首页 > 最新文献

Precision Optics Manufacturing最新文献

英文 中文
Concept of a two-part clamping system for lenses in optical metrology 光学计量中镜头两部分夹持系统的概念
Pub Date : 2020-07-08 DOI: 10.1117/12.2566547
Sebastian Sitzberger, J. Liebl, C. Trum, R. Rascher
The developed concept represents a universally applicable clamping system designed to fit in any measuring machine with any measuring principle. The design ensures that, as long as the lens remains clamped, the measurement results are reproducible. Form errors due to tension remain constant across all measuring and processing steps. The version presented in this paper was developed especially for small lenses in the diameter range up to 40 mm. On the one hand, the design allows for fast measurement of loose lenses. On the other hand, the device can also be used for measurement comparisons, since lenses can also be mounted permanently. In the following, the concept and first results of measurement tests are presented.
开发的概念代表了一个普遍适用的夹紧系统,设计适合于任何测量机与任何测量原理。设计确保,只要镜头保持夹紧,测量结果是可重复的。由于张力的形式误差在所有测量和加工步骤中保持不变。本文介绍的版本是专门为直径40毫米以下的小镜头开发的。一方面,该设计允许快速测量松散的镜片。另一方面,该设备也可以用于测量比较,因为镜头也可以永久安装。下面,介绍了测量试验的概念和初步结果。
{"title":"Concept of a two-part clamping system for lenses in optical metrology","authors":"Sebastian Sitzberger, J. Liebl, C. Trum, R. Rascher","doi":"10.1117/12.2566547","DOIUrl":"https://doi.org/10.1117/12.2566547","url":null,"abstract":"The developed concept represents a universally applicable clamping system designed to fit in any measuring machine with any measuring principle. The design ensures that, as long as the lens remains clamped, the measurement results are reproducible. Form errors due to tension remain constant across all measuring and processing steps. The version presented in this paper was developed especially for small lenses in the diameter range up to 40 mm. On the one hand, the design allows for fast measurement of loose lenses. On the other hand, the device can also be used for measurement comparisons, since lenses can also be mounted permanently. In the following, the concept and first results of measurement tests are presented.","PeriodicalId":422212,"journal":{"name":"Precision Optics Manufacturing","volume":"81 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2020-07-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129772844","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Influencing factors for a continuous wave UV-laser component 连续波紫外激光器元件的影响因素
Pub Date : 2020-07-08 DOI: 10.1117/12.2564916
Jessica Stelzl, C. Wünsche, S. Höfer
During the development of an optical system, one comes to the point where you have to build the optically active element into a mechanical device that becomes part of the system. At this point you come across the well-known question that it is not only necessary to consider and ensure the quality of the individual element. It is also important to look at the entire component in order to identify potential influencing factors on the performance of the optical system. At the beginning of a two-year project at Technologiecampus Teisnach the polishing process of a nonlinear crystal as the crucial component of the optical system was being explored. This system is designed to create continuous wave laser beams in the deep UV range. The crystal has to be embedded between two prisms. Roughness and shape of the crystal is ensured via the polishing process which alone has many influencing factors and was examined at the beginning of the project. The quality of the crystal can be as good as it can be, but if the contacting prisms do not fit, the whole prism-coupled device will become unusable in the overall optical laser system. The performance of the laser can only be achieved by harmonizing all elements of the PCD and the PCD itself into the laser set-up. In the current phase of the project this question will be dealt with. The prism-coupled device is split up into its individual parts, which are the nonlinear crystal, the prisms as optical auxiliary components, micro screws and mechanical support. Going through the requirements to the properties of the crystal and their limitations, the influence of the PCD on the optical performance of the crystal is presented. Here, the main focus is placed on the mode of fixing the crystal between the prisms and on putting the stack of crystal and prisms in the laser beam. The influencing factors between the crystal, the prisms and the method of fixing the PCD are described.
