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Simulation of silicon etching in NF3 plasma reactor NF3等离子体反应器中硅腐蚀的模拟
IF 2.8 4区 物理与天体物理 Q2 PHYSICS, MULTIDISCIPLINARY Pub Date : 2023-06-29 DOI: 10.1007/s12043-023-02579-0
H L Swami, V Mehta, Yogendra Kumar, Chetan Jariwala, Rajesh Kumar

The plasma etching process plays a vital role in microelectronics chip manufacturing and cleaning of the vapour deposition reactors. Plasma etching phenomena can be better understood using plasma-chemistry models. Plasma discharge generates various gas species and gas species interact with the surface species. The interaction of gas species and surfaces species creates volatile species which can come out from the surface very easily and contributes to the surface etch. The simulation of the etching process makes the plasma etching reactor superior by enhancing the performance and exploration of processes. The simulation of the silicon etching is carried out in an NF3 plasma reactor. The plasma chemistry along with the surface chemistry models are utilised for reaction happening inside the reactor. Reactor parameters, such as pressure, RF power deposition, mass flow rate, etc. were varied to enhance the reactor performance and understand the events’ dependency. The simulation was done using the Perrin experimental parameters and simulated results were compared with the published experimental results. The simulation is based on the mixed plasma reactor within a certain volume. It does not account for geometrical parameters and therefore it is 0-d modelling of the reactor. The simulation is based on the flow dynamics along with gas and surface chemistry. The simulation shows the same trend as the experiment. The established simulation model was also used to estimate the etch rate in future in-house experiments. The parameters and simulation results of a future in-house experiment are also included in the report. The work conducted here is to support future in-house experiments of silicon etching for better performance. This is also important for establishing an etching facility for manufacturing electronic integrated circuit and metal surface cleaning.

等离子体蚀刻工艺在微电子芯片制造和气相沉积反应器的清洗中起着至关重要的作用。等离子体化学模型可以更好地理解等离子体蚀刻现象。等离子体放电产生各种气体,气体与表面气体相互作用。气体和表面物质的相互作用产生挥发性物质,挥发性物质可以很容易地从表面出来,并有助于表面蚀刻。通过对等离子体腐蚀过程的模拟,提高了等离子体腐蚀反应器的性能,并对工艺进行了探索。在NF3等离子体反应器中对硅蚀刻过程进行了模拟。等离子体化学和表面化学模型被用于研究反应器内发生的反应。改变反应器参数,如压力、RF功率沉积、质量流量等,以提高反应器性能并了解事件的依赖性。采用Perrin实验参数进行了模拟,并将模拟结果与已发表的实验结果进行了比较。模拟是在一定体积内的混合等离子体反应器上进行的。它没有考虑几何参数,因此它是反应堆的0-d模型。该模拟是基于流体动力学以及气体和表面化学。仿真结果与实验结果一致。所建立的仿真模型也可用于未来内部实验中蚀刻速率的估计。报告中还包括了未来内部实验的参数和模拟结果。这里进行的工作是为了支持未来硅蚀刻的内部实验,以获得更好的性能。这对于建立用于制造电子集成电路和金属表面清洁的蚀刻设备也很重要。
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引用次数: 0
D-dimensional Schrödinger equation with attractive radial potential and its thermal properties 具有吸引径向势的d维Schrödinger方程及其热性质
IF 2.8 4区 物理与天体物理 Q2 PHYSICS, MULTIDISCIPLINARY Pub Date : 2023-06-27 DOI: 10.1007/s12043-023-02571-8
Uduakobong S Okorie, Akpan N Ikot, Nuhu Ibrahim

The D-dimensional Schrödinger equation with attractive radial potential (ARP) is solved using asymptotic iteration method, and its approximate solutions are obtained in closed form. The normalised wave function of the potential model was also determined using the hypergeometric Gauss differential equation. The variation of the energy eigenvalues of ARP with different potential parameters and quantum numbers were discussed for selected dimensions. In addition, the thermal property expressions for ARP were obtained in closed form, and their variations with temperature were discussed extensively for various values of dimension. Critical temperature values were seen to exist for specific heat capacity, at unique dimensions. Our results agree with those obtained in the literatures.

