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Wafer-Level Package With Simultaneous TSV Connection and Cavity Hermetic Sealing by Solder Bonding for MEMS Device MEMS器件的晶圆级封装,同时采用TSV连接和焊接腔密封
Pub Date : 2009-05-29 DOI: 10.1109/TEPM.2009.2021766
Yuhan Cao, Wenguo Ning, L. Luo
In this paper, a wafer-level package with simultaneous through silicon via (TSV) connection and cavity hermetic sealing by low-temperature solder bonding for microelectromechanical system (MEMS) device such as resonator is presented. Wet etching technique combined with dry etching technique is utilized to achieve a ldquoY-shapedrdquo through wafer interconnection structure to shorten the TSV in order to reduce cost. Ansoft HFSSTM 3-D electromagnetic simulator is used to assess the transition properties of signal with frequency of the new interconnection structure. Sn solder bonding is utilized to achieve simultaneous TSV connection and cavity hermetic sealing. Average shear strength of 19.5 Mpa and excellent leak rate of around 1.9 times 10-9 atm cc/s have been achieved, which meet the requirements of MIL-STD-883E. Kevin structure is also fabricated to measure the resistance of the metallized TSV, the resistance of the ldquoY-shapedrdquo through wafer interconnection and the contact resistance of the Cu/Sn IMC bond joint.
本文提出了一种用于谐振器等微机电系统(MEMS)器件的晶圆级封装,采用TSV (through silicon via)连接和低温焊接同时进行腔体密封。采用湿法蚀刻技术与干法蚀刻技术相结合,通过晶圆互连结构实现ldquoy形状的结构,从而缩短TSV以降低成本。利用Ansoft HFSSTM三维电磁模拟器对新互连结构的信号随频率的过渡特性进行了评估。采用锡焊结合实现TSV连接和腔体密封同时进行。平均抗剪强度为19.5 Mpa,泄漏率约为1.9倍10-9 atm cc/s,达到MIL-STD-883E要求。制作了Kevin结构,测量了金属化TSV的电阻、ldquoy型通过晶圆互连的电阻和Cu/Sn IMC键合接头的接触电阻。
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引用次数: 40
Modeling of the Fluid Volume Transferred in Contact Dispensing Processes 接触点胶过程中流体体积传递的建模
Pub Date : 2009-05-29 DOI: 10.1109/TEPM.2009.2020515
X.B. Chen, M. G. Li, N. Cao
In the contact dispensing process, the contact of the fluid with the target board is essentially needed in order to transfer a certain volume of fluid to the board. Due to the action of surface tension, part of the fluid extruded from the needle hangs on the needle after the process, and this causes the difference between the fluid volume extruded and the one transferred to the board. This difference is usually ignored in the literature, yet is critical to the precise process control. In this paper, a model to represent the difference is developed based on the Young-Laplace capillarity equation as well as the boundary conditions established for this particular problem. Experiments and simulations were carried out to verify the model effectiveness as well as to investigate the influence of the fluid volume extruded from the needle, the needle size, and the initial height of the needle on the fluid volume transferred in the contact dispensing process.
