This paper proposes safety evaluation method for use in various kinds of control strategies for human-care robots. In the case of a careless collision between a robot and a human, impact force and impact stress are chosen as evaluation values, and a danger index is defined to quantitatively evaluate the effectiveness of each safety strategy used for control. As in the previous paper on safety design, this proposed method allows us to assess the contribution of each safety control strategy to the overall safety performance of a human-care robot. In addition, a new type of robot simulation system for danger-evaluation is constructed on a workstation. The system simplifies the evaluation of danger in both the design and control of human-care robots to quantify the effectiveness of various safety strategies. Here we describe the results obtained and the successful optimization of a safety control strategy for human care robots.
{"title":"Safety evaluation method of human-care robot control","authors":"K. Ikuta, M. Nokota, H. Ishii","doi":"10.1109/MHS.2000.903301","DOIUrl":"https://doi.org/10.1109/MHS.2000.903301","url":null,"abstract":"This paper proposes safety evaluation method for use in various kinds of control strategies for human-care robots. In the case of a careless collision between a robot and a human, impact force and impact stress are chosen as evaluation values, and a danger index is defined to quantitatively evaluate the effectiveness of each safety strategy used for control. As in the previous paper on safety design, this proposed method allows us to assess the contribution of each safety control strategy to the overall safety performance of a human-care robot. In addition, a new type of robot simulation system for danger-evaluation is constructed on a workstation. The system simplifies the evaluation of danger in both the design and control of human-care robots to quantify the effectiveness of various safety strategies. Here we describe the results obtained and the successful optimization of a safety control strategy for human care robots.","PeriodicalId":372317,"journal":{"name":"MHS2000. Proceedings of 2000 International Symposium on Micromechatronics and Human Science (Cat. No.00TH8530)","volume":"37 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-10-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114698358","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Khepera is a high performance mini-robot. Its compact power allows an efficient experimentation using a real robot and applying the basic simulation tools. Webots is a high quality Khepera simulator used in the fields of autonomous systems, intelligent robotics, evolutionary robotics, machine learning, computer vision, and artificial intelligence. The simulation program can be transferred to the real robots easily. The aim of this article is to support the development of Khepera applications in the Webots environment. Starting from the introduction of Khepera robot and its development methodologies, the paper presents and analyses an application example of Khepera robot in the Webots environment. Finally, current applications and future research directions are presented.
{"title":"Developing Khepera robot applications in a Webots environment","authors":"L.F. Wang, K. Tan, V. Prahlad","doi":"10.1109/MHS.2000.903293","DOIUrl":"https://doi.org/10.1109/MHS.2000.903293","url":null,"abstract":"Khepera is a high performance mini-robot. Its compact power allows an efficient experimentation using a real robot and applying the basic simulation tools. Webots is a high quality Khepera simulator used in the fields of autonomous systems, intelligent robotics, evolutionary robotics, machine learning, computer vision, and artificial intelligence. The simulation program can be transferred to the real robots easily. The aim of this article is to support the development of Khepera applications in the Webots environment. Starting from the introduction of Khepera robot and its development methodologies, the paper presents and analyses an application example of Khepera robot in the Webots environment. Finally, current applications and future research directions are presented.","PeriodicalId":372317,"journal":{"name":"MHS2000. Proceedings of 2000 International Symposium on Micromechatronics and Human Science (Cat. No.00TH8530)","volume":"10 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-10-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"117063293","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
In the medical field and in biotechnology application, a new type of human scale teleoperating system that can carry out three-dimensional high-speed micromanipulation has urgently been demanded. It is our purpose to develop a new type of human scale operating system for microoperation that can manipulate a microobject. In this paper, we deal with a human scale teleoperating system. In order to operate microobject in human scale, the working table and micromanipulator with multi DOF are demanded to be developed. The authors describe a macro/micro mechanism for the system. Firstly, they designed a precision parallel micromechanism with 6 DOF (10 /spl mu/m Moving Range, 10nm Resolving Power), and composed the macro/micro mechanism. Then, they also designed the complex control for the macro/micro mechanism. Experimental results indicate that the proposed macro/micro mechanism can be controlled by teleoperation, and that it is very useful for human scale microperation system.
