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Ultrasonic Bonding Using Anisotropic Conductive Films (ACFs) for Flip Chip Interconnection 利用各向异性导电膜(ACFs)进行倒装芯片互连的超声键合
Pub Date : 2009-08-28 DOI: 10.1109/TEPM.2009.2027894
Kiwon Lee, H. Kim, M. Yim, K. Paik
In this paper, a novel anisotropic conductive film (ACF) flip chip bonding method using ultrasonic vibration for flip chip interconnection is demonstrated. The curing and bonding behaviors of ACFs by ultrasonic vibration were investigated using a 40-kHz ultrasonic bonder with longitudinal vibration. In situ temperature of the ACF layer during ultrasonic (U/S) bonding was measured to investigate the effects of substrate materials and substrate temperature. Curing of the ACFs by ultrasonic vibration was investigated by dynamic scanning calorimetry (DSC) analysis in comparison with isothermal curing. Die adhesion strength of U/S-bonded specimens was compared with that of thermo-compression (T/C) bonded specimens. The temperature of the ACF layer during U/S bonding was significantly affected by the type of substrate materials rather than by the substrate heating temperature. With room the temperature U/S bonding process, the temperature of the ACF layer increased up to 300degC within 2 s on FR-4 substrates and 250degC within 4 s on glass substrates. ACFs were fully cured within 3 s by ultrasonic vibration, because the ACF temperature exceeded 300degC within 3 s. Die adhesion strengths of U/S-bonded specimens were as high as those of T/C bonded specimens both on FR-4 and glass substrates. In summary, U/S bonding of ACF significantly reduces the ACF bonding times to several seconds, and also makes bonding possible at room temperature compared with T/C bonding which requires tens of seconds for bonding time and a bonding temperature of more than 180degC.
本文提出了一种利用超声振动实现各向异性导电膜(ACF)倒装芯片连接的新方法。采用40 khz纵向振动超声键合机,研究了ACFs在超声振动下的固化和键合行为。测量了超声(U/S)键合过程中ACF层的原位温度,研究了衬底材料和衬底温度对ACF层原位温度的影响。采用动态扫描量热法(DSC)对ACFs的超声固化进行了研究,并与等温固化进行了比较。比较了U/ s粘结试样与热压(T/C)粘结试样的模具粘接强度。在U/S键合过程中,ACF层的温度受衬底材料类型的影响显著,而不受衬底加热温度的影响。室温U/S键合过程中,在FR-4基板上ACF层的温度在2 S内上升到300℃,在玻璃基板上的温度在4 S内上升到250℃。超声振动使ACF在3 s内完全固化,因为ACF温度在3 s内超过300℃。U/ s键合试样在FR-4和玻璃基板上的模具附着力均高于T/C键合试样。综上所述,ACF的U/S键合可以将ACF的键合时间显著缩短到几秒,并且可以在室温下键合,而T/C键合需要几十秒的键合时间和180℃以上的键合温度。
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引用次数: 20
Flexible Electronics: Thin Silicon Die on Flexible Substrates 柔性电子:柔性基板上的薄硅模
Pub Date : 2009-08-28 DOI: 10.1109/TEPM.2009.2028880
Tan Zhang, Z. Hou, R.W. Johnson, L. Del Castillo, A. Moussessian, R. Greenwell, B. Blalock
Silicon thinned to 50 mum and less is flexible allowing the fabrication of flexible and conformable electronics. Two techniques have been developed to achieve this goal using thinned die: die flip chip bonded onto flexible substrates [polyimide and liquid crystal polymer (LCP)] and die flip chip laminated onto LCP films. A key to achieving each of these techniques is the thinning of die to a thickness of 50 mum or thinner. Conventional grinding and polishing can be used to thin to 50 mum. At 50 mum, the active die becomes flexible and must be handled by temporarily bonding it to a holder die for assembly. Both reflow solder and thermocompression assembly methods are used. In the case of solder assembly, underfill is used to reinforce the solder joints. With thermocompression bonding of the die to an LCP substrate, the LCP adheres to the die surface, eliminating the need for underfill.
