Force control is effective to dexterous operations for a human body or mechanical parts even in the micro world. For this purpose, a prototype micro operation hand with two fingers constrained to parallel motion linkages was developed. It uses magnetic suspension technology so that fine force control without force sensor is realized. The accuracy of positioning is a few /spl mu/m with the range of tens mm. The accuracy of force control is 30 mgf with a range of hundreds gf. The effectiveness of the proposed hand was verified by the application to various micro operations including mechanical.
{"title":"A magnetic suspension parallel motion hand and its application to micro processes","authors":"Taku Nakamura, K. Shimamura, Toshio Ando","doi":"10.1109/MHS.2000.903306","DOIUrl":"https://doi.org/10.1109/MHS.2000.903306","url":null,"abstract":"Force control is effective to dexterous operations for a human body or mechanical parts even in the micro world. For this purpose, a prototype micro operation hand with two fingers constrained to parallel motion linkages was developed. It uses magnetic suspension technology so that fine force control without force sensor is realized. The accuracy of positioning is a few /spl mu/m with the range of tens mm. The accuracy of force control is 30 mgf with a range of hundreds gf. The effectiveness of the proposed hand was verified by the application to various micro operations including mechanical.","PeriodicalId":372317,"journal":{"name":"MHS2000. Proceedings of 2000 International Symposium on Micromechatronics and Human Science (Cat. No.00TH8530)","volume":"9 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-10-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130095100","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Various speech production substitutes which aim to reconstruct speech function have been developed and used practically, for vocalizing handicapped persons. However, conventional speech production substitutes have problems. In order to develop perfect speech production substitutes, we paid attention to the PZT ceramic vibrator as a sound source of an artificial larynx. We produced an artificial larynx using a PZT ceramic vibrator, and we evaluated its performance. The power spectrum of produced artificial larynx user's voice is similar to that of an unhandicapped person's voice. The vocalized sound of the produced artificial larynx user shows good characteristics at formant frequency with the role which is important for the vowel discrimination. However, the resonant frequency of the vibrator is high, and it is difficult to generate sound near 125 Hz. Thus, we researched a method for lowering the frequency of the generated sound. In this report, we tried to reduce the frequency of the generated sound by using an added mass.
{"title":"Artificial larynx using PZT ceramic vibrator as a sound source (the characteristic improvement of PZT ceramic vibrator)","authors":"K. Ooe, T. Fukuda, F. Arai","doi":"10.1109/MHS.2000.903311","DOIUrl":"https://doi.org/10.1109/MHS.2000.903311","url":null,"abstract":"Various speech production substitutes which aim to reconstruct speech function have been developed and used practically, for vocalizing handicapped persons. However, conventional speech production substitutes have problems. In order to develop perfect speech production substitutes, we paid attention to the PZT ceramic vibrator as a sound source of an artificial larynx. We produced an artificial larynx using a PZT ceramic vibrator, and we evaluated its performance. The power spectrum of produced artificial larynx user's voice is similar to that of an unhandicapped person's voice. The vocalized sound of the produced artificial larynx user shows good characteristics at formant frequency with the role which is important for the vowel discrimination. However, the resonant frequency of the vibrator is high, and it is difficult to generate sound near 125 Hz. Thus, we researched a method for lowering the frequency of the generated sound. In this report, we tried to reduce the frequency of the generated sound by using an added mass.","PeriodicalId":372317,"journal":{"name":"MHS2000. Proceedings of 2000 International Symposium on Micromechatronics and Human Science (Cat. No.00TH8530)","volume":"47 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-10-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127605130","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
This paper reports a new deep X-ray exposure system to realize 3D microstructures with controllable curved and inclined walls. Based on a compact synchrotron light source, a dedicated X-ray beamline and the exposure device have been constructed. They could work in exposure environments of vacuum or helium gas. The exposure device was mainly made up of 5 stages and had as many as 6 degrees of freedom, which enabled the system to have more functions than the normal one. Besides the scan in its plane, the substrate surface could also rotate round one of its normal and tangent respectively. Driven by a PZT stage, the X-ray mask could move freely in its plan against the substrate behind, which were used to control the wall inclination and flexure of the substrate structure. The system also had off-line mask-substrate alignment function. Various 3D PMMA microstructures can be realized by the system, such as lens array, nozzles, tube connector, conical tubes, inclined channels, long circle channels, angle pipe with smooth joint, cone, gear rack, long column with curve cross-section etc., which are impossible with the normal X-ray lithography system. A series of deep X-ray lithography experiments have been completed and obtained some interesting 3D PMMA microstructures and the relationship between the etching depth and the dose energy of the exposure. It demonstrated the potential of the system, which will greatly enlarge the application fields of deep X-ray lithography and LIGA process.
