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Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques最新文献

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Numerical Modeling of Thermal Processes and the Effect of Heating of Near-Surface Silicon Layers on the Titanium Accumulation and Diffusion during High-Intensity Pulsed Ion Implantation 高强度脉冲离子注入过程中热过程的数值模拟及近表面硅层加热对钛积累和扩散的影响
IF 0.4 Q4 PHYSICS, CONDENSED MATTER Pub Date : 2025-11-15 DOI: 10.1134/S1027451025701277
A. I. Ivanova, G. A. Bleykher, D. D. Zaitsev

Currently, industrialized countries are paying more and more attention to ion plasma technologies. That is because local doping of a certain zone or the entire surface instead of changing the properties of the sample’s entire volume is possible with the help of beam ion-plasma technologies. Ion bombardment changes almost all properties of the solid surface and the surface layer. The physical and mechanical properties of surface and near-surface layers of materials are the most important factors determining the durability and reliability of processed products. The article has considered the features of thermal processes and the effect of pulsed heating of near-surface silicon layers on diffusion transfer under conditions of synergy of high-intensity titanium ion implantation and the energy impact of a repetitively-pulsed beam of high power density on the surface in order to increase the ion alloying depth due to radiation-stimulated diffusion when heating of the entire sample is limited. The article presents the results of calculating the space-time distribution of temperature fields in silicon and the diffusion transfer of the implanted dopant under the action of submillisecond titanium ion beams.

目前,工业发达国家越来越重视离子等离子体技术。这是因为在束离子等离子体技术的帮助下,局部掺杂某一区域或整个表面而不是改变样品的整个体积的性质是可能的。离子轰击几乎改变了固体表面和表层的所有性质。材料表层和近表层的物理机械性能是决定加工产品耐久性和可靠性的最重要因素。本文考虑了在高强度钛离子注入和高功率密度重复脉冲光束对表面的能量冲击协同作用下,热过程的特点和近表面硅层脉冲加热对扩散传递的影响,以便在整个样品加热有限的情况下,通过辐射刺激扩散增加离子合金化深度。本文给出了在亚毫秒级钛离子束作用下硅中温度场的时空分布和注入掺杂剂的扩散传递的计算结果。
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引用次数: 0
Manufacturing of Atomically Smooth High-Precision Substrates for X-ray Mirrors from Single-Crystal Silicon by Chemical-Mechanical Polishing 用化学-机械抛光技术制备原子光滑的高精度x射线反射镜衬底
IF 0.4 Q4 PHYSICS, CONDENSED MATTER Pub Date : 2025-11-15 DOI: 10.1134/S1027451025701149
N. I. Chkhalo, A. A. Akhsakhalyan, M. V. Zorina, I. V. Malyshev, M. S. Mikhailenko, S. N. Belyaev, O. A. Mal’shakova

A developed technology for chemical-mechanical polishing of large-sized single-crystal silicon substrates for X-ray optical applications is reported. Compared to the standard technology of chemical-mechanical polishing of silicon wafers for microelectronics, which emphasizes the atomic smoothness of substrates and a small damaged layer, high accuracy of the surface shape is demanded, which can be either flat or curved. Materials for polishing pads and suspensions for mechanical lapping and chemical-mechanical polishing, as well as the main parameters of the processing, were found that ensured an effective surface roughness of 0.17 nm in the spatial frequency range 0.025–65 μm–1 and a root-mean-square error of 8.86 nm of the surface shape deviating from the plane. The surface obtained using the developed technology is not inferior in roughness to the results of the world leading manufacturers of silicon wafers for microelectronics and significantly surpasses it in shape accuracy.

