Manufacturing Letters最新文献_第2页

3D soft material printer as a mesoscale additive biomanufacturing platform for in-space manufacturing 三维软材料打印机作为用于太空制造的中尺度增材生物制造平台

IF 1.9 Q3 ENGINEERING, MANUFACTURING

Manufacturing Letters

Pub Date : 2024-10-01 DOI: 10.1016/j.mfglet.2024.09.015

Albert J. Patrick, Salil Bapat, Ajay P. Malshe

With the burgeoning in-space manufacturing (ISM) industry, developing an on-demand additive manufacturing (AM) platform will be crucial for long-term space habitation. However, acute space boundary conditions, such as limited physical space, microgravity, vacuum, and others pose unique challenges for designing the printing process, the platform’s structure, and the materials’ printability. An AM platform operable in a space environment would enable production at the point of need (PoN), for example, on-demand food, nutrition, and pharmaceutical products. This research is focused on the design, fabrication, and testing of a 3D printer confined within CubeSat boundaries to study the feasibility of soft material printing aimed toward potential ISM applications. The printer unit was built using components off the shelf (COTS) while adhering to the severe spatial boundary conditions posed by the CubeSat dimensions and was tested using an edible material ink to demonstrate multi-layer prints of soft materials. Printing in ambient Earth conditions as well as under vacuum displayed consistent layer cohesion and comparison to 3D model data although vacuum prints showed visibly dehydrated prints owing to outgassing of air bubbles. The printer equipment’s structural integrity was validated under simulated launch and operation conditions using a vibration testing setup according to the NASA-recommended microsatellites standards. The results indicated that the printer assembly maintained its structural and operational integrity during and after testing. Using soft materials as the basis of testing allows scalability when expanding to more complex and structural materials to produce spare parts using a frugally engineered modular manufacturing platform.

随着太空制造（ISM）产业的蓬勃发展，开发按需增材制造（AM）平台对长期太空居住至关重要。然而，有限的物理空间、微重力、真空等严峻的空间边界条件对打印工艺、平台结构和材料的可打印性设计提出了独特的挑战。可在太空环境中运行的 AM 平台可实现按需生产（PoN），例如按需生产食品、营养品和药品。这项研究的重点是设计、制造和测试限制在立方体卫星边界内的三维打印机，以研究软材料打印的可行性，从而实现潜在的国际空间站应用。该打印机使用现成组件（COTS）制造，同时遵守立方体卫星尺寸所带来的严格空间边界条件，并使用可食用材料墨水进行测试，以演示软材料的多层打印。在地球环境和真空条件下进行的打印显示出一致的层内聚力，并与三维模型数据进行了比较，但真空打印因气泡排出而显示出明显的脱水打印。根据美国国家航空航天局推荐的微型卫星标准，使用振动测试装置在模拟发射和运行条件下验证了打印机设备的结构完整性。结果表明，打印机组件在测试期间和测试之后都保持了结构和运行的完整性。使用软材料作为测试的基础，在扩展到更复杂的结构性材料时具有可扩展性，可利用节俭的工程模块化制造平台生产备件。

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引用次数: 0

Employing the electrode of different diameters to join dissimilar Al-Cu thin sheets using resistance spot welding 使用不同直径的电极通过电阻点焊连接异种铝铜薄板

IF 1.9 Q3 ENGINEERING, MANUFACTURING

Manufacturing Letters

Pub Date : 2024-10-01 DOI: 10.1016/j.mfglet.2024.09.055

Rajdev Singh, Amit Choudhary, Navneet Arora

This study aims to clarify the intricate connection between using different electrode tip diameters and the quality of spot joints. By investigating basic principles and process parameters, the research highlights how various combinations of electrode sizes affect weld quality. Specifically, to join aluminum (Al) and copper (Cu), two electrode sizes were employed: 4 mm and 8 mm tip diameter. Given that copper has higher conductivity (398 W/mK) and a higher melting temperature (1085 °C) compared to aluminum (237 W/mK and 660 °C respectively), efforts were made to enhance current density towards the copper side by using the smaller electrode tip diameter (4 mm) on that side. Experiments were conducted using two different combinations of sheet thicknesses (0.5 mm and 1 mm), revealing the need for optimized electrode tip diameter combinations for varying sheet thicknesses and materials with different thermos-physical properties. Overall, this study seeks to deepen our understanding of resistance spot welding, specifically focusing on the importance, challenges, and future prospects associated with varying electrode tip diameters in joining dissimilar metals.

