sensing elements of power generators, temperature sensors, radiation sensors, flow sensors, and so on. The thermocouple is composed of polysilicon and Au junction. The thermopile was fabricated by MICS (Micromachine Integrated Chip Service: three polysilicon layers structure). Outputs were measured as a function of distance between hot contact of the thermopile and the radiation source. In order to confirm performance of the thermopile, the output voltages were compared with theoretical values. The experimental results were in good agreement with the calculations.
{"title":"Fabrication of self-supporting polysilicon thermopile","authors":"I. Yajima, T. Toriyama, S. Sugiyama, K. Fukumasu, S. Konishi","doi":"10.1109/MHS.2000.903332","DOIUrl":"https://doi.org/10.1109/MHS.2000.903332","url":null,"abstract":"A prototype self-supporting polysilicon-metal junction thermopile has been developed. In order to realize ideal higher thermal isolation, a thermopile without a membrane and having self-supporting structure is proposed. The hot and cold contacts in the proposed thermopile are reversible. The thermopile can be widely used for sensing elements of power generators, temperature sensors, radiation sensors, flow sensors, and so on. The thermocouple is composed of polysilicon and Au junction. The thermopile was fabricated by MICS (Micromachine Integrated Chip Service: three polysilicon layers structure). Outputs were measured as a function of distance between hot contact of the thermopile and the radiation source. In order to confirm performance of the thermopile, the output voltages were compared with theoretical values. The experimental results were in good agreement with the calculations.","PeriodicalId":372317,"journal":{"name":"MHS2000. Proceedings of 2000 International Symposium on Micromechatronics and Human Science (Cat. No.00TH8530)","volume":"158 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-10-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115633166","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Shrinkage and irradiated energy distribution cause manufacturing errors in laser photolithography for producing micro parts. The manufacturing accuracy when producing micro parts is calculated. The micro polymer part is reinforced by unidirectional whiskers in order to improve the manufacturing accuracy. The shrinkage ratio is decreased by the addition of unidirectional whiskers.
{"title":"Improvement of accuracy in laser photolithography for producing micro part by the addition of unidirectional whisker","authors":"T. Nakamoto, K. Yamaguchi, T. Obata","doi":"10.1109/MHS.2000.903287","DOIUrl":"https://doi.org/10.1109/MHS.2000.903287","url":null,"abstract":"Shrinkage and irradiated energy distribution cause manufacturing errors in laser photolithography for producing micro parts. The manufacturing accuracy when producing micro parts is calculated. The micro polymer part is reinforced by unidirectional whiskers in order to improve the manufacturing accuracy. The shrinkage ratio is decreased by the addition of unidirectional whiskers.","PeriodicalId":372317,"journal":{"name":"MHS2000. Proceedings of 2000 International Symposium on Micromechatronics and Human Science (Cat. No.00TH8530)","volume":"54 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-10-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127779775","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Y. Hirai, Y. Marushima, S. Soda, D. Jin, H. Kawata, K. Inoue, Y. Tanaka
This paper presents the deflection characteristics of electrostatic actuators, which have shape modified electrodes and cantilevers. In order to investigate how to get a large deflection with a low voltage, various structures are examined by a numerical calculation. Maximum deflections, just before a cantilever is pulled into an electrode, are evaluated. The numerical analysis shows that the triangular electrode with a triangular cantilever gives large deflection with a low applied voltage. To realize the triangular cantilever, a novel fabrication process by a double exposure method is proposed. The experimental results show that the triangular like cantilevers have excellent performance for deflection characteristics, which agrees well with the calculation results.
{"title":"Electrostatic actuator with novel shaped cantilever","authors":"Y. Hirai, Y. Marushima, S. Soda, D. Jin, H. Kawata, K. Inoue, Y. Tanaka","doi":"10.1109/MHS.2000.903327","DOIUrl":"https://doi.org/10.1109/MHS.2000.903327","url":null,"abstract":"This paper presents the deflection characteristics of electrostatic actuators, which have shape modified electrodes and cantilevers. In order to investigate how to get a large deflection with a low voltage, various structures are examined by a numerical calculation. Maximum deflections, just before a cantilever is pulled into an electrode, are evaluated. The numerical analysis shows that the triangular electrode with a triangular cantilever gives large deflection with a low applied voltage. To realize the triangular cantilever, a novel fabrication process by a double exposure method is proposed. The experimental results show that the triangular like cantilevers have excellent performance for deflection characteristics, which agrees well with the calculation results.","PeriodicalId":372317,"journal":{"name":"MHS2000. Proceedings of 2000 International Symposium on Micromechatronics and Human Science (Cat. No.00TH8530)","volume":"24 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-10-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134054201","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
To allow the production of small /spl mu/m order microstructures, processing with the laser /spl mu/-jet has the unique characteristics of material removal process, but its industrial application has yet to be established. This paper describes creating fine patterned microstructure in silicon using this laser /spl mu/-jet and discusses various physical phenomenon that ultimately affect the quality of the end product and explores the possibilities of current and new application areas. The present results show much better cut quality compared with the conventional technique. Grating like grove structures were created with a line and pitch width below 100 /spl mu/m.