采用渐近迭代法求解了具有吸引径向势(ARP)的d维Schrödinger方程,得到了其封闭形式的近似解。利用超几何高斯微分方程确定了势模型的归一化波函数。在选定的维度上讨论了ARP的能量特征值随势参数和量子数的变化。此外,还得到了ARP的封闭热性能表达式,并对不同尺寸值下其随温度的变化进行了广泛的讨论。临界温度值被视为存在的比热容,在独特的尺寸。我们的结果与文献中的结果一致。
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引用次数: 0
A completely solvable new (mathcal{{PT}})-symmetric periodic potential with real energies 一个完全可解的新(mathcal{{PT}}) -真实能量对称周期势
IF 2.8 4区 物理与天体物理 Q2 PHYSICS, MULTIDISCIPLINARY Pub Date : 2023-06-27 DOI: 10.1007/s12043-023-02565-6
Anjana Sinha, Rajkumar Roychoudhury

Non-Hermitian Hamiltonians respecting parity–time symmetry are well known to be associated with real spectrum, so long as (mathcal{{PT}}) symmetry is exact or unbroken, with energies turning to complex conjugate pairs as this symmetry breaks down spontaneously. Such potentials are characterised by an even real part and an odd imaginary part. However, exactly solvable quantum mechanical models are very few. In this work, we conduct an exact analytical study of a new, periodic, (mathcal{{PT}})-symmetric potential. The energies are observed to be real always, as there is no scope for spontaneous breakdown of (mathcal{{PT}}) symmetry. Using the principles of supersymmetric quantum mechanics, we find its partner Hamiltonian, sharing the same energy spectrum, with the possible exception of the ground state. Incidentally, the partner is also (mathcal{{PT}}) symmetric. Using Mathematica, we plot the exact eigenfunctions of both the partner Hamiltonians. Additionally, supersymmetric quantum mechanics (SUSY QM) helps us to find a totally new exactly solvable, non-trivial Hamiltonian, with the same energy spectrum.

尊重奇偶时间对称性的非厄米哈密顿量众所周知与实谱有关,只要(mathcal{{PT}})对称是精确的或未被破坏的,当这种对称性自发破坏时,能量就会转向复共轭对。这样的势具有偶数实部和奇虚部的特征。然而,精确可解的量子力学模型很少。在这项工作中,我们对一个新的,周期性的,(mathcal{{PT}})对称势进行了精确的分析研究。观测到的能量总是真实的,因为不存在(mathcal{{PT}})对称性的自发破坏。利用超对称量子力学的原理,我们发现它的伙伴哈密顿量,共享相同的能谱,除了基态可能例外。顺便说一下,伙伴也是(mathcal{{PT}})对称的。使用Mathematica,我们绘制了两个伙伴哈密顿量的精确特征函数。此外,超对称量子力学(SUSY QM)帮助我们找到一个全新的完全可解的,具有相同能谱的非平凡哈密顿量。
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引用次数: 0
On exploring (lambda )-symmetries, Darboux polynomials and other integrable quantifiers of Easter Island Population Model 探索复活节岛人口模型的(lambda )-对称性、达布多项式和其他可积量词
IF 2.8 4区 物理与天体物理 Q2 PHYSICS, MULTIDISCIPLINARY Pub Date : 2023-06-24 DOI: 10.1007/s12043-023-02576-3
Mohanasubha Ramasamy, Subhasri Devarajan, Senthilvelan Murugaian, Karthikeyan Rajagopal

Modelling biological processes is more important to analyse the real biological process in detail. Solving the modelled mathematical equations associated with the considered process/system gives us a better understanding of how complex interactions and processes work in that particular system. In this work, we consider Basener–Ross population model and study its integrability quantifiers for some restricted system parameters. We begin our analysis from finding (lambda )-symmetries. Then, we relate (lambda )-symmetries with Darboux polynomials via integrating factors. Also, we extract Lie point symmetries, null forms, Jacobi last multipliers and telescopic vector fields of the Basener–Ross population model from the obtained Darboux polynomials and (lambda )-symmetries. The obtained results will help the biologist to analyse the Basener–Ross population model in a deeper way.

