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2013 Abstracts IEEE International Conference on Plasma Science (ICOPS)最新文献

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Chemical dosimetry of an indirect exposure non-thermal plasma device 间接暴露非热等离子体装置的化学剂量测定
Pub Date : 2013-06-16 DOI: 10.1109/PLASMA.2013.6633327
S. Plimpton, M. Gołkowski, Chad M. Austin, M. Voskuil, Deborah G. Mitchell, S. Eaton, G. Eaton, C. Golkowski
Summary form only given. Interest in the use of non-thermal plasmas in the biomedical setting is rapidly growing. Potential applications of such devices range from instrument sterilization to clinical therapy. One of the largest hurdles to the implementation of nonthermal plasmas, specifically in regard to patient exposure, is the relatively poor understanding of the chemical processes taking place. Recent research has focused intensely on the dynamic chemical cocktail associated with specific discharge configurations. Our group recently detailed the ability to control chemical species created by our device through modifying operating parameters, namely humidity1. Specifically, we demonstrated our device's capability to deliver the short-lived hydroxyl radical to treatment sites at a distance of over a meter from the plasma discharge. This recent development of our remote design allows for potential user-defined specificity in both concentration and flavor of chemical exposure to the treatment environment. Introduction of non-thermal plasma devices to the clinical setting, specifically in the United States, will inevitably require a certain degree of therapeutic control. We report on the in vitro “plasma dosimetry” related to the application of our device. Control of the device effluent's chemical makeup allows for parameterization of treatment-related variables like the ratio of inactivation or DNA oxidation between prokaryotic and eukaryotic species. Building on previous work using electron spin resonance spectroscopy to enumerate free radicals delivered to our treatment site, we demonstrate the potential for a therapeutic window of operation. Such regulation provides the potential to tune non-thermal plasma based devices with regard to the contamination or infection being treated.
只提供摘要形式。对在生物医学环境中使用非热等离子体的兴趣正在迅速增长。这种装置的潜在应用范围从器械灭菌到临床治疗。实施非热等离子体的最大障碍之一,特别是在患者接触方面,是对发生的化学过程的理解相对较差。最近的研究集中在与特定放电结构相关的动态化学混合物上。我们的团队最近详细介绍了通过修改操作参数(即湿度)来控制我们的设备产生的化学物质的能力。具体来说,我们展示了我们的设备能够将短寿命的羟基自由基输送到距离等离子体放电超过一米的治疗点。我们的远程设计的最新发展允许潜在的用户自定义特异性的浓度和风味的化学暴露于处理环境。将非热等离子体装置引入临床环境,特别是在美国,将不可避免地需要一定程度的治疗控制。我们报道了与我们的设备应用相关的体外“血浆剂量学”。控制装置流出物的化学组成允许参数化处理相关变量,如原核生物和真核生物物种之间的失活或DNA氧化比率。在先前的工作基础上,利用电子自旋共振光谱来枚举传递到我们治疗部位的自由基,我们展示了治疗操作窗口的潜力。这种调节提供了针对正在治疗的污染或感染调整基于非热等离子体的设备的潜力。
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引用次数: 0
Rapid X-band microwave breakdown in Ne Ne中的快速x波段微波击穿
Pub Date : 2013-06-16 DOI: 10.1109/PLASMA.2013.6633511
J. Scharer, X. Xiang, B. Kupczyk, J. Booske
Observations of rapidly formed (<;50-400 ns) distributed plasma discharges using X-band microwaves in Neon with 1 mTorr residual air are presented. A stainless steel cylindrical discharge test chamber is used to observe microwave breakdown at 10 to 760 torr pressures. The chamber is enclosed with polycarbonate windows on both ends and has two side ports. The magnetron illuminates the chamber using 25 kW, 9.382 GHz and 0.8 μs pulse-width power through an X-band waveguide pressed against the polycarbonate window. Microwave diodes are used to measure incident, reflected, and transmitted microwave power to a moveable monopole antenna located beyond the discharge chamber. They provide information to determine the discharge reflection and attenuation characteristics as the pressure is varied. Observations of localized transmission power reduction measurements of -20 dB that occur within 50-400 ns caused by the plasma under different conditions have been made. Optical emission spectra experiments allow one to determine the gas temperature of the plasma at different pressures. Microwave mixers are used to compare both the amplitude and phase of the reflected signals in phase and in quadrature (90 degrees) relative to a fixed phase reference signal. Together with a six region 1-D plasma modeling code, the effective plasma density, collision frequency and electron temperature are estimated. An ICCD provides fast (<;50 ns) time-scale optical images to estimate the plasma size, also revealing the plasma formation and decay processes.
