In recent years, many microrobots have been developed for search applications using swarms in places where humans cannot enter, such as disaster sites. Hexapod robots are suitable for moving over uneven terrain. In order to use micro-hexapod robots for swarm exploration, it is necessary to reduce the robot’s size while maintaining its rigidity. Herein, we propose a micro-hexapod with an SU-8 rigid frame that can be assembled from a single sheet. By applying the SU-8 coating as a structure to the hexapod and increasing the rigidity, the substrate size can be reduced to within 40 mm × 40 mm and the total length when assembled to approximately 30 mm. This enables the integration of the micro electromechanical systems (MEMS) process into small and inexpensive hexapod robots. In this study, we assembled the hexapod with a rigid frame from a sheet created using the MEMS process and evaluated the leg motion.
This paper presents an algorithm for solving the inverse dynamics of a parallel manipulator (PM) with offset universal joints (RR–joints) via the Newton–Euler method. The PM with RR–joints increase the joint stiffness and enlarge the workspace but introduces additional joint parameters and constraint torques, rendering the dynamics more complex. Unlike existing studies on PMs with RR–joints, which emphasize the kinematics and joint performance, this paper studies the dynamical model. First, an iterative algorithm is established through a rigid body velocity transformation, which calculates the input parameters of the link velocity and acceleration. A linear system of equations in matrix form is then established for the entire PM through the Newton–Euler method. By using the generalized minimal residual method (GMRES) to solve the equation system, all the forces and torques on the joints can be obtained, from which the required actuation force can be derived. This method is validated through numerical simulations using the automatic dynamic analysis of multibody systems software. The proposed method is suitable for establishing the dynamic model of complex PMs with redundant or hybrid structures.