We describe the newly developed flexible micro processing system organized by insect size robots in SEM. The small robots, composed of piezo elements and electromagnets, can move and control their position with submicron resolution. Also, these robots are small enough to be installed in the SEM vacuum chamber in which conventional machines cannot be easily set up without special procedures. As a basic function, one small robot which has a micro sliding table can transport it at the SEM focus point precisely and this sliding table can be also positioned by the other small robot. This two robots combination can provide x-y accurate positioning at any location within the chamber. On the sample table, the small robot with a micromanipulator can handle the small object for picking up and down. Also, as an advanced micro processing system, the fiber guided YAG-laser is also employed to provide the special material treatment. The operator can control each small robot easily with the help of real time monitoring of the SEM image. This collaboration of small robots in SEM has great benefit for providing both flexible and accurate micro processing performance with low cost.
{"title":"Flexible micro-processing by multiple miniature robots in SEM vacuum chamber","authors":"O. Fuchiwaki, H. Aoyama","doi":"10.1109/MHS.2000.903304","DOIUrl":"https://doi.org/10.1109/MHS.2000.903304","url":null,"abstract":"We describe the newly developed flexible micro processing system organized by insect size robots in SEM. The small robots, composed of piezo elements and electromagnets, can move and control their position with submicron resolution. Also, these robots are small enough to be installed in the SEM vacuum chamber in which conventional machines cannot be easily set up without special procedures. As a basic function, one small robot which has a micro sliding table can transport it at the SEM focus point precisely and this sliding table can be also positioned by the other small robot. This two robots combination can provide x-y accurate positioning at any location within the chamber. On the sample table, the small robot with a micromanipulator can handle the small object for picking up and down. Also, as an advanced micro processing system, the fiber guided YAG-laser is also employed to provide the special material treatment. The operator can control each small robot easily with the help of real time monitoring of the SEM image. This collaboration of small robots in SEM has great benefit for providing both flexible and accurate micro processing performance with low cost.","PeriodicalId":372317,"journal":{"name":"MHS2000. Proceedings of 2000 International Symposium on Micromechatronics and Human Science (Cat. No.00TH8530)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130855579","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
H. Misawa, S. Juodkazis, A. Marcinkevičius, V. Mizeikis, A. Yamaguchi, Hongbo Sun, S. Matsuo
We describe microfabrication of various materials by multiphoton absorption of femtosecond (120-150 fs) light pulses. The photo-modification at the focal point of tightly focused laser beam occurs inherently within a volume smaller than that defined by the diffraction limit. The achievable lateral resolution is compared with that obtainable by lithography which uses near-field optical microscopy. This technique can in principle lead to the realization of 3D optical memory and photonic crystals with arbitrary lattice in polymers and silica glass, 3D prototyping in polymerizable resins, and etching of 3D structures guided by the optically damaged pattern in silica. Another topic also discussed deals with laser micromanipulation using continuous wave laser operating at 1.06 /spl mu/m. Light-controlled revolution of liquid crystal droplet and volume-phase transition of gels are described.