硅薄至50微米或更小是灵活的,允许制造灵活和符合电子产品。为了实现这一目标,已经开发了两种技术:将倒装芯片粘接在柔性衬底上[聚酰亚胺和液晶聚合物(LCP)],以及将倒装芯片层压在LCP薄膜上。实现这些技术的关键是将模具厚度减薄到50毫米或更薄。常规研磨抛光可达到50 μ m。在50妈妈,主动模具变得灵活,必须处理暂时粘合到一个持有人模具组装。回流焊和热压缩组装方法都被使用。在焊料装配的情况下,下填料用于加强焊点。由于模具与LCP基板的热压粘合,LCP粘附在模具表面,从而消除了下填充的需要。
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引用次数: 34
Reliable Lead-Free Rework Process for Stacked CSP Components 可靠的无铅堆砌CSP组件返工工艺
Pub Date : 2009-08-07 DOI: 10.1109/TEPM.2009.2022541
S. Iyer, K. Srihari
Memory module manufacturers face an ongoing challenge to incorporate more functionality and superior performance with each new generation of product offering. The growth in demand for memory capacity is surpassing the pace at which memory component manufacturers are able to cost-effectively produce the next generation of monolithic memory devices. This drives the need for utilizing stacked components for memory module assemblies. The complex nature of stacked chip-scale package (CSP) components coupled with a lead-free process presents unique rework challenges that needed to be studied and addressed. Reworking a CSP is complicated as the solder joints are hidden underneath the component. The process window available for the lead-free rework process is very narrow. There are number of other critical factors, which complicate and affect the repeatability of the rework process. The complications only increase with the use of stacked CSP devices. The rework of package stacked CSP components, which are complex in nature, is a daunting task. The key issues and observations with regard to the issues and challenges associated with the lead-free rework of mirror-imaged package stacked CSP components has been presented in this paper. In addition, the paper also provides a recipe for reliably reworking these packages.
内存模块制造商面临着一个持续的挑战,即在每一代新产品中融入更多的功能和卓越的性能。存储器容量需求的增长速度超过了存储器元件制造商能够经济有效地生产下一代单片存储器设备的速度。这就需要将堆叠组件用于内存模块组件。堆叠芯片级封装(CSP)组件的复杂性与无铅工艺相结合,带来了独特的返工挑战,需要研究和解决。由于焊点隐藏在组件下方,因此重新加工CSP是复杂的。可用于无铅返工工艺的工艺窗口非常狭窄。还有许多其他关键因素使返工过程复杂化并影响返工过程的可重复性。随着堆叠CSP器件的使用,复杂性只会增加。封装堆叠CSP组件的返工本质上是复杂的,是一项艰巨的任务。本文提出了与镜像封装堆叠CSP组件无铅返工相关的关键问题和观察结果。此外,本文还提供了可靠地重做这些包的方法。
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引用次数: 2
Design for Environment: An Environmentally Conscious Analysis Model for Modular Design 面向环境的设计:模块化设计的环境意识分析模型
Pub Date : 2009-07-10 DOI: 10.1109/TEPM.2009.2022544
X. Qian, Hongchao Zhang
Nowadays, more and more manufacturing enterprises are working hard to improve the environmental performance of their products. Pollution may be generated through the life cycle of a product. To maximally improve a product's overall environmental performance and reduce potential environmental impacts, Design for the Environment can be used as early as the design stage for the product. For electromechanical products, modular design is a widely used design method. While traditional modularity analysis pays little attention to environmental factors, this research aims at including comprehensive environmentally conscious criteria into modularity analysis. This paper presents a semi-quantitative environmentally conscious modular analysis model in order to reduce pollution. Eight criteria are identified to capture most of potential environmental impacts of modular products, some of which are fuzzy criteria. Fuzzy Analytic Hierarchy Process is used to rank these environmental criteria, and fuzzy numbers are used to map some uncertain judgments of decision makers with crisp numbers. Structure of a product is represented as a fuzzy graph. The proposed modularity analysis includes similarity analysis and independence analysis. In the end, an example is given to illustrate the developed methodology.
