Pub Date : 2013-08-01DOI: 10.1109/3M-NANO.2013.6737413
U. Bhagat, B. Shirinzadeh, L. Clark, Y. Qin, D. Zhang, Y. Tian
The work presented in this paper focuses on the system identification of a 2-DOF flexure-based mechanism, designed for micro/nano scale positioning and manipulation. In the presented compliant mechanism, the cross axis coupling ratio is below 1% indicating excellent decoupling performance. The system identification procedure, experimental design, data collection, data analysis, and validation of the identified system are detailed in this paper. A linear sine swept signal over a range from 1 Hz to 1000 Hz is applied to the system as an input. Laser interferometry-based sensing and measurement technique is used to measure the response of the system. The experimental data is used to evaluate the transfer function of the system in the X and Y axes. The first natural frequency of the 2-DOF mechanism in the X and Y axes are estimated using the identified models, which are found out to be 557 Hz and 545 Hz respectively. Validation data is collected and used to verify the accuracy of the identified model. The error between the predicted output of the identified model and the experimental response is found to be less than ±10%, mostly resulted from actuator hysteresis. Further, a feedforward controller is implemented to track a 1-DOF smooth multiple-frequency trajectory.
{"title":"Experimental system identification and feed-forward control of a 2-DOF flexure-based mechanism","authors":"U. Bhagat, B. Shirinzadeh, L. Clark, Y. Qin, D. Zhang, Y. Tian","doi":"10.1109/3M-NANO.2013.6737413","DOIUrl":"https://doi.org/10.1109/3M-NANO.2013.6737413","url":null,"abstract":"The work presented in this paper focuses on the system identification of a 2-DOF flexure-based mechanism, designed for micro/nano scale positioning and manipulation. In the presented compliant mechanism, the cross axis coupling ratio is below 1% indicating excellent decoupling performance. The system identification procedure, experimental design, data collection, data analysis, and validation of the identified system are detailed in this paper. A linear sine swept signal over a range from 1 Hz to 1000 Hz is applied to the system as an input. Laser interferometry-based sensing and measurement technique is used to measure the response of the system. The experimental data is used to evaluate the transfer function of the system in the X and Y axes. The first natural frequency of the 2-DOF mechanism in the X and Y axes are estimated using the identified models, which are found out to be 557 Hz and 545 Hz respectively. Validation data is collected and used to verify the accuracy of the identified model. The error between the predicted output of the identified model and the experimental response is found to be less than ±10%, mostly resulted from actuator hysteresis. Further, a feedforward controller is implemented to track a 1-DOF smooth multiple-frequency trajectory.","PeriodicalId":120368,"journal":{"name":"2013 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale","volume":"8 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128492773","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-08-01DOI: 10.1109/3M-NANO.2013.6737404
Hui Tang, Yangmin Li, Xiao Xiao
In recent years, biological micromanipulations emerge as a promising application in the micro/nano technology. Manual manipulation tends to have disadvantages of low success rate and low repeatability. In order to perform the robotic biomanipulations, a novel flexure-based Yθ large-workspace micromanipulator with differential lever displacement amplifier (DLDA) is proposed in this paper. After a series of optimal designs and mechanism modeling, the mechanism performance of the proposed micromanipulator is validated by using the Finite Element Analysis (FEA) method. Finally, the proposed micromanipulator is fabricated and close-loop experimentally tested to make a prototype characterization. In this study, two piezoelectric (PZT) actuators P-216.80 with close-loop travel 120 μm and close-loop resolution 2.4 nm are employed, the simulation and experimentally results indicate that the mechanism displacement amplification ratio can reach up to 31, thus the maximum output displacement can achieve around 3.3 mm, the rotation angle can reach up to around 26.5°. Both theoretical derivation and prototype test results well testify the proposed mechanism possesses satisfactory performance to perform the practical biomanipulations.
