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2013 Seventh International Conference on Sensing Technology (ICST)最新文献

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Scale factor in MEMS gyroscopes: The effect of power supply voltage MEMS陀螺仪的比例因子:电源电压的影响
Pub Date : 2013-12-01 DOI: 10.1109/ICSENST.2013.6727652
Martin Vagner, P. Benes
This paper discusses the behavior of MEMS gyroscopes during power supply fluctuations, which is a problem that has not been sufficiently analyzed to date. The focus is placed on the scale factor. In the opening section, the authors present the basic output configurations of the MEMS gyroscopes and propose their general models. The following part of the article has a practical character. Here, eight types of the above-defined gyroscopes are examined to demonstrate the influence of the applied supply voltage. Firstly, the measurement procedure is described, and subsequently the results of this experiment are presented. The outcome of the performed research consists in that the scale factor error is smaller than 1% if the power supply voltage fluctuates within the range of ±0.25 V around the nominal value.
本文讨论了MEMS陀螺仪在电源波动时的行为,这是一个迄今尚未得到充分分析的问题。重点放在比例因子上。在开头部分,作者介绍了MEMS陀螺仪的基本输出配置,并提出了它们的一般模型。文章的下一部分具有实践性。在这里,八种类型的上述陀螺仪进行了检查,以证明施加的电源电压的影响。首先介绍了测量过程,然后给出了实验结果。研究结果表明,当电源电压在标称值周围±0.25 V范围内波动时,比例因子误差小于1%。
{"title":"Scale factor in MEMS gyroscopes: The effect of power supply voltage","authors":"Martin Vagner, P. Benes","doi":"10.1109/ICSENST.2013.6727652","DOIUrl":"https://doi.org/10.1109/ICSENST.2013.6727652","url":null,"abstract":"This paper discusses the behavior of MEMS gyroscopes during power supply fluctuations, which is a problem that has not been sufficiently analyzed to date. The focus is placed on the scale factor. In the opening section, the authors present the basic output configurations of the MEMS gyroscopes and propose their general models. The following part of the article has a practical character. Here, eight types of the above-defined gyroscopes are examined to demonstrate the influence of the applied supply voltage. Firstly, the measurement procedure is described, and subsequently the results of this experiment are presented. The outcome of the performed research consists in that the scale factor error is smaller than 1% if the power supply voltage fluctuates within the range of ±0.25 V around the nominal value.","PeriodicalId":374655,"journal":{"name":"2013 Seventh International Conference on Sensing Technology (ICST)","volume":"18 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130783773","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Improving leak detection sensing in pipelines: A multidimensional approach with FDM 改进管道泄漏检测传感:基于FDM的多维方法
Pub Date : 2013-12-01 DOI: 10.1109/ICSENST.2013.6727746
A. Lay-Ekuakille, G. Griffo, P. Vergallo
The problem of detecting leakages in pipelines has been assuming a crucial importance for saving water from bad usage and exploitation. FDM (Filter Diagonalization Method) is a promising method used in nuclear magnetic resonance for decaying issues. We propose a comparison between a one-dimensional FDM and a multidimensional one. This comparison points out interesting aspects related to the leak width and noise contained in the signal and that are hidden in 1 D FDM. An interesting result is the fact that, thanks to multidimensional approach, finding other peaks and lobes, it is possible to improve the construction of a pipelines and to reduce the number of sensors to be located on the pipeline.
