Pub Date : 2013-08-01DOI: 10.1109/3M-NANO.2013.6737414
Li Ma, Chenyang Jiang, Jintao Xiao, Kun Wang, Wei Xie, Bo Liu
Piezoelectric inchworm actuators have a wide application in the field of Nano positioning and ultra-precision detecting instruments which depend on the characteristics of large stroke, high resolution and rigidity, quick response speed, small size, high driving force, low power consumption, not being affected by electromagnetic interference, and so on. A new piezoelectric inchworm actuator based on the principle of flexible amplification is developed in this paper. In the moving mechanism of the actuator, its clamping mechanism adopts symmetrical lever amplification structure, and its middle drive mechanism uses compound bridge structure. Theoretical analysis and finite element analysis are carried out to design the hinge structure which has influences on the properties of the moving mechanism. High precision cross roller guide ways are utilized to improve the positioning accuracy of the actuator. The laboratory platform of the piezoelectric inchworm actuator is built. A controlling program of the actuator is compiled by Lab-VIEW. Then, the properties of the actuator are tested. The experimental results show that the working stroke of the actuator is 50 mm, the minimum step pitch is 60 μm the maximum step pitch is 105 μm the fast speed is 2.04 mm/s, the maximum clamping force is 21 N, the maximum dead load is 500 g, and the average speed of the actuator can reach 1.47 mm/s when the driving frequency is 50 Hz and the load is 1 kg.
{"title":"A piezoelectric inchworm actuator based on the principle of flexible amplification","authors":"Li Ma, Chenyang Jiang, Jintao Xiao, Kun Wang, Wei Xie, Bo Liu","doi":"10.1109/3M-NANO.2013.6737414","DOIUrl":"https://doi.org/10.1109/3M-NANO.2013.6737414","url":null,"abstract":"Piezoelectric inchworm actuators have a wide application in the field of Nano positioning and ultra-precision detecting instruments which depend on the characteristics of large stroke, high resolution and rigidity, quick response speed, small size, high driving force, low power consumption, not being affected by electromagnetic interference, and so on. A new piezoelectric inchworm actuator based on the principle of flexible amplification is developed in this paper. In the moving mechanism of the actuator, its clamping mechanism adopts symmetrical lever amplification structure, and its middle drive mechanism uses compound bridge structure. Theoretical analysis and finite element analysis are carried out to design the hinge structure which has influences on the properties of the moving mechanism. High precision cross roller guide ways are utilized to improve the positioning accuracy of the actuator. The laboratory platform of the piezoelectric inchworm actuator is built. A controlling program of the actuator is compiled by Lab-VIEW. Then, the properties of the actuator are tested. The experimental results show that the working stroke of the actuator is 50 mm, the minimum step pitch is 60 μm the maximum step pitch is 105 μm the fast speed is 2.04 mm/s, the maximum clamping force is 21 N, the maximum dead load is 500 g, and the average speed of the actuator can reach 1.47 mm/s when the driving frequency is 50 Hz and the load is 1 kg.","PeriodicalId":120368,"journal":{"name":"2013 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale","volume":"9 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126527456","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-08-01DOI: 10.1109/3M-NANO.2013.6737456
Jing Li, Feng Du, Jinkai Xu, Xue Wang, Huadong Yu
The multi-coupling characteristics and the contact angle performance of the lower surface of the lotus leaf were investigated through laser scanning confocal microscope, scanning electron microscopy and contact angle measurement. The results indicate that the lower surfaces of the lotus leaf possess biological multi-coupling contents and excellent hydrophobic performance. Scallops morphology, micro grid-like structure and the wax-like materials with the lower surface energy of the lower surfaces of the lotus leaf were systematically investigated as biological coupling contents contributing to improve the hydrophobic performance. In this paper, researchers found that hydrophobic function of the lotus leaf' lower surface are results of interaction among coupling contents by certain coupling mechanisms from the bionic viewpoint.