在光学系统的开发过程中,我们必须将光学主动元件构建到成为系统一部分的机械装置中。在这一点上,您遇到了一个众所周知的问题,即不仅需要考虑和确保单个元素的质量。为了确定对光学系统性能的潜在影响因素,观察整个组件也很重要。在technologiescampus Teisnach一项为期两年的项目开始时,研究人员正在探索作为光学系统关键组成部分的非线性晶体的抛光过程。该系统旨在产生深紫外范围内的连续波激光束。晶体必须嵌在两个棱镜之间。晶体的粗糙度和形状是通过抛光过程来保证的,抛光过程本身有许多影响因素,并在项目开始时进行了检查。晶体的质量可以尽可能好,但如果接触棱镜不匹配,整个棱镜耦合装置将在整个光学激光系统中无法使用。激光器的性能只能通过协调PCD的所有元素和PCD本身进入激光设置来实现。在项目的当前阶段,将处理这个问题。棱镜耦合装置分为非线性晶体、作为光学辅助元件的棱镜、微螺杆和机械支撑等独立部件。通过对晶体性能的要求及其局限性,介绍了PCD对晶体光学性能的影响。本文主要讨论了晶体在棱镜间的固定方式以及晶体与棱镜的叠加方式。介绍了晶体、棱镜和PCD固定方法之间的影响因素。
{"title":"Influencing factors for a continuous wave UV-laser component","authors":"Jessica Stelzl, C. Wünsche, S. Höfer","doi":"10.1117/12.2564916","DOIUrl":"https://doi.org/10.1117/12.2564916","url":null,"abstract":"During the development of an optical system, one comes to the point where you have to build the optically active element into a mechanical device that becomes part of the system. At this point you come across the well-known question that it is not only necessary to consider and ensure the quality of the individual element. It is also important to look at the entire component in order to identify potential influencing factors on the performance of the optical system. At the beginning of a two-year project at Technologiecampus Teisnach the polishing process of a nonlinear crystal as the crucial component of the optical system was being explored. This system is designed to create continuous wave laser beams in the deep UV range. The crystal has to be embedded between two prisms. Roughness and shape of the crystal is ensured via the polishing process which alone has many influencing factors and was examined at the beginning of the project. The quality of the crystal can be as good as it can be, but if the contacting prisms do not fit, the whole prism-coupled device will become unusable in the overall optical laser system. The performance of the laser can only be achieved by harmonizing all elements of the PCD and the PCD itself into the laser set-up. In the current phase of the project this question will be dealt with. The prism-coupled device is split up into its individual parts, which are the nonlinear crystal, the prisms as optical auxiliary components, micro screws and mechanical support. Going through the requirements to the properties of the crystal and their limitations, the influence of the PCD on the optical performance of the crystal is presented. Here, the main focus is placed on the mode of fixing the crystal between the prisms and on putting the stack of crystal and prisms in the laser beam. The influencing factors between the crystal, the prisms and the method of fixing the PCD are described.","PeriodicalId":422212,"journal":{"name":"Precision Optics Manufacturing","volume":"41 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2020-07-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116495088","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Non-ablative removal of sub surface damages in grinded optical glass substrates by controlled melting of thin surface layers using CO2-laser radiation 利用co2激光辐射控制薄表面层熔化,非烧蚀去除研磨光学玻璃基板的亚表面损伤
Pub Date : 2020-07-08 DOI: 10.1117/12.2564801
M. Jung, C. Trum, Beate Schmidbauer, E. Willenborg, R. Rascher
The form generation of optical surfaces by grinding and mechanical polishing results in small sub surface damages in the form of micro cracks that conventionally have to be removed by further removal of the damaged surface layers. In order to reduce process time and material cost non-ablative methods for removal of micro cracks are desired. Utilising the low optical penetration depths of less than 10 μm for CO2-laser radiation in glass, the laser energy can be used to heat up and melt thin surface layers. Using a 1.5 kW CO2-laser, a quasi-line focus formed by a scanner unit and a constant feed speed, it is possible to close all micro cracks present in the rough grinded test surfaces (max. SSD-depth ~ 63 μm), while achieving a process time of less than 2 seconds for a Ø 30 mm N-BK7 lens, respectively 7.5 seconds for fused silica. With a Sa as low as 50 nm and low distortion from the original shape the surfaces can directly be conventionally polished, further reducing the process chain complexity.
通过研磨和机械抛光产生的光学表面会产生微裂纹形式的小亚表面损伤,通常必须通过进一步去除损坏的表面层来消除这些损伤。为了减少加工时间和材料成本,需要非烧蚀法去除微裂纹。利用co2激光在玻璃中的低光穿透深度小于10 μm,激光能量可以用来加热和熔化薄的表面层。使用1.5 kW的co2激光器,由扫描器单元形成的准线聚焦和恒定的进给速度,可以关闭粗糙研磨测试表面上存在的所有微裂纹。同时,对于Ø 30 mm N-BK7透镜的工艺时间小于2秒,而对于熔融二氧化硅透镜的工艺时间为7.5秒。由于Sa低至50 nm,并且与原始形状的畸变很小,因此可以直接对表面进行常规抛光,进一步降低了工艺链的复杂性。
{"title":"Non-ablative removal of sub surface damages in grinded optical glass substrates by controlled melting of thin surface layers using CO2-laser radiation","authors":"M. Jung, C. Trum, Beate Schmidbauer, E. Willenborg, R. Rascher","doi":"10.1117/12.2564801","DOIUrl":"https://doi.org/10.1117/12.2564801","url":null,"abstract":"The form generation of optical surfaces by grinding and mechanical polishing results in small sub surface damages in the form of micro cracks that conventionally have to be removed by further removal of the damaged surface layers. In order to reduce process time and material cost non-ablative methods for removal of micro cracks are desired. Utilising the low optical penetration depths of less than 10 μm for CO2-laser radiation in glass, the laser energy can be used to heat up and melt thin surface layers. Using a 1.5 kW CO2-laser, a quasi-line focus formed by a scanner unit and a constant feed speed, it is possible to close all micro cracks present in the rough grinded test surfaces (max. SSD-depth ~ 63 μm), while achieving a process time of less than 2 seconds for a Ø 30 mm N-BK7 lens, respectively 7.5 seconds for fused silica. With a Sa as low as 50 nm and low distortion from the original shape the surfaces can directly be conventionally polished, further reducing the process chain complexity.","PeriodicalId":422212,"journal":{"name":"Precision Optics Manufacturing","volume":"74 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2020-07-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114698799","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
The NPMM-200: large area high resolution for freeform surface measurement NPMM-200:用于自由曲面测量的大面积高分辨率
Pub Date : 2020-07-08 DOI: 10.1117/12.2564918
Christian Schober, C. Pruss, A. Herkommer, W. Osten
Nanometer resolution metrology is a significant topic in the development and production of complex shaped high precision optics. The Nanopositioning and Nanomeasuring Machine NPMM-200 at ITO is built for nanometer scale positioning in a large scale measurement volume of 200 mm x 200 mm x 25 mm. The concept of the machine is based on a high precision interferometrically controlled stage in a stable metrological frame made of glass-ceramic. In this frame, different types of sensors can be attached for measurement of surface topographies. In this contribution, we present the use of optical sensors, such as a fixed focus probe, for measuring of high precision aspheric and freeform optics with this new machine.
