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Differences and effects of two machine concepts on the manufacturing process of aspherical lenses 两种机器概念对非球面透镜制造过程的差异及影响
Pub Date : 2022-07-15 DOI: 10.1117/12.2632071
R. Hild, Sebastian Stahringer, R. Mandler, M. Degünther
The production of medium to large lenses (200 - 500 mm) is becoming increasingly important against the background of the semiconductor crisis. The value of a lens increases enormously through the entire value chain. A large number of processes are necessary to achieve the final contour and quality. The grinding and polishing processes must be precisely coordinated in order to achieve all requirements. The polishing process is not always a controllable variable, since various chemical and mechanical influences come together and affect the process result. For this reason, it is important to control the grinding process. The question of how it is possible to improve the surface quality as much as possible without allowing any geometric deviations is central. The effect of different machine concepts and their advantages against the background of specific quality requirements is still unknown. Therefore, a comparison of two machine concepts and their effects on the grinding process, the component quality and the possibilities of polishing the generated surfaces will be analyzed in more detail. The focus is on the MCG500 and UPG500 machine concepts from OptoTech Optikmaschinen GmbH. The results show, that the 5-axis grinding machine MCG500 enables a high-quality grinding process, which allows to reach a PV inbetween 1.5 - 3 μm. Compared to the 4-axis machine UPG500, the MCG500 is used as a pre-grinding machine to achieve a PV of 0.4 - 1.5 μm with the help of the UPG500. In addition the, the sub surface damage is only 3 - 7 μm on the UPG500 compared to 10 - 20 μm on the MCG500. With the achieved tolerances of the UPG500, the subsequent polishing process is shortened by approx. 30% compared to the upstream grinding process by the MCG500 and at the same time the process reliability to achieve the final specifications increases.
在半导体危机的背景下,中大型镜片(200 - 500毫米)的生产变得越来越重要。通过整个价值链,镜片的价值会大幅增加。为了达到最终的轮廓和质量,需要进行大量的工序。研磨和抛光过程必须精确协调,以达到所有要求。抛光过程并不总是一个可控变量,因为各种化学和机械影响共同影响过程结果。因此,控制磨削过程是很重要的。如何在不允许任何几何偏差的情况下尽可能提高表面质量的问题是中心问题。不同的机器概念及其优势在特定质量要求背景下的影响仍然是未知的。因此,将更详细地分析两种机器概念的比较及其对磨削过程、部件质量和抛光生成表面的可能性的影响。重点是OptoTech Optikmaschinen GmbH的MCG500和UPG500机器概念。结果表明,五轴磨床MCG500可以实现高质量的磨削工艺,其PV值在1.5 ~ 3 μm之间。与4轴机床UPG500相比,MCG500作为预磨机,在UPG500的帮助下实现了0.4 ~ 1.5 μm的PV。此外,与MCG500的10 ~ 20 μm相比,UPG500的亚表面损伤仅为3 ~ 7 μm。在达到UPG500的公差后,后续的抛光过程缩短了大约。与上游30%的磨削工艺相比,MCG500同时使工艺可靠性达到最终规格的提高。
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引用次数: 0
Atmospheric plasma jet used as polishing tool for optical glasses 大气等离子体射流用作光学眼镜抛光工具
Pub Date : 2022-07-15 DOI: 10.1117/12.2631860
H. Müller, T. Arnold
Plasma Jet assisted smoothing of rough ground optical surfaces is presented. An accurate temperature regime during the process is inevitable to achieve a uniformly smoothed surface. The possibilities for in-process temperature control are demonstrated on the example of Fused Silica and N-BK7® polishing. For both materials, the surface roughness RMS value can be significantly reduced by a factor of 20 to 1000 depending on the material and the initial ground state. An annealing step after smoothing is necessary to minimize birefringence caused by internal stress. The achievement of the existing requirements for precision optics is demonstrated.
