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On the metrology of the MSF errors MSF误差的计量研究
Pub Date : 2018-08-07 DOI: 10.1117/12.2318675
Olga Kukso, R. Rascher, R. Börret, M. Pohl
The aim of our research is to study middle spatial frequency errors (MSFE) on optical surfaces. We investigate the surfaces after all manufacturing processes to find out the main affecting factors and to choose the proper processing parameters to minimize the size of the errors. In this paper we describe some middle spatial frequency errors, which occur during grinding. As there are limited possibilities to measure ground surfaces, their analysis from the point of measurement is most difficult. Therefore, it is of utmost importance to optimally organize the measurement guaranteeing sufficient data for the reconstruction of the toolpath and avoidance of aliasing effects. In the paper discuss possible classifications and some difficulties during measuring of grinded surfaces.
本研究的目的是研究光学表面的中频误差。对加工后的表面进行了研究,找出了主要的影响因素,并选择了合适的加工参数,使加工误差最小。本文对磨削过程中产生的中频误差进行了分析。由于测量地表的可能性有限,因此从测量角度分析地表是最困难的。因此,优化组织测量,保证有足够的数据进行刀具轨迹重建,避免混叠效应是至关重要的。本文讨论了磨削表面测量中可能存在的分类和一些难点。
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引用次数: 1
Efficient assembly of lens objectives using sub-cell alignment turning 利用亚单元对准转动高效装配透镜物镜
Pub Date : 2018-08-07 DOI: 10.1117/12.2318687
C. Buss
Increasing demands for single lenses and lens systems influence in particular their production technology. It has become unfeasible – both technologically as well as financially – to manually adjust lenses in pre-assembled objective lenses. In recent years, it has thus become desirable to automate many steps of the process to chain. This enables new assembly strategies that allow for tilt and air gap accuracies in the micron range and drastically reduce the time and labor of manually correcting for astigmatism and coma at the same time.
对单镜头和镜头系统需求的增加尤其影响了它们的生产技术。无论是在技术上还是在经济上,手动调整预装好的物镜的镜片已经变得不可行。近年来,人们希望将流程中的许多步骤自动化。这使得新的装配策略能够实现微米范围内的倾斜和气隙精度,并同时大大减少人工校正散光和彗差的时间和劳动。
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引用次数: 0
Tilted wave interferometry for testing large surfaces 用于大表面测试的倾斜波干涉测量法
Pub Date : 2018-08-07 DOI: 10.1117/12.2318573
A. Harsch, C. Pruss, A. Haberl, W. Osten
Measuring large surfaces interferometrically is a straight forward established technology, as long as they are concave and spherical. The situation chnages completely if aspheres and freeforms have to be measured. The application of a Tilted Wave Interferometer opens up possibilities to measure large concave surfaces of any shape without compensation optics. For the investigation of large convex aspheres, it is necessary to make use of stitching methods. Due to the freeform capability of the Tilted Wave Interefrometer, it is possible to acquire larger subapertures compared to null interferometers. Therefore measurement and computation time are reduced.
干涉测量大型表面是一种直接建立的技术,只要它们是凹的和球形的。如果要测量球面和自由曲面,情况就完全不同了。倾斜波干涉仪的应用开辟了测量任何形状的大凹面而无需补偿光学的可能性。对于大型凸球的研究,有必要采用拼接方法。由于倾斜波干涉仪的自由形状能力,与零干涉仪相比,它可以获得更大的子孔径。从而减少了测量和计算时间。
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引用次数: 1
Testing high accuracy optics using the phase shifting point diffraction interferometer 用移相点衍射干涉仪测试高精度光学器件
Pub Date : 2018-08-07 DOI: 10.1117/12.2316330
N. Voznesenskiy, Mariia Voznesenskaia, D. Jha
Advanced figuring technology has enabled manufacturing of high accuracy optics for precision applications. The measurement technologies to verify them are largely based on Fizeau interferometry, which is limited in terms of accuracy because of external accessories such as reference flat. Lack of appropriate verification method is adversely affecting the manufacturing and optimization of precision optics. In this paper, we explore a fundamentally different interferometry arrangement, D7 produced by Difrotec. A phase shifting point diffraction interferometer (PSPDI) and present measurement results for concave spheres with an accuracy of λ/1000 PV, and compared this full-shot result with wavefront maps obtained by subaperture stitching (SAS) to verify stitching accuracy. We also describe measurement of asphere cavity using SAS, with higher accuracy, λ/500 RMS, discuss strategies to measure concave/convex spheres and aspheres with R-number ≥ 0.5 with nanometer accuracy, and conclude with perspectives on the future applications of PSPDI D7.