用x波段微波在残余空气为1mtorr的氖中观察了快速形成的(< 50- 400ns)分布等离子体放电。采用不锈钢圆柱放电试验箱,在10 ~ 760托耳压力下观察微波击穿。该腔室两端用聚碳酸酯窗封闭,并有两个侧孔。磁控管通过压在聚碳酸酯窗口上的x波段波导,以25 kW, 9.382 GHz和0.8 μs脉宽的功率照射腔室。微波二极管用于测量入射、反射和传输到位于放电室外的可移动单极天线的微波功率。当压力变化时,它们提供了确定放电反射和衰减特性的信息。对不同条件下等离子体在50 ~ 400ns范围内引起的局部传输功率降低- 20db的测量结果进行了观察。光学发射光谱实验可以测定等离子体在不同压力下的气体温度。微波混频器用于比较反射信号的相位和正交(90度)相对于固定相位参考信号的幅度和相位。结合六区一维等离子体模拟代码,估计了有效等离子体密度、碰撞频率和电子温度。ICCD提供快速(< 50 ns)的时间尺度光学图像来估计等离子体的大小,也揭示了等离子体的形成和衰变过程。
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引用次数: 0
PPPS-2013: This is a sample abstract submission dielectric barrier discharges: Pulsed breakdown, electrical characterization and Chemistry PPPS-2013:这是提交的样品摘要:介质阻挡放电:脉冲击穿,电学表征和化学
Pub Date : 2013-06-16 DOI: 10.1109/PLASMA.2013.6633189
R. Brandenburg, H. Hoft, T. Hoder, A. Pipa, R. Basner, M. Schmidt, M. Kettlitz
Summary form only given. The application of atmospheric pressure discharges in new fields like environmental protection, surface treatment or life-sciences requires a profound knowledge on the plasma parameters and properties. This includes (1) the characterization of the breakdown processes triggering plasma chemistry, (2) the proper determination of the electrical parameters and (3) the description of the dominant chemical pathways. The contribution aims to present new approaches regarding these three topics for pulsed driven Dielectric Barrier Discharges in particular. It will be shown by fast electrical, optical and spectroscopic methods that the ignition, breakdown statistics and spatio-temporally resolved development of pulsed DBD microdischarges is controlled by the properties of the power supply (duty cycle, frequency, amplitude varied) as well as the composition of the gas1. In particular the starting point of the microdischarge ignition can be changed which is a new effect in DBDs caused by electric field rearrangement in the gap due to positive ion development. Surface processes at the dielectric barriers influencing this behavior will be discussed, too. The determination of electrical parameters such as discharge current, gas gap voltage, instantaneous power and energy as well as the charge transferred through the gas gap based on a simple equivalent circuit will be presented. The proposed approach accurately accounts the displacement current and key capacitance values, which inexactly determination are a source of experimental errors in particular in case of pulsed driven DBDs. The presented approach is consistent with sinusoidal-voltage driven or miniature pulsed driven DBDs. We believe that these new insights on electrical characterization are an important input for those who are working with DBDs, since the electrical parameters are mandatory information. The characterization of the dominant chemical pathways of advanced plasma processes is usually focused on the volume processes only. This contribution will discuss several examples which shall emphasize, that secondary effects must be considered, too. These shall cover the topics of adsorption-enhanced VOC conversion by DBD plasma treatment, NOx conversion and indirect plasma treatment of liquids for antimicrobial and chemical decontamination.