本研究旨在阐明使用不同直径电极头与点焊质量之间的复杂联系。通过对基本原理和工艺参数的调查，研究强调了各种电极尺寸组合对焊接质量的影响。具体来说，在连接铝（Al）和铜（Cu）时，使用了两种尺寸的电极：尖端直径分别为 4 毫米和 8 毫米。鉴于铜的导电率（398 W/mK）和熔化温度（1085 °C）高于铝（分别为 237 W/mK 和 660 °C），因此在铜侧使用较小的电极头直径（4 毫米），努力提高铜侧的电流密度。使用两种不同的板材厚度组合（0.5 毫米和 1 毫米）进行了实验，结果表明需要针对不同的板材厚度和具有不同热物理性质的材料优化电极尖端直径组合。总之，本研究旨在加深我们对电阻点焊的理解，特别是关注在焊接异种金属时不同电极头直径的重要性、挑战和未来前景。

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引用次数: 0

Surface insight: Leveraging high-density dataset fusion for enhanced roughness classification 表面洞察力：利用高密度数据集融合增强粗糙度分类能力

IF 1.9 Q3 ENGINEERING, MANUFACTURING

Manufacturing Letters

Pub Date : 2024-10-01 DOI: 10.1016/j.mfglet.2024.09.022

Ronit Shetty, Ahmad Al Majali, Lee Wells

The ability to assess the surface quality quickly and accurately is of immense importance in manufacturing system. Modern metrology system along with machine learning is great at classification but requires more time. Traditionally accessing surface roughness is a time-consuming process. The progress in manufacturing technology necessitates improved approaches for quality control, specifically in the categorization of surface roughness, which has a substantial impact on the performance of materials. This research study introduces a novel method for classifying surface roughness by combining image data and point cloud data to create a comprehensive model. It then compares the performance of this model with a model that just relies on image data. A comprehensive analysis is conducted in this study, where image and point cloud data is collected and analysed. Multilinear principal component analysis (MPCA) along with random forest classifier is employed to create a model that classifies the surface texture. The primary goal is to showcase the enhanced precision and comprehensive understanding offered by the fused data model compared to the model that solely relies on images.

Furthermore, the work presents a pragmatic approach for developing this enhanced model offline and applying it online in real-time production environments, with a particular focus on using only image data. This strategy is in line with the objectives of Industry 4.0, which seeks to achieve more intelligent and data-driven manufacturing processes. Subsequent investigations will prioritize expanding the model’s suitability to various manufacturing settings, particularly highlighting its capacity to ensure quality in manufacturing lines through the utilization of images.

在制造系统中，快速准确地评估表面质量的能力极为重要。现代计量系统和机器学习在分类方面非常出色，但需要更多时间。传统上，获取表面粗糙度是一个耗时的过程。随着制造技术的进步，有必要改进质量控制方法，特别是在表面粗糙度分类方面，这对材料的性能有重大影响。本研究通过结合图像数据和点云数据创建综合模型，介绍了一种新的表面粗糙度分类方法。然后将该模型的性能与仅依赖图像数据的模型进行比较。本研究进行了综合分析，收集并分析了图像和点云数据。采用多线性主成分分析法（MPCA）和随机森林分类器来创建表面纹理分类模型。主要目标是展示融合数据模型与仅依赖图像的模型相比所提供的更高精度和更全面的理解。此外，该工作还提出了一种实用方法，用于离线开发这种增强型模型，并将其在线应用于实时生产环境，尤其侧重于仅使用图像数据。这一策略符合工业 4.0 的目标，即实现更加智能和数据驱动的生产流程。随后的研究将优先考虑扩大模型在各种生产环境中的适用性，特别是突出其通过利用图像确保生产线质量的能力。

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引用次数: 0

Improving surface integrity of GH4169 alloy through magnetic-assisted cutting 通过磁力辅助切割提高 GH4169 合金的表面完整性

IF 1.9 Q3 ENGINEERING, MANUFACTURING

Manufacturing Letters

Pub Date : 2024-10-01 DOI: 10.1016/j.mfglet.2024.09.077

Chao Tang, Yixuan Ye, Yu Zhang, Binghan Huang, Tao Huang, Dong Zhang, Xiaoming Zhang, Chang Ye