先进的计算技术使高精度光学器件的制造成为可能。验证它们的测量技术主要基于菲索干涉测量法,由于参考平面等外部附件,其精度受到限制。缺乏适当的验证方法对精密光学元件的制造和优化产生了不利的影响。在本文中,我们探索了一种完全不同的干涉测量安排,由Difrotec生产的D7。利用相移点衍射干涉仪(PSPDI)对凹球进行了精度为λ/1000 PV的测量,并将其与子孔径拼接(SAS)获得的波前图进行了比较,验证了拼接精度。本文还介绍了利用SAS对非球面腔体的测量,其测量精度为λ/500 RMS,讨论了以纳米精度测量凹/凸球和r数≥0.5的非球面的策略,并对PSPDI D7的未来应用前景进行了展望。
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引用次数: 1
ABC-polishing ABC-polishing
Pub Date : 2018-08-07 DOI: 10.1117/12.2318549
A. Haberl, J. Liebl, R. Rascher
In the past, steadily increasing demands on the imaging properties of optics have led more and more precise spherical apertures. For a long time, these optical components have been produced in a satisfying quality using classic polishing methods such as pitch polishing. The advance of computer-controlled subaperture (SA) polishing techniques improved the accuracy of spheres. However, this new machine technology also made it possible to produce new lens geometries, such as aspheres. In contrast to classic polishing methods, the high determinism of SA polishing allows a very specific correction of the surface defect. The methods of magneto-rheological finishing (MRF) [1], [2] and ion beam figuring (IBF) [3], [4] stand out in particular because of the achievable shape accuracy. However, this leads to the fact that a principle of manufacturing "As exact as possible, as precise as necessary" [5] is often ignored. The optical surfaces often produced with unnecessary precision, result at least in increased processing times. The increasing interconnection of the production machines and the linking with databases already enables a consistent database to be established. It is possible to store measurements, process characteristics or tolerances for the individual production steps in a structured way. The difficulty, however, lies in the reasonable evaluation of the measurement data. This is where this publication comes in. The smart evaluation of the measurement data with the widespread Zernike polynomials should result in a classification, depending on the required manufacturing tolerance. In combination with the so-called ABC analysis, all surface defects can be categorized. In this way, an analytic breakdown of a - initially confusing - overall problem is made. With the aid of cost functions [6] an evaluation and consequently a deduction of actions is made possible. Thus, for example, the isolated processing of rotationally symmetrical errors in spiral mode, setup times and machining times can be reduced while avoiding mid spatial frequency errors (MSFE) at the same time.
过去,对光学成像性能的要求不断提高,导致越来越多的精确的球面孔径。长期以来,这些光学元件一直使用经典的抛光方法,如沥青抛光,以令人满意的质量生产。计算机控制子孔径(SA)抛光技术的发展提高了球体的精度。然而,这种新的机器技术也使生产新的透镜几何形状成为可能,例如球面。与经典抛光方法相比,SA抛光的高确定性允许对表面缺陷进行非常具体的修正。磁流变精加工(MRF)[1],[2]和离子束成形(IBF)[3],[4]的方法尤其突出,因为可以实现形状精度。然而,这导致了“尽可能精确,必要时尽可能精确”的制造原则[5]经常被忽视。光学表面通常以不必要的精度生产,至少导致加工时间的增加。生产机器的日益相互连接和与数据库的联系已经能够建立一个一致的数据库。可以以结构化的方式存储单个生产步骤的测量值、工艺特性或公差。但难点在于对测量数据的合理评价。这就是这本出版物的由来。使用广泛的泽尼克多项式对测量数据进行智能评估,应根据所需的制造公差进行分类。结合所谓的ABC分析,所有的表面缺陷都可以被分类。通过这种方式,对一个最初令人困惑的总体问题进行了分析分解。在成本函数[6]的帮助下,可以对行为进行评估,从而推导出行为。因此,例如,在螺旋模式下的旋转对称误差的隔离加工,设置时间和加工时间可以减少,同时避免中频误差(MSFE)。
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引用次数: 0
Spectrally controlled source for interferometric measurements of multiple surface cavities 光谱控制源干涉测量多个表面腔
Pub Date : 2018-08-07 DOI: 10.1117/12.2318641
C. Salsbury, J. Posthumus, Artur Olszak