纳米分辨率测量是复杂形状高精度光学器件开发和生产中的一个重要课题。ITO的纳米定位和纳米测量机NPMM-200专为200 mm x 200 mm x 25 mm的大规模测量体积的纳米级定位而设计。该机器的概念是基于一个高精度的干涉测量控制阶段在一个稳定的计量框架由玻璃陶瓷制成。在这个框架中,可以附加不同类型的传感器来测量表面地形。在这篇文章中,我们介绍了使用光学传感器,如固定焦点探头,测量高精度非球面和自由曲面光学与这台新机器。
{"title":"The NPMM-200: large area high resolution for freeform surface measurement","authors":"Christian Schober, C. Pruss, A. Herkommer, W. Osten","doi":"10.1117/12.2564918","DOIUrl":"https://doi.org/10.1117/12.2564918","url":null,"abstract":"Nanometer resolution metrology is a significant topic in the development and production of complex shaped high precision optics. The Nanopositioning and Nanomeasuring Machine NPMM-200 at ITO is built for nanometer scale positioning in a large scale measurement volume of 200 mm x 200 mm x 25 mm. The concept of the machine is based on a high precision interferometrically controlled stage in a stable metrological frame made of glass-ceramic. In this frame, different types of sensors can be attached for measurement of surface topographies. In this contribution, we present the use of optical sensors, such as a fixed focus probe, for measuring of high precision aspheric and freeform optics with this new machine.","PeriodicalId":422212,"journal":{"name":"Precision Optics Manufacturing","volume":"33 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2020-07-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131104320","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Computer-aided beam path generation and assessment for Stevick-Paul telescopes 史蒂夫克-保罗望远镜的计算机辅助光束路径生成与评估
Pub Date : 2020-07-08 DOI: 10.1117/12.2564852
M. Wagner, G. Fütterer
At Deggendorf Institute of Technology a student project is currently under way to build a Stevick-Paul telescope for astrophotography. An important step in the overall development procedure of each telescope is the design of a beam-path and ensuring its suitability under optical and engineering aspects. The students performed this process in a sequential manner by using several different computer programs (e.g. MATLAB, Zemax, Creo Parametric). To accelerate the beam path design process, a Python program to automate the major part of the design process with minimum human supervision was created. The input data of the python program consists of ranges of the desired characteristics of the Stevick-Paul telescope, such as focal lengths, primary mirror diameters and tilts etc., mirror thickness and mount geometries, as well as the specific type of camera. After setting the input, the program creates 2D cross-sections of beam paths according to the formulas of D. Stevick and may introduce a flat fold mirror to reduce the overall system size as well as improve the accessibility of the focus plane. The subsequent assessment routine checks against the susceptibility for stray light and performs a complex analysis of the available installation space to ensure sufficient mechanical tolerances. In this way, collisions between mirrors, mounts and cameras are avoided and obstructions of the beam path are prevented. At any stage, the program can produce graphical representations of the beam paths. In this paper the computer-aided design of a telescope beam path with a focal length of 2400 mm is demonstrated. During development of the software, a subset of folded Stevick-Paul telescopes, in which certain components are parallel, was found. This subset may be useful to simplify the alignment procedure. In conclusion, further refinement of the software is necessary, although the program is already a useful aid for certain aspects when creating a beam path design.