{"title":"New Yθ compliant micromanipulator with ultra-large workspace for biomanipulations","authors":"Hui Tang, Yangmin Li, Xiao Xiao","doi":"10.1109/3M-NANO.2013.6737404","DOIUrl":"https://doi.org/10.1109/3M-NANO.2013.6737404","url":null,"abstract":"In recent years, biological micromanipulations emerge as a promising application in the micro/nano technology. Manual manipulation tends to have disadvantages of low success rate and low repeatability. In order to perform the robotic biomanipulations, a novel flexure-based Yθ large-workspace micromanipulator with differential lever displacement amplifier (DLDA) is proposed in this paper. After a series of optimal designs and mechanism modeling, the mechanism performance of the proposed micromanipulator is validated by using the Finite Element Analysis (FEA) method. Finally, the proposed micromanipulator is fabricated and close-loop experimentally tested to make a prototype characterization. In this study, two piezoelectric (PZT) actuators P-216.80 with close-loop travel 120 μm and close-loop resolution 2.4 nm are employed, the simulation and experimentally results indicate that the mechanism displacement amplification ratio can reach up to 31, thus the maximum output displacement can achieve around 3.3 mm, the rotation angle can reach up to around 26.5°. Both theoretical derivation and prototype test results well testify the proposed mechanism possesses satisfactory performance to perform the practical biomanipulations.","PeriodicalId":120368,"journal":{"name":"2013 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale","volume":"140 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127500385","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-08-01DOI: 10.1109/3M-NANO.2013.6737445
Jiang Wei, Wang Nan, Yan Wei, Hu Song, Pu Xiao-qiong
Transfer of graphics is achieved by optical lithography for several decades in semiconductor process. The production capacity of 45 nm node has been formed. But now semiconductor industry is difficult to be developed according to the Moore law because of the inherent limitations of optical lithography. Now electron-beam directwriting, X-ray exposure and nanoimprint technology are the main technologies for next generation graphics transfer technology. Nanoimprint technology has the advantages of high yield, lowcost and simple process. This paper introduced the traditional nanoimprint technology and its development, including the principle, applications and challenges.
{"title":"The next generation microelectronics craft technique: Nanoimprint lithography","authors":"Jiang Wei, Wang Nan, Yan Wei, Hu Song, Pu Xiao-qiong","doi":"10.1109/3M-NANO.2013.6737445","DOIUrl":"https://doi.org/10.1109/3M-NANO.2013.6737445","url":null,"abstract":"Transfer of graphics is achieved by optical lithography for several decades in semiconductor process. The production capacity of 45 nm node has been formed. But now semiconductor industry is difficult to be developed according to the Moore law because of the inherent limitations of optical lithography. Now electron-beam directwriting, X-ray exposure and nanoimprint technology are the main technologies for next generation graphics transfer technology. Nanoimprint technology has the advantages of high yield, lowcost and simple process. This paper introduced the traditional nanoimprint technology and its development, including the principle, applications and challenges.","PeriodicalId":120368,"journal":{"name":"2013 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122554950","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-08-01DOI: 10.1109/3M-NANO.2013.6737389
Chen Li-guo, Lei Yan-yan, Chen Tao, Pan Ming-qiang, Gu Yang-qin
High precision positioning stage has played increasingly important role in the areas of aeronautics and astronautics, ultra-precision manufacturing and measuring, microelectronics, biological engineering, optical engineering, etc. In this paper, a piezo-powered 2D micro-positioning stage based on parallel sheet plate flexible beams is designed. A lever amplifier structure connected by circular arc flexible hinges is designed, which can effectively enlarge driven displacement and narrow the size of the positioning stage. The structure of parallel flexible decoupling beams and circular arc flexure hinges are simulated by ANSYS. The simulation results show that the structure of the stage can effectively reduce the coupling of the micro positioning stage. Finally, the stage is manufactured and the experiments proved that the positioning accuracy is 10nm and the coupling of the micro positioning platform is 5.036%.