只提供摘要形式。大气压放电在环境保护、表面处理或生命科学等新领域的应用需要对等离子体的参数和特性有深刻的了解。这包括(1)触发等离子体化学的击穿过程的表征,(2)电参数的适当确定和(3)主要化学途径的描述。贡献的目的是提出关于这三个主题的新方法,特别是脉冲驱动的介质阻挡放电。通过快速电学、光学和光谱学方法表明,脉冲DBD微放电的点火、击穿统计和时空分辨发展是由电源的特性(占空比、频率、振幅变化)以及气体的组成控制的。特别是微放电点火的起始点可以改变,这是由于正离子在间隙中形成电场重排而引起的dbd的新效应。我们还将讨论介电势垒处的表面过程对这一特性的影响。给出了基于简单等效电路的放电电流、气隙电压、瞬时功率和能量以及通过气隙转移的电荷等电学参数的确定方法。提出的方法准确地计算位移电流和关键电容值,这些不准确的确定是实验误差的来源,特别是在脉冲驱动dbd的情况下。所提出的方法与正弦电压驱动或微型脉冲驱动dbd一致。我们相信这些关于电特性的新见解对于那些使用dbd的人来说是一个重要的输入,因为电参数是强制性的信息。对先进等离子体过程的主要化学途径的描述通常只集中在体积过程上。这篇文章将讨论几个例子,强调也必须考虑到次要影响。这些将涵盖DBD等离子体处理的吸附增强VOC转化、NOx转化和用于抗菌和化学净化的液体的间接等离子体处理等主题。
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引用次数: 0
Study on pulse power supply by using pulse forming network modules toward intense X-ray source 利用脉冲形成网络模块对强x射线源进行脉冲电源的研究
Pub Date : 2013-06-16 DOI: 10.1109/PLASMA.2013.6635139
Nobuyuki Anzai, Fumitaka Tachinami, D. Takewaki, T. Sasaki, T. Kikuchi, T. Aso, N. Harada
Summary form only given. For observing interior of dense plasmas, intense, point-spot X-ray source is generated by X-pinch technique1. Required parameter of the pulse generator is the rate of current rise 1012 A/s, i.e. 100 kA of current and 100 ns of current rising time2.To generate X-ray source by using X-pinch system, PFN module3 was used, having the advantages of holding high peak current, simple fabrication, and so on. The circuit topology of the PFN module through circuit simulations has been optimized, and three-stage LC-ladder of PFN is suitable for the table-top power supply for X-pinch. The inductance component included in the generator is strongly affected to the rate of current rise. In order to reduce the inductance of the X-pinch system, we evaluate the inductance and the rate of rise, experimentally. The PFN modules were coaxially arranged in octagon plates, and 48 PFN modules can be connected to drive the X-pinch. The PFN module consists of a three-stage LC-ladder circuit, which 73 nH of the inductance and 2700 pF of the capacitance. The discharge device has a coaxial configuration to reduce the inductance. The load current flowing through the inductance measured using a Rogowski coil, contained in the device was determined by comparison between the calculated results with Alternative Transients Program-Electromagnetic Transients Program (ATP-EMTP)4. The rate of current rise obtained was 1.7 x 1011 A/s. From these experiments, the electrode inductance of 65 nH was estimated from the results calculated by the ATP-EMTP. The charging voltage to achieve the target rate of current rise is evaluated to be about 60 - 80 kV.