在德根多夫理工学院,一个学生项目正在进行中,目的是建造一个用于天文摄影的史蒂夫克-保罗望远镜。在每个望远镜的整个开发过程中,一个重要的步骤是设计光束路径,并确保其在光学和工程方面的适用性。学生们使用几个不同的计算机程序(例如MATLAB, Zemax, Creo Parametric)以顺序的方式完成了这个过程。为了加速光束路径的设计过程,我们创建了一个Python程序,以最少的人工监督来自动化设计过程的主要部分。python程序的输入数据包括stewick - paul望远镜的期望特性范围,如焦距、主镜直径和倾角等,反射镜厚度和安装几何形状,以及特定类型的相机。设置输入后,程序创建二维截面梁的路径的公式d Stevick和可能会引入平面折叠镜来减少整个系统的大小以及提高可访问性焦点平面。后续评估常规检查对杂散光的易感性和执行一个复杂的分析可用的安装空间,以确保足够的机械公差。通过这种方式,避免了镜子、支架和相机之间的碰撞,并防止了光束路径的阻碍。在任何阶段,该程序都可以生成光束路径的图形表示。本文论述了焦距为2400 mm的望远镜光束路径的计算机辅助设计。在软件开发过程中,发现了折叠的史蒂夫克-保罗望远镜的子集,其中某些组件是平行的。这个子集可能有助于简化对齐过程。总之,进一步完善的软件是必要的,虽然程序已经是一个有用的援助,当创建一个光束路径设计的某些方面。
{"title":"Computer-aided beam path generation and assessment for Stevick-Paul telescopes","authors":"M. Wagner, G. Fütterer","doi":"10.1117/12.2564852","DOIUrl":"https://doi.org/10.1117/12.2564852","url":null,"abstract":"At Deggendorf Institute of Technology a student project is currently under way to build a Stevick-Paul telescope for astrophotography. An important step in the overall development procedure of each telescope is the design of a beam-path and ensuring its suitability under optical and engineering aspects. The students performed this process in a sequential manner by using several different computer programs (e.g. MATLAB, Zemax, Creo Parametric). To accelerate the beam path design process, a Python program to automate the major part of the design process with minimum human supervision was created. The input data of the python program consists of ranges of the desired characteristics of the Stevick-Paul telescope, such as focal lengths, primary mirror diameters and tilts etc., mirror thickness and mount geometries, as well as the specific type of camera. After setting the input, the program creates 2D cross-sections of beam paths according to the formulas of D. Stevick and may introduce a flat fold mirror to reduce the overall system size as well as improve the accessibility of the focus plane. The subsequent assessment routine checks against the susceptibility for stray light and performs a complex analysis of the available installation space to ensure sufficient mechanical tolerances. In this way, collisions between mirrors, mounts and cameras are avoided and obstructions of the beam path are prevented. At any stage, the program can produce graphical representations of the beam paths. In this paper the computer-aided design of a telescope beam path with a focal length of 2400 mm is demonstrated. During development of the software, a subset of folded Stevick-Paul telescopes, in which certain components are parallel, was found. This subset may be useful to simplify the alignment procedure. In conclusion, further refinement of the software is necessary, although the program is already a useful aid for certain aspects when creating a beam path design.","PeriodicalId":422212,"journal":{"name":"Precision Optics Manufacturing","volume":"46 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2020-07-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131040616","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Applications of cold atmospheric pressure plasmas in optics manufacturing 冷大气压等离子体在光学制造中的应用
Pub Date : 2020-07-08 DOI: 10.1117/12.2564862
C. Gerhard
Finishing of optical components is one of the main challenging tasks in optics manufacturing. This includes precision polishing, smoothing, and surface modification, e.g. for subsequent contact bonding. Recent developments have shown that the use of dielectric barrier discharge plasmas at atmospheric pressure allows for the conception and realization of novel approaches for such surface finishing. Since this type of plasma stands out due a low gas temperature, it is also referred to as “cold” plasma. It is thus suitable for the treatment of temperature-sensitive optical media. In this contribution, selected applications of such plasmas in optics manufacturing are presented. First, it is shown that precision polishing of different optical media can be achieved by the use of direct plasma discharges with an inert process gas. By the plasma-induced selective removal of roughness peaks, a notable decrease in surface roughness of the initial value was obtained. Second, plasma-induced cleaning of optics surfaces including the underlying plasma-physical and plasmachemical mechanisms is presented. Here, not only surface-adherent carbonaceous contaminations, but also residues from polishing agents and other operating materials can be removed. Such cleaning results in several advantageous effects as for example an increase in laser-induced damage threshold or a modification in free surface energy, leading to an improved adhesion of coatings and cements. Finally, plasma treatment is suitable for refractive index matching of glass surfaces by a plasma-induced modification of the chemical composition of the near-surface glass layer.
光学元件的精加工是光学制造中最具挑战性的任务之一。这包括精密抛光、平滑和表面修饰,例如用于后续的接触粘合。最近的发展表明,在大气压下使用介质阻挡放电等离子体,可以构思和实现这种表面处理的新方法。由于这种类型的等离子体由于气体温度低而突出,它也被称为“冷”等离子体。因此,它适用于处理温度敏感的光学介质。在这篇文章中,介绍了这种等离子体在光学制造中的应用。首先,通过使用惰性工艺气体直接等离子体放电可以实现不同光学介质的精密抛光。通过等离子体诱导的选择性去除粗糙度峰,获得了初始值表面粗糙度的显著降低。其次,介绍了等离子体诱导的光学表面清洁,包括潜在的等离子体物理和等离子体力学机制。在这里,不仅可以去除表面附着的碳质污染物,还可以去除抛光剂和其他操作材料的残留物。这样的清洗会产生一些有利的效果,例如激光诱导损伤阈值的增加或自由表面能的改变,从而改善涂层和水泥的附着力。最后,通过等离子体诱导近表面玻璃层化学成分的修饰,等离子体处理适合于玻璃表面的折射率匹配。