{"title":"Development of a macro/micro mechanism for human scale teleoperating system","authors":"Shuxiang Guo, K. Sugimoto, S. Hata","doi":"10.1109/MHS.2000.903307","DOIUrl":"https://doi.org/10.1109/MHS.2000.903307","url":null,"abstract":"In the medical field and in biotechnology application, a new type of human scale teleoperating system that can carry out three-dimensional high-speed micromanipulation has urgently been demanded. It is our purpose to develop a new type of human scale operating system for microoperation that can manipulate a microobject. In this paper, we deal with a human scale teleoperating system. In order to operate microobject in human scale, the working table and micromanipulator with multi DOF are demanded to be developed. The authors describe a macro/micro mechanism for the system. Firstly, they designed a precision parallel micromechanism with 6 DOF (10 /spl mu/m Moving Range, 10nm Resolving Power), and composed the macro/micro mechanism. Then, they also designed the complex control for the macro/micro mechanism. Experimental results indicate that the proposed macro/micro mechanism can be controlled by teleoperation, and that it is very useful for human scale microperation system.","PeriodicalId":372317,"journal":{"name":"MHS2000. Proceedings of 2000 International Symposium on Micromechatronics and Human Science (Cat. No.00TH8530)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-10-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130383010","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
The spiral-type magnetic micro-machine, which is driven by a rotating magnetic field, is characterized by wireless operation for swimming. The machine has to swim under a lower Reynolds number environment, when the machine is downsized and working inside the human body. In this study, using various silicone oils whose kinematic viscosity ranged from 1 to 5/spl times/10/sup 5/ mm/sup 2//s, the swimming performance of the machine at low Reynolds number was examined. The machine composed of a cylindrical NdFeB magnet could swim in oils under condition of Re=10/sup -7/. This Reynolds number is the same as that of a micro-machine with micron size swimming in water. In addition, the machine could turn by controlling the external rotational magnetic field, and therefore the swimming direction of the machine could be controlled. Using these principles, a magnetic micromachine, which can run in a gel, was also fabricated.
{"title":"Spiral-type micro-machine for medical applications","authors":"K. Ishiyama, K. Arai, M. Sendoh, A. Yamazaki","doi":"10.1109/MHS.2000.903292","DOIUrl":"https://doi.org/10.1109/MHS.2000.903292","url":null,"abstract":"The spiral-type magnetic micro-machine, which is driven by a rotating magnetic field, is characterized by wireless operation for swimming. The machine has to swim under a lower Reynolds number environment, when the machine is downsized and working inside the human body. In this study, using various silicone oils whose kinematic viscosity ranged from 1 to 5/spl times/10/sup 5/ mm/sup 2//s, the swimming performance of the machine at low Reynolds number was examined. The machine composed of a cylindrical NdFeB magnet could swim in oils under condition of Re=10/sup -7/. This Reynolds number is the same as that of a micro-machine with micron size swimming in water. In addition, the machine could turn by controlling the external rotational magnetic field, and therefore the swimming direction of the machine could be controlled. Using these principles, a magnetic micromachine, which can run in a gel, was also fabricated.","PeriodicalId":372317,"journal":{"name":"MHS2000. Proceedings of 2000 International Symposium on Micromechatronics and Human Science (Cat. No.00TH8530)","volume":"111 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-10-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114543828","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
To realize an artificial finger sensing device for a human robot, a new tactile sensor has been developed. Generally the tactile sensor is required to have high reliability, size miniaturization, high sensitivity and wide frequency response. In view of these requirements, a micro electromagnetic coil was proposed as the main tactile component. The coil was a planar spiral thick structure for increasing sensitivity. Micromachining technology for the size miniaturization and for automatic assembling was applied to the micro coil fabrication. The coil, soft rubber and metal plate formed a new type tactile sensor. Ni micro coil of thickness 300 /spl mu/m and diameter 3 mm was fabricated. Using different soft rubber and metal plate, the sense and force characteristics of the tactile sensor were tested. The experimental results show that the microtactile sensor has high sensitivity and wide frequency response.
{"title":"Development of a new type tactile sensor using micro electromagnetic coil for human robot","authors":"Xianhe Ding, K. Kuribayashi, T. Hashida","doi":"10.1109/MHS.2000.903310","DOIUrl":"https://doi.org/10.1109/MHS.2000.903310","url":null,"abstract":"To realize an artificial finger sensing device for a human robot, a new tactile sensor has been developed. Generally the tactile sensor is required to have high reliability, size miniaturization, high sensitivity and wide frequency response. In view of these requirements, a micro electromagnetic coil was proposed as the main tactile component. The coil was a planar spiral thick structure for increasing sensitivity. Micromachining technology for the size miniaturization and for automatic assembling was applied to the micro coil fabrication. The coil, soft rubber and metal plate formed a new type tactile sensor. Ni micro coil of thickness 300 /spl mu/m and diameter 3 mm was fabricated. Using different soft rubber and metal plate, the sense and force characteristics of the tactile sensor were tested. The experimental results show that the microtactile sensor has high sensitivity and wide frequency response.","PeriodicalId":372317,"journal":{"name":"MHS2000. Proceedings of 2000 International Symposium on Micromechatronics and Human Science (Cat. No.00TH8530)","volume":"22 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-10-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122981292","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Micro actuators are developed for hard disk drive application. The aim is high density data storage by positioning the read and write head element precisely. The desired specifications are displacement of /spl plusmn/1 /spl mu/m, operating voltage of 20 V and structural resonance frequency of 151 Hz. We fabricated a metallic actuator by using thick photoresist lithography and nickel electroplating. The electrostatic gap between the mover and the stator has high aspect ratio to achieve low voltage operation. We introduce a vertical sacrificial layer of copper to make the electrostatic gap. We utilize photoresist with thickness of 10 /spl mu/m. We completed the process and operated the actuator successfully. We also developed a silicon actuator using silicon deep etching and deposition technology. We use ICP-RIE for silicon etching and LPCVD for deposition of the vertical sacrificial layer of SiO/sub 2/ and the mover structure of polysilicon. We obtained an actuator which had thickness of 100 /spl mu/m with electrode gap of aspect ratio of 50.