只提供摘要形式。为了观测致密等离子体内部,利用x -夹点技术产生强烈的点-点x射线源。脉冲发生器所需参数为电流上升速率1012 A/s,即100 kA电流和100 ns电流上升时间2。利用x夹紧系统产生x射线源,采用PFN模块3,具有保持峰值电流高、制作简单等优点。通过电路仿真对PFN模块的电路拓扑结构进行了优化,PFN的三级lc -梯适合用于x -掐位的台式电源。发电机中包含的电感元件对电流上升速率有很大影响。为了减小x夹紧系统的电感,我们通过实验对电感和上升率进行了评估。PFN模块同轴排列在八角形板中,可连接48个PFN模块来驱动X-pinch。PFN模块由三级lc阶梯电路组成,其中电感为73 nH,电容为2700 pF。放电装置具有同轴结构以减小电感。通过与备选瞬态程序-电磁瞬态程序(ATP-EMTP)4的计算结果比较,确定了通过器件中包含的Rogowski线圈测量的电感的负载电流。得到的电流上升速率为1.7 × 1011 A/s。从这些实验中,根据ATP-EMTP计算的结果估计了65 nH的电极电感。达到目标电流上升速率的充电电压约为60 ~ 80kv。
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引用次数: 0
Investigation of initial stage of hybrid X pinches 杂交种初穗期的研究
Pub Date : 2013-06-16 DOI: 10.1109/PLASMA.2013.6635138
I. N. Tilikin, A. S. Dimitriev, A. R. Mingaleev, S. N. Mishin, V. Romanova, A. E. Ter-Oganesyan, T. Shelkovenko, S. Pikuz, C. Hoyt, P. Gourdain, A. Cahill, J. Greenly, D. Hammer
Summary form only given. The initial stage a hybrid X pinch (HXP) plasma formation has been studied using laser probing x-ray radiography and electrical measurements. This stage is especially interesting in HXPs in comparison with standard X-pinches because of the strong influence of the electrode plasmas on the process of neck development. Electrode material evaporated by strong UV radiation from the exploding wire can shorten the electrode gap before hot spot formation. The interaction of electrodes plasmas and the exploding wire plasma determines the discharge parameters required for proper HXP operation. The experiments in this work were performed on different pulsers with output current from 4 kA to 1.2 MA and current rise time from 50 ns to 340 ns. The low inductance super small pulse generator Micro based on ceramic capacitors and a flashover vacuum optically triggered switch was specially designed to study the initial phase of the HXP. This pulser with a peak current of 5 kA and current rise rate 100 A/ns reproduced very well the processes in HXPs on more powerful devices in first tenths nanoseconds of the discharge and enables us to study the details of plasma formation without powering big machines. The results obtained on the Micro pulser were compared with the results obtained in experiments on our older pulsers GVP (10 kA, 350 ns) and BIN (250 kA, 100 ns) at the Lebedev Institute, and XP (400 kA, 100 ns) and COBRA (1 MA, 100 ns) at Cornell University. It was shown that in HXPs from materials with low melting temperature and high core expansion rate (Al, Cu, Ag, Au) the wire core expands and fills inter-electrode gap and prevents fast diode shortening by the electrode plasma. That makes possible using relatively long pulse drivers for HXP.
只提供摘要形式。利用激光探测X射线摄影和电测量技术研究了混合X捏缩(HXP)等离子体形成的初始阶段。由于电极等离子体对颈部发育过程的强烈影响,与标准x -夹钳相比,hxp的这一阶段特别有趣。由爆炸导线产生的强紫外辐射蒸发的电极材料可以在热点形成之前缩短电极间隙。电极等离子体和爆炸导线等离子体的相互作用决定了适当的HXP操作所需的放电参数。实验在不同的脉冲上进行,输出电流从4 kA到1.2 MA,电流上升时间从50 ns到340 ns。基于陶瓷电容器和闪络真空光触发开关的低电感超小型脉冲发生器Micro,专门用于研究HXP的初始相位。该脉冲发生器的峰值电流为5 kA,电流上升速率为100 a /ns,在放电的前十分之一纳秒内就能在更强大的设备上很好地再现hxp中的过程,使我们能够在不为大型机器供电的情况下研究等离子体形成的细节。并与列别捷夫研究所的GVP (10 kA, 350 ns)和BIN (250 kA, 100 ns)以及康奈尔大学的XP (400 kA, 100 ns)和COBRA (1 MA, 100 ns)上的实验结果进行了比较。结果表明,在熔点低、芯膨胀率高的材料(Al、Cu、Ag、Au)中,芯膨胀填充电极间隙,阻止了电极等离子体对二极管的快速缩短。这使得在HXP中使用相对较长的脉冲驱动成为可能。
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引用次数: 0
Kinetic simulations of a large-sized multifrequency CCP-based sputtering source with a PIC/MCC darwin code 基于PIC/MCC达尔文代码的大型多频ccp溅射源动力学仿真
Pub Date : 2013-06-16 DOI: 10.1109/PLASMA.2013.6634962
D. Eremin, S. Bienholz, D. Szeremley, T. Hemke, P. Awakowicz, R. Brinkmann, T. Mussenbrock
Summary form only given. A novel concept of a sputtering source based on a CCP multifrequency large-sized discharge is currently under experimental investigation [1]. The physics of such a discharge is quite complex and includes phenomena taking place on several time and spatial scales. In particular, because of the size and the high frequency harmonics in the driving voltage of such a discharge, the electromagnetic effects may play a significant role. Moreover, use of the electrical asymmetry effect (EAE) to create a self-consistent bias complicates the problem even more. In the present work we report results of our studying such a discharge with a recently developed self-consistent kinetic 2d3c PIC/MCC GPU-parallelized code which uses Darwin approximation [2] for description of the electromagnetic field components. The simulations are made in a geometry close to that of the sputtering source used in the experiments. We discuss interesting features of the discharges arising in the main and the side chambers and compare the simulation results and the experimental data.