We present a new light source capable of locating interference fringes at an adjustable distance from the interferometer. The spectrum is electronically controlled in such a way that the fringes are limited to only one of the surfaces of the optics under test. With the new source it is straightforward, for example, to measure the parallel surfaces of thin glass plates and multiple surface cavities. Existing interferometers, as well as older systems, can be upgraded with this source. Traditional methods of interferometry are widely used and accepted for simple measurement configurations, but measurement accuracy can decrease rapidly with increasing measurement complexity. For example, coherent interferometry struggles to achieve accurate and repeatable results with the presence of any additional feedback surface in the measurement cavity due to temporally coherent back reflections. Conversely, incoherent interferometers can isolate single surfaces for measurement but require more complex interferometer system designs. As a result, many of these systems are limited in their dynamic range of measurable cavity sizes and present considerable difficulties in the alignment process, increasing total measurement time. Both methods are inherently restricted by the intrinsic properties of their respective source. Spectrally controlled interferometry (SCI) is a source driven method which inherits many advantages from both coherent and incoherent interferometry while evading typical limitations. The sources spectral properties are manipulated to produce a tunable coherence function in measurement space which allows control over the coherence envelope width, the fringe location, and the fringe phase. With this source realization, a host of measurement advantages which simplify measurement complexity and reduce total measurement time becomes available. One major application is the extinction of extraneous surface back reflections. Without any mechanical translation, realignment, or traditional piezoelectric transducers, front and back surfaces of planar optics can be isolated independently and complete phase shifting interferometric (PSI) measurements can be taken. Furthermore, because all control parameters are implemented at the source level, the spectrally controlled source is a good candidate for upgrading existing interferometer systems. In this paper, we present the theoretical background for this source and the implications of the method. Additionally, a multiple surface cavity measurement is provided as a means of demonstrating the spectrally controlled sources capability to isolate individual cavities from detrimental back reflections across a large dynamic range of measurable cavity sizes without mechanical realignment. A discussion of the implementation benefits and practical details will be included. Limitations and comparisons to alternative methods will be addressed, as well.
我们提出了一种新的光源,能够在距离干涉仪可调的距离上定位干涉条纹。光谱是电子控制的,这样条纹就被限制在被测光学器件的一个表面上。例如,有了新的光源,测量薄玻璃板的平行表面和多个表面空腔就很简单了。现有的干涉仪,以及旧的系统,可以用这个源升级。传统的干涉测量方法由于测量结构简单而被广泛使用和接受,但随着测量复杂性的增加,测量精度会迅速下降。例如,当测量腔中存在任何额外的反馈面时,由于时间相干反射,相干干涉测量难以获得准确和可重复的结果。相反,非相干干涉仪可以隔离单个表面进行测量,但需要更复杂的干涉仪系统设计。因此,许多这些系统在其可测量腔尺寸的动态范围内受到限制,并且在校准过程中存在相当大的困难,增加了总测量时间。这两种方法都受到各自源的内在特性的固有限制。光谱控制干涉法是一种源驱动的干涉方法,它既继承了相干干涉法和非相干干涉法的许多优点,又避免了典型的局限性。在测量空间中,对源的光谱特性进行操作,以产生可调谐的相干函数,从而可以控制相干包络宽度、条纹位置和条纹相位。通过这种源的实现,简化了测量复杂性,缩短了总测量时间,从而获得了一系列测量优势。一个主要的应用是消除无关表面的反射。无需任何机械平移、调整或传统的压电换能器,可以独立地隔离平面光学器件的前后表面,并进行完整的相移干涉测量(PSI)。此外,由于所有控制参数都在源级实现,因此光谱控制源是升级现有干涉仪系统的良好候选者。在本文中,我们介绍了这一来源的理论背景和该方法的含义。此外,提供了一个多表面空腔测量作为一种手段,证明光谱控制源能够在可测量的空腔尺寸的大动态范围内隔离单个空腔,而不需要机械调整。将包括对实现好处和实际细节的讨论。局限性和比较替代方法也将解决。
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引用次数: 1
Closed-loop next generation laser polishing 闭环下一代激光抛光
Pub Date : 2018-08-07 DOI: 10.1117/12.2318749
R. Rascher, C. Vogt, O. Fähnle, Daewook Kim
A novel fabrication parameter controlling method for laser polishing processes called CLasso (Control of LASer Surface Optimization) is presented, monitoring within the footprint the smoothening process as well as the removal of ssd in situ. Therefore, it is possible to determine and control the optimum dwell time a footprint needs to stay at a certain point before moving further enabling a more stable and cost optimized polishing.