提出了等离子体射流辅助光滑粗糙光学表面的方法。为了获得均匀光滑的表面,在加工过程中精确的温度是不可避免的。以熔融二氧化硅和N-BK7®抛光为例,演示了过程中温度控制的可能性。对于这两种材料,根据材料和初始基态的不同,表面粗糙度RMS值可以显着降低20到1000倍。平滑后的退火步骤是必要的,以尽量减少由内应力引起的双折射。论证了现有精密光学要求的实现。
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引用次数: 1
Impact of different types of water as lubricants on roughness and contamination of bound abrasive ground heavy flint glass surfaces 不同类型的水作为润滑剂对黏结磨料地面重火石玻璃表面粗糙度和污染的影响
Pub Date : 2022-07-15 DOI: 10.1117/12.2631964
C. Gerhard, A. Dobis
Mechanical abrasion is usually accepted to be the predominant mechanism during material removal of glass via grinding. However, a certain chemical reaction of the used lubricant with the glass surface as occurring during polishing can be expected. Against this background, the impact of different types of water as lubricants, tap water and distilled deionised water, on surface roughness and the degree of contamination of bound abrasive ground heavy flint glass surfaces was investigated in this contribution. It is shown that in case of distilled deionised water, notably lower surface roughness is obtained. Moreover, huge differences in the presence of hydrogen and calcium were qualitatively measured via laserinduced breakdown spectroscopy. The results indicate that the type of water, and especially its content of mineral trace elements, has a mentionable impact on the grinding process and the state of the ground surface. Smoother surfaces with a lower amount of contaminations were achieved when using distilled deionised water in the course of the grinding process. This fact is of mentionable interest for the production of optical components where usually, optically inactive surfaces remain in the ground state.
机械磨损通常被认为是玻璃研磨去除材料的主要机理。然而,在抛光过程中,可以预期使用的润滑剂与玻璃表面发生某种化学反应。在此背景下,不同类型的水作为润滑剂,自来水和蒸馏去离子水,对表面粗糙度的影响和污染程度的结合磨料研磨重燧石玻璃表面进行了研究。结果表明,在蒸馏去离子水的情况下,表面粗糙度明显降低。此外,通过激光诱导击穿光谱定性测量了氢和钙存在的巨大差异。结果表明,水的类型,特别是矿物微量元素的含量,对磨矿过程和地表状态有重要的影响。当在研磨过程中使用蒸馏去离子水时,表面更光滑,污染物更少。这一事实对于光学元件的生产具有重要意义,通常光学非活性表面保持在基态。
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引用次数: 0
Acoustic measurements for optics 光学声学测量
Pub Date : 2021-06-15 DOI: 10.1117/12.2595330
Olga Kukso, Michael F. Benisch, R. Rascher, Shadrach Sundar, M. Hacker, Manuel Duschl, Michel Nussbaum
The aim of the research was the development of a measurement and analysis method that enables the detection of errors and malfunctions within a machine tools and in the manufacturing process using acoustic sensors (microphones).
该研究的目的是开发一种测量和分析方法,该方法可以使用声学传感器(麦克风)检测机床和制造过程中的错误和故障。
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引用次数: 0
Plasma-induced shaping of liquid-based polymer lenses 等离子体诱导液体基聚合物透镜成形
Pub Date : 2021-06-07 DOI: 10.1117/12.2594607
C. Gerhard, G. Mielke, L. Beste, D. Tasche
Liquid-based lenses are of notable interest for the realization of prototypes, small batch series and even mass-product articles as for example micro lens arrays or low-cost optics. Hence, quite a number of different approaches for the manufacture of such lenses are in hand. The focal length of liquid lenses can be customized by the choice of the used liquid, a modification of its viscosity, for example via heating, substrate coating or overhead storing and curing. In this contribution, we present a further approach based on plasma treatment of the substrate surface where two different effects are generated by the use of different process gases. After treatment, optical cement is applied to the surfaces, forming a plano-convex lens due to surface tension. Argon plasma treatment leads to a reduction of the contact angle and an increase in the focal length of the lens in the course of treatment. The opposite effect, an increase in contact angle and a decrease in focal length, respectively, occurs when using octafluorocyclobutane as process gas. The possible range of currently realizable focal lengths and the particularly underlying effects are presented in this contribution.