{"title":"Applications of cold atmospheric pressure plasmas in optics manufacturing","authors":"C. Gerhard","doi":"10.1117/12.2564862","DOIUrl":"https://doi.org/10.1117/12.2564862","url":null,"abstract":"Finishing of optical components is one of the main challenging tasks in optics manufacturing. This includes precision polishing, smoothing, and surface modification, e.g. for subsequent contact bonding. Recent developments have shown that the use of dielectric barrier discharge plasmas at atmospheric pressure allows for the conception and realization of novel approaches for such surface finishing. Since this type of plasma stands out due a low gas temperature, it is also referred to as “cold” plasma. It is thus suitable for the treatment of temperature-sensitive optical media. In this contribution, selected applications of such plasmas in optics manufacturing are presented. First, it is shown that precision polishing of different optical media can be achieved by the use of direct plasma discharges with an inert process gas. By the plasma-induced selective removal of roughness peaks, a notable decrease in surface roughness of the initial value was obtained. Second, plasma-induced cleaning of optics surfaces including the underlying plasma-physical and plasmachemical mechanisms is presented. Here, not only surface-adherent carbonaceous contaminations, but also residues from polishing agents and other operating materials can be removed. Such cleaning results in several advantageous effects as for example an increase in laser-induced damage threshold or a modification in free surface energy, leading to an improved adhesion of coatings and cements. Finally, plasma treatment is suitable for refractive index matching of glass surfaces by a plasma-induced modification of the chemical composition of the near-surface glass layer.","PeriodicalId":422212,"journal":{"name":"Precision Optics Manufacturing","volume":"118 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2020-07-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128447696","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Spectrally controlled interferometry for high numerical aperture spherical cavity measurements 高数值孔径球腔测量的光谱控制干涉测量
Pub Date : 2019-06-28 DOI: 10.1117/12.2527151
C. Salsbury, Donald A. Pearson, Artur Olszak
High numerical aperture optical elements are relied on for the most demanding applications in optical imaging but pose a significant challenge for conventional metrology techniques. Laser Fizeau interferometers provide a flexible measurement platform for measuring spherical optics by offering a common path configuration to test spherical optics against a convex reference surface. However, in this configuration, traditional piezoelectric transducer (PZT) based phase shifters produce non-uniform phase shifts which vary across the aperture as the spherical reference surface is translated along the optical axis. While these errors are negligible for low numerical aperture optics, the phase shift errors quickly become significant for high numerical aperture optics. The phase shift nonuniformity results in fringe print through and phase ripple artifacts which limit overall accuracy of phase shifted interferometry (PSI) measurements. Spectrally controlled interferometry (SCI) is a method which produces localized, high contrast interference fringes in non-zero optical path length cavities through tailored control of the sources spectral distribution. In addition to fringe location, fringe phase is also controlled through spectrum manipulation without mechanical motion or compensation. As a consequence, the SCI method produces uniform, full-aperture phase shifts with a high degree of linearity regardless of numerical aperture; thus, phase shift errors associated with traditional PZTs can be eliminated. Furthermore, because SCI is a source driven method, it can easily be integrated with any Fizeau interferometer. In this paper, we present the fundamental background for SCI and the advantages of the method as they apply to the measurement of high numerical aperture spherical optics. Additionally, we compare PSI measurements between a traditional laser Fizeau interferometer with PZT based phase shifters and an SCI Fizeau interferometer. Existing methods to this problem are discussed and compared with the presented SCI method, as well.
高数值孔径光学元件是光学成像中最苛刻的应用,但对传统的计量技术提出了重大挑战。激光菲索干涉仪提供了一个灵活的测量平台,通过提供一个共同的路径配置来测试球面光学对凸参考表面。然而,在这种配置中,传统的基于压电换能器(PZT)的移相器会产生不均匀的相移,当球面参考面沿着光轴平移时,相移会在孔径范围内变化。而这些误差是可以忽略不计的低数值孔径光学,相移误差迅速成为显著的高数值孔径光学。相移不均匀性导致条纹打印穿过和相纹伪影,限制了相移干涉测量(PSI)的整体精度。光谱控制干涉法是一种在非零光程长度的空腔中通过对光源光谱分布的定制控制而产生局部高对比度干涉条纹的方法。除了条纹位置外,还可以通过谱操作来控制条纹相位,而无需机械运动或补偿。因此,无论数值孔径如何,SCI方法都会产生均匀的全孔径相移,并且具有高度线性;因此,可以消除与传统压电陶瓷相关的相移误差。此外,由于SCI是一种源驱动方法,它可以很容易地与任何菲索干涉仪集成。本文介绍了SCI的基本背景,以及该方法应用于大数值孔径球面光学测量的优点。此外,我们比较了采用PZT移相器的传统激光菲索干涉仪和SCI菲索干涉仪之间的PSI测量结果。讨论了现有的方法,并与SCI方法进行了比较。
{"title":"Spectrally controlled interferometry for high numerical aperture spherical cavity measurements","authors":"C. Salsbury, Donald A. Pearson, Artur Olszak","doi":"10.1117/12.2527151","DOIUrl":"https://doi.org/10.1117/12.2527151","url":null,"abstract":"High numerical aperture optical elements are relied on for the most demanding applications in optical imaging but pose a significant challenge for conventional metrology techniques. Laser Fizeau interferometers provide a flexible measurement platform for measuring spherical optics by offering a common path configuration to test spherical optics against a convex reference surface. However, in this configuration, traditional piezoelectric transducer (PZT) based phase shifters produce non-uniform phase shifts which vary across the aperture as the spherical reference surface is translated along the optical axis. While these errors are negligible for low numerical aperture optics, the phase shift errors quickly become significant for high numerical aperture optics. The phase shift nonuniformity results in fringe print through and phase ripple artifacts which limit overall accuracy of phase shifted interferometry (PSI) measurements. Spectrally controlled interferometry (SCI) is a method which produces localized, high contrast interference fringes