{"title":"Design and research of miniaturization two-dimensional micro-positioning platform based on parallel sheet plate flexible decoupling beams","authors":"Chen Li-guo, Lei Yan-yan, Chen Tao, Pan Ming-qiang, Gu Yang-qin","doi":"10.1109/3M-NANO.2013.6737389","DOIUrl":"https://doi.org/10.1109/3M-NANO.2013.6737389","url":null,"abstract":"High precision positioning stage has played increasingly important role in the areas of aeronautics and astronautics, ultra-precision manufacturing and measuring, microelectronics, biological engineering, optical engineering, etc. In this paper, a piezo-powered 2D micro-positioning stage based on parallel sheet plate flexible beams is designed. A lever amplifier structure connected by circular arc flexible hinges is designed, which can effectively enlarge driven displacement and narrow the size of the positioning stage. The structure of parallel flexible decoupling beams and circular arc flexure hinges are simulated by ANSYS. The simulation results show that the structure of the stage can effectively reduce the coupling of the micro positioning stage. Finally, the stage is manufactured and the experiments proved that the positioning accuracy is 10nm and the coupling of the micro positioning platform is 5.036%.","PeriodicalId":120368,"journal":{"name":"2013 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale","volume":"22 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131364740","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-08-01DOI: 10.1109/3M-NANO.2013.6737420
Chenfei Sun, Yan Zhang, Yujuan Wang, Yunfei Chen
Graphene is a newly emerging material in many different fields because of its special physical structure. This literature focuses on the influence of layer numbers on friction characteristics. The sample is deposited on a SiO2 substrate. Optical microscope is used to precisely position the specimen while AFM and Raman spectroscopy are suitable tools to determine the layer number of the sheet material. It is found that both the friction force and friction coefficient are reduced with the increase of layer numbers. Moreover, it is also investigated that friction force increases with the velocity.
{"title":"Investigation on friction performance of graphene","authors":"Chenfei Sun, Yan Zhang, Yujuan Wang, Yunfei Chen","doi":"10.1109/3M-NANO.2013.6737420","DOIUrl":"https://doi.org/10.1109/3M-NANO.2013.6737420","url":null,"abstract":"Graphene is a newly emerging material in many different fields because of its special physical structure. This literature focuses on the influence of layer numbers on friction characteristics. The sample is deposited on a SiO2 substrate. Optical microscope is used to precisely position the specimen while AFM and Raman spectroscopy are suitable tools to determine the layer number of the sheet material. It is found that both the friction force and friction coefficient are reduced with the increase of layer numbers. Moreover, it is also investigated that friction force increases with the velocity.","PeriodicalId":120368,"journal":{"name":"2013 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale","volume":"39 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123880204","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-08-01DOI: 10.1109/3M-NANO.2013.6737457
M. Helal, Lefeng Wang, Lining Sun
Compliant mechanisms have made an enormous contribution in the design process of various fields such as for adaptive structures, hand-held tools, components in transportations, electronics, and surgical tools. The use of compliant mechanisms will help in reducing the number of components, which therefore decrease manufacturing cost and additionally increase the performance. Topology optimization has proven to be a powerful method for the conceptual design of structures and mechanisms. Topology optimization is the technique that finds the optimal layout of the structure within a specified design domain. This paper presents the micro/nano angular-table compliant mechanism. The topology optimization is applied for designing two-dimensional micro/nano angular-table compliant mechanism. The final optimal topology configuration of the micro/nano-angular table is shown and discussed.
{"title":"Structure topology optimization of two-dimension micro/nano angular-table","authors":"M. Helal, Lefeng Wang, Lining Sun","doi":"10.1109/3M-NANO.2013.6737457","DOIUrl":"https://doi.org/10.1109/3M-NANO.2013.6737457","url":null,"abstract":"Compliant mechanisms have made an enormous contribution in the design process of various fields such as for adaptive structures, hand-held tools, components in transportations, electronics, and surgical tools. The use of compliant mechanisms will help in reducing the number of components, which therefore decrease manufacturing cost and additionally increase the performance. Topology optimization has proven to be a powerful method for the conceptual design of structures and mechanisms. Topology optimization is the technique that finds the optimal layout of the structure within a specified design domain. This paper presents the micro/nano angular-table compliant mechanism. The topology optimization is applied for designing two-dimensional micro/nano angular-table compliant mechanism. The final optimal topology configuration of the micro/nano-angular table is shown and discussed.","PeriodicalId":120368,"journal":{"name":"2013 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale","volume":"295 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121331881","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-08-01DOI: 10.1109/3M-NANO.2013.6737421
A. J. Mohamad, Xinyao Zhu, Xianping Liu, Wilhelm Pfleging, M. Torge
We report the investigation on effect of surface topography (roughness) and hydrophobicity (contact angle measurement) on bacteria adhesion for polystyrene material. The surfaces of polystyrene substrates were patterned using UV-laser radiation with a wavelength of 193 nm at different conditions. Different surface topographies were fabricated and then measured by an optical surface profiler and contact angle measurements. For bacterial adhesion experiments, an assay of Escherichia coli (E.coli) has been developed and used for bacterial adhesion measurements on both as received and the modified polystyrene surfaces. The method is based upon the staining of attached bacterial cells with the nucleic acid-binding, green fluorescent DAPI stain. The preliminary results show that laser-assisted modification by using laser ablation can make polystyrene substrates either more hydrophilic (with oxygen) or more hydrophobic (with air). The contact angle can be varied from 37° to 108°. The results on bacterial attachment show that the polystyrene substrates as received have no bacteria attached, indicating a good anti-bacterial performance. The treated substrates show some bacterial attachment and, in particular, the surfaces with high contact angle have much higher numbers of bacterial cells attached. This indicates that such laser-assisted process with air can make polystyrene surfaces more attractive to E. coli bacteria.