液体基透镜对于实现原型、小批量系列甚至批量产品(例如微透镜阵列或低成本光学器件)具有显著的兴趣。因此,相当多的不同的方法来制造这样的镜头是在手。液体透镜的焦距可以通过选择使用的液体来定制,改变其粘度,例如通过加热,基材涂层或头顶储存和固化。在这篇文章中,我们提出了一种基于等离子体处理基底表面的进一步方法,其中使用不同的工艺气体会产生两种不同的效果。处理后,光学水泥被应用到表面,形成一个平凸透镜由于表面张力。氩等离子体处理导致接触角减小,透镜焦距增大。当使用八氟环丁烷作为工艺气体时,会发生相反的效果,即接触角增加和焦距减小。目前可实现的焦距的可能范围和特别潜在的影响提出了这一贡献。
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引用次数: 1
Balancing optical system design and optical fabrication chain design 平衡光学系统设计和光学制造链设计
Pub Date : 2021-06-07 DOI: 10.1117/12.2595065
O. Faehnle, E. Langenbach, I. Livshits
The design of optical systems has two main tasks: (a) their optimal optical performance and (b) their optimal producibility; whereby the latter has to comply with the "magic triangle" of optical performance quality, fabrication cost and manufacturing throughput. Unfortunately, for decades there has been a major mismatch in designing optical systems. On one hand, optical system designers are well supported by State-of-The-Art optical design software tools while on the other hand, the design of optical fabrication chains and their cost, which is strongly interlinked with the parameters and tolerances of the optical system design, is still today completely depending on humans experiences and knowledge. Consequently, while optical system designs are well optimized for optical system performance, their optimization for optimal producibility and manufacturing chain design is not possible during the design phase of the optical system itself. This paper reports on the application of a novel approach to optical design strategies. Within a Swiss research project called PanDao, a new type of software tool was developed enabling the integration of producibility analyses and fabrication chain optimizations into the optical design process. PanDao reads in lens parameters and tolerances as described in the ISO 10110 standards and generates the optimal fabrication chain at minimum cost, taking more than 300 optical fabrication techniques into account.
光学系统的设计有两个主要任务:(a)其最佳光学性能和(b)其最佳生产效率;后者必须符合光学性能质量、制造成本和制造吞吐量的“魔三角”。不幸的是,几十年来,在设计光学系统时存在一个主要的不匹配。一方面,光学系统设计人员得到了最先进的光学设计软件工具的良好支持,另一方面,光学制造链的设计及其成本与光学系统设计的参数和公差密切相关,今天仍然完全取决于人类的经验和知识。因此,虽然光学系统设计在光学系统性能上得到了很好的优化,但在光学系统本身的设计阶段,它们对最佳可生产性和制造链设计的优化是不可能的。本文报道了一种新方法在光学设计策略中的应用。在一个名为PanDao的瑞士研究项目中,开发了一种新型软件工具,可以将可生产性分析和制造链优化集成到光学设计过程中。PanDao根据ISO 10110标准读取透镜参数和公差,并考虑300多种光学制造技术,以最低成本生成最佳制造链。
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引用次数: 0
Knowing the limits: surface deviation in the mid-spatial-frequency range by deflectometric measurements 了解极限:通过偏转测量在中空间频率范围内的表面偏差
Pub Date : 2021-06-07 DOI: 10.1117/12.2601919
R. Kometer, E. Hofbauer
Deflectometric measurements using V-SPOT technology has been proven to achieve accurate surface profiles for aspheres at moderate cost and low preparation effort. In order to extend the resolution limit, the optical and mechanical device has been improved to provide on the one side topography information in the slope domain at high accuracy (< 5 μrad) and an improved lateral resolution (< 0,2 mm) to cover surface profile errors in the mid-spatial-frequency range from 1 to 10 mm-1. Within this publication we are providing the experimental setup and the measurement procedures to achieve production relevant information about the surface quality. Slope deviations of aspheric samples (glass and metal) are analyzed in angular spectral components and the surface profile is compared with interferometric data to proof accuracy and lateral resolution of our device. As final conclusion we outlook for further improvements of the proposed device to allow full control of form deviation and mid-spatial frequency errors.