GH4169 alloy presents superior properties such as high strength and resistance to high temperature, but possesses poor machinability. To ameliorate the problem and improve the machined surface integrity of GH4169 alloy, this paper focused on the application of magnetic-assisted cutting (MAC) for GH4169 alloy. In the MAC process, a permanent magnetic field (the magnetic field intensity is 0.25 T) was applied to the workpiece material during cutting, and its impact on chip morphology, tool damage and surface integrity was investigated. By comparing to traditional cutting (TC), the introduction of a magnetic field results in a reduction in the chip thickness and minimizes chip serration, leading to smoother cutting process and reduced fluctuations in cutting forces. Meanwhile, the introduction of magnetic field resulted in a substantial decrease in the notch wear and abrasion of cutting tool, and mitigated the excessive growth of built-up edge (BUE), which improved the tool life and machined surface integrity. By analyzing the machined surface at the end of TC and MAC, it was found that the surface roughness at the end of MAC was reduced by 22.4 %. Meanwhile, the cavity, side flow and debris of BUE, which tend to occur in the machined surface during the TC process, are effectively suppressed after MAC. Furthermore, Microstructural analysis of the machined surface indicated an enhancement in the dislocation density on the machined surface layer, suggesting the magnetoplastic effect of the magnetic field on GH4169 alloy.

GH4169 合金具有高强度和耐高温等优越性能，但机加工性能较差。为了改善这一问题，提高 GH4169 合金的加工表面完整性，本文重点研究了磁辅助切削（MAC）在 GH4169 合金中的应用。在磁辅助切削过程中，切削时对工件材料施加永磁磁场（磁场强度为 0.25 T），并研究其对切屑形态、刀具损伤和表面完整性的影响。与传统切削（TC）相比，磁场的引入可减小切屑厚度，减少切屑锯齿，从而使切削过程更顺畅，切削力波动更小。同时，磁场的引入大大降低了切削工具的缺口磨损和磨耗，缓解了积聚刃（BUE）的过度增长，从而提高了工具寿命和加工表面的完整性。通过分析 TC 和 MAC 末端的加工表面，发现 MAC 末端的表面粗糙度降低了 22.4%。同时，TC 加工过程中容易出现在加工表面的空腔、侧流和 BUE 碎片在 MAC 加工后得到了有效抑制。此外，对加工表面的微观结构分析表明，加工表面层的位错密度有所增加，这表明磁场对 GH4169 合金产生了磁塑效应。

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引用次数: 0

Kalman filter-driven state observer for thermal error compensation in machine tool digital twins 用于机床数字双胞胎热误差补偿的卡尔曼滤波器驱动状态观测器

IF 1.9 Q3 ENGINEERING, MANUFACTURING

Manufacturing Letters

Pub Date : 2024-10-01 DOI: 10.1016/j.mfglet.2024.09.025

Sebastian Lang , Sofia Talleri , Josef Mayr , Konrad Wegener , Markus Bambach

Sustainable reduction of thermal errors during production is the key challenge in modern high-precision manufacturing. Numerical compensation models provide an energy-efficient solution, but in the case of data-driven models, high-quality experimental data must be time-consuming and expensive to produce, negatively impacting overall productivity. Furthermore, robustness concerns arise in the case of new operating conditions, which were not contained in the training data. This paper presents a novel use of a Kalman filter together with model order reduced finite element models to observe the entire thermal state, which allows the subsequent solution of the mechanical model and computation of the thermal errors in real-time without requiring any training data but instead purely based on the physical system model. The effectiveness of this approach is evaluated using experiments on a thermal test bench with 16 out of 40 temperature sensors employed for observation and demonstrated on a 5-axis machine tool (MT) with 13 out of 25 temperature sensors used. Due to the combination of the reduced order model and Kalman filter these 13 temperature sensors are sufficient to represent a MT mesh of more than 350’000 elements. The entire temperature profile of the thermal test bench is reconstructed to achieve a root mean square error (RMSE) of the unobserved temperature sensors of only 2.7 °C, which accounts for more than 83% of all temperature variations and 1.3 °C for the 5-axis MT. For the thermal error of the thermal test bench, the RMSE could be reduced from

67.4 μ m

to

33.3 μ m

, corresponding to a reduction of 52.7 %. This could be achieved without the need for experimental data for model calibration, in a real-time capable physics-based model.