{"title":"Deep X-ray exposure system with multistage for 3D microfabrication","authors":"H. You, N. Matsuzuka, T. Yamaji, O. Tabata","doi":"10.1109/MHS.2000.903289","DOIUrl":"https://doi.org/10.1109/MHS.2000.903289","url":null,"abstract":"This paper reports a new deep X-ray exposure system to realize 3D microstructures with controllable curved and inclined walls. Based on a compact synchrotron light source, a dedicated X-ray beamline and the exposure device have been constructed. They could work in exposure environments of vacuum or helium gas. The exposure device was mainly made up of 5 stages and had as many as 6 degrees of freedom, which enabled the system to have more functions than the normal one. Besides the scan in its plane, the substrate surface could also rotate round one of its normal and tangent respectively. Driven by a PZT stage, the X-ray mask could move freely in its plan against the substrate behind, which were used to control the wall inclination and flexure of the substrate structure. The system also had off-line mask-substrate alignment function. Various 3D PMMA microstructures can be realized by the system, such as lens array, nozzles, tube connector, conical tubes, inclined channels, long circle channels, angle pipe with smooth joint, cone, gear rack, long column with curve cross-section etc., which are impossible with the normal X-ray lithography system. A series of deep X-ray lithography experiments have been completed and obtained some interesting 3D PMMA microstructures and the relationship between the etching depth and the dose energy of the exposure. It demonstrated the potential of the system, which will greatly enlarge the application fields of deep X-ray lithography and LIGA process.","PeriodicalId":372317,"journal":{"name":"MHS2000. Proceedings of 2000 International Symposium on Micromechatronics and Human Science (Cat. No.00TH8530)","volume":"52 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-10-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121143744","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
We manufacture two miniature robots: a Y-shape miniature robot and a /spl Delta/-shape miniature robot. The robots realize displacement in X, Y and /spl Theta/ directions. The principle of the displacement is described. The displacement and velocity of the /spl Delta/-shape robot are measured. The displacement of the /spl Delta/-shape robot on an inclined surface is discussed.
{"title":"Miniature robots with three degrees of freedom","authors":"T. Koyanagi, R. Fukui, A. Torii, A. Ueda","doi":"10.1109/MHS.2000.903314","DOIUrl":"https://doi.org/10.1109/MHS.2000.903314","url":null,"abstract":"We manufacture two miniature robots: a Y-shape miniature robot and a /spl Delta/-shape miniature robot. The robots realize displacement in X, Y and /spl Theta/ directions. The principle of the displacement is described. The displacement and velocity of the /spl Delta/-shape robot are measured. The displacement of the /spl Delta/-shape robot on an inclined surface is discussed.","PeriodicalId":372317,"journal":{"name":"MHS2000. Proceedings of 2000 International Symposium on Micromechatronics and Human Science (Cat. No.00TH8530)","volume":"35 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-10-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124490205","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
M. Bhuiyan, A. Unno, Y. Yokoyama, T. Toriyama, S. Sugiyama
A fork-type micro connector with high aspect ratio and high package density was fabricated using UV thick photoresist and Ni electroforming. A negative photoresist (THB-138N) was used as a mold of Ni electroforming. The tips of plug terminal of the micro connector were formed as movable portions using Cu sacrificial layer etching. In order to make firm contact and precise connection of the micro connector, two-step guidance was adopted. The size of the terminal of fabricated micro connector was 50 /spl mu/m-thickness and 15 /spl mu/m-width (minimum). The maximum aspect ratio of the fabricated micro connector is 3.3 and the terminal pitch is 80 /spl mu/m. A contact resistance of approximately 50 m/spl Omega/ was obtained by using four-point probe method.