只提供摘要形式。基于CCP多频大尺度放电的新型溅射源概念目前正在实验研究中[1]。这种放电的物理学是相当复杂的,包括在几个时间和空间尺度上发生的现象。特别是,由于这种放电的尺寸和驱动电压中的高频谐波,电磁效应可能起重要作用。此外,使用电不对称效应(EAE)来产生自一致的偏置使问题更加复杂。在目前的工作中,我们报告了我们用最近开发的自一致动力学2d3c PIC/MCC gpu并行代码研究这种放电的结果,该代码使用达尔文近似[2]来描述电磁场分量。模拟是在接近实验中使用的溅射源的几何结构中进行的。讨论了主室和侧室放电的有趣特征,并将模拟结果与实验数据进行了比较。
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引用次数: 0
From series production of gyrotrons for W7-X towards EU-1 MW gyrotrons for ITER 从W7-X回旋加速器的批量生产到ITER的eu - 1mw回旋加速器
Pub Date : 2013-06-16 DOI: 10.1109/PPC.2013.6627710
J. Jelonnek, G. Gantenbein, K. Hesch, J. Jin, I. Pagonakis, B. Piosczyk, T. Rzesnicki, M. Thumm, S. Alberti, J. Hogge, M. Tran, V. Erckmann, H. Laqua, G. Michel, P. Bénin, F. Legrand, Y. Rozier, K. Avramidis, J. Vomvoridis, Z. Ioannidis, G. Latsas, I. Tigelis, F. Albajar, T. Bonicelli, F. Cismondi
Summary form only given. Europe is spending joint efforts to develop and to manufacture MW-level gyrotrons for electron cyclotron heating and current drive (ECRH&ECCD) of future plasma experiments. The two most important are the stellarator Wendelstein W7-X at Greifswald and the tokamak ITER at Cadarache. The construction of the 140 GHz, 1 MW CW gyrotrons for the 10 MW ECRH system of W7-X is proceeding well. It is expected that the next series tube will have finished final acceptance tests well in spring 2013. According to plan, production of the gyrotrons for W7-X will be finalized by 2014. This report will summarize the actual status. In parallel to the production and testing of the W7-X gyrotrons, the European GYrotron Consortium (EGYC) is presently developing the EU-1 MW, 170 GHz gyrotron for ITER. That design had been initiated in 2007 already, as a risk mitigation measure during the development of the advanced EU ITER-2 MW coaxial-cavity gyrotron. The basic idea of the EU ITER-1 MW design is to benefit from the experiences made during development and series production of the W7-X gyrotrons and of the experiences gained from the 2 MW coaxial-cavity gyrotron design. Preliminary designs of the cavity and the magnetron injection gun have been presented earlier. During 2012, the scientific design of the EU ITER-1 MW gyrotron components has been finalized. In collaboration with the industrial partner Thales Electron Devices, the industrial design of the technological parts of the gyrotron is being completed. A short pulse prototype gyrotron is under development to support the design of the CW prototype tube. The technological path towards the EU ITER-1MW gyrotron and the final design will be presented.