管道泄漏的检测问题对于防止水资源的不当使用和开发具有至关重要的意义。FDM(滤波对角化法)是一种很有前途的用于核磁共振衰减问题的方法。我们提出了一维FDM和多维FDM的比较。这种比较指出了与信号中包含的泄漏宽度和噪声有关的有趣方面,这些方面隐藏在一维FDM中。一个有趣的结果是,由于采用了多维方法,可以找到其他峰和叶,从而可以改进管道的构造并减少要位于管道上的传感器数量。
{"title":"Improving leak detection sensing in pipelines: A multidimensional approach with FDM","authors":"A. Lay-Ekuakille, G. Griffo, P. Vergallo","doi":"10.1109/ICSENST.2013.6727746","DOIUrl":"https://doi.org/10.1109/ICSENST.2013.6727746","url":null,"abstract":"The problem of detecting leakages in pipelines has been assuming a crucial importance for saving water from bad usage and exploitation. FDM (Filter Diagonalization Method) is a promising method used in nuclear magnetic resonance for decaying issues. We propose a comparison between a one-dimensional FDM and a multidimensional one. This comparison points out interesting aspects related to the leak width and noise contained in the signal and that are hidden in 1 D FDM. An interesting result is the fact that, thanks to multidimensional approach, finding other peaks and lobes, it is possible to improve the construction of a pipelines and to reduce the number of sensors to be located on the pipeline.","PeriodicalId":374655,"journal":{"name":"2013 Seventh International Conference on Sensing Technology (ICST)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130787981","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 6
Automated monitoring of foraging behaviour in free ranging sheep grazing a biodiverse pasture 在生物多样性牧场放牧的自由放养羊觅食行为的自动监测
Pub Date : 2013-12-01 DOI: 10.1109/ICSENST.2013.6727614
A. Mason, J. Sneddon
Little is currently known about the foraging behavior of free ranging animals, particularly in biodiverse pastures. This is despite the suggestion of recent work that animals grazing on such pastures tend to produce better quality meat. This paper presents a bespoke Wireless Sensor Network system designed to be mounted on grazing animals and collect movement information which is then coded with reference to human observations. In doing this it has been possible to calibrate the bespoke system such that, in realtime, the system can be used to deduce animal behavior (e.g. resting, grazing, foraging, etc.) remotely. When coupled with future GPS-free positional information, this system will provide valuable information for the UK agricultural industry, in addition to overcoming the challenges faced by many commercial systems which rely on energy intensive GPS technology.
目前对自由放养动物的觅食行为知之甚少,特别是在生物多样性的牧场。尽管最近的研究表明,在这样的牧场上放牧的动物往往能生产出质量更好的肉。本文介绍了一种定制的无线传感器网络系统,该系统设计用于安装在放牧动物身上,并收集运动信息,然后根据人类的观察结果进行编码。这样一来,就有可能校准定制的系统,这样,在实时,系统可以用来推断动物的行为(例如休息,放牧,觅食等)远程。当与未来无GPS定位信息相结合时,除了克服许多依赖能源密集型GPS技术的商业系统所面临的挑战外,该系统还将为英国农业提供有价值的信息。
{"title":"Automated monitoring of foraging behaviour in free ranging sheep grazing a biodiverse pasture","authors":"A. Mason, J. Sneddon","doi":"10.1109/ICSENST.2013.6727614","DOIUrl":"https://doi.org/10.1109/ICSENST.2013.6727614","url":null,"abstract":"Little is currently known about the foraging behavior of free ranging animals, particularly in biodiverse pastures. This is despite the suggestion of recent work that animals grazing on such pastures tend to produce better quality meat. This paper presents a bespoke Wireless Sensor Network system designed to be mounted on grazing animals and collect movement information which is then coded with reference to human observations. In doing this it has been possible to calibrate the bespoke system such that, in realtime, the system can be used to deduce animal behavior (e.g. resting, grazing, foraging, etc.) remotely. When coupled with future GPS-free positional information, this system will provide valuable information for the UK agricultural industry, in addition to overcoming the challenges faced by many commercial systems which rely on energy intensive GPS technology.","PeriodicalId":374655,"journal":{"name":"2013 Seventh International Conference on Sensing Technology (ICST)","volume":"24 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125325723","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 11
Biochemical sensing assays based on coalescence-induced self-propulsion digital microfluidics 基于聚结诱导自推进数字微流体的生化传感分析
Pub Date : 2013-12-01 DOI: 10.1109/ICSENST.2013.6727618
V. Nock, Yannic Müller, M. Sellier, C. Verdier
This work reports on coalescence-induced self-propulsion as a driving mechanism to actuate microfluidic droplet assays. We demonstrate multi-droplet translation and assay-type sensing on a digital microfluidics platform by use of surface tension gradients alone. These gradients arise during the coalescence of two droplets of liquid having different compositions and therefore surface tensions. We demonstrate a chemi-luminescence blood-detection reaction based on the mixing of two carrier droplets containing solutions of synthetic blood and luminol sensor solution. Presence of iron in the blood solution is recorded using digital imaging and analyzed via offline image processing. The results demonstrate the capability of the propulsion mechanism to propel droplets over several millimeters, thus enabling one to design a new family of chip-based biochemical sensor assays.