in non-zero optical path length cavities through tailored control of the sources spectral distribution. In addition to fringe location, fringe phase is also controlled through spectrum manipulation without mechanical motion or compensation. As a consequence, the SCI method produces uniform, full-aperture phase shifts with a high degree of linearity regardless of numerical aperture; thus, phase shift errors associated with traditional PZTs can be eliminated. Furthermore, because SCI is a source driven method, it can easily be integrated with any Fizeau interferometer. In this paper, we present the fundamental background for SCI and the advantages of the method as they apply to the measurement of high numerical aperture spherical optics. Additionally, we compare PSI measurements between a traditional laser Fizeau interferometer with PZT based phase shifters and an SCI Fizeau interferometer. Existing methods to this problem are discussed and compared with the presented SCI method, as well.","PeriodicalId":422212,"journal":{"name":"Precision Optics Manufacturing","volume":"21 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-06-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114506984","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Ultraprecise micromachining of retroreflective structures 反射结构的超精密微加工
Pub Date : 2019-06-28 DOI: 10.1117/12.2526434
N. Milliken, E. Bordatchev, O. R. Tutunea-Fatan
To meet stringent automotive safety requirements, car taillights typically incorporate retroreflective elements. In addition to their retroreflective role, these structures are also used for lighting/aesthetic/styling purposes. The most common type of automotive retroreflector (RR) – also known as reflex reflector – is characterized by a corner-cube (CC) geometry that has been fabricated for more than 60 years through a conventional pin-bundling technology. While accurate, this manufacturing approach remains time-consuming, expensive and over-constraining in terms of the RR design. To address this, alternate RR fabrication pathways have been developed and this study outlines the capabilities of a novel approach including milestones, setbacks, advantages and disadvantages. Corner-cube geometry includes three mutually orthogonal facets that meet at a common vertex/apex. This configuration precludes the use of most material removal techniques involving rotational tools. To address this, an alternate RR shape called right triangular prism (RTP) was proposed. This geometry is amenable to diamond-based single point cutting approaches, but its optical performance proved to not be identical with that conventional CC RR. The successful fabrication of RTP RRs was demonstrated in acrylic and quality/functionality of the prototype were assessed through both metrological and optical means. Surface quality Ra of less than 20 nm was achieved through an adequate combination of multi-axis machine tool kinematics and ultraprecise single point tool geometry. This cutting technique worked well on non-ferrous, but not on ferrous materials. Nevertheless, an alternative strategy involving micromilling has been developed for cutting RTPs in ferrous substrates. The successful fabrication of tooling inserts has been completed such that injection molded replicas of RTP RRs will be produced in the future. It is expected that the development of cutting-based RR fabrication strategies along with the associate knowledge on the underlying cutting mechanics will enable a broader diversity of RR designs in the future.
为了满足严格的汽车安全要求,汽车尾灯通常采用反光元件。除了它们的反光作用,这些结构也用于照明/美学/造型的目的。最常见的汽车后向反射器(RR)也被称为反射反射器,其特点是角立方(CC)几何形状,通过传统的针束技术已经制造了60多年。虽然精确,但这种制造方法在RR设计方面仍然耗时,昂贵且过度限制。为了解决这个问题,已经开发了替代的RR制造途径,本研究概述了一种新方法的能力,包括里程碑、挫折、优点和缺点。角立方几何包括三个相互正交的面,它们在一个共同的顶点/顶点相遇。这种结构排除了大多数涉及旋转工具的材料去除技术的使用。为了解决这个问题,提出了一种替代的RR形状,称为右三角棱镜(RTP)。这种几何形状适用于基于金刚石的单点切割方法,但其光学性能被证明与传统的CC RR不相同。在丙烯酸树脂中成功制造了RTP RRs,并通过计量和光学手段评估了原型的质量/功能。通过多轴机床运动学和超精密单点刀具几何结构的充分结合,实现了小于20 nm的表面质量Ra。这种切割技术在有色金属材料上工作得很好,但在有色金属材料上就不行。然而,已经开发了一种涉及微铣削的替代策略来切割铁基板中的rtp。刀具镶件的成功制造已经完成,因此RTP RRs的注塑复制品将在未来生产。预计基于切削的RR制造策略的发展以及对潜在切削力学的相关知识将在未来实现更广泛的RR设计。
{"title":"Ultraprecise micromachining of retroreflective structures","authors":"N. Milliken, E. Bordatchev, O. R. Tutunea-Fatan","doi":"10.1117/12.2526434","DOIUrl":"https://doi.org/10.1117/12.2526434","url":null,"abstract":"To meet stringent automotive safety requirements, car taillights typically incorporate retroreflective elements. In addition to their retroreflective role, these structures are also used for lighting/aesthetic/styling purposes. The most common type of automotive retroreflector (RR) – also known as reflex reflector – is characterized by a corner-cube (CC) geometry that has been fabricated for more than 60 years through a conventional pin-bundling technology. While accurate, this manufacturing approach remains time-consuming, expensive and over-constraining in terms of the RR design. To address this, alternate RR fabrication pathways have been developed and this study outlines the capabilities of a novel approach including milestones, setbacks, advantages and disadvantages. Corner-cube geometry includes three mutually orthogonal facets that meet at a common vertex/apex. This configuration precludes the use of most material removal techniques involving rotational tools. To address this, an alternate RR shape called right triangular prism (RTP) was proposed. This geometry is amenable to diamond-based single point cutting approaches, but its optical performance proved to not be identical with that conventional CC RR. The successful fabrication of RTP RRs was demonstrated in acrylic and quality/functionality of the prototype were assessed through both metrological and optical means. Surface