只提供摘要形式。欧洲正在共同努力开发和制造用于未来等离子体实验的电子回旋加速器加热和电流驱动(ECRH&ECCD)的兆瓦级回旋加速器。其中最重要的两个是Greifswald的Wendelstein W7-X仿星器和Cadarache的托卡马克ITER。W7-X的10兆瓦ECRH系统的140 GHz、1兆瓦连续波回旋管的建造进展顺利。预计下一个系列管将在2013年春季顺利完成最终验收测试。按照计划,W7-X的回旋管生产将于2014年完成。这份报告将总结实际情况。在生产和测试W7-X回旋加速器的同时,欧洲回旋加速器联盟(EGYC)目前正在为ITER开发EU-1 MW, 170 GHz回旋加速器。该设计已于2007年启动,作为开发先进的欧盟ITER-2 MW同轴腔回旋管期间的一项风险缓解措施。欧盟iter - 1mw设计的基本思想是借鉴W7-X回旋管的研制和批量生产过程中取得的经验,以及借鉴2mw同轴腔回旋管设计的经验。腔体和磁控管注射枪的初步设计已经在前面介绍过。2012年期间,欧盟ITER-1兆瓦回旋加速器组件的科学设计已经完成。在与工业合作伙伴泰利斯电子设备公司的合作下,回旋管技术部分的工业设计正在完成。为了支持连续波原型管的设计,一个短脉冲原型回旋管正在开发中。将介绍欧盟ITER-1MW回旋加速器的技术路径和最终设计。
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引用次数: 3
Etching of bacterial endospores of Bacillus subtilis in an inductively coupled low-pressure plasma 枯草芽孢杆菌内生孢子在感应耦合低压等离子体中的蚀刻
Pub Date : 2013-06-16 DOI: 10.1109/PLASMA.2013.6634842
B. Denis, N. Bibinov, P. Awakowicz, M. Raguse, R. Moeller
Low-pressure plasmas offer a rapid and efficient option for sterilization of pharmaceutical and medical objects. First commercial plasma sterilization reactors are approved by European Medicines Agency (EMA).1 On short time scales UV/VUV radiation was shown to be the main sterilization mechanism. In order to inactive heterogeneous contamination of microorganisms (i.e., multilayer arrangements of vegetative cells and bacterial endospores) sufficient etching is needed for plasma sterilization.
低压等离子体为药品和医疗器械的灭菌提供了快速有效的选择。首个商用等离子体灭菌反应器获得欧洲药品管理局(EMA)批准在短时间尺度上,UV/VUV辐射被证明是主要的杀菌机制。为了使非均匀污染的微生物(即营养细胞和细菌内生孢子的多层排列)失活,等离子体灭菌需要足够的蚀刻。
{"title":"Etching of bacterial endospores of Bacillus subtilis in an inductively coupled low-pressure plasma","authors":"B. Denis, N. Bibinov, P. Awakowicz, M. Raguse, R. Moeller","doi":"10.1109/PLASMA.2013.6634842","DOIUrl":"https://doi.org/10.1109/PLASMA.2013.6634842","url":null,"abstract":"Low-pressure plasmas offer a rapid and efficient option for sterilization of pharmaceutical and medical objects. First commercial plasma sterilization reactors are approved by European Medicines Agency (EMA).1 On short time scales UV/VUV radiation was shown to be the main sterilization mechanism. In order to inactive heterogeneous contamination of microorganisms (i.e., multilayer arrangements of vegetative cells and bacterial endospores) sufficient etching is needed for plasma sterilization.","PeriodicalId":6313,"journal":{"name":"2013 Abstracts IEEE International Conference on Plasma Science (ICOPS)","volume":"58 1","pages":"1-1"},"PeriodicalIF":0.0,"publicationDate":"2013-06-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"80446660","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Microcavity plasma devices operating in air: Optimization of the device structure for efficient nitric oxide generation 在空气中工作的微腔等离子体装置:有效生成一氧化氮的装置结构优化
Pub Date : 2013-06-16 DOI: 10.1109/PLASMA.2013.6634989
C. Shin, S. Park, J. Eden
Summary form only given. This presentation describes the fabrication and operation of microdischarge devices which can sustain stable air plasma inside the microcavity and efficiently produce desired gas species from a gas flow. A DC-discharge type microcavity device has been fabricated on nanoporous Al2O3 dielectrics, a robust dielectric produced by wet chemical processing.Production of nitric oxide (NO) from air discharge is one of key interests in this presentation with a potential application of biomedical therapeutics. By controlling the microdischarge device characteristics designed to have optimized condition for NO generation, it can produce NO species selectively at voltages, at least a order lower compared to other conventional techniques. Quantitative measurement of gas species out of the air microplasmas will be discussed.