本工作报告了聚结诱导的自推进作为驱动机制来驱动微流控液滴分析。我们演示了多液滴平移和分析型传感在数字微流体平台上仅使用表面张力梯度。这些梯度是在两个不同成分的液滴结合时产生的,因此产生了表面张力。我们演示了一种化学发光血液检测反应,该反应基于混合含有合成血液溶液和鲁米诺传感器溶液的两个载体液滴。使用数字成像记录血液溶液中铁的存在,并通过离线图像处理进行分析。结果表明,推进机制的能力,推动液滴超过几毫米,从而使人们能够设计一个新的家族基于芯片的生化传感器分析。
{"title":"Biochemical sensing assays based on coalescence-induced self-propulsion digital microfluidics","authors":"V. Nock, Yannic Müller, M. Sellier, C. Verdier","doi":"10.1109/ICSENST.2013.6727618","DOIUrl":"https://doi.org/10.1109/ICSENST.2013.6727618","url":null,"abstract":"This work reports on coalescence-induced self-propulsion as a driving mechanism to actuate microfluidic droplet assays. We demonstrate multi-droplet translation and assay-type sensing on a digital microfluidics platform by use of surface tension gradients alone. These gradients arise during the coalescence of two droplets of liquid having different compositions and therefore surface tensions. We demonstrate a chemi-luminescence blood-detection reaction based on the mixing of two carrier droplets containing solutions of synthetic blood and luminol sensor solution. Presence of iron in the blood solution is recorded using digital imaging and analyzed via offline image processing. The results demonstrate the capability of the propulsion mechanism to propel droplets over several millimeters, thus enabling one to design a new family of chip-based biochemical sensor assays.","PeriodicalId":374655,"journal":{"name":"2013 Seventh International Conference on Sensing Technology (ICST)","volume":"35 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122256036","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 5
KIKIWAKE system for promoting interest in sound source separation technique — Novel application of microphone array and signal processing KIKIWAKE系统促进对声源分离技术的兴趣-麦克风阵列和信号处理的新应用
Pub Date : 2013-12-01 DOI: 10.1109/ICSENST.2013.6727767
Tomoki Taguchi, M. Goseki, Ryohei Egusa, Etsuji Yamaguchi, S. Inagaki, Yoshiaki Takeda, M. Namatame, Masanori Sugimoto, F. Kusunoki
In recent years, microphone array signal processing has been actively studied in the field of engineering. In consideration of our hope that children's interest in this technology will contribute to the future development of science and technology, we have developed the KIKIWAKE system with a microphone array and conducted the Prince Shotoku Game to promote children's interest. Then, we confirmed the effectiveness of the system through interviews.