{"title":"Electrostatic micro actuators with high-aspect-ratio driving gap for hard disk drive application","authors":"T. Iizuka, T. Oba, H. Fujita","doi":"10.1109/MHS.2000.903330","DOIUrl":"https://doi.org/10.1109/MHS.2000.903330","url":null,"abstract":"Micro actuators are developed for hard disk drive application. The aim is high density data storage by positioning the read and write head element precisely. The desired specifications are displacement of /spl plusmn/1 /spl mu/m, operating voltage of 20 V and structural resonance frequency of 151 Hz. We fabricated a metallic actuator by using thick photoresist lithography and nickel electroplating. The electrostatic gap between the mover and the stator has high aspect ratio to achieve low voltage operation. We introduce a vertical sacrificial layer of copper to make the electrostatic gap. We utilize photoresist with thickness of 10 /spl mu/m. We completed the process and operated the actuator successfully. We also developed a silicon actuator using silicon deep etching and deposition technology. We use ICP-RIE for silicon etching and LPCVD for deposition of the vertical sacrificial layer of SiO/sub 2/ and the mover structure of polysilicon. We obtained an actuator which had thickness of 100 /spl mu/m with electrode gap of aspect ratio of 50.","PeriodicalId":372317,"journal":{"name":"MHS2000. Proceedings of 2000 International Symposium on Micromechatronics and Human Science (Cat. No.00TH8530)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-10-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130698519","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
A stochastic program is developed for adaptive control and identification of industrial design applications. Our program is executed at two levels: a stochastic trajectory planner and an on-line trajectory follower based on the complete stochastic dynamic model of the process. The modeling is first done in the deterministic case based on the Lagrangian formalism. This gives the stochastic model of the process. This study is applied to a case study of mobile robots agents. The mobility of the robot is also considered; first static mobility is given. Then we consider dynamic mobility. After that the mobility is randomized and taken as an output of our dynamic system. Our program is one of identification of the doubly stochastic process of hidden Markov chains minimizing the function of information of Kullback-Leibler convergence and the consistence of functions of parameters evaluation. Simulations for the case of the SARAH robot are given to demonstrate the efficiency of our algorithms.
{"title":"Probabilistic algorithm and training rule for a new identification and control kernel application to robotics systems","authors":"A. Khoukhi","doi":"10.1109/MHS.2000.903302","DOIUrl":"https://doi.org/10.1109/MHS.2000.903302","url":null,"abstract":"A stochastic program is developed for adaptive control and identification of industrial design applications. Our program is executed at two levels: a stochastic trajectory planner and an on-line trajectory follower based on the complete stochastic dynamic model of the process. The modeling is first done in the deterministic case based on the Lagrangian formalism. This gives the stochastic model of the process. This study is applied to a case study of mobile robots agents. The mobility of the robot is also considered; first static mobility is given. Then we consider dynamic mobility. After that the mobility is randomized and taken as an output of our dynamic system. Our program is one of identification of the doubly stochastic process of hidden Markov chains minimizing the function of information of Kullback-Leibler convergence and the consistence of functions of parameters evaluation. Simulations for the case of the SARAH robot are given to demonstrate the efficiency of our algorithms.","PeriodicalId":372317,"journal":{"name":"MHS2000. Proceedings of 2000 International Symposium on Micromechatronics and Human Science (Cat. No.00TH8530)","volume":"5 6 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-10-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121119349","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
To control a micromechatronic system, microsensors and microactuators are necessary. So far a lot of sensors made by using Si micromachining technology have been reported. On the other hand, only a few microactuators have been developed. Among these, micro SMA actuators have attracted strong attention because of their strong force, high power, faster response for their micro size and size reducibility by micromachining technology. In this plenary talk, the fabrication methods of micro SMA actuators and motion control using a micro SMA actuator are reviewed.
