E. van Setten, S. Leitão, C. van Lare, J. van Schoot, J. Finders, K. Bhattacharyya
{"title":"High-NA EUV imaging: the quest for resolution, depth-of-focus, and productivity","authors":"E. van Setten, S. Leitão, C. van Lare, J. van Schoot, J. Finders, K. Bhattacharyya","doi":"10.1117/12.2645000","DOIUrl":"https://doi.org/10.1117/12.2645000","url":null,"abstract":"","PeriodicalId":374992,"journal":{"name":"International Conference on Extreme Ultraviolet Lithography 2022","volume":"112 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2022-11-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127128558","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
W. Chao, Dongseok Nam, Sharon R Oh, Sarath Samdurala, E. Gullikson, F. Salmassi, A. Yen, P. Naulleau
{"title":"Ruthenium attenuated phase-shifting structure fabrication for contact-hole applications","authors":"W. Chao, Dongseok Nam, Sharon R Oh, Sarath Samdurala, E. Gullikson, F. Salmassi, A. Yen, P. Naulleau","doi":"10.1117/12.2645263","DOIUrl":"https://doi.org/10.1117/12.2645263","url":null,"abstract":"","PeriodicalId":374992,"journal":{"name":"International Conference on Extreme Ultraviolet Lithography 2022","volume":"29 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2022-10-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116733257","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
K. Rook, A. Kulkarni, A. Checco, Kenji Yamamoto, Russell Luberoff, Mario Roque, Stephen Lozowski, Joel A. Bahena, Marjorie Chee, Meng H. Lee
{"title":"Advancements in Mo/Si deposition techniques for high volume manufacturing of EUV mask blanks","authors":"K. Rook, A. Kulkarni, A. Checco, Kenji Yamamoto, Russell Luberoff, Mario Roque, Stephen Lozowski, Joel A. Bahena, Marjorie Chee, Meng H. Lee","doi":"10.1117/12.2641798","DOIUrl":"https://doi.org/10.1117/12.2641798","url":null,"abstract":"","PeriodicalId":374992,"journal":{"name":"International Conference on Extreme Ultraviolet Lithography 2022","volume":"72 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2022-10-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115021054","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Bappaditya Dey, S. Halder, Argho Das, Sayantan Das, Stewart Wu, G. Fenger
{"title":"Deep-learning denoiser-assisted framework for robust SEM contour extraction and analysis for advanced semiconductor node","authors":"Bappaditya Dey, S. Halder, Argho Das, Sayantan Das, Stewart Wu, G. Fenger","doi":"10.1117/12.2645403","DOIUrl":"https://doi.org/10.1117/12.2645403","url":null,"abstract":"","PeriodicalId":374992,"journal":{"name":"International Conference on Extreme Ultraviolet Lithography 2022","volume":"105 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2022-10-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134562733","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
N. Davydova, V. Wiaux, J. Bekaert, F. Timmermans, Bram Slachter, T. Kovalevich, E. van Setten, Marcel Beckers, Simon van Gorp, Rong-Bing Zhao, Dezheng Sun, Ming-Chun Tien, Hoon Ser, Diederik de Bruin, Stephen D. Hsu, R. Carpaij
{"title":"Stitching for High NA: new insights and path forward","authors":"N. Davydova, V. Wiaux, J. Bekaert, F. Timmermans, Bram Slachter, T. Kovalevich, E. van Setten, Marcel Beckers, Simon van Gorp, Rong-Bing Zhao, Dezheng Sun, Ming-Chun Tien, Hoon Ser, Diederik de Bruin, Stephen D. Hsu, R. Carpaij","doi":"10.1117/12.2653388","DOIUrl":"https://doi.org/10.1117/12.2653388","url":null,"abstract":"","PeriodicalId":374992,"journal":{"name":"International Conference on Extreme Ultraviolet Lithography 2022","volume":"43 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2022-10-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126965692","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Wonyoung Choi, Heechang Ko, Jiwon Kang, Janggun Park, Min-Woo Kim, Junhyeong Lee, Hye-Ceol Oh
{"title":"Possible underlayer dependent CD and overlay variation due to different heat absorption with EUV exposure","authors":"Wonyoung Choi, Heechang Ko, Jiwon Kang, Janggun Park, Min-Woo Kim, Junhyeong Lee, Hye-Ceol Oh","doi":"10.1117/12.2643047","DOIUrl":"https://doi.org/10.1117/12.2643047","url":null,"abstract":"","PeriodicalId":374992,"journal":{"name":"International Conference on Extreme Ultraviolet Lithography 2022","volume":"39 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2022-10-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122006435","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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