{"title":"Multi-coupling hydrophobic characteristics on the lower surface of the lotus leaf","authors":"Jing Li, Feng Du, Jinkai Xu, Xue Wang, Huadong Yu","doi":"10.1109/3M-NANO.2013.6737456","DOIUrl":"https://doi.org/10.1109/3M-NANO.2013.6737456","url":null,"abstract":"The multi-coupling characteristics and the contact angle performance of the lower surface of the lotus leaf were investigated through laser scanning confocal microscope, scanning electron microscopy and contact angle measurement. The results indicate that the lower surfaces of the lotus leaf possess biological multi-coupling contents and excellent hydrophobic performance. Scallops morphology, micro grid-like structure and the wax-like materials with the lower surface energy of the lower surfaces of the lotus leaf were systematically investigated as biological coupling contents contributing to improve the hydrophobic performance. In this paper, researchers found that hydrophobic function of the lotus leaf' lower surface are results of interaction among coupling contents by certain coupling mechanisms from the bionic viewpoint.","PeriodicalId":120368,"journal":{"name":"2013 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale","volume":"22 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121308207","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-08-01DOI: 10.1109/3M-NANO.2013.6737385
L. Zhao, Z. Wang, W. Li, M. Yu, Z. Zhang, J. Xu, Y. Yu, Z. Weng, S. Li, C. Maple, D. Li, Y. Yue
This paper discusses the effect of pulse repetition rates on silicon wafer modification by four-beam laser interference. In the work, four-beam laser interference was used to pattern single crystal silicon wafers for the fabrication of dots, and different laser pulse repetition rates were applied to the process in the air. The results were obtained from 10 laser exposure pulses with the single laser fluence of 283mJ/cm2, the pulse repetition rates were 1Hz, 5Hz and 10Hz, the laser wavelength was 1064nm and the pulse duration 7-9ns. The results have been observed using a scanning electron microscope (SEM) and optical microscope. They indicate that the laser pulse repetition rate has to be properly selected for the fabrication of the structures of dots using four-beam laser interference.
{"title":"Effect of pulse repetition rate on silicon wafer modification by four-beam laser interference","authors":"L. Zhao, Z. Wang, W. Li, M. Yu, Z. Zhang, J. Xu, Y. Yu, Z. Weng, S. Li, C. Maple, D. Li, Y. Yue","doi":"10.1109/3M-NANO.2013.6737385","DOIUrl":"https://doi.org/10.1109/3M-NANO.2013.6737385","url":null,"abstract":"This paper discusses the effect of pulse repetition rates on silicon wafer modification by four-beam laser interference. In the work, four-beam laser interference was used to pattern single crystal silicon wafers for the fabrication of dots, and different laser pulse repetition rates were applied to the process in the air. The results were obtained from 10 laser exposure pulses with the single laser fluence of 283mJ/cm2, the pulse repetition rates were 1Hz, 5Hz and 10Hz, the laser wavelength was 1064nm and the pulse duration 7-9ns. The results have been observed using a scanning electron microscope (SEM) and optical microscope. They indicate that the laser pulse repetition rate has to be properly selected for the fabrication of the structures of dots using four-beam laser interference.","PeriodicalId":120368,"journal":{"name":"2013 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale","volume":"96 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125630609","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-08-01DOI: 10.1109/3M-NANO.2013.6737454
Huixiang Wang, Lining Sun
Molecular techniques are transforming our understanding of cellular function and disease. However, accurate molecular analysis methods will be limited if the input DNA, RNA, or protein is not derived from pure population of cells or is contaminated by the wrong cells. This paper will introduce a design of a micro-to-nano manipulation device. It was an automatic, rapid, accurate separation and extraction system designated group of cells or single cells for pathology research. Essential micro-to-nano manipulations were executed by microdissection knife based on piezo-power ultrasonic vibration (vibration frequency at 15-50 kHz and amplitude 0.001-1μm) and microcollection tool based on vacuum adsorption (controllable press at 0.001-0.5Mpa). Lots of 5μm liver embedded sections were dissected and collected successfully by many experiments. Contrast testing experiment indicates that no harm to tissue by the ultrasonic dissection tool, good availability to collection by the vacuum adsorption and the micromanipulation system is applicable to bio-micro-to-nano manipulations with high stability and accuracy.