如今,越来越多的制造企业都在努力提高其产品的环保性能。污染可能在产品的整个生命周期中产生。为了最大限度地提高产品的整体环境性能并减少潜在的环境影响,环境设计可以早在产品的设计阶段就使用。对于机电产品而言,模块化设计是一种应用广泛的设计方法。传统的模块化分析很少考虑环境因素,而本研究旨在将综合的环境意识标准纳入模块化分析。为了减少污染,本文提出了一种半定量的环保意识模块化分析模型。确定了八个标准来捕捉模块化产品的大部分潜在环境影响,其中一些是模糊标准。利用模糊层次分析法对这些环境标准进行排序,并利用模糊数将决策者的一些不确定判断映射为清晰的数字。产品的结构用模糊图表示。本文提出的模块化分析包括相似性分析和独立性分析。最后,给出了一个实例来说明所开发的方法。
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引用次数: 32
Statistical Approach for Cycle Time Estimation in Semiconductor Packaging Factories 半导体封装工厂周期时间估计的统计方法
Pub Date : 2009-07-06 DOI: 10.1109/TEPM.2009.2022270
W. Pearn, Y. Tai, J. Lee
In the semiconductor industry, to enhance customer satisfactions and ability of quick responses, the development of cycle time estimation model is very important. Cycle time estimation is an essential planning basis, which has many applications, especially on the analyses of performance indexes, capacity planning, and the assignments of due dates. In this paper, we provide a statistical approach for cycle time estimation in semiconductor plastic ball grid array (PBGA) packaging factories. Due to today's fierce competitive environments in the semiconductor industry, planners involved in PBGA packaging factories need an approach to obtain estimated cycle times with different confidence to ensure the due date assignments more accurately. Therefore, upper confidence bounds of estimated cycle times at various confidence coefficients are also presented in this paper. We demonstrate the applicability of the proposed cycle time estimation model incorporating the upper confidence bounds by presenting a real-world example taken from a PBGA packaging shop floor in a semiconductor packaging factory located in the Science-Based Industrial Park in Hsinchu, Taiwan.
在半导体行业中,为了提高客户满意度和快速响应能力,开发周期时间估计模型是非常重要的。周期时间估计是一个重要的规划基础,它有许多应用,特别是在性能指标分析、容量规划和截止日期分配方面。本文提出了一种用于半导体塑料球栅阵列(PBGA)封装工厂周期时间估计的统计方法。由于当今半导体行业竞争激烈,参与PBGA封装工厂的计划人员需要一种方法来获得不同置信度的估计周期时间,以确保更准确地分配到期日。因此,本文也给出了不同置信系数下估计周期时间的上置信界限。我们通过展示位于台湾新竹科技工业园区的半导体封装工厂的PBGA封装车间的实际示例来证明所提出的周期时间估计模型的适用性,该模型包含了上置信区间。
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引用次数: 11
A 5-Gbps Test System for Wafer-Level Packaged Devices 晶圆级封装器件的5gbps测试系统
Pub Date : 2009-06-23 DOI: 10.1109/TEPM.2009.2017773
A. Majid, D. Keezer
This paper describes an economical approach to high-speed testing of wafer-level packaged logic devices. The solution assumes that the devices have built-in self-test features, thereby reducing the complexity of external test instrumentation required. A stand-alone miniature tester is connected to the top of a wafer probe card, transmitting and receiving multiple high-speed (2-5 Gbps) signals. To keep costs low, the tester uses off-the-shelf components. However, its performance in some respects exceeds that of traditional automated test equipment (ATE). Measurements demonstrate the tester producing 5-Gbps signals with a plusmn 18-ps timing accuracy. The generated signals exhibit low jitter ( ~ 35 ps) and have a rise time of about 60 ps. Similar performance is also shown for signal capture.