我们描述了通过飞秒(120-150秒)光脉冲的多光子吸收来实现各种材料的微加工。紧聚焦激光束焦点处的光修饰固有地发生在小于衍射极限的体积内。将可实现的横向分辨率与使用近场光学显微镜的光刻获得的横向分辨率进行了比较。原则上，该技术可以在聚合物和硅玻璃中实现任意晶格的三维光存储和光子晶体，在可聚合树脂中实现三维原型，并在硅中实现由光学损伤模式引导的三维结构蚀刻。另一个主题也讨论了激光微操作使用连续波激光工作在1.06 /spl μ m /m。描述了液晶液滴的光控旋转和凝胶的体相转变。
{"title":"Laser microfabrication/manipulation of dielectric materials","authors":"H. Misawa, S. Juodkazis, A. Marcinkevičius, V. Mizeikis, A. Yamaguchi, Hongbo Sun, S. Matsuo","doi":"10.1109/MHS.2000.903278","DOIUrl":"https://doi.org/10.1109/MHS.2000.903278","url":null,"abstract":"We describe microfabrication of various materials by multiphoton absorption of femtosecond (120-150 fs) light pulses. The photo-modification at the focal point of tightly focused laser beam occurs inherently within a volume smaller than that defined by the diffraction limit. The achievable lateral resolution is compared with that obtainable by lithography which uses near-field optical microscopy. This technique can in principle lead to the realization of 3D optical memory and photonic crystals with arbitrary lattice in polymers and silica glass, 3D prototyping in polymerizable resins, and etching of 3D structures guided by the optically damaged pattern in silica. Another topic also discussed deals with laser micromanipulation using continuous wave laser operating at 1.06 /spl mu/m. Light-controlled revolution of liquid crystal droplet and volume-phase transition of gels are described.","PeriodicalId":372317,"journal":{"name":"MHS2000. Proceedings of 2000 International Symposium on Micromechatronics and Human Science (Cat. No.00TH8530)","volume":"439 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116019171","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
We used a numerical simulation system to investigate the use of chemical anisotropic etching to fabricate diaphragm structures with a rounded profile at the edge. The rounded-shape was formed by using a two-step KOH etching procedure. The etched profiles were categorized into five types and their shapes were determined by three parameters: the first etching depth, the second etching depth, and mask offset between the first and second etching steps. According to the simulation results, we made a rounded concaved shape at the periphery of a diaphragm structure in order to reduce the concentration of stress there.
{"title":"Forming a rounded etched profile by using two-step anisotropic wet etching","authors":"M. Shikida, K. Kawasaki, K. Sato","doi":"10.1109/MHS.2000.903297","DOIUrl":"https://doi.org/10.1109/MHS.2000.903297","url":null,"abstract":"We used a numerical simulation system to investigate the use of chemical anisotropic etching to fabricate diaphragm structures with a rounded profile at the edge. The rounded-shape was formed by using a two-step KOH etching procedure. The etched profiles were categorized into five types and their shapes were determined by three parameters: the first etching depth, the second etching depth, and mask offset between the first and second etching steps. According to the simulation results, we made a rounded concaved shape at the periphery of a diaphragm structure in order to reduce the concentration of stress there.","PeriodicalId":372317,"journal":{"name":"MHS2000. Proceedings of 2000 International Symposium on Micromechatronics and Human Science (Cat. No.00TH8530)","volume":"10 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-10-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126385638","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
T. Kozuka, T. Tuziuti, H. Mitome, F. Arai, T. Fukuda
Non-contact micromanipulation is a fundamental technique in micromachine technology. Previously, we proposed a new manipulation technique to transport particles two-dimensionally using an ultrasonic standing wave field generated by three transducers, whose sound beam axes were arranged with an angle of 120/spl deg/ in a plane. The present paper describes an advanced technique to manipulate particles three-dimensionally using four transducers. The transducers were settled at each corner of a regular triangular pyramid with their soundbeam axes crossing at the center of the pyramid. All transducers were driven at the same frequency, and a standing wave field was generated in the crossing region. When polystyrene particles were poured with a pipette into the sound field, the particles were trapped at the node of the sound pressure in the central region of the sound field. Changing the phase of one transducer out of four, the trapped particles were transported along the sound beam axis of the transducer. Combining each movement along the four sound beam axes, three-dimensional non-contact manipulation of a particle was accomplished.