使用V-SPOT技术的偏转测量已被证明可以以中等成本和低准备工作量获得精确的球体表面轮廓。为了扩大分辨率限制,对光学和机械装置进行了改进,使其在斜坡域中提供高精度(< 5 μrad)的一侧地形信息,并提高了横向分辨率(< 0.2 mm),以覆盖1 ~ 10 mm-1中频范围内的表面轮廓误差。在本出版物中,我们提供了实验设置和测量程序,以实现有关表面质量的生产相关信息。分析了非球面样品(玻璃和金属)的角度光谱分量的斜率偏差,并将表面轮廓与干涉测量数据进行了比较,以证明我们的设备的精度和横向分辨率。作为最后的结论,我们展望进一步改进所提出的设备,以允许完全控制形状偏差和中空间频率误差。
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引用次数: 0
Design of a measuring machine for optical filters 光学滤光片测量机的设计
Pub Date : 2021-06-07 DOI: 10.1117/12.2594445
M. Wagner
Modern optical designs rely on a mix of spherical and aspherical lenses to reduce the element count, weight, overall price and assembly effort of optics. Aspherical elements are commonplace in specialized, high-performance laboratory and medical equipment as well as consumer electronics such as smartphone cameras. To produce these lenses, manufacturing shops need to have the necessary metrology tools, such as stitching interferometers, tactile measuring machines or null correctors for interferometers e.g. CGHs. This requirement may be an economic hurdle for smaller optical shops, which are specialized on small batch or single-item production. Therefore, researchers at THD work on a solution to provide a new class of economic, contactless, light-based measuring machines for aspherical as well as spherical or flat surfaces. The proposed machine is in principle a wavefront sensor and employs for this purpose an angle-sensitive filter e.g. a metallic interference filter. In this paper the steps to gain the prerequisite calibration of angle-sensitive filters are laid out. The commissioning of a filter transmission measuring machine is described. This machine consists of a laser-based illumination system, an angle measurement table, a telecentric lens with a scientific CMOS camera as well as data acquisition and data analysis software. Several “lessons learned” regarding the correct setup and alignment of the system are described. A first filter is measured and a diagram of transmission against angle is presented. A perspective of future work on the system, i.a. the usage of a Shack-Hartmann sensor for an orthogonal alignment of the beam axis with the rotational axis, is given.