报道了一种用于x射线光学的大尺寸单晶硅衬底的化学机械抛光技术。与微电子硅片化学机械抛光的标准工艺相比,强调衬底的原子光洁度和小损伤层,对表面形状的精度要求很高,可以是平面的,也可以是弯曲的。在0.025 ~ 65 μm-1空间频率范围内,机械研磨和化学-机械抛光用抛光垫和悬浮液的有效表面粗糙度为0.17 nm,表面形状偏离平面的均方根误差为8.86 nm。利用所开发的技术获得的表面在粗糙度方面不低于世界领先的微电子硅片制造商的结果,并且在形状精度方面大大超过了它。
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引用次数: 0
Fabrication of Silica X-ray Microlenses by Ion-Beam Lithography 离子束光刻制备二氧化硅x射线微透镜
IF 0.4 Q4 PHYSICS, CONDENSED MATTER Pub Date : 2025-11-15 DOI: 10.1134/S1027451025701204
I. I. Lyatun, S. S. Lyatun, V. A. Yunkin, A. A. Snigirev

The paper presents the results of development and fabrication of X-ray microlenses from X-ray amorphous material, silica, by ion-beam lithography using modern systems combining a focused ion beam and a scanning electron microscope. The possibility of fabrication of glass microlenses with a concave parabolic profile and curvature radii from 2 to 30 μm and an aperture of 20 μm is demonstrated. A method for removing the redeposited layer using 5% hydrofluoric acid is tested. The achieved accuracy of parabolic microlens profile fabrication is less than 30 nm (minimum–maximum scatter), and the RMS roughness of the optical surface is less than 10 nm. The optical characteristics of silica microlenses for high-resolution X‑ray microscopy applications for new-generation synchrotron sources are evaluated.

本文介绍了利用聚焦离子束和扫描电子显微镜相结合的现代系统,利用离子束光刻技术,以x射线非晶材料二氧化硅为原料,研制和制备x射线微透镜的结果。证明了制造曲率半径为2 ~ 30 μm、孔径为20 μm的凹抛物线型玻璃微透镜的可能性。试验了用5%氢氟酸除去再沉积层的方法。抛物面微透镜廓形加工的精度小于30 nm(最小-最大散射),光学表面的RMS粗糙度小于10 nm。评估了用于新一代同步加速器源的高分辨率X射线显微镜应用的二氧化硅微透镜的光学特性。
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引用次数: 0
Optimization of Ion Source Flow Rate 离子源流量的优化
IF 0.4 Q4 PHYSICS, CONDENSED MATTER Pub Date : 2025-11-15 DOI: 10.1134/S1027451025701253
S. V. Kanev, V. V. Kozhevnikov, S. A. Khartov

Electrostatic ion sources with different methods of plasma excitation are widely used in the production of high-tech products, the surface modification of which provides predetermined properties. These properties essentially depend on the parameters of the generated ion beams, which are determined by the correspondence of the ion-extraction system to the required application, in particular, the optimal design of the ion source as a whole, including the working medium consumption parameters. This work is devoted to solving the problem of optimizing the flow rate of the ion source. It is proposed to consider the integral discharge parameters of a radio-frequency ion source operating as part of a vacuum process facility. This approach makes it possible to ignore the spatial distributions of discharge plasma parameters and to propose a simple model for determining the optimal coefficient of the source mass efficiency. An example of a calculation is shown, which allows a preliminary estimation of the parameters of the process facility.

采用不同等离子体激发方式的静电离子源广泛应用于高科技产品的生产中,其表面改性提供了预定的性能。这些特性本质上取决于产生的离子束的参数,而这些参数是由离子萃取系统与所需应用的对应关系决定的,特别是离子源作为一个整体的优化设计,包括工作介质消耗参数。本工作致力于解决离子源流速优化问题。提出了考虑作为真空工艺设备一部分的射频离子源的整体放电参数。这种方法可以忽略放电等离子体参数的空间分布,并提出一个简单的模型来确定源质量效率的最佳系数。给出了一个计算的例子,它允许对工艺设备的参数进行初步估计。
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引用次数: 0
Piezo-Photocatalytic Decomposition of Metronidazole Using ZnO Microtetrapods under Simulated Sunlight 模拟阳光下ZnO微四足体压电光催化分解甲硝唑的研究
IF 0.4 Q4 PHYSICS, CONDENSED MATTER Pub Date : 2025-11-15 DOI: 10.1134/S1027451025701216
R. R. Gyulakhmedov, D. A. Selimov, V. V. Krasnova, A. E. Muslimov, A. S. Lavrikov, V. M. Kanevsky, M. Kh. Rabadanov, F. F. Orudzhev