近年来,传声器阵列信号处理在工程领域得到了积极的研究。考虑到我们希望孩子们对这项技术的兴趣将有助于未来科技的发展,我们开发了带有麦克风阵列的KIKIWAKE系统,并进行了王子Shotoku游戏来促进孩子们的兴趣。然后,我们通过访谈确认了系统的有效性。
{"title":"KIKIWAKE system for promoting interest in sound source separation technique — Novel application of microphone array and signal processing","authors":"Tomoki Taguchi, M. Goseki, Ryohei Egusa, Etsuji Yamaguchi, S. Inagaki, Yoshiaki Takeda, M. Namatame, Masanori Sugimoto, F. Kusunoki","doi":"10.1109/ICSENST.2013.6727767","DOIUrl":"https://doi.org/10.1109/ICSENST.2013.6727767","url":null,"abstract":"In recent years, microphone array signal processing has been actively studied in the field of engineering. In consideration of our hope that children's interest in this technology will contribute to the future development of science and technology, we have developed the KIKIWAKE system with a microphone array and conducted the Prince Shotoku Game to promote children's interest. Then, we confirmed the effectiveness of the system through interviews.","PeriodicalId":374655,"journal":{"name":"2013 Seventh International Conference on Sensing Technology (ICST)","volume":"15 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121119119","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
A low power environmental wireless radiation monitoring system by using 920MHz frequency band 一种采用920MHz频段的低功耗环境无线辐射监测系统
Pub Date : 2013-12-01 DOI: 10.1109/ICSENST.2013.6727759
Y. Matsumoto, M. Satoh, Kenzo Ozaki
A wireless radiation monitoring system has been developed using a sensor network and one board-type radiation module. The one board-type radiation module is based on the Pocket Geiger type5 by Radiation-watch.org[1]. The power consumption of the module was reduced to 3 mW to drive the monitoring system by a solar cell. The module is designed to connect a Gvove terminal of Arduino microprocessors. The radiation dose rate was transmitted by wireless modules (Xbee, RF bee, etc.), and collected by the application program. The communication distance of the module was around 40-160 m in a straight-line distance. A novel 920MHz module has been developed by combining the radiation module and a PIC32bit microprocessor. The communication distance by using the module is over 3 km in a straight-line. Software was designed to form a mesh network. Because a lower power radiation detector is required for environmental measurements around the Fukushima nuclear plant, a custom detection ASIC has been designed using a 0.6-μm CMOS process. The power consumption of the circuit was 1.5 mW.
利用传感器网络和板状辐射模块,研制了一种无线辐射监测系统。单板型辐射模块是基于radiationwatch.org[1]的Pocket Geiger型。该模块的功耗降低到3mw,通过太阳能电池驱动监控系统。该模块用于连接Arduino微处理器的Gvove终端。辐射剂量率通过无线模块(Xbee、RF bee等)传输,由应用程序采集。模块之间的直线通信距离在40-160米左右。将辐射模块与pic32位微处理器相结合,开发了一种新型的920MHz模块。使用该模块的直线通信距离可达3公里以上。软件被设计成网状网络。由于福岛核电站周围的环境测量需要低功率辐射探测器,因此采用0.6 μm CMOS工艺设计了定制检测ASIC。电路的功耗为1.5 mW。
{"title":"A low power environmental wireless radiation monitoring system by using 920MHz frequency band","authors":"Y. Matsumoto, M. Satoh, Kenzo Ozaki","doi":"10.1109/ICSENST.2013.6727759","DOIUrl":"https://doi.org/10.1109/ICSENST.2013.6727759","url":null,"abstract":"A wireless radiation monitoring system has been developed using a sensor network and one board-type radiation module. The one board-type radiation module is based on the Pocket Geiger type5 by Radiation-watch.org[1]. The power consumption of the module was reduced to 3 mW to drive the monitoring system by a solar cell. The module is designed to connect a Gvove terminal of Arduino microprocessors. The radiation dose rate was transmitted by wireless modules (Xbee, RF bee, etc.), and collected by the application program. The communication distance of the module was around 40-160 m in a straight-line distance. A novel 920MHz module has been developed by combining the radiation module and a PIC32bit microprocessor. The communication distance by using the module is over 3 km in a straight-line. Software was designed to form a mesh network. Because a lower power radiation detector is required for environmental measurements around the Fukushima nuclear plant, a custom detection ASIC has been designed using a 0.6-μm CMOS process. The power consumption of the circuit was 1.5 mW.","PeriodicalId":374655,"journal":{"name":"2013 Seventh International Conference on Sensing Technology (ICST)","volume":"29 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116734475","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 5