{"title":"Three-dimensional acoustic micromanipulation using four ultrasonic transducers","authors":"T. Kozuka, T. Tuziuti, H. Mitome, F. Arai, T. Fukuda","doi":"10.1109/MHS.2000.903313","DOIUrl":"https://doi.org/10.1109/MHS.2000.903313","url":null,"abstract":"Non-contact micromanipulation is a fundamental technique in micromachine technology. Previously, we proposed a new manipulation technique to transport particles two-dimensionally using an ultrasonic standing wave field generated by three transducers, whose sound beam axes were arranged with an angle of 120/spl deg/ in a plane. The present paper describes an advanced technique to manipulate particles three-dimensionally using four transducers. The transducers were settled at each corner of a regular triangular pyramid with their soundbeam axes crossing at the center of the pyramid. All transducers were driven at the same frequency, and a standing wave field was generated in the crossing region. When polystyrene particles were poured with a pipette into the sound field, the particles were trapped at the node of the sound pressure in the central region of the sound field. Changing the phase of one transducer out of four, the trapped particles were transported along the sound beam axis of the transducer. Combining each movement along the four sound beam axes, three-dimensional non-contact manipulation of a particle was accomplished.","PeriodicalId":372317,"journal":{"name":"MHS2000. Proceedings of 2000 International Symposium on Micromechatronics and Human Science (Cat. No.00TH8530)","volume":"47 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-10-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126530216","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
We developed a XeF/sub 2/ pulse etching system controlled by a computer and examined effects of etching pressure and an aperture width on Si etching. The etching depth and the undercut ranged from 12.9 to 17.6 /spl mu/m and 7.5 to 13.0 /spl mu/m as the aperture width increases with a charge pressure of 390 Pa, a pulse number of 10, a pulse duration time of 60 seconds, respectively. Etching depth and undercut ranged from 11.8 to 14.2 /spl mu/m and 9.1 to 10.4 /spl mu/m as the aperture width increases with the charge pressure of 65 Pa, 50 pulses, 60 seconds, respectively The aperture effects decreased with decreasing the etching pressure. Etching roughness decreases with decreasing the etching pressure. The roughness was 1150 /spl Aring/ with the charge pressure of 390 Pa, 10 pulses, 60 seconds and 250 /spl Aring/ with the charge pressure of 65 Pa, 50 pulses, 60 seconds.
{"title":"Effects of etching pressure and aperture width on Si etching with XeF/sub 2/ [for MEMS]","authors":"K. Sugano, O. Tabata","doi":"10.1109/MHS.2000.903296","DOIUrl":"https://doi.org/10.1109/MHS.2000.903296","url":null,"abstract":"We developed a XeF/sub 2/ pulse etching system controlled by a computer and examined effects of etching pressure and an aperture width on Si etching. The etching depth and the undercut ranged from 12.9 to 17.6 /spl mu/m and 7.5 to 13.0 /spl mu/m as the aperture width increases with a charge pressure of 390 Pa, a pulse number of 10, a pulse duration time of 60 seconds, respectively. Etching depth and undercut ranged from 11.8 to 14.2 /spl mu/m and 9.1 to 10.4 /spl mu/m as the aperture width increases with the charge pressure of 65 Pa, 50 pulses, 60 seconds, respectively The aperture effects decreased with decreasing the etching pressure. Etching roughness decreases with decreasing the etching pressure. The roughness was 1150 /spl Aring/ with the charge pressure of 390 Pa, 10 pulses, 60 seconds and 250 /spl Aring/ with the charge pressure of 65 Pa, 50 pulses, 60 seconds.","PeriodicalId":372317,"journal":{"name":"MHS2000. Proceedings of 2000 International Symposium on Micromechatronics and Human Science (Cat. No.00TH8530)","volume":"48 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-10-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128159481","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
A versatile micro fluidic device "Biochemical IC Family" based on the concept of IC chip-set family has been proposed and developed by the authors. Several types of biochemical IC containing multiple micro fluidic devices such as reactors, concentrators and one-way valves have been already developed and we have demonstrated that a luminous enzyme of firefly was synthesized by using these chips. Since all chemical fluids were supply by the external pumps in the past experiment, the micro pump chip and switching valve chip are demanded for total IC family. In this research, new chips to handle chemical fluid were first fabricated successfully and basic performance was verified experimentally. Shape memory alloy (SMA) micro actuator was utilized for micro actuation. A new micro stereo lithography process (Hybrid IH Process) to make 3D composite structures consisting of UV polymer and other micro parts was developed and was utilized for total chip fabrication. The micro pump chip succeeded to supply chemical liquids through the connected chips. On the other hand, the micro switching valve chip changed reaction passes quickly. By using these biochemical IC chips, a new era where various kinds of reaction systems can be constructed by chemists in their own laboratory will come.