The article presents the results of a study on the effect of ultrasonic exposure on the process of photocatalytic decomposition of metronidazole using ZnO microtetrapods under simultaneous irradiation with artificial sunlight. The synthesized zinc oxide microtetrapods had pronounced sharp tips, clear facets, and edges, indicating their high crystalline perfection. This unique morphology of ZnO microtetrapods provides the material with high catalytic activity in both photocatalytic and piezocatalytic processes. The Raman spectrum of ZnO microtetrapods showed distinct peaks corresponding to the transverse E1 and high-frequency E2h modes. The high intensity of the E2h mode indicates the crystalline perfection of ZnO microtetrapods. The enhancement of the intensity of the transverse optical mode A1 is observed at the tip of the tetrapod and is absent at its base. It has been shown that the use of ZnO microtetrapods allows significant efficiency in the decomposition of metronidazole due to the combined effect of light and ultrasound, creating a piezoelectric field on the surface of ZnO. This piezoelectric field promotes the spatial separation of photogenerated charges and reduces the likelihood of their recombination, significantly increasing the rate of decomposition of the target pollutant. The rate constant for the decomposition of metronidazole in piezo-photocatalysis is higher than the rate constants for photolysis, sonolysis, sonophotolysis, piezocatalysis, and photocatalysis by 1254, 35, 17, 8, and 4 times, respectively.

本文研究了人工光照下超声照射对ZnO微四足体光催化分解甲硝唑过程的影响。合成的氧化锌微四足动物有明显的尖端、清晰的表面和边缘,表明它们的结晶性很高。这种独特的ZnO微四足体形态使得该材料在光催化和压电催化过程中都具有较高的催化活性。ZnO微四足动物的拉曼光谱显示出明显的峰,对应于横向E1和高频E2h模式。高强度的E2h模式表明ZnO微四足动物的结晶是完美的。在四足动物的尖端观察到横向光学模式A1的强度增强,而在其基部则不存在。研究表明,由于光和超声的联合作用,ZnO微四足体在ZnO表面产生压电场,使得甲硝唑的分解效率显著提高。这种压电场促进了光生电荷的空间分离,降低了它们重组的可能性,显著提高了目标污染物的分解速度。甲硝唑在压电光催化下的分解速率常数比光解、声解、声解、压电催化和光催化的分解速率常数分别高1254倍、35倍、17倍、8倍和4倍。
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引用次数: 0
A Comprehensive Review on Fundamental Properties and Applications of Cadmium Oxide (CdO) 氧化镉(CdO)的基本性质及应用综述
IF 0.4 Q4 PHYSICS, CONDENSED MATTER Pub Date : 2025-11-15 DOI: 10.1134/S1027451025701319
Parvin Kumar, Vipin Kumar, Varun Gupta, Renu Kumari, Narayan Prasad

From last few years, transparent conducting oxide (TCOs) are gaining more attention in device technology. TCOs is an electrically conductive and optically transparent material. Its excellent properties have made it a promising material for various industries. Out of these TCOs, CdO is a binary compound of cadmium and oxygen, and has witnessed a dynamic evolution in its applications and understanding over the years. Cadmium Oxide (CdO) has garnered significant attention in scientific research and industrial applications due to its distinctive fundamental properties and versatile functionalities. Cadmium oxide is a prominent material, and it has wide applications like photovoltaic, optoelectronic, gas sensing, and solar cells when doped with different dopants. The objective of this review article is to deliver a wide-ranging understanding about CdO and its structural, optical, electrical properties and various applications, with the key directions of valuable resource for scientists, industry professionals, researchers operational in the fundamental properties and applications of this compound with a focus on its role in the semiconductor industry. Furthermore, this research article discussed the comparison analysis with cadmium telluride (CdTe) with the aim of elaborating the discussion concerning CdO. The evolution of CdO use might also be influenced by global perspectives on sustainability and environmental responsibility.