Design and characterization of a PCB based capacitive shear force sensor for robotic gripper application 基于PCB的机器人夹具电容式剪切力传感器的设计与表征
Pub Date : 2013-12-01 DOI: 10.1109/ICSENST.2013.6727777
Sheng-Jui Chen, Jian-Lin Huang, Gwo-Jen Wu, Chung-Lin Wu, S. Pan
The shear force sensor is one of the key elements in future robotic industries; it is of great importance in applications where robotic arms are required to delicately interact with objects to be handled. This paper presents the development of a capacitive shear force capable of sensing shear forces in two degrees of freedom. The fabrication of the sensor is based on the PCB fabrication process, a well-known and mature technology. We adopt the capacitance sensing scheme for its high sensitivity and easy implementation. For sensor characterization, we used a force gauge and an optical interferometer to measure sensor's parameters including its sensitivity and resolution. The dimension of our prototype shear force sensor including the metal housing is 26 mm × 13 mm × 58 mm suitable for the integration with commercial robotic grippers. For sensor performance, we achieved a shear force sensitivity of 126 fF/N and a resolution of smaller than 6 mN.
剪切力传感器是未来机器人工业的关键元件之一;在需要机械臂与被处理物体进行精细交互的应用中,这是非常重要的。本文介绍了一种电容式剪切力的研制,这种力能够在两个自由度上感应剪切力。传感器的制作是基于PCB制作工艺,这是一种众所周知的成熟技术。我们采用电容传感方案,因为它灵敏度高,易于实现。对于传感器的特性,我们使用了一个力计和一个光学干涉仪来测量传感器的参数,包括灵敏度和分辨率。我们的原型剪切力传感器包括金属外壳的尺寸为26毫米× 13毫米× 58毫米,适合与商用机器人抓取器集成。在传感器性能方面,我们实现了126 fF/N的剪切力灵敏度和小于6 mN的分辨率。
{"title":"Design and characterization of a PCB based capacitive shear force sensor for robotic gripper application","authors":"Sheng-Jui Chen, Jian-Lin Huang, Gwo-Jen Wu, Chung-Lin Wu, S. Pan","doi":"10.1109/ICSENST.2013.6727777","DOIUrl":"https://doi.org/10.1109/ICSENST.2013.6727777","url":null,"abstract":"The shear force sensor is one of the key elements in future robotic industries; it is of great importance in applications where robotic arms are required to delicately interact with objects to be handled. This paper presents the development of a capacitive shear force capable of sensing shear forces in two degrees of freedom. The fabrication of the sensor is based on the PCB fabrication process, a well-known and mature technology. We adopt the capacitance sensing scheme for its high sensitivity and easy implementation. For sensor characterization, we used a force gauge and an optical interferometer to measure sensor's parameters including its sensitivity and resolution. The dimension of our prototype shear force sensor including the metal housing is 26 mm × 13 mm × 58 mm suitable for the integration with commercial robotic grippers. For sensor performance, we achieved a shear force sensitivity of 126 fF/N and a resolution of smaller than 6 mN.","PeriodicalId":374655,"journal":{"name":"2013 Seventh International Conference on Sensing Technology (ICST)","volume":"23 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125128724","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
Reducing the probe ball diameters of 3D silicon-based microprobes for dimensional metrology 减小尺寸测量用三维硅基微探头的探头球直径
Pub Date : 2013-12-01 DOI: 10.1109/ICSENST.2013.6727663
N. Ferreira, A. Brennecke, A. Dietzel, S. Büttgenbach, T. Krah, D. Metz, K. Kniel, F. Hartig
Microprobing systems based on silicon force sensors allow accurate force and displacement measurements in the range of several μN or μm. Due to the high sensitive diffused piezoresistors and an appropriate electrical circuitry, these probing systems enable tactile measurement without leaving scratches on the probed surfaces. To probe microstructures on workpieces, probes with probe balls as small as possible are sought. Mostly, commercial microprobes have probe balls with diameters of 120 μm or larger. In this work, microprobes with probe ball diameters down to 50 μm are presented and characterized in detail. In order to verify the performance of these new microprobes, measurements have been carried out to characterize both their mechanical behavior and their sensitivity. These properties have been extensively analyzed for different sensor designs and probe ball diameters. For instance, microprobes with probe ball diameters of 50 μm have a stiffness of about 0.637 mN/μm in X-Y and about 20.023 mN/μm in Z directions of the probe. The sensitivity amounts to 1.174 mV/V/μm and 20.478 mV/V/μm in X-Y and Z directions, respectively. The results presented encourage a new generation of microprobes to be used in dimensional metrology.