持续减少生产过程中的热误差是现代高精密制造面临的主要挑战。数值补偿模型提供了一种高能效的解决方案，但在数据驱动模型的情况下，高质量的实验数据必须耗费大量时间和成本，从而对整体生产率产生负面影响。此外，在出现新的运行条件时，也会出现鲁棒性问题，而这些条件并不包含在训练数据中。本文介绍了卡尔曼滤波器与模型阶次降低的有限元模型相结合的一种新方法，用于观察整个热状态，从而可以在不需要任何训练数据的情况下，纯粹根据物理系统模型对机械模型和热误差进行实时求解和计算。通过在热试验台上使用 40 个温度传感器中的 16 个进行观察，并在使用 25 个温度传感器中的 13 个进行观察的五轴机床 (MT) 上进行演示，对这种方法的有效性进行了评估。由于结合了降阶模型和卡尔曼滤波器，这 13 个温度传感器足以代表超过 350'000 个元素的 MT 网格。通过重建热试验台的整个温度曲线，未观测到的温度传感器的均方根误差（RMSE）仅为 2.7 °C，占所有温度变化的 83% 以上，五轴 MT 的均方根误差为 1.3 °C。热试验台的热误差均方根误差可从 67.4μm 减小到 33.3μm，相当于减少了 52.7%。在基于物理的实时模型中，无需实验数据进行模型校准即可实现这一目标。

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引用次数: 0

Nanotechnology-enhanced castability of wrought aluminum alloys 2024 and 6063 利用纳米技术提高锻造铝合金 2024 和 6063 的可铸性

IF 1.9 Q3 ENGINEERING, MANUFACTURING

Manufacturing Letters

Pub Date : 2024-10-01 DOI: 10.1016/j.mfglet.2024.09.033

Guan-Cheng Chen , Xiaochun Li

In the realm of high-performance applications, wrought aluminum alloys are esteemed for their high mechanical properties and excellent strength-to-weight ratio. However, their limited castability poses challenges in economically producing intricate structures through casting processes. To address this issue, a small proportion of TiC nanoparticles is introduced into the melts of AA 2024 and AA 6063 for nano-treating. This nano-treatment imparts several beneficial effects, including the delayed release of latent heat, inhibition of grain growth, and improvement of wettability. These effects enhance the fluidity of the melt, eliminate hot cracking, and elevate the surface quality of the castings. The outcomes underscore the promising potential of emerging nano-treatment technology in rendering traditionally non-castable wrought aluminum alloys suitable for cost-effective casting processes, ultimately delivering high-performance products for a wide range of applications.

在高性能应用领域，锻造铝合金因其高机械性能和出色的强度重量比而备受推崇。然而，其有限的可铸造性给通过铸造工艺经济地生产复杂结构带来了挑战。为解决这一问题，在 AA 2024 和 AA 6063 的熔体中引入了少量 TiC 纳米颗粒进行纳米处理。这种纳米处理具有多种有益效果，包括延迟潜热释放、抑制晶粒生长和改善润湿性。这些效果增强了熔体的流动性，消除了热裂纹，并提高了铸件的表面质量。这些成果凸显了新兴纳米处理技术在使传统上不可铸造的锻造铝合金适用于具有成本效益的铸造工艺方面的巨大潜力，并最终为广泛的应用领域提供高性能产品。

引用次数: 0

Mechanical property improvements of LPBF-AlSi10Mg via forging to modify microstructure and defect characteristics 通过锻造改变微观结构和缺陷特征，改善 LPBF-AlSi10Mg 的机械性能

IF 1.9 Q3 ENGINEERING, MANUFACTURING

Manufacturing Letters

Pub Date : 2024-10-01 DOI: 10.1016/j.mfglet.2024.09.072

Austin Ngo , Noah Kohlhorst , Svitlana Fialkova , Bradley Jared , Tony Schmitz , Glenn Daehn , Jennifer L.W. Carter , Jian Cao , John J. Lewandowski

Additive Manufacturing (AM) processes have versatile capabilities but are susceptible to the formation of as-cast non-equilibrium microstructures, process-induced defects, and porosity, which have deleterious effects on the mechanical performance. As part of our NSF-ERC-HAMMER program, isothermal forging was investigated as a novel post-processing technique for refining microstructure, reducing process defect severity, and thereby improving mechanical properties. Specimens of Laser Powderbed Fusion (LPBF) AlSi10Mg were fabricated over a range of process parameters and tensile tested as a baseline. Initial work focused on duplicate AM material that was then hot forged with 20 % strain to investigate the effects of isothermal forging at one temperature and strain rate on the microstructure, tensile, and fatigue properties of the as-deposited materials. The microstructures, process-induced defect populations, and tensile/fatigue properties of both as-deposited and forged materials were quantified and analysed by OM, EBSD, XCT, and SEM by various NSF-ERC-HAMMER team members. Isothermal hot forging was found to induce recrystallisation and modify process-induced defect geometry along with increasing tensile ductility. The effects of AM deposition parameters and forge post-processing conditions on LPBF AlSi10Mg will be discussed in terms of microstructure, mechanical properties, and fractography.