近年来,透明导电氧化物(tco)在器件技术中受到越来越多的关注。tco是一种导电的光学透明材料。其优异的性能使其成为各行各业的理想材料。在这些tco中,CdO是镉和氧的二元化合物,多年来在应用和理解方面经历了动态发展。氧化镉由于其独特的基本性质和多种功能,在科学研究和工业应用中受到了广泛的关注。氧化镉是一种突出的材料,当掺杂不同的掺杂剂时,它在光伏、光电、气敏、太阳能电池等领域有着广泛的应用。这篇综述文章的目的是提供对CdO及其结构、光学、电学性质和各种应用的广泛理解,并为科学家、行业专业人士、研究人员在该化合物的基本性质和应用方面提供宝贵的资源,重点是其在半导体工业中的作用。此外,本文还讨论了与碲化镉(CdTe)的比较分析,旨在阐述有关CdO的讨论。CdO使用的演变也可能受到可持续性和环境责任的全球观点的影响。
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引用次数: 0
In Situ High-Temperature Synchrotron X-ray Studies of Microstructure and Phase Composition of Additively Fabricated Ti–6Al–4V/TiC Metal Matrix Composite Ti-6Al-4V /TiC金属基复合材料原位高温同步x射线显微组织与相组成研究
IF 0.4 Q4 PHYSICS, CONDENSED MATTER Pub Date : 2025-11-15 DOI: 10.1134/S102745102570140X
A. V. Panin, M. S. Syrtanov, T. A. Lobova, O. B. Perevalova, M. S. Kazachenok

The microstructure and phase composition of Ti–6Al–4V/TiC metal matrix composite samples obtained by wire-feed electron-beam additive manufacturing are investigated by X-ray diffraction analysis and optical, scanning, and transmission electron microscopy. It is shown that the microstructure of the Ti–6Al–4V/TiC composite consists of primary β-grains containing α/α′-plates separated by interlayers of residual β- and α′′-phases. Irregularly shaped TiC carbide particles with sizes of 1–2 µm are distributed along the boundaries of the primary β-grains. The changes in the phase composition of the 3D-printed Ti–6Al–4V/TiC composites during heating from room temperature to 1100°C are investigated by X-ray diffraction using synchrotron radiation. The changes in the shape and position of the X-ray peaks of α/α′- and β-phases during heating and cooling are analyzed. It is shown that in the temperature range of 700–800°C, there is a shift of the 110 peak of the β-phase towards large angles, as well as a change in its full width at half maximum associated with the formation and subsequent decomposition of the orthorhombic α′′-phase.

采用x射线衍射分析、光学显微镜、扫描电镜和透射电镜研究了线馈电子束增材制造制备的Ti-6Al-4V /TiC金属基复合材料样品的显微组织和相组成。结果表明,Ti-6Al-4V /TiC复合材料的显微组织由含有α/α′-板的初生β晶粒组成,中间由残余β-相和α′-相隔开。晶粒边缘分布有1 ~ 2 μ m大小的不规则TiC碳化物颗粒。采用同步辐射x射线衍射研究了3d打印Ti-6Al-4V /TiC复合材料在室温加热至1100℃过程中相组成的变化。分析了在加热和冷却过程中α/α′-相和β-相x射线峰的形状和位置的变化。结果表明,在700 ~ 800℃的温度范围内,β-相的110峰向大角度移动,其全宽在半最大值处发生变化,这与正交α”相的形成和随后的分解有关。
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引用次数: 0
Structural Characteristics of Ceramic Composites ZrO2–20%Al2O3 Obtained by Additive Method 添加剂法制备ZrO2-20%Al2O3陶瓷复合材料的结构特性
IF 0.4 Q4 PHYSICS, CONDENSED MATTER Pub Date : 2025-11-15 DOI: 10.1134/S1027451025701228
M. V. Korobenkov, A. S. Narikovich, S. S. Lyatun, I. I. Lyatun, I. S. Zherebtsov, M. N. Ulyanov