本文介绍了一种经济的晶圆级封装逻辑器件高速测试方法。该解决方案假设设备具有内置的自测功能,从而减少了所需的外部测试仪器的复杂性。一个独立的微型测试仪连接到晶圆探测卡的顶部,发送和接收多个高速(2-5 Gbps)信号。为了保持低成本,测试人员使用现成的组件。然而,它的性能在某些方面超过了传统的自动化测试设备(ATE)。测量表明,测试仪产生5-Gbps信号与正负18-ps定时精度。生成的信号表现出低抖动(~ 35 ps),并且具有约60 ps的上升时间。信号捕获也显示出类似的性能。
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引用次数: 2
Fabrication of Molded Interconnection Devices by Ultrasonic Hot Embossing on Thin Polymer Films 用超声热压印技术在聚合物薄膜上制造模制互连器件
Pub Date : 2009-06-16 DOI: 10.1109/TEPM.2009.2020742
P. Khuntontong, T. Blaser, W. Schomburg
Ultrasonic hot embossing allows fabrication of metal patterns onto a polymer film with a low cost and rapid process. A polymer layer with a thin metal film on top is welded onto the polymer substrate where there are protruding micro structures on the tool. Edges around the protruding structures cut the metal layer and ensure electrical insulation. The entire process performs in a few seconds. The non-welded areas are mechanically removed after this process. An antenna of a radio frequency identification device (RFID) and a flexible membrane keyboard were fabricated by embossing 10- mum-thick conductive paths from an aluminum foil onto polypropylene films, 150 and 250 mum in thickness. Antenna circuits have been proven to show the expected resonance frequencies and the keyboard was successfully employed as an input device for a PC.
超声波热压印可以在聚合物薄膜上以低成本和快速的工艺制造金属图案。将顶部有金属薄膜的聚合物层焊接到聚合物基板上,在聚合物基板上有突出的微观结构。突出结构周围的边缘切割金属层,确保电绝缘。整个过程在几秒钟内完成。在此过程之后,非焊接区域被机械去除。通过在厚度分别为150和250 μ m的聚丙烯薄膜上压印10 μ m厚的铝箔导电路径,制备了射频识别装置(RFID)天线和柔性薄膜键盘。天线电路已被证明可以显示预期的谐振频率,并且键盘已成功地用作PC机的输入设备。
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引用次数: 39
An Effective Scheduling Approach for Maximizing Polyimide Printing Weighted Throughput in Cell Assembly Factories 最大化聚酰亚胺打印加权吞吐量的有效调度方法
Pub Date : 2009-06-02 DOI: 10.1109/TEPM.2009.2019340
S. Chung, Y. Tai, W. Pearn
Polyimide printing (PI) is an important process operation but also often the cause of bottlenecks in capital-intensive cell assembly factories. Therefore, the development of an effective scheduling method to maximize throughput in this PI process is essential and difficult. In the polyimide printing scheduling problem (PISP), jobs are given weights and clustered by their product types, which must be processed on identical parallel PI machines. The setup times for two consecutive jobs between different product types in the PI machines are sequence-dependent. In this paper, the PISP is formulated as a mixed integer linear programming model. The PISP is also transformed into a multiple tour maximum collection problem (MTMCP), a well-known network problem which has been investigated extensively. Based on this transformation, one can therefore solve the PISP near-optimally using the efficient algorithm.
聚酰亚胺印刷(PI)是一个重要的工艺操作,但往往是造成瓶颈的资本密集型电池组装工厂。因此,开发一种有效的调度方法,以最大限度地提高该PI过程的吞吐量是必要的和困难的。在聚酰亚胺印刷调度问题(PISP)中,作业被赋予权重并按其产品类型聚类,这些作业必须在相同的并行PI机器上加工。PI机器中不同产品类型之间的两个连续作业的设置时间是顺序相关的。本文将PISP表述为一个混合整数线性规划模型。PISP也被转化为一个被广泛研究的著名网络问题MTMCP (multiple tour maximum collection problem)。基于这种转换,我们可以使用高效的算法来求解PISP问题。
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引用次数: 5
Simplified Measuring Method of Copper Concentration in Solder Bath Utilizing Copper Dissolution 利用铜溶解法简化锡液中铜浓度的测定方法
Pub Date : 2009-06-02 DOI: 10.1109/TEPM.2009.2021259
G. Izuta, T. Tanabe, K. Suganuma
In lead-free soldering on printed circuit boards (PCBs), the dissolution and disappearance of PCB copper electrodes in solder bath has been a problem for the dip soldering method, such as wave soldering, in which PCBs are dipped in molten solder. In the former report, it has been estimated the influence of solder composition, temperature, and flowing velocity on the dissolution of copper electrodes by the experiment of the dip soldering process and clarified the dissolution rate for Sn-3.0Ag-xCu alloys, which is defined by solder temperature and copper concentration. Based on above study, the simplified measuring method of copper concentration in the solder bath has been developed, which uses the dissolution of wedge-shaped copper pattern formed on FR-4 PCB. As a result of the experiment on dipping the PCB in solder of Sn-3.0Ag-xCu (x = 0.5, 0.9, 1.2 and 1.5) alloys, it has been confirmed that the method enables the measuring copper concentration in the solder bath easily.