基于硅力传感器的微探测系统可以在几个μN或μm的范围内进行精确的力和位移测量。由于高灵敏度的扩散压阻和适当的电路,这些探测系统使触觉测量不会在探测表面留下划痕。为了探测工件上的微结构,需要寻找具有尽可能小的探测球的探针。大多数商用微探针的探针球直径为120 μm或更大。在这项工作中,探针球直径低至50 μm的微探针被提出并详细表征。为了验证这些新型微探针的性能,已经进行了测量,以表征它们的机械行为和灵敏度。对于不同的传感器设计和探头球直径,已经对这些特性进行了广泛的分析。例如,探头球直径为50 μm的微探头,其X-Y方向刚度约为0.637 mN/μm, Z方向刚度约为20.023 mN/μm。X-Y和Z方向的灵敏度分别为1.174 mV/V/μm和20.478 mV/V/μm。所提出的结果鼓励了新一代微探头在尺寸测量中的应用。
{"title":"Reducing the probe ball diameters of 3D silicon-based microprobes for dimensional metrology","authors":"N. Ferreira, A. Brennecke, A. Dietzel, S. Büttgenbach, T. Krah, D. Metz, K. Kniel, F. Hartig","doi":"10.1109/ICSENST.2013.6727663","DOIUrl":"https://doi.org/10.1109/ICSENST.2013.6727663","url":null,"abstract":"Microprobing systems based on silicon force sensors allow accurate force and displacement measurements in the range of several μN or μm. Due to the high sensitive diffused piezoresistors and an appropriate electrical circuitry, these probing systems enable tactile measurement without leaving scratches on the probed surfaces. To probe microstructures on workpieces, probes with probe balls as small as possible are sought. Mostly, commercial microprobes have probe balls with diameters of 120 μm or larger. In this work, microprobes with probe ball diameters down to 50 μm are presented and characterized in detail. In order to verify the performance of these new microprobes, measurements have been carried out to characterize both their mechanical behavior and their sensitivity. These properties have been extensively analyzed for different sensor designs and probe ball diameters. For instance, microprobes with probe ball diameters of 50 μm have a stiffness of about 0.637 mN/μm in X-Y and about 20.023 mN/μm in Z directions of the probe. The sensitivity amounts to 1.174 mV/V/μm and 20.478 mV/V/μm in X-Y and Z directions, respectively. The results presented encourage a new generation of microprobes to be used in dimensional metrology.","PeriodicalId":374655,"journal":{"name":"2013 Seventh International Conference on Sensing Technology (ICST)","volume":"18 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115160215","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 10
An add-drop ring resonator interferometer sensor with high sensitivity 一种高灵敏度的加降环谐振干涉仪传感器
Pub Date : 2013-12-01 DOI: 10.1109/ICSENST.2013.6727666
Yundong Zhang, Kaiyang Wang, Xiaoqi Liu, Xuenan Zhang
We propose an add-drop ring resonator interferometer with high sensitivity. We theoretically demonstrate this add-drop ring resonator configuration with a compact size enables the simultaneously producing fast light and slow light. We also theoretically calculate the sensitivity of the add-drop ring resonator interferometer as a sensing system. The sensitivity of our configuration can achieve 13.48/rad, which is enhanced by 6.46/rad compared to that of the traditional single-bus ring resonator which is 7.02/rad. This proposed structure enables highly sensitive, compact and stable sensors.