{"title":"Research on a micro-to-nano bio-manipulation device","authors":"Huixiang Wang, Lining Sun","doi":"10.1109/3M-NANO.2013.6737454","DOIUrl":"https://doi.org/10.1109/3M-NANO.2013.6737454","url":null,"abstract":"Molecular techniques are transforming our understanding of cellular function and disease. However, accurate molecular analysis methods will be limited if the input DNA, RNA, or protein is not derived from pure population of cells or is contaminated by the wrong cells. This paper will introduce a design of a micro-to-nano manipulation device. It was an automatic, rapid, accurate separation and extraction system designated group of cells or single cells for pathology research. Essential micro-to-nano manipulations were executed by microdissection knife based on piezo-power ultrasonic vibration (vibration frequency at 15-50 kHz and amplitude 0.001-1μm) and microcollection tool based on vacuum adsorption (controllable press at 0.001-0.5Mpa). Lots of 5μm liver embedded sections were dissected and collected successfully by many experiments. Contrast testing experiment indicates that no harm to tissue by the ultrasonic dissection tool, good availability to collection by the vacuum adsorption and the micromanipulation system is applicable to bio-micro-to-nano manipulations with high stability and accuracy.","PeriodicalId":120368,"journal":{"name":"2013 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale","volume":"20 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132121687","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-08-01DOI: 10.1109/3M-NANO.2013.6737383
Jinyun Liu, Zuobin Wang, Yingmin Qu, Guoliang Wang, Dayou Li, C. Maple
Paper discusses the effect of fullerenol on the morphology features of colon cancer SW480 cells. In the work, the changes of morphology features of SW480 cells, treated with three groups of fullerenol concentrations, were studied using atomic force microscopy (AFM) to evaluate their induction of apoptosis in colon cancer cells on the nanoscale. There were 20 single cells of each group used to test and determine the changes of their features in the experiments, including untreated SW480 cells, SW480 cells treated with Img/ml fullerenol and SW480 cells treated with 2mg/ml fullerenol. The experimental results have shown that the untreated and treated SW480 cells have different sizes and shapes. The lengths of the cells were decreased and their heights increased with the increase of the fullerenol dose.
{"title":"Effect of fullerenol on the morphology features of SW480 cells","authors":"Jinyun Liu, Zuobin Wang, Yingmin Qu, Guoliang Wang, Dayou Li, C. Maple","doi":"10.1109/3M-NANO.2013.6737383","DOIUrl":"https://doi.org/10.1109/3M-NANO.2013.6737383","url":null,"abstract":"Paper discusses the effect of fullerenol on the morphology features of colon cancer SW480 cells. In the work, the changes of morphology features of SW480 cells, treated with three groups of fullerenol concentrations, were studied using atomic force microscopy (AFM) to evaluate their induction of apoptosis in colon cancer cells on the nanoscale. There were 20 single cells of each group used to test and determine the changes of their features in the experiments, including untreated SW480 cells, SW480 cells treated with Img/ml fullerenol and SW480 cells treated with 2mg/ml fullerenol. The experimental results have shown that the untreated and treated SW480 cells have different sizes and shapes. The lengths of the cells were decreased and their heights increased with the increase of the fullerenol dose.","PeriodicalId":120368,"journal":{"name":"2013 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale","volume":"223 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123244864","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-08-01DOI: 10.1109/3M-NANO.2013.6737445
Jiang Wei, Wang Nan, Yan Wei, Hu Song, Pu Xiao-qiong
Transfer of graphics is achieved by optical lithography for several decades in semiconductor process. The production capacity of 45 nm node has been formed. But now semiconductor industry is difficult to be developed according to the Moore law because of the inherent limitations of optical lithography. Now electron-beam directwriting, X-ray exposure and nanoimprint technology are the main technologies for next generation graphics transfer technology. Nanoimprint technology has the advantages of high yield, lowcost and simple process. This paper introduced the traditional nanoimprint technology and its development, including the principle, applications and challenges.
{"title":"The next generation microelectronics craft technique: Nanoimprint lithography","authors":"Jiang Wei, Wang Nan, Yan Wei, Hu Song, Pu Xiao-qiong","doi":"10.1109/3M-NANO.2013.6737445","DOIUrl":"https://doi.org/10.1109/3M-NANO.2013.6737445","url":null,"abstract":"Transfer of graphics is achieved by optical lithography for several decades in semiconductor process. The production capacity of 45 nm node has been formed. But now semiconductor industry is difficult to be developed according to the Moore law because of the inherent limitations of optical lithography. Now electron-beam directwriting, X-ray exposure and nanoimprint technology are the main technologies for next generation graphics transfer technology. Nanoimprint technology has the advantages of high yield, lowcost and simple process. This paper introduced the traditional nanoimprint technology and its development, including the principle, applications and challenges.","PeriodicalId":120368,"journal":{"name":"2013 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122554950","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-08-01DOI: 10.1109/3M-NANO.2013.6737391
Liguo Chen, Xiaowei Xu, Wenyuan He, Lining Sun
According to obtain the mechanism of electrowetting-on-dielectric (EWOD), the instantaneous pressure difference inside a droplet was obtained by means of a numerical simulation method in this paper, which was the root reason for EWOD. First, based upon the theory of electrowetting-on-dielectric(EWOD), a geometrical model of EWOD was established in a commercial software using VOF method. Next, deriving that two kinds of fluid which should follow the law of mass conservation and principle of momentum conservation. The experimental results show that the numerical simulation results are in good agreement with the experimental results, In one period of motion, the higher pressure region inside a droplet will keep changing and transferring along with the driving time until a steady state of pressure difference is obtained; besides, the much longer driving time is, the much larger pressure difference will be inside a droplet. The transfer of higher pressure region is the root reason for droplet establishing the velocity field which vividly illustrates how the droplet deforms.