在接触点胶过程中,基本上需要流体与靶板接触,以便将一定体积的流体传递到板上。由于表面张力的作用,从针筒挤出的部分流体在加工后挂在针筒上,这就造成了挤出的流体体积与输送到板子上的流体体积之间的差异。这种差异通常在文献中被忽略,但对精确的过程控制至关重要。本文根据Young-Laplace毛细方程和为这一特殊问题建立的边界条件,建立了一个表示这种差异的模型。通过实验和仿真验证了该模型的有效性,并研究了针头挤出的流体体积、针头尺寸和针头初始高度对接触点胶过程中流体传输体积的影响。
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引用次数: 16
Concurrent Optimization of Crescent Bond Pull Force and Tail Breaking Force in a Thermosonic Cu Wire Bonding Process 热超声铜丝键合过程中月牙键拉力和断尾力的同步优化
Pub Date : 2009-05-29 DOI: 10.1109/TEPM.2009.2019338
J. Lee, M. Mayer, Y. Zhou, S. Hong, J. Moon
In conventional wire bonding process optimization, the crescent bond is tested by destructive pulling the loop and measure the pull force (PF) required to break the bond. While this method assures the final quality, it does not necessarily minimize production stoppages which can reduce throughput significantly. Many stoppages are caused by short-tail and tail-lift errors which in turn are caused by reduced tail bond strength. The tail breaking force (TBF) is a measure for tail bond strength. A consistent tail breaking operation is needed for robust Cu wire bond production with little operator assistance required to restart stopped machines. We report the concurrent (simultaneous) optimization of PF and TBF using standard pull testing and a method that directly measures the tail bond strength in-process, respectively. The example process uses standard 25-mum-diameter Cu wire on standard Ag-plated leadframe diepads and wire loops oriented perpendicular to the ultrasonic horn. The optimization consists of (1) finding the factors to obtain a symmetrical bond shape, (2) choosing fixed values for bond time (25 ms) and heater stage temperature (220degC), and (3) adding the new optimization step of maximizing the TBF by iteratively optimizing the impact force (IF), bonding force (BF), and ultrasound (US) parameters. Among these parameters, the US and BF are the most significant. A process window (PW) is defined as the set of US/BF parameter combinations that result in a response being inside a previously defined range. PWs for PF and TBF are determined and compared with each other. There is only a partial overlap of these PWs. To increase the process capability index (cpk) for TBF, it is recommended to first carry out conventional PF optimization followed by a minimization of the bonding force parameter to the lowest value still fulfilling the PF cpk requirement.
在传统的金属丝键合工艺优化中,对月牙形键合进行破坏性拉环测试,并测量断键所需的拉力(PF)。虽然这种方法保证了最终的质量,但它不一定能最大限度地减少生产停工,这可能会显著降低吞吐量。许多停机是由短尾和尾升错误引起的,而短尾和尾升错误又由尾粘接强度降低引起。尾部断裂力(TBF)是衡量尾部粘结强度的一种指标。为了保证铜丝键合的稳定生产,需要始终如一的断尾操作,而无需人工辅助即可重新启动已停止的机器。我们报告了同时(同步)优化PF和TBF使用标准拉力测试和一种方法,直接测量尾部粘结强度在过程中分别。示例过程在标准镀银引线框架双衬垫和垂直于超声波喇叭方向的线环上使用标准25毫米直径的铜线。优化包括:(1)寻找获得对称键合形状的因素;(2)选择固定的键合时间(25 ms)和加热阶段温度(220℃);(3)通过迭代优化冲击力(IF)、结合力(BF)和超声波(US)参数,增加TBF最大化的优化步骤。在这些参数中,美国和BF是最显著的。进程窗口(PW)被定义为一组US/BF参数组合,这些组合导致响应在先前定义的范围内。确定了PF和TBF的pw,并进行了比较。这些pw只有部分重叠。为了提高TBF的工艺能力指数(cpk),建议首先进行常规的PF优化,然后将结合力参数最小化到仍然满足PF cpk要求的最小值。
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引用次数: 17
An Empirical Comparison of Spatial Randomness Models for Yield Analysis 产量分析的空间随机模型的实证比较
Pub Date : 2009-04-03 DOI: 10.1109/TEPM.2009.2015768
H.H. Fellows, C. Mastrangelo, K. P. White
Yield analysis is an important activity in the assessment and control of semiconductor fabrication processes. Tests of spatial randomness provide a means of enhancing yield analysis by considering the patterns of good and defective chips on the wafer. These patterns can be related to the likely sources of defects during production. This paper compares two approaches for determining spatial randomness based on join-count statistics. The first assumes that a random distribution of defects can be modeled as a spatially homogenous Bernoulli process (SHBP). The second uses a Markov random field (MRF) as the null distribution. While both methods are shown to have good performance, the MRF outperforms the SHBP on both clustered and random defect data.