模拟生物过程对于详细分析真实的生物过程更为重要。解决与所考虑的过程/系统相关的建模数学方程可以让我们更好地理解在特定系统中复杂的交互和过程是如何工作的。本文考虑了Basener-Ross种群模型,并研究了其对某些受限系统参数的可积量词。我们从寻找(lambda ) -对称开始分析。然后,我们通过积分因子将(lambda ) -对称与达布多项式联系起来。此外,我们从得到的Darboux多项式和(lambda ) -对称中提取出了Basener-Ross种群模型的Lie点对称、零形式、Jacobi最后乘子和伸缩向量场。获得的结果将有助于生物学家更深入地分析Basener-Ross种群模型。
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引用次数: 0
Optical soliton solutions and dynamical behaviours of Kudryashov’s equation employing efficient integrating approach 采用有效积分法的Kudryashov方程的光孤子解和动力学行为
IF 2.8 4区 物理与天体物理 Q2 PHYSICS, MULTIDISCIPLINARY Pub Date : 2023-06-24 DOI: 10.1007/s12043-023-02575-4
Sachin Kumar, Monika Niwas

This research studies the Kudryashov’s equation by using the generalised exponential rational function (GERF) technique. This technique allows us to use the traveling wave reduction for Kudryashov’s equation which provides the system of equations associated with the real and imaginary parts of the profile pulse for a complex function. First and foremost, we reduced these systems of equations into nonlinear ordinary differential equations (ODE) under the travelling wave transformations. The critical steps of the GERF technique are then applied to the resulting nonlinear ODE. With the assistance of the mentioned technique, we obtained different kinds of families of optical soliton solutions for Kudryashov’s equation. The real part, imaginary part and modulus of some of the obtained solutions are investigated/explored by the three-dimensional visual representations under the appropriate choice of the involved arbitrary parameters with suitable range space, demonstrating that the solutions represent a series of solitons, bright solitons, dark solitons, singular solitons, the interaction of solitons with solitary wave profiles, the interaction of kink waves with solitons and the interaction of kink waves with solitons.

本文利用广义指数有理函数(GERF)技术对Kudryashov方程进行了研究。这种技术允许我们对Kudryashov方程使用行波约简,该方程提供了与复杂函数的剖面脉冲的实部和虚部相关的方程组。首先,我们将这些方程组在行波变换下化为非线性常微分方程(ODE)。然后将GERF技术的关键步骤应用于所得到的非线性ODE。在上述技术的帮助下,我们得到了Kudryashov方程的不同种类的光孤子解。在适当选择所涉及的任意参数和适当的范围空间下,用三维可视化的方法研究了所得到的一些解的实部、虚部和模部,证明了这些解代表了一系列孤子、亮孤子、暗孤子、奇异孤子、孤子与孤波剖面的相互作用。扭结波与孤子的相互作用以及扭结波与孤子的相互作用。
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引用次数: 2
Correction: Investigation of thermal dependence of phonon frequencies, sound velocity, mechanical and optical characteristics of the (beta )-GaN semiconductor compound 修正:研究声子频率,声速,(beta ) -GaN半导体化合物的机械和光学特性的热依赖性
IF 2.8 4区 物理与天体物理 Q2 PHYSICS, MULTIDISCIPLINARY Pub Date : 2023-06-23 DOI: 10.1007/s12043-023-02563-8
Ahmed M Abuali, Elkenany B Elkenany
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引用次数: 0
Tuning electronic and magnetic properties of FeRh alloy by chemical and physical methods 用化学和物理方法调整铁氢合金的电子和磁性能
IF 2.8 4区 物理与天体物理 Q2 PHYSICS, MULTIDISCIPLINARY Pub Date : 2023-06-20 DOI: 10.1007/s12043-023-02567-4
R Greeshma, Rudra Banerjee