提出了一种新的激光抛光工艺参数控制方法——激光表面优化控制(CLasso, Control of laser Surface Optimization),该方法可以在光足迹内监测光滑过程以及原位ssd的去除。因此,在进一步实现更稳定和成本优化的抛光之前,可以确定和控制足迹需要停留在某一点上的最佳停留时间。
{"title":"Closed-loop next generation laser polishing","authors":"R. Rascher, C. Vogt, O. Fähnle, Daewook Kim","doi":"10.1117/12.2318749","DOIUrl":"https://doi.org/10.1117/12.2318749","url":null,"abstract":"A novel fabrication parameter controlling method for laser polishing processes called CLasso (Control of LASer Surface Optimization) is presented, monitoring within the footprint the smoothening process as well as the removal of ssd in situ. Therefore, it is possible to determine and control the optimum dwell time a footprint needs to stay at a certain point before moving further enabling a more stable and cost optimized polishing.","PeriodicalId":422212,"journal":{"name":"Precision Optics Manufacturing","volume":"11 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-08-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128948253","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Flatness metrology based on small-angle deflectometric procedures with electronic tiltmeters 基于电子倾斜仪的小角度偏转测量程序的平面测量
Pub Date : 2017-06-15 DOI: 10.1117/12.2268288
G. Ehret, S. Laubach, M. Schulz
The measurement of optical flats, e. g. synchrotron or XFEL mirrors, with single nanometer topography uncertainty is still challenging. At PTB, we apply for this task small-angle deflectometry in which the angle between the direction of the beam sent to the surface and the beam detected is small. Conventional deflectometric systems measure the surface angle with autocollimators whose light beam also represents the straightness reference. An advanced flatness metrology system was recently implemented at PTB that separates the straightness reference task from the angle detection task. We call it ‘Exact Autocollimation Deflectometric Scanning’ because the specimen is slightly tilted in such a way that at every scanning position the specimen is ‘exactly’ perpendicular to the reference light beam directed by a pentaprism to the surface under test. The tilt angle of the surface is then measured with an additional autocollimator. The advantage of the EADS method is that the two tasks (straightness reference and measurement of surface slope) are separated and each of these can be optimized independently. The idea presented in this paper is to replace this additional autocollimator by one or more electro-mechanical tiltmeters, which are typically faster and have a higher resolution than highly accurate commercially available autocollimators. We investigate the point stability and the linearity of a highly accurate electronic tiltmeter. The pros and cons of using tiltmeters in flatness metrology are discussed.
测量具有单纳米形貌不确定度的光学平面,例如同步加速器或XFEL反射镜,仍然具有挑战性。在PTB中,我们采用小角度偏转法,即发送到表面的光束方向与检测到的光束方向之间的夹角很小。传统的偏转测量系统使用自准直器测量表面角度,其光束也代表直线参考。最近在PTB实施了一种先进的平面度测量系统,该系统将直线度参考任务与角度检测任务分离开来。我们称之为“精确自准直偏转扫描”,因为在每个扫描位置,样品都“完全”垂直于由五棱镜指向被测表面的参考光束。然后用附加的自准直仪测量表面的倾斜角。EADS方法的优点是将直线度参考和地表坡度测量两项任务分离开来,可以独立进行优化。本文提出的想法是用一个或多个机电倾斜仪取代这个额外的自准直仪,这通常比高度精确的商用自准直仪更快,分辨率更高。研究了高精度电子倾斜仪的点稳定性和线性度。讨论了在平面度测量中使用倾斜仪的利弊。
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引用次数: 1
Actuator design for vibration assisted machining of high performance materials with ultrasonically modulated cutting speed 用于超声调制切削速度的高性能材料振动辅助加工的驱动器设计
Pub Date : 2017-06-15 DOI: 10.1117/12.2272133
Philipp M. Rinck, Sebastian Sitzberger, M. F. Zaeh
In vibration assisted machining, an additional high-frequency oscillation is superimposed on the kinematics of the conventional machining process. This generates oscillations on the cutting edge in the range of a few micrometers, thereby causing a high-frequency change in the cutting speed or the feed. Consequently, a reduction of cutting forces, an increase of the tool life as well as an improvement of the workpiece quality can be achieved. In milling and grinding it has been shown that these effects are already partially present in the case of a vibration excitation in axial direction relative to the workpiece, which is perpendicular to the cutting direction. Further improvements of the process results can be achieved by superimposing a vibration in cutting direction and thus modifying the cutting speed at high frequency. The presented work shows the design of an ultrasonic actuator that enables vibration-assisted milling and grinding with ultrasonically modulated cutting speed. The actuator system superimposes a longitudinal torsional ultrasonic oscillation to the milling or grinding tool. It uses a bolt clamped Langevin transducer and a helically slotted horn, which degenerates the longitudinal vibration into a combined longitudinal torsional (L-T) vibration at the output surface. A finite element analysis is used to determine the vibration resonance frequency and mode shapes to maximize the torsional output. Afterwards, the simulation has been experimentally validated.