良率分析是评估和控制半导体制造过程的一项重要活动。空间随机性测试通过考虑晶圆片上好的和有缺陷的芯片的模式,提供了一种增强良率分析的方法。这些模式可以与生产过程中可能的缺陷来源相关。本文比较了基于连接计数统计的两种确定空间随机性的方法。第一个假设缺陷的随机分布可以被建模为空间齐次伯努利过程(SHBP)。第二种方法使用马尔科夫随机场(MRF)作为零分布。虽然两种方法都显示出良好的性能,但MRF在聚类和随机缺陷数据上都优于SHBP。
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引用次数: 6
Effects of Anisotropic Conductive Film Viscosity on ACF Fillet Formation and Chip-On-Board Packages 各向异性导电膜粘度对ACF圆角形成和片上封装的影响
Pub Date : 2009-03-31 DOI: 10.1109/TEPM.2009.2015288
Kyung-Woon Jang, K. Paik
In this paper, the effects of anisotropic conductive film (ACF) viscosity on ACF fillet formation and, ultimately, on the pressure cooker test (PCT) reliability of ACF flip chip assemblies were investigated. The ACF viscosity was controlled by varying the molecular weight of the epoxy materials. It was found that the ACF viscosity increased as the increase of molecular weight of the epoxy materials. However, there was little variation of the thermomechanical properties among the evaluated ACFs with different viscosites. Also, the results showed that the ACFs have no differences in moisture absorption rate, die adhesion strength, and degree-of-cure. In scanning electron microscopy images, the lower ACF viscosity resulted in the smoother ACF fillet shape and the higher fillet height. From the results of PCT, the ACF flip chip assembly with the smoother fillet shape showed better reliability in terms of contact resistance changes. After 130 h of PCT, the flip chip assembly with lower ACF viscosity also showed a lesser degree of delamination at the ACF/chip interface.
本文研究了各向异性导电膜(ACF)粘度对ACF倒片组件的夹角形成的影响,并最终对ACF倒装片组件的高压锅试验(PCT)可靠性进行了研究。通过改变环氧材料的分子量来控制ACF的粘度。结果表明,ACF的粘度随环氧材料分子量的增加而增加。然而,不同黏度的活性炭纤维的热力学性能变化不大。结果表明,活性炭纤维在吸湿率、模具粘接强度和固化程度上没有差异。在扫描电镜图像中,较低的ACF粘度导致ACF圆角形状更光滑,圆角高度更高。从PCT的结果来看,圆角形状更光滑的ACF倒装芯片在接触电阻变化方面表现出更好的可靠性。PCT 130 h后,ACF粘度较低的倒装芯片组件在ACF/芯片界面处也显示出较小程度的分层。
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引用次数: 17
Near Void-Free Assembly Development of Flip Chip Using No-Flow Underfill 采用无流底填的倒装芯片近无空隙组装开发
Pub Date : 2009-03-27 DOI: 10.1109/TEPM.2009.2015592
Sangil Lee, M. Yim, R. Master, C. Wong, D. Baldwin
The advanced flip-chip-in-package (FCIP) process technology, using no-flow underfill material for high I/O density (over 3000 I/O) and fine-pitch (down to 150 mum) interconnect applications, presents challenges for flip chip processing because underfill void formation during reflow drives interconnect yield down and degrades reliability. In spite of such challenges, a high yield, reliable assembly process (>99.99%) has been achieved using commercial no-flow underfill material with a high I/O, fine-pitch FCIP. This has been obtained using design of experiments with physical interpretation techniques. Statistical analysis determined what assembly conditions should be used in order to achieve robust interconnects without disrupting the FCIP interconnect structure. However, the resulting high yield process had the side effect of causing a large number of voids in the FCIP assemblies. Parametric studies were conducted to develop assembly process conditions that would minimize the number of voids in the FCIP induced by thermal effects. This work has resulted in a significant reduction in the number of underfill voids. This paper presents systematic studies into yield characterization, void formation characterization, and void reduction through the use of structured experimentation which was designed to improve assembly yield and to minimize the number of voids, respectively, in FCIP assemblies.