{"title":"Simulation and experimental verification of driving mechanism for a microfluidic device based on electrowetting-on-dielectric","authors":"Liguo Chen, Xiaowei Xu, Wenyuan He, Lining Sun","doi":"10.1109/3M-NANO.2013.6737391","DOIUrl":"https://doi.org/10.1109/3M-NANO.2013.6737391","url":null,"abstract":"According to obtain the mechanism of electrowetting-on-dielectric (EWOD), the instantaneous pressure difference inside a droplet was obtained by means of a numerical simulation method in this paper, which was the root reason for EWOD. First, based upon the theory of electrowetting-on-dielectric(EWOD), a geometrical model of EWOD was established in a commercial software using VOF method. Next, deriving that two kinds of fluid which should follow the law of mass conservation and principle of momentum conservation. The experimental results show that the numerical simulation results are in good agreement with the experimental results, In one period of motion, the higher pressure region inside a droplet will keep changing and transferring along with the driving time until a steady state of pressure difference is obtained; besides, the much longer driving time is, the much larger pressure difference will be inside a droplet. The transfer of higher pressure region is the root reason for droplet establishing the velocity field which vividly illustrates how the droplet deforms.","PeriodicalId":120368,"journal":{"name":"2013 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale","volume":"20 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125226592","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-08-01DOI: 10.1109/3M-NANO.2013.6737379
Jin Wei, Jianyi Zheng, G. Zheng, Xiang Wang, Guangqi He, Haiyan Liu, Daoheng Sun, Juan Liu
In this paper, mechanical stretching force is introduced into the Electrohydrodynamic Direct-Write (EDW) process. The effects of mechanical stretching on the rheology and deposition behaviors of EDW jet were investigated. The stretching affects that stemmed from the EDW motion platform provided an extra force on the charged jet. The larger stretching force applied on the jet played a good role to overcome bending instability, and stretch the jet into finer ones. Since the short distance between spinneret and collector, the mechanical stretching force acted more important role on the jet formation process. Thanks to the stretching effect, the whipping of charged jet can be avoided and micro/nano thin film without curve structure can be direct-written on the collector. With increasing collector motion velocity, the line width and thickness of micro/nano thin film will be decreased. During the EDW process, the mechanical stretching force had provided an excellent aspect to control the morphology and deposition pattern of EDWed micro/nano thin film.
{"title":"Pattern stretchable micro-nano thin film via Electrohydrodynamic Direct-Writing","authors":"Jin Wei, Jianyi Zheng, G. Zheng, Xiang Wang, Guangqi He, Haiyan Liu, Daoheng Sun, Juan Liu","doi":"10.1109/3M-NANO.2013.6737379","DOIUrl":"https://doi.org/10.1109/3M-NANO.2013.6737379","url":null,"abstract":"In this paper, mechanical stretching force is introduced into the Electrohydrodynamic Direct-Write (EDW) process. The effects of mechanical stretching on the rheology and deposition behaviors of EDW jet were investigated. The stretching affects that stemmed from the EDW motion platform provided an extra force on the charged jet. The larger stretching force applied on the jet played a good role to overcome bending instability, and stretch the jet into finer ones. Since the short distance between spinneret and collector, the mechanical stretching force acted more important role on the jet formation process. Thanks to the stretching effect, the whipping of charged jet can be avoided and micro/nano thin film without curve structure can be direct-written on the collector. With increasing collector motion velocity, the line width and thickness of micro/nano thin film will be decreased. During the EDW process, the mechanical stretching force had provided an excellent aspect to control the morphology and deposition pattern of EDWed micro/nano thin film.","PeriodicalId":120368,"journal":{"name":"2013 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale","volume":"13 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125647700","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-08-01DOI: 10.1109/3M-NANO.2013.6737413
U. Bhagat, B. Shirinzadeh, L. Clark, Y. Qin, D. Zhang, Y. Tian
The work presented in this paper focuses on the system identification of a 2-DOF flexure-based mechanism, designed for micro/nano scale positioning and manipulation. In the presented compliant mechanism, the cross axis coupling ratio is below 1% indicating excellent decoupling performance. The system identification procedure, experimental design, data collection, data analysis, and validation of the identified system are detailed in this paper. A linear sine swept signal over a range from 1 Hz to 1000 Hz is applied to the system as an input. Laser interferometry-based sensing and measurement technique is used to measure the response of the system. The experimental data is used to evaluate the transfer function of the system in the X and Y axes. The first natural frequency of the 2-DOF mechanism in the X and Y axes are estimated using the identified models, which are found out to be 557 Hz and 545 Hz respectively. Validation data is collected and used to verify the accuracy of the identified model. The error between the predicted output of the identified model and the experimental response is found to be less than ±10%, mostly resulted from actuator hysteresis. Further, a feedforward controller is implemented to track a 1-DOF smooth multiple-frequency trajectory.