{"title":"Physical processes in micromachining of silicon by laser /spl mu/-jet","authors":"Y. Kathuria","doi":"10.1109/MHS.2000.903288","DOIUrl":"https://doi.org/10.1109/MHS.2000.903288","url":null,"abstract":"To allow the production of small /spl mu/m order microstructures, processing with the laser /spl mu/-jet has the unique characteristics of material removal process, but its industrial application has yet to be established. This paper describes creating fine patterned microstructure in silicon using this laser /spl mu/-jet and discusses various physical phenomenon that ultimately affect the quality of the end product and explores the possibilities of current and new application areas. The present results show much better cut quality compared with the conventional technique. Grating like grove structures were created with a line and pitch width below 100 /spl mu/m.","PeriodicalId":372317,"journal":{"name":"MHS2000. Proceedings of 2000 International Symposium on Micromechatronics and Human Science (Cat. No.00TH8530)","volume":"60 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-10-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124184934","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
K. Tsuruta, T. Sasaya, Takashi Shibata, N. Kawahara
We have been developing an in-pipe wireless micro robot for inspection on inner surface of pipes. The robot consists of a CCD camera, a locomotive device, a system control circuit and wireless energy supply and communication devices. The robot moves in a 10 mm diameter pipe without wire and observes the inner surface of the pipe using the installed CCD camera. We have developed a compact control circuit which controls all the devices installed in the robot by commands from outside and transmits the image data from the CCD camera. As for the control circuit, the power consumption and the size are greatly restricted in order to be installed in the robot. In order to reduce the size of the circuit, we have newly developed an image data communication LSI based on a new architecture. The LSI is made of 0.35 /spl mu/m CMOS technology and has the size of 3.9 mm by 3.9 mm. To make the control circuit compact, we used a flip chip assembly for the LSI and eight more ICs in the robot. Through a fabricated prototype of the micro robot, we have successfully confirmed the wireless image data communication of 2.27 frames per second and control of the robot by microwave technology.
我们一直在开发一种用于管道内表面检测的管道内无线微型机器人。该机器人由CCD摄像机、机车装置、系统控制电路和无线供电通讯装置组成。机器人在直径为10mm的无导线管道中移动，通过安装的CCD摄像机观察管道的内表面。我们开发了一种紧凑的控制电路，可以通过外部命令控制安装在机器人上的所有设备，并传输CCD相机的图像数据。在控制电路方面，为了安装在机器人中，大大限制了功耗和尺寸。为了减小电路的体积，我们开发了一种基于新结构的图像数据通信大规模集成电路。该LSI采用0.35 /spl μ m CMOS技术，尺寸为3.9 mm × 3.9 mm。为了使控制电路更紧凑，我们使用了一个倒装芯片组装大规模集成电路，并在机器人中使用了另外八个集成电路。通过制作微型机器人样机，我们成功地实现了每秒2.27帧的无线图像数据通信和微波技术对机器人的控制。
{"title":"Control circuit in an in-pipe wireless micro inspection robot","authors":"K. Tsuruta, T. Sasaya, Takashi Shibata, N. Kawahara","doi":"10.1109/MHS.2000.903290","DOIUrl":"https://doi.org/10.1109/MHS.2000.903290","url":null,"abstract":"We have been developing an in-pipe wireless micro robot for inspection on inner surface of pipes. The robot consists of a CCD camera, a locomotive device, a system control circuit and wireless energy supply and communication devices. The robot moves in a 10 mm diameter pipe without wire and observes the inner surface of the pipe using the installed CCD camera. We have developed a compact control circuit which controls all the devices installed in the robot by commands from outside and transmits the image data from the CCD camera. As for the control circuit, the power consumption and the size are greatly restricted in order to be installed in the robot. In order to reduce the size of the circuit, we have newly developed an image data communication LSI based on a new architecture. The LSI is made of 0.35 /spl mu/m CMOS technology and has the size of 3.9 mm by 3.9 mm. To make the control circuit compact, we used a flip chip assembly for the LSI and eight more ICs in the robot. Through a fabricated prototype of the micro robot, we have successfully confirmed the wireless image data communication of 2.27 frames per second and control of the robot by microwave technology.","PeriodicalId":372317,"journal":{"name":"MHS2000. Proceedings of 2000 International Symposium on Micromechatronics and Human Science (Cat. No.00TH8530)","volume":"67 E-8 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-10-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121469495","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
The paper firstly presents the two main initiatives and programs in Europe for stimulating research and development in the microsystems field. They consist of the new phase launched in 1999 by the European commission within IST in the 5th FWP Frame Work Programme and the new strategic program Eurimus labelised in 1998 within the Eureka frame. The next section presents NEXUS the European network of excellence for microsystems, its main organisation based on USCs User Supplier Clubs and the result of the two task forces market investigations and road map. The third section is dedicated to EUROPRACTICE which aims at providing access to microsystems foundry services for European small and medium sized companies. As a conclusion of this presentation the last chapter of the paper presents the European main success stories in different field of applications such as automotive, IPC industrial process control, aeronautics, CAD tools and Ips, (bio)medical and household appliances.