{"title":"Micro connector fabricated by micro process technology","authors":"M. Bhuiyan, A. Unno, Y. Yokoyama, T. Toriyama, S. Sugiyama","doi":"10.1109/MHS.2000.903295","DOIUrl":"https://doi.org/10.1109/MHS.2000.903295","url":null,"abstract":"A fork-type micro connector with high aspect ratio and high package density was fabricated using UV thick photoresist and Ni electroforming. A negative photoresist (THB-138N) was used as a mold of Ni electroforming. The tips of plug terminal of the micro connector were formed as movable portions using Cu sacrificial layer etching. In order to make firm contact and precise connection of the micro connector, two-step guidance was adopted. The size of the terminal of fabricated micro connector was 50 /spl mu/m-thickness and 15 /spl mu/m-width (minimum). The maximum aspect ratio of the fabricated micro connector is 3.3 and the terminal pitch is 80 /spl mu/m. A contact resistance of approximately 50 m/spl Omega/ was obtained by using four-point probe method.","PeriodicalId":372317,"journal":{"name":"MHS2000. Proceedings of 2000 International Symposium on Micromechatronics and Human Science (Cat. No.00TH8530)","volume":"21 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-10-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123557948","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
We evaluate the performance of vibration-type microdevices. Stroboscopic phase-shift interferometry is capable of imaging high speed (/spl sim/MHz) and small(/spl sim/10 nm) vibration and is applied to displacement measurement of the microdevices. A laser diode, which is used as a light source of the interferometry, is irradiated stroboscopically in order to observe an object vibrating at high frequency. A phase-shift algorithm is used to obtain high contrast images. The optical system is a Fizeau-type interferometer which eliminates optical noises. An ultrasonic motor (USM), consisting of a rotor and a stator, is used as test object. The vibration frequency of the stator is about 50 kHz. In our previous work, several vibration distributions of the stator with different vibration phases were measured. A vibration state on the stator surface has been obtained by some vibration distributions. In this paper, we measure the vibration state of the rotor surface of the USM. When the rotor of the USM is driven by small vibration of the stator, the rotor surface is deformed. Therefore, some vibration distributions on the rotor surface with different vibration phases are measured according to the phase of the driving signal. The vibration distributions are compared with each other. As a result, the change of the vibration distribution proves the movement of the surface of the rotor.
{"title":"Vibration transmission of an USM: rotor observed by phase-shift interferometry","authors":"T. Yamamoto, A. Torii, A. Ueda, K. Hane","doi":"10.1109/MHS.2000.903299","DOIUrl":"https://doi.org/10.1109/MHS.2000.903299","url":null,"abstract":"We evaluate the performance of vibration-type microdevices. Stroboscopic phase-shift interferometry is capable of imaging high speed (/spl sim/MHz) and small(/spl sim/10 nm) vibration and is applied to displacement measurement of the microdevices. A laser diode, which is used as a light source of the interferometry, is irradiated stroboscopically in order to observe an object vibrating at high frequency. A phase-shift algorithm is used to obtain high contrast images. The optical system is a Fizeau-type interferometer which eliminates optical noises. An ultrasonic motor (USM), consisting of a rotor and a stator, is used as test object. The vibration frequency of the stator is about 50 kHz. In our previous work, several vibration distributions of the stator with different vibration phases were measured. A vibration state on the stator surface has been obtained by some vibration distributions. In this paper, we measure the vibration state of the rotor surface of the USM. When the rotor of the USM is driven by small vibration of the stator, the rotor surface is deformed. Therefore, some vibration distributions on the rotor surface with different vibration phases are measured according to the phase of the driving signal. The vibration distributions are compared with each other. As a result, the change of the vibration distribution proves the movement of the surface of the rotor.","PeriodicalId":372317,"journal":{"name":"MHS2000. Proceedings of 2000 International Symposium on Micromechatronics and Human Science (Cat. No.00TH8530)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-10-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129647233","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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