The rapidly developing field of additive manufacturing requires quality control of finished products. In this regard, nondestructive testing methods, in particular X-ray computed microtomography, turned out to be in demand. The paper presents a study of the structure of the ZrO2–20%Al2O3 ceramic composite obtained by the fused deposition modeling method of a thermoplastic suspension consisting of nanostructured powders of the same composition, a binder, and carbon nanotubes. To obtain information about the structure, two-dimensional sections of reconstructed images were analyzed. The anisotropy of the structure was shown, and possible causes of the heterogeneity of the pore and grain structure were explained. The information about the structure obtained by X-ray computed tomography will be used in further work to optimize the parameters of the fused deposition modeling technology and optimize the compositions of thermoplastic suspensions.

快速发展的增材制造领域要求成品的质量控制。在这方面,无损检测方法,特别是x射线计算机微断层扫描,被证明是有需求的。本文研究了由相同成分的纳米结构粉末、粘结剂和碳纳米管组成的热塑性悬浮液熔融沉积建模方法获得的ZrO2-20%Al2O3陶瓷复合材料的结构。为了获得结构信息,对重建图像的二维切片进行了分析。表明了结构的各向异性,并解释了孔隙和颗粒结构不均匀的可能原因。通过x射线计算机断层扫描获得的结构信息将用于进一步优化熔融沉积建模技术的参数和优化热塑性悬浮液的组成。
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引用次数: 0
On the Applicability of Spacecraft Passive Protection 航天器被动防护的适用性研究
IF 0.4 Q4 PHYSICS, CONDENSED MATTER Pub Date : 2025-11-15 DOI: 10.1134/S102745102570123X
V. V. Svotina, M. V. Cherkasova, A. V. Melnikov

The spacecraft passive protection of monolithic and screen types has been considered. The screen passive protection includes an additional protective shield placed in front of the protected wall. The penetration length of particles for various types of passive protection has been estimated. Based on the simulation results and experimental data presented in the literature, the applicability ranges of various types of spacecraft passive protection are formulated.

研究了单片式和屏蔽式航天器的被动防护。屏幕被动保护包括放置在受保护墙前面的附加保护屏蔽。对不同类型的被动防护粒子的穿透长度进行了估计。在仿真结果和文献实验数据的基础上,提出了各种航天器被动防护的适用范围。
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引用次数: 0
Coherent X-ray Radiation of Relativistic Electrons in a Composite Target 复合靶中相对论电子的相干x射线辐射
IF 0.4 Q4 PHYSICS, CONDENSED MATTER Pub Date : 2025-11-15 DOI: 10.1134/S1027451025701435
A. V. Noskov, S. V. Blazhevich, I. N. Bardakova, A. V. Konovalenko

A dynamic theory of coherent X-ray radiation generated by a beam of relativistic electrons in a composite target “amorphous layer-vacuum-periodic layered medium” has been developed. A periodic layered medium consists of three different layers arranged periodically, with the layers located at an arbitrary angle to the target surface. Coherent X-ray radiation exits through the rear surface of the target; that is, radiation in the periodic layered medium occurs in the Laue scattering geometry. Within the framework of the two-wave approximation of the dynamic theory of diffraction, expressions describing the spectral-angular densities of parametric X-ray radiation (PXR) in the periodic layered medium and diffracted transition radiation (DTR) are obtained and studied.

本文建立了一种相对论性电子束在复合靶“非晶层-真空-周期层状介质”中产生相干x射线的动力学理论。周期性层状介质由三个不同的层组成,这些层与目标表面成任意角度。相干x射线辐射穿过目标的后表面;即周期性层状介质中的辐射以劳埃散射几何形式发生。在衍射动力学理论的两波近似框架内,得到并研究了周期层状介质中参数x射线辐射(PXR)和衍射跃迁辐射(DTR)的谱角密度表达式。
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引用次数: 0
期刊
Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques
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