{"title":"Micro SMA actuator and motion control","authors":"K. Kuribayashi","doi":"10.1109/MHS.2000.903279","DOIUrl":"https://doi.org/10.1109/MHS.2000.903279","url":null,"abstract":"To control a micromechatronic system, microsensors and microactuators are necessary. So far a lot of sensors made by using Si micromachining technology have been reported. On the other hand, only a few microactuators have been developed. Among these, micro SMA actuators have attracted strong attention because of their strong force, high power, faster response for their micro size and size reducibility by micromachining technology. In this plenary talk, the fabrication methods of micro SMA actuators and motion control using a micro SMA actuator are reviewed.","PeriodicalId":372317,"journal":{"name":"MHS2000. Proceedings of 2000 International Symposium on Micromechatronics and Human Science (Cat. No.00TH8530)","volume":"22 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-10-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115715511","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
A new ultra-fine piercing process utilizing SiC fiber as a punch was proposed and micro holes of 14 /spl mu/m diameter were successfully pierced for three kinds of metal foils 8 to 15 /spl mu/m in thickness. In this paper, process refinement to assure the stability of piercing action and good tool life are discussed. As a result of applying a vacuum system, it is confirmed that tool life is rather improved for aluminum and beryllium copper foils and also good quality is maintained after 1000 heats.
{"title":"Improvement of ultra-fine piercing by vacuum system","authors":"T. Mori, K. Hirota, D. Tokumoto","doi":"10.1109/MHS.2000.903294","DOIUrl":"https://doi.org/10.1109/MHS.2000.903294","url":null,"abstract":"A new ultra-fine piercing process utilizing SiC fiber as a punch was proposed and micro holes of 14 /spl mu/m diameter were successfully pierced for three kinds of metal foils 8 to 15 /spl mu/m in thickness. In this paper, process refinement to assure the stability of piercing action and good tool life are discussed. As a result of applying a vacuum system, it is confirmed that tool life is rather improved for aluminum and beryllium copper foils and also good quality is maintained after 1000 heats.","PeriodicalId":372317,"journal":{"name":"MHS2000. Proceedings of 2000 International Symposium on Micromechatronics and Human Science (Cat. No.00TH8530)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-10-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122481285","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
H. Woern, J. Seyfried, S. Fahlbusch, A. Buerkle, F. Schmoeckel
A wide range of microcomponents can today be produced using various microfabrication techniques, The assembly of complex microsystems consisting of several single components (i.e., hybrid microsystems) is, however, a difficult task that is seen to be a real challenge for the robotic research community. It is necessary to conceive flexible, highly precise and fast microassembly methods. In this paper, the development of a microrobot-based microassembly station is presented. Mobile piezoelectric microrobots with dimensions of some cm/sup 3/ and with at least 5 DOF can perform various manipulations either under a light microscope or inside the vacuum chamber of a scanning electron microscope. The components of the station developed and its control system are described. The latter comprises a vision-based sensor system for automatic robot control and user interfaces for semi-automated control and teleoperation. First results of the SEM-based micro assembly, handling of biological cells and integration of force microsensors into our microrobots are presented as well.
{"title":"Flexible microrobots for micro assembly tasks","authors":"H. Woern, J. Seyfried, S. Fahlbusch, A. Buerkle, F. Schmoeckel","doi":"10.1109/MHS.2000.903303","DOIUrl":"https://doi.org/10.1109/MHS.2000.903303","url":null,"abstract":"A wide range of microcomponents can today be produced using various microfabrication techniques, The assembly of complex microsystems consisting of several single components (i.e., hybrid microsystems) is, however, a difficult task that is seen to be a real challenge for the robotic research community. It is necessary to conceive flexible, highly precise and fast microassembly methods. In this paper, the development of a microrobot-based microassembly station is presented. Mobile piezoelectric microrobots with dimensions of some cm/sup 3/ and with at least 5 DOF can perform various manipulations either under a light microscope or inside the vacuum chamber of a scanning electron microscope. The components of the station developed and its control system are described. The latter comprises a vision-based sensor system for automatic robot control and user interfaces for semi-automated control and teleoperation. First results of the SEM-based micro assembly, handling of biological cells and integration of force microsensors into our microrobots are presented as well.","PeriodicalId":372317,"journal":{"name":"MHS2000. Proceedings of 2000 International Symposium on Micromechatronics and Human Science (Cat. No.00TH8530)","volume":"61 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-10-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116595309","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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