增材制造（AM）工艺具有多功能性，但容易形成铸造时的非平衡微结构、工艺引起的缺陷和孔隙率，从而对机械性能产生有害影响。作为国家自然科学基金-环境科学研究中心-HAMMER 项目的一部分，等温锻造作为一种新型后处理技术进行了研究，以完善微观结构、减少工艺缺陷的严重程度，从而改善机械性能。在一定的工艺参数范围内制作了激光粉末熔床（LPBF）AlSi10Mg 试样，并作为基线进行了拉伸测试。最初的工作重点是复制 AM 材料，然后以 20% 的应变进行热锻，以研究在一个温度和应变率下进行等温锻造对沉积材料的微观结构、拉伸和疲劳性能的影响。国家自然科学基金委员会-能源研究中心-HAMMER 小组的多名成员通过 OM、EBSD、XCT 和 SEM 对沉积材料和锻造材料的微观结构、加工过程引起的缺陷群以及拉伸/疲劳性能进行了量化和分析。研究发现，等温热锻可诱导再结晶并改变工艺引起的缺陷几何形状，同时增加拉伸延展性。我们将从微观结构、机械性能和断口形貌方面讨论 AM 沉积参数和锻造后处理条件对 LPBF AlSi10Mg 的影响。

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引用次数: 0

Analytical temperature model for spindle speed selection in additive friction stir deposition 用于在添加剂摩擦搅拌沉积过程中选择主轴转速的温度分析模型

IF 1.9 Q3 ENGINEERING, MANUFACTURING

Manufacturing Letters

Pub Date : 2024-10-01 DOI: 10.1016/j.mfglet.2024.09.090

Tony Schmitz , Elijah Charles , Brett Compton

This paper describes a physics-based, analytical model for additive friction stir deposition (AFSD) spindle speed selection to achieve a desired deposition temperature. In the model, power input to the feedstock, which enables plastic flow and deposition, is related to the material temperature rise and subsequent flow stress reduction using Fourier’s conduction rate equation. Power input is modeled as frictional heating at the deposit-surface interface and adiabatic heating due to plastic deformation. The flow stress is predicted using the strain, strain rate, and temperature-dependent Johnson-Cook constitutive model for the selected feedstock alloy. Model predictions are compared to AFSD numerical simulation results available in the literature and experiments for aluminum alloys.

本文介绍了一种基于物理学的分析模型，用于选择添加剂摩擦搅拌沉积（AFSD）主轴转速，以达到所需的沉积温度。在该模型中，对原料的功率输入（可实现塑性流动和沉积）与材料温升和随后的流动应力降低有关，采用的是傅里叶传导率方程。输入功率被模拟为沉积物表面界面的摩擦加热和塑性变形引起的绝热加热。流动应力是使用应变、应变率和温度相关的约翰逊-库克构成模型对所选原料合金进行预测的。模型预测结果与铝合金的 AFSD 数值模拟结果和实验结果进行了比较。

引用次数: 0

Friction stir processing: A thermomechanical processing tool for high pressure die cast Al-alloys for vehicle light-weighting 摩擦搅拌加工：用于汽车轻量化的高压压铸铝合金的热机械加工工具

IF 1.9 Q3 ENGINEERING, MANUFACTURING

Manufacturing Letters

Pub Date : 2024-10-01 DOI: 10.1016/j.mfglet.2024.09.061

Avik Samanta , Hrishikesh Das , Glenn J. Grant , Saumyadeep Jana

This study uses friction stir processing (FSP) for thermomechanical processing of high-pressure die-casting (HPDC) to modify microstructure and improve mechanical properties. FSP is carried out on two different HPDC aluminum alloys: (a) general-purpose, high-iron, HPDC A380 alloy and (b) premium quality, low-iron HPDC Aural-5 alloy in thin wall, flat plate geometry. Subsequent mechanical testing shows ∼30 % and ∼65 % enhancement in yield strength and tensile ductility. In addition, FSP leads to ∼10 times improvement in fatigue life for A380 alloy and ∼70 % improvement in fracture toughness for Aural-5 alloy. These findings emphasize the capability of FSP to modify the microstructure of HPDC Al-alloys-based structural components so that they can demonstrate a good combination of strength, ductility, fracture toughness, and high fatigue properties for long-term durability and reliability.