{"title":"SMA micro pumps and switching valves for biochemical IC family","authors":"K. Ikuta, T. Hasegawa, T. Adachi","doi":"10.1109/MHS.2000.903308","DOIUrl":"https://doi.org/10.1109/MHS.2000.903308","url":null,"abstract":"A versatile micro fluidic device \"Biochemical IC Family\" based on the concept of IC chip-set family has been proposed and developed by the authors. Several types of biochemical IC containing multiple micro fluidic devices such as reactors, concentrators and one-way valves have been already developed and we have demonstrated that a luminous enzyme of firefly was synthesized by using these chips. Since all chemical fluids were supply by the external pumps in the past experiment, the micro pump chip and switching valve chip are demanded for total IC family. In this research, new chips to handle chemical fluid were first fabricated successfully and basic performance was verified experimentally. Shape memory alloy (SMA) micro actuator was utilized for micro actuation. A new micro stereo lithography process (Hybrid IH Process) to make 3D composite structures consisting of UV polymer and other micro parts was developed and was utilized for total chip fabrication. The micro pump chip succeeded to supply chemical liquids through the connected chips. On the other hand, the micro switching valve chip changed reaction passes quickly. By using these biochemical IC chips, a new era where various kinds of reaction systems can be constructed by chemists in their own laboratory will come.","PeriodicalId":372317,"journal":{"name":"MHS2000. Proceedings of 2000 International Symposium on Micromechatronics and Human Science (Cat. No.00TH8530)","volume":"136 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-10-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127353778","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
The purpose of this research is to develop a minute size knife for cutting of minute objects such as cells. We report on a microknife that cuts the object by using ultrasonic vibration of a sharp needle. We employed a multilayer piezoelectric actuator for generating the ultrasonic vibration for cutting. Also, we made a tactile sensor for the microknife by using PZT thin film made by the hydrothermal method. We evaluated the cutting performance and the tactile sensor by experiments.
{"title":"Microknife using ultrasonic vibration","authors":"F. Arai, T. Amano, T. Fukuda, H. Satoh","doi":"10.1109/MHS.2000.903312","DOIUrl":"https://doi.org/10.1109/MHS.2000.903312","url":null,"abstract":"The purpose of this research is to develop a minute size knife for cutting of minute objects such as cells. We report on a microknife that cuts the object by using ultrasonic vibration of a sharp needle. We employed a multilayer piezoelectric actuator for generating the ultrasonic vibration for cutting. Also, we made a tactile sensor for the microknife by using PZT thin film made by the hydrothermal method. We evaluated the cutting performance and the tactile sensor by experiments.","PeriodicalId":372317,"journal":{"name":"MHS2000. Proceedings of 2000 International Symposium on Micromechatronics and Human Science (Cat. No.00TH8530)","volume":" 32","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-10-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"113951998","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
G. Skidmore, M. Ellis, E. Parker, N. Sarkar, R. Merkle
A top-down assembly approach to nanotechnology starting with parts using MEMS techniques is presented. MEMS components, built with integrated circuit manufacturing processes, can be used to fabricate complex parts with integrated functionality. These parts can be used in assemblies at the micron length scale and above. To pursue assemblies of this type certain developments are necessary to constrain parts until needed, mechanically and electrically couple parts, and handle parts. A system architecture, scalable to smaller sizes, for assembling such parts in exponential and massively parallel manners is presented. Some progress towards these developments has been made by demonstrations of reversible positional component tethering and reversible positional mechanical coupling.