{"title":"Experimental system identification and feed-forward control of a 2-DOF flexure-based mechanism","authors":"U. Bhagat, B. Shirinzadeh, L. Clark, Y. Qin, D. Zhang, Y. Tian","doi":"10.1109/3M-NANO.2013.6737413","DOIUrl":"https://doi.org/10.1109/3M-NANO.2013.6737413","url":null,"abstract":"The work presented in this paper focuses on the system identification of a 2-DOF flexure-based mechanism, designed for micro/nano scale positioning and manipulation. In the presented compliant mechanism, the cross axis coupling ratio is below 1% indicating excellent decoupling performance. The system identification procedure, experimental design, data collection, data analysis, and validation of the identified system are detailed in this paper. A linear sine swept signal over a range from 1 Hz to 1000 Hz is applied to the system as an input. Laser interferometry-based sensing and measurement technique is used to measure the response of the system. The experimental data is used to evaluate the transfer function of the system in the X and Y axes. The first natural frequency of the 2-DOF mechanism in the X and Y axes are estimated using the identified models, which are found out to be 557 Hz and 545 Hz respectively. Validation data is collected and used to verify the accuracy of the identified model. The error between the predicted output of the identified model and the experimental response is found to be less than ±10%, mostly resulted from actuator hysteresis. Further, a feedforward controller is implemented to track a 1-DOF smooth multiple-frequency trajectory.","PeriodicalId":120368,"journal":{"name":"2013 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale","volume":"8 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128492773","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-08-01DOI: 10.1109/3M-NANO.2013.6737389
Chen Li-guo, Lei Yan-yan, Chen Tao, Pan Ming-qiang, Gu Yang-qin
High precision positioning stage has played increasingly important role in the areas of aeronautics and astronautics, ultra-precision manufacturing and measuring, microelectronics, biological engineering, optical engineering, etc. In this paper, a piezo-powered 2D micro-positioning stage based on parallel sheet plate flexible beams is designed. A lever amplifier structure connected by circular arc flexible hinges is designed, which can effectively enlarge driven displacement and narrow the size of the positioning stage. The structure of parallel flexible decoupling beams and circular arc flexure hinges are simulated by ANSYS. The simulation results show that the structure of the stage can effectively reduce the coupling of the micro positioning stage. Finally, the stage is manufactured and the experiments proved that the positioning accuracy is 10nm and the coupling of the micro positioning platform is 5.036%.
{"title":"Design and research of miniaturization two-dimensional micro-positioning platform based on parallel sheet plate flexible decoupling beams","authors":"Chen Li-guo, Lei Yan-yan, Chen Tao, Pan Ming-qiang, Gu Yang-qin","doi":"10.1109/3M-NANO.2013.6737389","DOIUrl":"https://doi.org/10.1109/3M-NANO.2013.6737389","url":null,"abstract":"High precision positioning stage has played increasingly important role in the areas of aeronautics and astronautics, ultra-precision manufacturing and measuring, microelectronics, biological engineering, optical engineering, etc. In this paper, a piezo-powered 2D micro-positioning stage based on parallel sheet plate flexible beams is designed. A lever amplifier structure connected by circular arc flexible hinges is designed, which can effectively enlarge driven displacement and narrow the size of the positioning stage. The structure of parallel flexible decoupling beams and circular arc flexure hinges are simulated by ANSYS. The simulation results show that the structure of the stage can effectively reduce the coupling of the micro positioning stage. Finally, the stage is manufactured and the experiments proved that the positioning accuracy is 10nm and the coupling of the micro positioning platform is 5.036%.","PeriodicalId":120368,"journal":{"name":"2013 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale","volume":"22 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131364740","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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