在振动辅助加工中,一个附加的高频振荡叠加在传统加工过程的运动学上。这在切削刃上产生几微米范围内的振荡,从而引起切削速度或进给的高频变化。因此,可以减少切削力,增加刀具寿命以及改善工件质量。在铣削和磨削中,已经表明,在相对于工件垂直于切削方向的轴向振动激励的情况下,这些影响已经部分存在。通过在切削方向上叠加振动,从而在高频处改变切削速度,可以进一步改善加工结果。所提出的工作展示了超声驱动器的设计,使振动辅助铣削和磨削超声调制的切割速度。执行器系统将纵向扭转超声振荡叠加到铣削或磨削工具上。它采用螺栓夹紧的朗格万换能器和螺旋开槽的喇叭,在输出表面将纵向振动退化为组合纵向扭转(L-T)振动。采用有限元分析确定振动共振频率和模态振型,使扭转输出最大化。然后,对仿真结果进行了实验验证。
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引用次数: 5
More steps towards process automation for optical fabrication 光学制造过程自动化的更多步骤
Pub Date : 2017-06-15 DOI: 10.1117/12.2275231
D. Walker, Guoyu Yu, A. Beaucamp, Matt Bibby, Hongyu Li, L. Mccluskey, S. Petrovic, Christina Reynolds
In the context of Industrie 4.0, we have previously described the roles of robots in optical processing, and their complementarity with classical CNC machines, providing both processing and automation functions. After having demonstrated robotic moving of parts between a CNC polisher and metrology station, and auto-fringe-acquisition, we have moved on to automate the wash-down operation. This is part of a wider strategy we describe in this paper, leading towards automating the decision-making operations required before and throughout an optical manufacturing cycle.
在工业4.0的背景下,我们之前已经描述了机器人在光学加工中的作用,以及它们与经典数控机床的互补作用,同时提供加工和自动化功能。在演示了CNC抛光机和计量站之间的机器人移动部件以及自动条纹采集之后,我们已经转向自动化冲洗操作。这是我们在本文中描述的更广泛战略的一部分,导致在光学制造周期之前和整个过程中所需的决策操作自动化。
{"title":"More steps towards process automation for optical fabrication","authors":"D. Walker, Guoyu Yu, A. Beaucamp, Matt Bibby, Hongyu Li, L. Mccluskey, S. Petrovic, Christina Reynolds","doi":"10.1117/12.2275231","DOIUrl":"https://doi.org/10.1117/12.2275231","url":null,"abstract":"In the context of Industrie 4.0, we have previously described the roles of robots in optical processing, and their complementarity with classical CNC machines, providing both processing and automation functions. After having demonstrated robotic moving of parts between a CNC polisher and metrology station, and auto-fringe-acquisition, we have moved on to automate the wash-down operation. This is part of a wider strategy we describe in this paper, leading towards automating the decision-making operations required before and throughout an optical manufacturing cycle.","PeriodicalId":422212,"journal":{"name":"Precision Optics Manufacturing","volume":"29 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-06-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114715407","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 5
期刊
Precision Optics Manufacturing
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