The electronic, magnetic and thermodynamic properties of ordered and chemically disordered FeRh alloy are studied using ab-initio methods. The equiatomic Fe(_{50})Rh(_{50}) composition is reported for both ordered and disordered phases. Chemically disordered Fe(_{x})Rh(_{100-x}) is reported and the effect of disorder on electronic and magnetic properties is discussed. Further, we have reported the effects of stress and strain in both the ordered and disordered phases. The result is only for the cubic phase, and no distortion has been taken into consideration. This study is motivated by the recent resurgence in the FeRh and is inspired by the fact that it is possible to sustain the barocaloric properties over the cycle. Hence, we have discussed the properties of Fe(_{x})Rh(_{100-x}) with chemical disorder and pressure simultaneously to gain an insight into the compound effect and the interplay between them.

采用从头算方法研究了有序和无序铁氢合金的电子、磁性和热力学性质。在有序相和无序相中均报道了等原子的Fe (_{50}) Rh (_{50})组成。报道了化学无序的Fe (_{x}) Rh (_{100-x}),并讨论了无序对电子和磁性能的影响。此外,我们还报道了应力和应变对有序相和无序相的影响。结果仅针对立方相,没有考虑畸变。这项研究的动机是最近FeRh的复苏,并受到在周期内维持气压特性的可能性这一事实的启发。因此,我们同时讨论了Fe (_{x}) Rh (_{100-x})在化学无序和压力下的性质,以深入了解它们之间的复合效应和相互作用。
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引用次数: 0
Influence of magnetic field and viscous dissipation due to graphene oxide nanofluid slip flow on an isothermally stretching cylinder 等温拉伸圆柱体上氧化石墨烯纳米流体滑移流动对磁场和粘滞耗散的影响
IF 2.8 4区 物理与天体物理 Q2 PHYSICS, MULTIDISCIPLINARY Pub Date : 2023-06-17 DOI: 10.1007/s12043-023-02559-4
Jagadeeshwar Pashikanti, D R Susmitha Priyadharshini

Because of their thermophysical and rheological properties, graphene oxide (GO) nanofluids show promising advances in heat transfer enhancement. In particular, in magnetohydrodynamic (MHD) studies, where the fluid flow is kept in check, heat transfer tends to diminish due to magnetic field strength. GO nanoparticles, with the highest thermal conductivity, significantly impacts heat transfer devices through conductive heat transfer enhancement. This paper computationally investigates the MHD flow of GO nanofluid over a linearly stretching cylinder. The nanofluid flow is modelled using Buongiorno model under the influence of viscous dissipation effects and the effects of nanoparticle characteristics such as thermophoresis and Brownian motion. The modelled equations are solved using spectral collocation method under isothermal and slip boundary conditions. An examination of the impacts of embedded parameters is presented in detail and it is shown that the conductive heat transfer and diffusive mass transfer are enhanced by dispersing GO nanoparticles in the base fluid. A quantitative analysis is made with the previously published results for special cases. As suggested, this study is significant in heat transfer applications which demand the use of magnetic fields.