只提供摘要形式。本文介绍了微放电装置的制造和操作,该装置可以在微腔内保持稳定的空气等离子体,并有效地从气流中产生所需的气体。采用湿法化学工艺制备了一种坚固的纳米多孔Al2O3介电材料,并在其上制备了直流放电型微腔器件。从空气排放中产生一氧化氮(NO)是本报告的主要兴趣之一,具有生物医学治疗的潜在应用。通过控制微放电装置的特性来优化NO的产生条件,它可以在电压下选择性地产生NO,至少比其他传统技术低一个数量级。讨论了空气微等离子体中气体种类的定量测量。
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引用次数: 0
20 kV, 2 cm2, 4H-SiC gate turn-off thyristors for advanced pulsed power applications 20kv, 2cm2, 4H-SiC栅极关断晶闸管,用于先进的脉冲功率应用
Pub Date : 2013-06-16 DOI: 10.1109/PPC.2013.6627403
Lin Cheng, A. Agarwal, C. Capell, M. O'loughlin, E. van Brunt, K. Lam, J. Richmond, A. Burk, J. Palmour, H. O’Brien, A. Ogunniyi, C. Scozzie
The development of high-voltage power devices based on wide bandgap semiconductor such as silicon carbide (SiC) has attracted great attention due to its superior material properties over silicon for high-temperature applications. Among the high-voltage SiC power devices, the 4H-SiC gate turn-off thyristor (GTO) offers excellent current handling, very high voltage blocking, and fast turn-off capabilities. The 4H-SiC GTO also exhibits lower forward voltage drop than the IGBT-based switches, resulting in lower losses during normal operation. It is an ideal switch for pulsed power applications that require high turn-on di/dt. In order to achieve a blocking capability of or greater than 20 kV in SiC, a thick drift epi-layer (> 160 μm) with an improved carrier lifetime (5 ~ 10 μs) is necessary to obtain a full conductivity modulation. In this paper, for the first time to our knowledge, we report our recently developed 1×2 cm2, 20 kV, 4H-SiC p-GTO using a 160 μm, 2×1014/cm3 doped, p-type drift layer. The active conducting area of the device is 0.53 cm2. Due to the limitations of the high-voltage test set-up, the 4H-SiC p-GTO showed an on-wafer gate-to-anode blocking voltage of 19.9 kV at a leakage current of 1 μA, which corresponds to a one-dimensional (1D) maximum electrical field of ~ 1.5 MV/cm at room-temperature. To measure this large area, 4H-SiC, p-GTO at high current levels (> 100 A/cm2), the forward characteristics of the device were evaluated using a Tektronix 371 curve tracer in pulse mode. A differential specific on-resistance of 11 MΩ-cm2 was obtained at a gate current of 0.35 A and a high current of 300 A/cm2 ~ 400 A/cm2. More results and discussion will be presented at the conference.
基于宽禁带半导体如碳化硅(SiC)的高压功率器件由于其在高温应用中优于硅的材料特性而备受关注。在高压SiC功率器件中,4H-SiC栅极关断晶闸管(GTO)具有出色的电流处理能力,非常高的电压阻断能力和快速关断能力。与基于igbt的开关相比,4H-SiC GTO还具有更低的正向压降,从而在正常工作时产生更低的损耗。它是脉冲功率应用的理想开关,需要高开通di/dt。为了在SiC中实现大于20 kV的阻断能力,需要一个厚的漂移外延层(> 160 μm),并提高载流子寿命(5 ~ 10 μs),以获得全电导率调制。在本文中,我们首次报道了我们最近开发的1×2 cm2, 20 kV, 4H-SiC p-GTO,使用160 μm, 2×1014/cm3掺杂的p型漂移层。该装置的有效导通面积为0.53 cm2。由于高压实验装置的限制,在漏电流为1 μA时,4H-SiC p-GTO的片上栅极阻断电压为19.9 kV,对应于室温下一维(1D)最大电场为~ 1.5 MV/cm。为了在高电流水平(bbb100 A/cm2)下测量这种大面积,4H-SiC, p-GTO,使用泰克371曲线示踪器在脉冲模式下评估该器件的正向特性。在栅极电流为0.35 A,高电流为300 A/cm2 ~ 400 A/cm2时,差分比导通电阻为11 MΩ-cm2。更多的结果和讨论将在会议上提出。
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引用次数: 48
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2013 Abstracts IEEE International Conference on Plasma Science (ICOPS)
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