{"title":"European R&D programs for MST/MEMS-Nexus, EUROPRACTICE and European MST/MEMS success stories","authors":"G. Menozzi","doi":"10.1109/MHS.2000.903277","DOIUrl":"https://doi.org/10.1109/MHS.2000.903277","url":null,"abstract":"The paper firstly presents the two main initiatives and programs in Europe for stimulating research and development in the microsystems field. They consist of the new phase launched in 1999 by the European commission within IST in the 5th FWP Frame Work Programme and the new strategic program Eurimus labelised in 1998 within the Eureka frame. The next section presents NEXUS the European network of excellence for microsystems, its main organisation based on USCs User Supplier Clubs and the result of the two task forces market investigations and road map. The third section is dedicated to EUROPRACTICE which aims at providing access to microsystems foundry services for European small and medium sized companies. As a conclusion of this presentation the last chapter of the paper presents the European main success stories in different field of applications such as automotive, IPC industrial process control, aeronautics, CAD tools and Ips, (bio)medical and household appliances.","PeriodicalId":372317,"journal":{"name":"MHS2000. Proceedings of 2000 International Symposium on Micromechatronics and Human Science (Cat. No.00TH8530)","volume":"6 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-10-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123822470","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
The piezoresistive effect in n type /spl beta/-SiC was analyzed on the basis of electron transport and deformation potential theory for cubic many-valley semiconductors. Two deformation potential constants, /spl Xi//sub d/ and /spl Xi//sub u/ of the n-type /spl beta/-SiC, were independently determined by Herring-Vogt theory, which is an extension of Bardeen-Shockley theory for single spherical surface energy semiconductor to the many-valley semiconductor. Shifts of conduction band edges against arbitrary stress components were explicitly formulated by using /spl Xi//sub d/ and /spl Xi//sub u/. Applying stress, the electrons transport between the many-valleys. The electron transport represents macroscopic change in electrical conductivity. Then, shifts of the conduction band edges in each valley were related to the electron transport. Finally, the origin of the piezoresistive effect was interpreted as the electron transport between the many-valleys due to stress. For practical micro mechanical sensor design, piezoresistive coefficients /spl pi//sub 11/ and /spl pi//sub 12/ and gauge factor were calculated as a function of temperature and impurity concentration.