先进的封装倒装芯片(FCIP)工艺技术,在高I/O密度(超过3000 I/O)和细间距(低至150 μ m)互连应用中使用无流底填材料,这给倒装芯片加工带来了挑战,因为回流过程中形成的底填空隙会降低互连成产量并降低可靠性。尽管存在这些挑战,但使用具有高I/O、细间距FCIP的商用无流底填材料,实现了高成品率、可靠的组装工艺(>99.99%)。这是通过物理解释技术的实验设计得到的。统计分析确定了在不破坏FCIP互连结构的情况下,应该使用什么装配条件来实现稳健的互连。然而,由此产生的高良率过程的副作用是在FCIP组件中造成大量空隙。进行了参数研究,以制定装配工艺条件,以尽量减少由热效应引起的FCIP中空洞的数量。这项工作大大减少了下填空隙的数量。本文通过结构化实验对产率表征、空洞形成表征和空洞减少进行了系统的研究,这些实验分别旨在提高FCIP组件的产率和减少空洞的数量。
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引用次数: 10
Parameter Modeling for Wafer Probe Test 晶圆探头测试参数建模
Pub Date : 2009-03-27 DOI: 10.1109/TEPM.2009.2017514
Y. Liu, T. Luk, S. Irving
This paper presents the simulation of parameters for wafer probe test by finite-element modeling with consideration of probe over-travel (OT) distance, scrub, contact friction coefficient, probe tip shapes, and diameter. The goal is to minimize the stresses in the device under the bond pad and eliminate wafer failure in probe test. In the probe test modeling, a nonlinear finite-element contact model is developed for the probe tip and wafer bond pad. Modeling results have shown that the probe test OT, probe tip shape and tip diameters, contact friction between the probe tip and bond pad, as well as the probe scrub of the probe tip on bond pad are important parameters that impact the failure of interlayer dielectric (ILD) layer under bond pad. Comparison between probe test damage and wire bonding failure shows the degree of damage to both probe test and wire bonding on the same bond pad structures. In addition that, a design of experiment (DOE) probe test with different ILD and metal thickness is carried. The correlation between the modeling and the DOE test is studied. The results show that the modeling solution agrees with the DOE probe test data. Modeling results have further revealed that probe test can induce the local tensile (or bending) first principal stress in ILD layer, which may be a root cause of the ILD failure in probe test.
本文采用有限元模型对晶圆探头测试参数进行仿真,考虑了探头超行程距离、摩擦系数、接触摩擦系数、探头尖端形状和直径等因素。目标是最小化键合垫下器件的应力,并消除探针测试中的晶圆失效。在探针测试建模中,建立了探针尖端与晶圆键合垫的非线性有限元接触模型。模拟结果表明,探针测试OT、探针尖形状和探针尖直径、探针尖与键垫的接触摩擦以及探针尖在键垫上的摩擦是影响键垫层间介电层失效的重要参数。通过对探头试验损伤和焊线破坏的比较,可以看出在同一焊盘结构上,探头试验和焊线损伤的程度。此外,还进行了不同ILD和不同金属厚度的实验探针测试设计。研究了模型与DOE试验的相关性。结果表明,模型解与DOE探测试验数据吻合较好。模拟结果进一步表明,探针试验可以诱发ILD层局部的拉伸(或弯曲)第一主应力,这可能是探针试验中ILD失效的根本原因。
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引用次数: 11
Statistical Analysis of Transponder Packaging in UHF RFID Systems 超高频RFID系统中应答器封装的统计分析
Pub Date : 2009-02-10 DOI: 10.1109/TEPM.2009.2012865
L. Mats, J. T. Cain, M. Mickle
Packaging of RFID transponders that operate at ultrahigh frequencies (UHF) requires nontraditional materials and innovative methods in order to make a functional, reliable, and inexpensive RFID transponders. Presented is a statistical analysis along with the model as the way to evaluate measured results and provide the quality and process control for the electrical and mechanical performance of the packaging of RFID tags with respect to different manufacturing processes. The power analysis is presented in support of the statistical analysis and the sample size selection.