{"title":"Micro-assembly for top-down nanotechnology","authors":"G. Skidmore, M. Ellis, E. Parker, N. Sarkar, R. Merkle","doi":"10.1109/MHS.2000.903276","DOIUrl":"https://doi.org/10.1109/MHS.2000.903276","url":null,"abstract":"A top-down assembly approach to nanotechnology starting with parts using MEMS techniques is presented. MEMS components, built with integrated circuit manufacturing processes, can be used to fabricate complex parts with integrated functionality. These parts can be used in assemblies at the micron length scale and above. To pursue assemblies of this type certain developments are necessary to constrain parts until needed, mechanically and electrically couple parts, and handle parts. A system architecture, scalable to smaller sizes, for assembling such parts in exponential and massively parallel manners is presented. Some progress towards these developments has been made by demonstrations of reversible positional component tethering and reversible positional mechanical coupling.","PeriodicalId":372317,"journal":{"name":"MHS2000. Proceedings of 2000 International Symposium on Micromechatronics and Human Science (Cat. No.00TH8530)","volume":"137 12 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-10-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131386348","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Piezo actuators are widely used for precision positioning purposes where a submicron resolution is needed. Among the possible means to increase the working range of those actuators whose stroke is, depending on the material, usually limited to a small fraction of the actuator length, is a stepping motion of the actuator. We use a stepping motion based on the stick and slip effect in order to achieve a long range while maintaining the advantage of a virtually unlimited resolution. In this paper we introduce miniature x-y-stages dedicated to the manipulation of samples under a microscope. As previous setups and experiments have shown, a parallel kinematic structure for positioning purposes in microscopy or micro assembly is not well suited because x and y motion of the actuators have an influence on each other. A system with a serial kinematic structure has therefore been developed. The proposed device will provide the same capabilities as existing motorized stages, but at a lower cost than manual positioning stages and at a very compact size.
{"title":"Micropositioners for microscopy applications based on the stick-slip effect","authors":"A. Bergander, J. Breguet, C. Schmitt, R. Clavel","doi":"10.1109/MHS.2000.903315","DOIUrl":"https://doi.org/10.1109/MHS.2000.903315","url":null,"abstract":"Piezo actuators are widely used for precision positioning purposes where a submicron resolution is needed. Among the possible means to increase the working range of those actuators whose stroke is, depending on the material, usually limited to a small fraction of the actuator length, is a stepping motion of the actuator. We use a stepping motion based on the stick and slip effect in order to achieve a long range while maintaining the advantage of a virtually unlimited resolution. In this paper we introduce miniature x-y-stages dedicated to the manipulation of samples under a microscope. As previous setups and experiments have shown, a parallel kinematic structure for positioning purposes in microscopy or micro assembly is not well suited because x and y motion of the actuators have an influence on each other. A system with a serial kinematic structure has therefore been developed. The proposed device will provide the same capabilities as existing motorized stages, but at a lower cost than manual positioning stages and at a very compact size.","PeriodicalId":372317,"journal":{"name":"MHS2000. Proceedings of 2000 International Symposium on Micromechatronics and Human Science (Cat. No.00TH8530)","volume":"185 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-10-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123480685","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
In the medical field, demands and expectations are growing for portable equipment that is small, low power, high performance and reliable in order to improve the quality of life of patients. We therefore developed super devices for medical applications by using micro 3D processing technology. This project should help to nurture R&D style business enterprises and help create knowledge-building industrial development along with new industries in the medical equipment field. The target for the first stage, development of a small, low power, high performance and reliable super device for medical applications, was achieved. We have also managed to apply this technology by developing a portable continual drug solution injector.
{"title":"Development of super devices for medical applications","authors":"M. Akiyama","doi":"10.1109/MHS.2000.903275","DOIUrl":"https://doi.org/10.1109/MHS.2000.903275","url":null,"abstract":"In the medical field, demands and expectations are growing for portable equipment that is small, low power, high performance and reliable in order to improve the quality of life of patients. We therefore developed super devices for medical applications by using micro 3D processing technology. This project should help to nurture R&D style business enterprises and help create knowledge-building industrial development along with new industries in the medical equipment field. The target for the first stage, development of a small, low power, high performance and reliable super device for medical applications, was achieved. We have also managed to apply this technology by developing a portable continual drug solution injector.","PeriodicalId":372317,"journal":{"name":"MHS2000. Proceedings of 2000 International Symposium on Micromechatronics and Human Science (Cat. No.00TH8530)","volume":"17 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-10-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126040354","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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