提出了一种高灵敏度的加降环谐振干涉仪。我们从理论上证明了这种小尺寸的加降环谐振器结构可以同时产生快光和慢光。我们还从理论上计算了加降环谐振干涉仪作为传感系统的灵敏度。该结构的灵敏度可以达到13.48/rad,比传统单母线环形谐振器的7.02/rad提高了6.46/rad。该结构可实现高灵敏度、紧凑和稳定的传感器。
{"title":"An add-drop ring resonator interferometer sensor with high sensitivity","authors":"Yundong Zhang, Kaiyang Wang, Xiaoqi Liu, Xuenan Zhang","doi":"10.1109/ICSENST.2013.6727666","DOIUrl":"https://doi.org/10.1109/ICSENST.2013.6727666","url":null,"abstract":"We propose an add-drop ring resonator interferometer with high sensitivity. We theoretically demonstrate this add-drop ring resonator configuration with a compact size enables the simultaneously producing fast light and slow light. We also theoretically calculate the sensitivity of the add-drop ring resonator interferometer as a sensing system. The sensitivity of our configuration can achieve 13.48/rad, which is enhanced by 6.46/rad compared to that of the traditional single-bus ring resonator which is 7.02/rad. This proposed structure enables highly sensitive, compact and stable sensors.","PeriodicalId":374655,"journal":{"name":"2013 Seventh International Conference on Sensing Technology (ICST)","volume":"42 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116586037","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Contactless potentiometers for automotive applications 汽车用非接触式电位器
Pub Date : 2013-12-01 DOI: 10.1109/ICSENST.2013.6727675
A. López-Martín, A. Carlosena
An overview of the field of contactless potentiometers in the automotive sector is presented. First, the main automotive systems that require the use of these devices are described. Then, the different sensors that can be employed to implement them are reviewed. Finally, a contactless potentiometer developed by the authors for automotive applications is described as a case study. It is based on a GMR Wheatstone bridge, is digitally configurable, and achieves maximum errors within +0.5° in an angular range of more than 100°.
概述了非接触式电位器在汽车领域的应用。首先,描述了需要使用这些装置的主要汽车系统。然后,对可用于实现这些功能的不同传感器进行了回顾。最后,介绍了作者开发的汽车用非接触式电位器。它基于GMR惠斯通电桥,可数字配置,在超过100°的角度范围内实现+0.5°的最大误差。
{"title":"Contactless potentiometers for automotive applications","authors":"A. López-Martín, A. Carlosena","doi":"10.1109/ICSENST.2013.6727675","DOIUrl":"https://doi.org/10.1109/ICSENST.2013.6727675","url":null,"abstract":"An overview of the field of contactless potentiometers in the automotive sector is presented. First, the main automotive systems that require the use of these devices are described. Then, the different sensors that can be employed to implement them are reviewed. Finally, a contactless potentiometer developed by the authors for automotive applications is described as a case study. It is based on a GMR Wheatstone bridge, is digitally configurable, and achieves maximum errors within +0.5° in an angular range of more than 100°.","PeriodicalId":374655,"journal":{"name":"2013 Seventh International Conference on Sensing Technology (ICST)","volume":"11 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129422483","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
期刊
2013 Seventh International Conference on Sensing Technology (ICST)
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