现代光学设计依赖于球面和非球面透镜的混合,以减少元件数量,重量,整体价格和光学组装工作。非球面元件在专业的高性能实验室和医疗设备以及智能手机相机等消费电子产品中很常见。为了生产这些透镜,制造车间需要有必要的计量工具,例如拼接干涉仪,触觉测量机或干涉仪的零校正器,例如CGHs。这一要求对于专门从事小批量或单品生产的小型光学商店来说可能是一个经济障碍。因此,THD的研究人员正在研究一种解决方案,为非球面、球面或平面提供一种新型的经济、非接触式、基于光的测量机。所提出的机器原则上是波前传感器,并为此目的采用角敏感滤波器,例如金属干涉滤波器。本文给出了获得角敏感滤波器必要标定的步骤。介绍了滤光透射测量机的调试情况。该机器由激光照明系统、角度测量表、远心镜头和科学的CMOS相机以及数据采集和数据分析软件组成。介绍了关于系统的正确设置和校准的几个“经验教训”。对第一滤波器进行了测量,并给出了透射角图。展望了该系统的未来工作,即使用Shack-Hartmann传感器进行光束轴与旋转轴的正交校准。
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引用次数: 1
Glass-welding with USP-lasers and long working distances 使用usp激光器和长距离工作距离的玻璃焊接
Pub Date : 2021-06-07 DOI: 10.1117/12.2593590
M. Kahle, D. Nodop, P. Wiemuth
The joining of optical glasses is a challenge even with the latest technology. Welding with ultrashort pulsed lasers is a way to join similar or dissimilar glasses without additives or macroscopic thermal tensions. The laser beam is focused through the work piece on the interface to be welded. Due to the high intensity in the laser focus, the beam is absorbed via nonlinear effects in a volume with about 20 µm in diameter. Several laser pulses heat up the material to the working point, while the thermal conductivity limits the heat affected zone well below 1 mm. This process is usually conducted with microscope objectives. Their short working distance limits the thickness of the work piece, the usable laser power and the feed rate of the process. To increase the possible dimensions of the welding partners and the process speed to industrial levels, we present USP-welding with a galvoscanner and a common F-theta-lens. Despite self-focusing effects, our experiments show that the process is stable and controllable. Furthermore, filamentation of the laser beam occurs and long cylindrical weld zones of some micrometers diameter and several hundreds of micrometers height are generated. The enormous length of this molten zone significantly lowers the demands on the work piece adjustment. Tensile tests were conducted on the welded samples. The tests show that the weld can reach a breaking strength in the order of magnitude of the base material.
即使使用最新的技术,光学眼镜的连接也是一个挑战。用超短脉冲激光焊接是一种不需要添加剂或宏观热张力连接相似或不同玻璃的方法。激光束通过工件聚焦在待焊界面上。由于激光聚焦的高强度,光束通过非线性效应在直径约20 μ m的体积内被吸收。几个激光脉冲将材料加热到工作点,而导热性将热影响区限制在1毫米以下。这个过程通常用显微镜物镜进行。它们的工作距离短,限制了工件的厚度、可用激光功率和加工的进给速度。为了将焊接伙伴的可能尺寸和工艺速度提高到工业水平,我们提出了使用电激扫描仪和普通f -theta透镜的usp焊接。尽管存在自聚焦效应,但实验表明该过程是稳定可控的。此外,激光束发生丝化,形成直径几微米、高度几百微米的长圆柱形焊缝区。这一巨大长度的熔化区大大降低了对工件调整的要求。对焊接试样进行了拉伸试验。试验表明,焊缝的断裂强度达到母材的数量级。
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引用次数: 1
Silicone-on-glass (SOG) diffractive optical elements (DOE) for the correction of chromatic aberrations and lens shape 用于校正色差和透镜形状的硅玻璃衍射光学元件(DOE)
Pub Date : 2021-06-07 DOI: 10.1117/12.2595141
H. Ries, R. Leutz
Chromatic aberrations are limiting the imaging performance of lenses. The classical way to correct of chromatic aberrations using flint and crown glasses adds volume, surfaces, and cost to the optical system. We present a novel approach to the problem based on diffractive optical elements (DOE) which can be applied as thin layers of silicone on glass substrates. We explain the optical design, the tooling required for highly efficient DOEs and the manufacturing process.
色差限制了透镜的成像性能。使用燧石和冠状玻璃校正色差的经典方法增加了光学系统的体积、表面和成本。我们提出了一种基于衍射光学元件(DOE)的新方法,这种衍射光学元件可以作为薄层硅树脂应用于玻璃基板上。我们解释了光学设计,高效do所需的工具和制造过程。
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引用次数: 4
期刊
Precision Optics Manufacturing
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