quality Ra of less than 20 nm was achieved through an adequate combination of multi-axis machine tool kinematics and ultraprecise single point tool geometry. This cutting technique worked well on non-ferrous, but not on ferrous materials. Nevertheless, an alternative strategy involving micromilling has been developed for cutting RTPs in ferrous substrates. The successful fabrication of tooling inserts has been completed such that injection molded replicas of RTP RRs will be produced in the future. It is expected that the development of cutting-based RR fabrication strategies along with the associate knowledge on the underlying cutting mechanics will enable a broader diversity of RR designs in the future.","PeriodicalId":422212,"journal":{"name":"Precision Optics Manufacturing","volume":"38 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-06-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"117268431","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Next generation of a linear chirped slope profile fabricated by plasma jet machining 等离子体射流加工新一代线性啁啾斜坡型材
Pub Date : 2019-06-28 DOI: 10.1117/12.2526746
H. Müller, G. Böhm, T. Arnold
Plasma Jet Machining is an established process in ultra-precision surface manufacturing. Removal of several nanometers up to millimeters can be achieved using the atmospheric pressure reactive plasma jet as a non-mechanical tool. Surface form measuring techniques have to be improved equally, to further enhance the deterministic machining. Exact knowledge of the instrument transfer function is necessary to distinguish measurement artefacts and reliable measurement results. Precise sinusoidal surface structures prepared by plasma jet etching can be used as calibration elements to determine the instrument transfer function, e.g. slope-measuring devices like Nanometer Optical component measuring Machine (NOM). The steps for manufacturing such calibration elements including theoretical considerations, adjustment of the plasma jet parameters and implementations on different substrates are presented. Finally, a chirped sinusoidal structure on a singlecrystalline silicon slab is fabricated.
等离子射流加工是一种成熟的超精密表面加工工艺。使用常压反应等离子体射流作为非机械工具,可以实现几纳米到毫米的去除。为了进一步提高加工的确定性,表面形状的测量技术也必须得到相应的改进。准确了解仪器传递函数对于区分测量伪影和可靠的测量结果是必要的。等离子体射流刻蚀制备的精密正弦表面结构可作为确定仪器传递函数的校准元件,如纳米光学元件测量机(NOM)等斜率测量装置。介绍了制造这种校准元件的步骤,包括理论考虑、等离子体射流参数的调整和在不同基材上的实现。最后,在单晶硅板上制备了啁啾正弦结构。
{"title":"Next generation of a linear chirped slope profile fabricated by plasma jet machining","authors":"H. Müller, G. Böhm, T. Arnold","doi":"10.1117/12.2526746","DOIUrl":"https://doi.org/10.1117/12.2526746","url":null,"abstract":"Plasma Jet Machining is an established process in ultra-precision surface manufacturing. Removal of several nanometers up to millimeters can be achieved using the atmospheric pressure reactive plasma jet as a non-mechanical tool. Surface form measuring techniques have to be improved equally, to further enhance the deterministic machining. Exact knowledge of the instrument transfer function is necessary to distinguish measurement artefacts and reliable measurement results. Precise sinusoidal surface structures prepared by plasma jet etching can be used as calibration elements to determine the instrument transfer function, e.g. slope-measuring devices like Nanometer Optical component measuring Machine (NOM). The steps for manufacturing such calibration elements including theoretical considerations, adjustment of the plasma jet parameters and implementations on different substrates are presented. Finally, a chirped sinusoidal structure on a singlecrystalline silicon slab is fabricated.","PeriodicalId":422212,"journal":{"name":"Precision Optics Manufacturing","volume":"21 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-06-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132491651","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Cleaning effects in optical layers: error characteristics and analysis methods 光学层的清洗效果:误差特征及分析方法
Pub Date : 2019-06-28 DOI: 10.1117/12.2527974
E. M. Zambrano, C. Wünsche, L. Mechold, S. Herr
In the course of the ever-increasing demand of high-performance optical components, dielectric coating processes are the key technology for the refinement of optics, ensuring their functionality. These optics are based on optical interference coatings, which are formed by a layer stack of alternating transparent single layers of high and low refractive index material. Assuming that turbidity as well as defects embedded in coatings are considered as a primary factor limiting the quality of optical coatings, the level of cleaning the substrates before coating has to be extremely high. Particular importance is attached to the interface between the layer stack and the substrate, especially to the interaction during the transition from the glass surface to the coating during the manufacturing process. This interaction is assumed to be caused by polishing, by corrosion during storage time or by effects during cleaning of the substrate before coating. Thus, it is necessary to characterize each type of defect and to define which technique is adequate to analyze each one of them efficiently. The project aims to raise the awareness and knowledge in terms of what happens during the coating process and, in particular, to understand the physical processes at the substrate during the manufacturing process. After analyzing the material flow, first focus was set on the cleaning procedure. It is assumed that one of the main influences on defects in the interface is the chemical cleaning. Chemical reactions on the surface of the glass substrate may occur due to additional effects of external components and elevated temperature in the washing basins.