在印刷电路板(PCB)的无铅焊接中,PCB铜电极在焊锡浴中的溶解和消失一直是浸焊方法(如波峰焊)的问题,其中PCB浸在熔融焊料中。在前一篇报告中,通过浸焊工艺实验,估计了焊料成分、温度和流动速度对铜电极溶解的影响,明确了Sn-3.0Ag-xCu合金的溶解速率,这是由焊料温度和铜浓度决定的。在此基础上,提出了一种利用FR-4 PCB板上形成的楔形铜纹的溶解来测定焊锡液中铜浓度的简化方法。通过将PCB浸在Sn-3.0Ag-xCu (x = 0.5, 0.9, 1.2和1.5)合金的焊料中进行实验,证实了该方法可以方便地测量锡液中铜的浓度。
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引用次数: 3
Low-Stress Thermosonic Copper Ball Bonding 低应力热超声铜球键合
Pub Date : 2009-06-02 DOI: 10.1109/TEPM.2009.2019123
A. Shah, M. Mayer, Y.N. Zhou, S. Hong, J. Moon
Thermosonic ball bonding processes on test chips with Al metallized bonding pads are optimized with one Au and two Cu wire types, all 25 mum diameter, obtaining average shear strengths of more than 120 MPa. The process temperature is ~110degC. Ball bonds made with Cu wire show at least 15% higher shear strength than those made with Au wire. The estimated maximum shear strength cpk value determined for Cu ball bonding (cpk = 3.7 plusmn 1.2) is almost 1.5 times as large as that of the Au ball bonding process (cpk = 2.3 plusmn 0.9), where LSL is 65.2 MPa. However, the ultrasound level required for Cu is approximately 1.3 times than that required for Au. Consequently, about 30% higher ultrasonic forces induced to the bonding pad are measured using integrated real-time microsensors. The accompanying higher stresses increase the risk of under-pad damage. One way to reduce ultrasonic bonding stresses is by choosing the softer of the two Cu wire types, resulting in a measured ultrasonic force reduction of about 5%. A second way is to reduce the ultrasound level. While this causes the average shear strength to fall by 15%, the ultrasonic force falls by 9%. The cpk value does not change significantly, suggesting that a successful Cu ball bonding operation can be run with about 0.9 times the conventionally optimized ultrasound level. The process adjusted in this way reduces the extra stress observed with Cu wire compared to that observed with Au wire by 42%.
采用1种Au线和2种Cu线,直径均为25 μ m,优化了Al金属化焊盘在测试芯片上的热超声球键合工艺,平均剪切强度大于120 MPa。工艺温度为~110℃。用铜丝制成的球键比用金丝制成的球键的抗剪强度至少高15%。估计Cu球键合的最大剪切强度cpk值(cpk = 3.7 plusmn 1.2)几乎是Au球键合的最大剪切强度cpk值(cpk = 2.3 plusmn 0.9)的1.5倍,其中LSL为65.2 MPa。然而,Cu所需的超声水平大约是Au所需的1.3倍。因此,使用集成的实时微传感器可以测量到约30%的高超声力。伴随的高应力增加了衬垫下损伤的风险。减少超声波粘合应力的一种方法是选择两种铜丝类型中较软的一种,从而使测量到的超声波力降低约5%。第二种方法是降低超声波水平。虽然这导致平均抗剪强度下降15%,但超声波力下降9%。cpk值没有显著变化,这表明成功的Cu球键合操作可以在约0.9倍的常规优化超声水平下进行。以这种方式调整的工艺与用金线观察到的相比,减少了用铜线观察到的额外应力42%。
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引用次数: 43
期刊
IEEE Transactions on Electronics Packaging Manufacturing
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