由于其热物理和流变特性,氧化石墨烯(GO)纳米流体在增强传热方面显示出有希望的进展。特别是在磁流体动力学(MHD)研究中,流体流动受到控制,由于磁场强度的影响,传热往往会减少。氧化石墨烯纳米颗粒具有最高的导热性,通过增强导热作用显著影响传热器件。本文计算研究了氧化石墨烯纳米流体在线性拉伸圆柱体上的MHD流动。采用Buongiorno模型对纳米流体的流动进行了建模,并考虑了黏性耗散效应、热泳运动和布朗运动等纳米颗粒特性的影响。在等温和滑移边界条件下,用谱配点法求解了模型方程。对嵌入参数的影响进行了详细的研究,结果表明,在基液中分散氧化石墨烯纳米颗粒可以增强传导传热和扩散传质。针对特殊情况,结合以往发表的结果进行了定量分析。正如建议的那样,这项研究在需要使用磁场的传热应用中具有重要意义。
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引用次数: 0
Influence of electric field on the electro-optical and electronic properties of 4-n-alkoxy-4(^prime )-cyanobiphenyl liquid crystal series: An application of DFT 电场对4-n-烷氧基-4 (^prime ) -氰联苯液晶系列电光电子性质的影响:DFT的应用
IF 2.8 4区 物理与天体物理 Q2 PHYSICS, MULTIDISCIPLINARY Pub Date : 2023-06-15 DOI: 10.1007/s12043-023-02570-9
Anoop Kumar Pandey, Abhishek Kumar, Ambrish Kumar Srivastava, Vijay Singh, Kamal Kumar Pandey, Apoorva Dwivedi, Madan Singh Chauhan, Dipendra Sharma

In this study, electro-optical and electronic properties of 4-n-alkoxy-4(^prime )-cyanobiphenyl liquid crystal homologous series was explored. The effect of the number of carbon atoms present in the alkoxy chain on the electro-optical parameters and global reactivity descriptors has been investigated in the presence of applied electric field. Further, these parameters have also been studied under varying electric field for the homologue number, (n = 8)–12. Most of the parameters exhibit odd–even effect for a certain range of homologous numbers. The variation of the homologous number in the electric field is demonstrated to have a considerable impact on these outcomes.

本研究探讨了4-n-烷氧基-4 (^prime ) -氰联苯液晶同源系列的电光电子性质。研究了在外加电场作用下,烷氧基链中碳原子数对其电光参数和整体反应性描述符的影响。此外,我们还研究了这些参数在不同电场条件下对同源数(n = 8) -12的影响。大多数参数对一定范围内的同源数表现出奇偶效应。在电场中同源数的变化被证明对这些结果有相当大的影响。
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引用次数: 1
Effects of quantum geometric phase of a particle in an oscillating hard-wall spherical trap 振荡硬壁球形阱中粒子量子几何相位的影响
IF 2.8 4区 物理与天体物理 Q2 PHYSICS, MULTIDISCIPLINARY Pub Date : 2023-06-13 DOI: 10.1007/s12043-023-02564-7
Reza Moazzemi, Seyed Mahdi Fazeli

We obtained the geometric phase for states of a particle in a spherical infinite potential well with moving walls in two different cases: First, when the radius of the well increases (or decreases) monotonically. Secondly, when the radius changes are oscillatory. In the latter case, we have solved the Schrödinger equation and found its solutions approximately. We obtained the transition rate for the possible real situation in an acousto-optic case which can reveal the effect of the geometric phase. We show that the absorption or radiation peaks will appear if the energy gap between the incident photon and the modified energy difference of two levels by the geometric phase is equal to the integer multiple of oscillation frequency.

我们在两种不同的情况下得到了具有运动壁面的球形无限势阱中粒子状态的几何相位:第一种情况是,当井的半径单调增加(或减少)时。其次,当半径发生振荡变化时。在后一种情况下,我们解出了Schrödinger方程,并近似地求出了它的解。我们得到了声光情况下可能实际情况下的跃迁速率,可以揭示几何相位的影响。结果表明,当入射光子与经几何相位修正的两能级能差之间的能隙等于振荡频率的整数倍时,会出现吸收峰或辐射峰。
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引用次数: 0
期刊
Pramana
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