在高性能光学元件需求不断增长的过程中,介质镀膜工艺是光学元件精细化、保证其功能性的关键技术。这些光学器件基于光学干涉涂层,由高、低折射率材料的透明单层交替堆叠而成。假设浊度和涂层中嵌入的缺陷被认为是限制光学涂层质量的主要因素,那么涂层前对基材的清洁水平必须非常高。特别重要的是层堆和基板之间的界面,特别是在制造过程中从玻璃表面过渡到涂层期间的相互作用。这种相互作用被认为是由抛光、储存期间的腐蚀或涂层前基材清洗过程中的影响引起的。因此,有必要描述每种类型的缺陷,并定义哪种技术足以有效地分析它们中的每一种。该项目旨在提高人们对涂层过程中发生的事情的认识和知识,特别是在制造过程中了解基材的物理过程。在分析了物料流之后,首先将重点放在清洗程序上。假设化学清洗是影响界面缺陷的主要因素之一。由于外部成分的额外影响和洗脸盆温度的升高,玻璃基板表面可能发生化学反应。
{"title":"Cleaning effects in optical layers: error characteristics and analysis methods","authors":"E. M. Zambrano, C. Wünsche, L. Mechold, S. Herr","doi":"10.1117/12.2527974","DOIUrl":"https://doi.org/10.1117/12.2527974","url":null,"abstract":"In the course of the ever-increasing demand of high-performance optical components, dielectric coating processes are the key technology for the refinement of optics, ensuring their functionality. These optics are based on optical interference coatings, which are formed by a layer stack of alternating transparent single layers of high and low refractive index material. Assuming that turbidity as well as defects embedded in coatings are considered as a primary factor limiting the quality of optical coatings, the level of cleaning the substrates before coating has to be extremely high. Particular importance is attached to the interface between the layer stack and the substrate, especially to the interaction during the transition from the glass surface to the coating during the manufacturing process. This interaction is assumed to be caused by polishing, by corrosion during storage time or by effects during cleaning of the substrate before coating. Thus, it is necessary to characterize each type of defect and to define which technique is adequate to analyze each one of them efficiently. The project aims to raise the awareness and knowledge in terms of what happens during the coating process and, in particular, to understand the physical processes at the substrate during the manufacturing process. After analyzing the material flow, first focus was set on the cleaning procedure. It is assumed that one of the main influences on defects in the interface is the chemical cleaning. Chemical reactions on the surface of the glass substrate may occur due to additional effects of external components and elevated temperature in the washing basins.","PeriodicalId":422212,"journal":{"name":"Precision Optics Manufacturing","volume":"32 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-06-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121411386","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
期刊
Precision Optics Manufacturing
全部 Acc. Chem. Res. ACS Applied Bio Materials ACS Appl. Electron. Mater. ACS Appl. Energy Mater. ACS Appl. Mater. Interfaces ACS Appl. Nano Mater. ACS Appl. Polym. Mater. ACS BIOMATER-SCI ENG ACS Catal. ACS Cent. Sci. ACS Chem. Biol. ACS Chemical Health & Safety ACS Chem. Neurosci. ACS Comb. Sci. ACS Earth Space Chem. ACS Energy Lett. ACS Infect. Dis. ACS Macro Lett. ACS Mater. Lett. ACS Med. Chem. Lett. ACS Nano ACS Omega ACS Photonics ACS Sens. ACS Sustainable Chem. Eng. ACS Synth. Biol. Anal. Chem. BIOCHEMISTRY-US Bioconjugate Chem. BIOMACROMOLECULES Chem. Res. Toxicol. Chem. Rev. Chem. Mater. CRYST GROWTH DES ENERG FUEL Environ. Sci. Technol. Environ. Sci. Technol. Lett. Eur. J. Inorg. Chem. IND ENG CHEM RES Inorg. Chem. J. Agric. Food. Chem. J. Chem. Eng. Data J. Chem. Educ. J. Chem. Inf. Model. J. Chem. Theory Comput. J. Med. Chem. J. Nat. Prod. J PROTEOME RES J. Am. Chem. Soc. LANGMUIR MACROMOLECULES Mol. Pharmaceutics Nano Lett. Org. Lett. ORG PROCESS RES DEV ORGANOMETALLICS J. Org. Chem. J. Phys. Chem. J. Phys. Chem. A J. Phys. Chem. B J. Phys. Chem. C J. Phys. Chem. Lett. Analyst Anal. Methods Biomater. Sci. Catal. Sci. Technol. Chem. Commun. Chem. Soc. Rev. CHEM EDUC RES PRACT CRYSTENGCOMM Dalton Trans. Energy Environ. Sci. ENVIRON SCI-NANO ENVIRON SCI-PROC IMP ENVIRON SCI-WAT RES Faraday Discuss. Food Funct. Green Chem. Inorg. Chem. Front. Integr. Biol. J. Anal. At. Spectrom. J. Mater. Chem. A J. Mater. Chem. B J. Mater. Chem. C Lab Chip Mater. Chem. Front. Mater. Horiz. MEDCHEMCOMM Metallomics Mol. Biosyst. Mol. Syst. Des. Eng. Nanoscale Nanoscale Horiz. Nat. Prod. Rep. New J. Chem. Org. Biomol. Chem. Org. Chem. Front. PHOTOCH PHOTOBIO SCI PCCP Polym. Chem.
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
0
微信
客服QQ
Book学术公众号 扫码关注我们
反馈
×
意见反馈
请填写您的意见或建议
请填写您的手机或邮箱
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
现在去查看 取消
×
提示
确定
Book学术官方微信
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术
文献互助 智能选刊 最新文献 互助须知 联系我们:info@booksci.cn
Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。
Copyright © 2023 Book学术 All rights reserved.
ghs 京公网安备 11010802042870号 京ICP备2023020795号-1