{"title":"Analysis of the piezoresistive effect in n-type /spl beta/-SiC based on electron transport and deformation potential theory","authors":"T. Toriyama, S. Sugiyama","doi":"10.1109/MHS.2000.903309","DOIUrl":"https://doi.org/10.1109/MHS.2000.903309","url":null,"abstract":"The piezoresistive effect in n type /spl beta/-SiC was analyzed on the basis of electron transport and deformation potential theory for cubic many-valley semiconductors. Two deformation potential constants, /spl Xi//sub d/ and /spl Xi//sub u/ of the n-type /spl beta/-SiC, were independently determined by Herring-Vogt theory, which is an extension of Bardeen-Shockley theory for single spherical surface energy semiconductor to the many-valley semiconductor. Shifts of conduction band edges against arbitrary stress components were explicitly formulated by using /spl Xi//sub d/ and /spl Xi//sub u/. Applying stress, the electrons transport between the many-valleys. The electron transport represents macroscopic change in electrical conductivity. Then, shifts of the conduction band edges in each valley were related to the electron transport. Finally, the origin of the piezoresistive effect was interpreted as the electron transport between the many-valleys due to stress. For practical micro mechanical sensor design, piezoresistive coefficients /spl pi//sub 11/ and /spl pi//sub 12/ and gauge factor were calculated as a function of temperature and impurity concentration.","PeriodicalId":372317,"journal":{"name":"MHS2000. Proceedings of 2000 International Symposium on Micromechatronics and Human Science (Cat. No.00TH8530)","volume":"9 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-10-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133152035","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
3D nanomanipulations of nano-order objects are realized with a 10-DOF nanorobotic manipulator, which is actuated with PZTs and Picomotors and operated inside a SEM. The coarse linear resolutions of the manipulator are better than 30 nm (X, Y, Z stages actuated by Picomotors) and the rotary one 2 mrad, while the resolutions of fine motions (actuated by PZTs) are within nano-order. AFM cantilevers are used as the end-effecters. Several kinds of manipulations are performed with the assistance of dielectrophoresis and van der Waals forces. Pick-and-place of a /spl phi/1 /spl mu/m polystyrene bead shows the effectiveness of dielectrophoresis. To show the manipulation accuracy, several letters are "written" with polystyrene /spl phi/3 /spl mu/m and /spl phi/1 /spl mu/m beads. 3D manipulations of multiwall carbon nanotubes are performed including picking up and bending single ones.
{"title":"3D nanorobotic manipulation of nano-order objects inside SEM","authors":"Lixin Dong, F. Arai, T. Fukuda","doi":"10.1109/MHS.2000.903305","DOIUrl":"https://doi.org/10.1109/MHS.2000.903305","url":null,"abstract":"3D nanomanipulations of nano-order objects are realized with a 10-DOF nanorobotic manipulator, which is actuated with PZTs and Picomotors and operated inside a SEM. The coarse linear resolutions of the manipulator are better than 30 nm (X, Y, Z stages actuated by Picomotors) and the rotary one 2 mrad, while the resolutions of fine motions (actuated by PZTs) are within nano-order. AFM cantilevers are used as the end-effecters. Several kinds of manipulations are performed with the assistance of dielectrophoresis and van der Waals forces. Pick-and-place of a /spl phi/1 /spl mu/m polystyrene bead shows the effectiveness of dielectrophoresis. To show the manipulation accuracy, several letters are \"written\" with polystyrene /spl phi/3 /spl mu/m and /spl phi/1 /spl mu/m beads. 3D manipulations of multiwall carbon nanotubes are performed including picking up and bending single ones.","PeriodicalId":372317,"journal":{"name":"MHS2000. Proceedings of 2000 International Symposium on Micromechatronics and Human Science (Cat. No.00TH8530)","volume":"52 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-10-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128820816","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
K. Yagi, Y. Sawaki, T. Inaba, M. Tokuda, A. Yamamoto, K. Sekioka
In order to get the engineering application of cardiac functions, the quantitative analysis of cardiac movement is necessary. Therefore this research is concentrated on left ventricular wall, which lasts one cardiac cycle is taken as the images. The movements of the pixel between two continuous images are visualized by optical flow calculation. The transition in micro space, displacement, topographic twist, minimum principal strain, angle of torsion, and shearing strain are calculated, and the dynamics evaluations of the myocardial wall motion are tried.
{"title":"Torsion and strain analysis of left ventricular wall at ejection period by using optical-flow","authors":"K. Yagi, Y. Sawaki, T. Inaba, M. Tokuda, A. Yamamoto, K. Sekioka","doi":"10.1109/MHS.2000.903298","DOIUrl":"https://doi.org/10.1109/MHS.2000.903298","url":null,"abstract":"In order to get the engineering application of cardiac functions, the quantitative analysis of cardiac movement is necessary. Therefore this research is concentrated on left ventricular wall, which lasts one cardiac cycle is taken as the images. The movements of the pixel between two continuous images are visualized by optical flow calculation. The transition in micro space, displacement, topographic twist, minimum principal strain, angle of torsion, and shearing strain are calculated, and the dynamics evaluations of the myocardial wall motion are tried.","PeriodicalId":372317,"journal":{"name":"MHS2000. Proceedings of 2000 International Symposium on Micromechatronics and Human Science (Cat. No.00TH8530)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-10-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122794852","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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