本研究采用摩擦搅拌加工（FSP）对高压压铸（HPDC）进行热机械加工，以改变微观结构并提高机械性能。FSP 在两种不同的 HPDC 铝合金上进行：(a) 通用、高铁 HPDC A380 合金；(b) 优质、低铁 HPDC Aural-5 薄壁平板合金。随后的机械测试表明，屈服强度和拉伸延展性分别提高了 30% 和 65%。此外，FSP 还使 A380 合金的疲劳寿命提高了 ∼ 10 倍，Aural-5 合金的断裂韧性提高了 ∼ 70%。这些发现强调了 FSP 对基于 HPDC 铝合金的结构组件的微观结构进行改性的能力，从而使其能够很好地结合强度、延展性、断裂韧性和高疲劳性能，以获得长期的耐用性和可靠性。

引用次数: 0

Rotary ultrasonic surface machining of silicon: Effects of ultrasonic power and tool rotational speed 硅的旋转超声波表面加工：超声波功率和工具转速的影响

IF 1.9 Q3 ENGINEERING, MANUFACTURING

Manufacturing Letters

Pub Date : 2024-10-01 DOI: 10.1016/j.mfglet.2024.09.063

Sarower Kabir , Shah Rumman Ansary , Yunze Li , Meng Zhang , Weilong Cong

The surging demand for monocrystalline silicon materials in the production of microelectronic components highlights its crucial role in the semiconductor and optic industries. Hence it is inevitable to produce a silicon workpiece with high quality finish to meet the demand in semiconductor industries. Due to high brittleness, controlling the quality of silicon in surface machining is quite difficult. Traditional manufacturing processes induce issues like rough surfaces and edge chipping. It was reported that rotary ultrasonic surface machining (RUSM) can effectively reduce cutting force, roughness, and edge chipping in machining of brittle materials. There have been several studies on drilling and sliding silicon materials using rotary ultrasonic machining investigating the effects of machining parameters on the output variables such as cutting force, torque, edge chipping, surface roughness etc. However, to the best of the authors’ knowledge, there are no reported investigations on effects of machining variables (ultrasonic power and tool rotation speed) in surface machining of silicon materials using the rotary ultrasonic machining. This study aimed to investigate the impacts of ultrasonic power and tool rotation speed on the cutting force, edge chipping, and surface roughness. Experimental results show that the ultrasonic vibration and tool rotation speed had a notable impact on edge chipping and cutting forces. Lastly, the current research has paved the way for widening the research on investigating grinding of the silicon wafer in semiconductor manufacturing with ultrasonic vibration and high rotation speed. In semiconductor wafer manufacturing, grinding process is used to reduce the flatness but generate surface and subsurface damage. With further investigations, RUSM can contribute to reducing these damages.

微电子元件生产对单晶硅材料的需求激增，凸显了它在半导体和光学行业中的重要作用。因此，为满足半导体行业的需求，生产出高质量的硅工件势在必行。由于硅的脆性很高，在表面加工中控制其质量相当困难。传统的制造工艺会导致表面粗糙和边缘崩裂等问题。据报道，旋转超声波表面加工（RUSM）可有效降低脆性材料加工中的切削力、粗糙度和边缘崩角。已有多项关于使用旋转超声波加工钻孔和滑动硅材料的研究，调查了加工参数对切削力、扭矩、边缘崩裂、表面粗糙度等输出变量的影响。然而，就作者所知，还没有关于使用旋转超声波加工硅材料时加工变量（超声波功率和刀具转速）对表面加工影响的研究报告。本研究旨在探讨超声波功率和刀具转速对切削力、边缘崩角和表面粗糙度的影响。实验结果表明，超声波振动和刀具转速对边缘崩角和切削力有显著影响。最后，目前的研究为拓宽研究半导体制造中硅晶片的超声波振动和高转速磨削铺平了道路。在半导体晶片制造过程中，研磨工艺用于降低平面度，但会产生表面和次表面损伤。随着研究的深入，RUSM 可以为减少这些损伤做出贡献。

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引用次数: 0