超高频(UHF)射频识别应答器的封装需要非传统的材料和创新的方法来制造功能齐全、可靠和廉价的射频识别应答器。提出了一种统计分析和模型,作为评估测量结果的方法,并为不同制造过程中RFID标签包装的电气和机械性能提供质量和过程控制。为了支持统计分析和样本量的选择,提出了功率分析。
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引用次数: 3
Modeling of Soldering Quality by Using Artificial Neural Networks 基于人工神经网络的焊接质量建模
Pub Date : 2009-02-10 DOI: 10.1109/TEPM.2008.2011813
M. Liukkonen, T. Hiltunen, Elina Havia, H. Leinonen, Y. Hiltunen
Multilayer perceptrons (MLPs ) are well-known artificial neural networks (ANNs) that are used in many different applications. In this paper, MLP neural networks were used to predict product quality in a wave soldering research case. The aims were to construct process models and to determine whether the formation of soldering defects could be predicted reliably by using the method. In addition, the scope of the research included demonstrating the prediction performance of the created models. A MLP-based variable selection procedure with a back-propagation algorithm was used to create defect formation models and to find the most important factors affecting the number of detected defects. The process parameters were used as inputs for the MLP network and each defect type in turn as a model output. In conclusion, the results were promising, and the method used showed potential considering the wider use of the data processing procedure in the electronics or any other industry.
多层感知器(mlp)是众所周知的人工神经网络(ann),用于许多不同的应用。本文以波峰焊为研究对象,利用MLP神经网络对产品质量进行预测。目的是建立工艺模型,并确定该方法是否能够可靠地预测焊接缺陷的形成。此外,研究的范围还包括演示所创建模型的预测性能。采用基于mlp的变量选择程序和反向传播算法建立缺陷形成模型,找出影响检测缺陷数量的最重要因素。过程参数被用作MLP网络的输入,每个缺陷类型依次作为模型输出。总之,结果是有希望的,考虑到数据处理程序在电子或任何其他行业的广泛使用,所使用的方法显示出潜力。
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引用次数: 25
Geometric Analysis and Manufacturing Considerations for Optimizing the Characteristics of a Twisted Pair 优化双绞线特性的几何分析与制造考虑
Pub Date : 2009-01-09 DOI: 10.1109/TEPM.2008.2005779
A. Lago, C. Peñalver, J. Marcos, J. Doval‐Gandoy, A. Melendez, Ó. López, F. Santiago, F. Freijedo, J. Vilas, J.C. Lorenzo
The geometry of a twisted pair largely determines its electrical characteristics. To improve and refine the value of these characteristics according to preset values, the optimization of the manufacturing processes requires comprehensive knowledge of twisted pair geometry and of how electrical magnitudes are affected by the construction features of the twisted pair. This paper studies the relation between the length of a twisted pair cable and the length of each of the wires that compose the cable, by analyzing concepts such as pitch angle and radius of the helix. In addition, it examines the deformations and irregularities that can occur in the twisted pair during the manufacturing process and their effects on the geometry of the twisted pair. Results showed in this paper are a part of a larger research project carried out in association with the R&D department of a cable manufacturing company, and these results are being applied into the design department of this company.
双绞线的几何形状在很大程度上决定了它的电特性。为了根据预设值提高和完善这些特性的值,制造工艺的优化需要对双绞线几何形状以及双绞线结构特征如何影响电量值有全面的了解。本文通过分析螺距角和螺旋半径等概念,研究了双绞线电缆的长度与组成电缆的每根导线的长度之间的关系。此外,它还检查了在制造过程中双绞线中可能发生的变形和不规则现象及其对双绞线几何形状的影响。本文中显示的结果是与一家电缆制造公司的研发部门合作开展的一个更大的研究项目的一部分,这些结果正在应用于该公司的设计部门。
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引用次数: 9
期刊
IEEE Transactions on Electronics Packaging Manufacturing
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