{"title":"Effect of surface topography on hydrophobicity and bacterial adhesion of polystyrene","authors":"A. J. Mohamad, Xinyao Zhu, Xianping Liu, Wilhelm Pfleging, M. Torge","doi":"10.1109/3M-NANO.2013.6737421","DOIUrl":"https://doi.org/10.1109/3M-NANO.2013.6737421","url":null,"abstract":"We report the investigation on effect of surface topography (roughness) and hydrophobicity (contact angle measurement) on bacteria adhesion for polystyrene material. The surfaces of polystyrene substrates were patterned using UV-laser radiation with a wavelength of 193 nm at different conditions. Different surface topographies were fabricated and then measured by an optical surface profiler and contact angle measurements. For bacterial adhesion experiments, an assay of Escherichia coli (E.coli) has been developed and used for bacterial adhesion measurements on both as received and the modified polystyrene surfaces. The method is based upon the staining of attached bacterial cells with the nucleic acid-binding, green fluorescent DAPI stain. The preliminary results show that laser-assisted modification by using laser ablation can make polystyrene substrates either more hydrophilic (with oxygen) or more hydrophobic (with air). The contact angle can be varied from 37° to 108°. The results on bacterial attachment show that the polystyrene substrates as received have no bacteria attached, indicating a good anti-bacterial performance. The treated substrates show some bacterial attachment and, in particular, the surfaces with high contact angle have much higher numbers of bacterial cells attached. This indicates that such laser-assisted process with air can make polystyrene surfaces more attractive to E. coli bacteria.","PeriodicalId":120368,"journal":{"name":"2013 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale","volume":"28 14 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115884244","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-08-01DOI: 10.1109/3M-NANO.2013.6737455
Huixiang Wang, T. Li, Bohui Zhang
For the problem of the delay of autofocus, fuzzy image and the error of motor control in the traditional pipeline detection system (PDS), a new kind of PDS with voice-coil-motor drive is introduced in this paper. It adapts two-stage composite algorithm based on the deviations function and the wavelet transform, and uses the improved mountain-climbing-search-strategy. Finally complete the simulation of algorithm by MATLAB, test image processing through the platform of VC++6.0 and achieve the ideal effect of focus.
{"title":"Research on composite autofocus algorithm for detection system of pipeline robot","authors":"Huixiang Wang, T. Li, Bohui Zhang","doi":"10.1109/3M-NANO.2013.6737455","DOIUrl":"https://doi.org/10.1109/3M-NANO.2013.6737455","url":null,"abstract":"For the problem of the delay of autofocus, fuzzy image and the error of motor control in the traditional pipeline detection system (PDS), a new kind of PDS with voice-coil-motor drive is introduced in this paper. It adapts two-stage composite algorithm based on the deviations function and the wavelet transform, and uses the improved mountain-climbing-search-strategy. Finally complete the simulation of algorithm by MATLAB, test image processing through the platform of VC++6.0 and achieve the ideal effect of focus.","PeriodicalId":120368,"journal":{"name":"2013 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale","volume":"81 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114299682","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-08-01DOI: 10.1109/3M-NANO.2013.6737431
Hui Chen, M. Pallapa, Weijie Sun, Zhendong Sun, J. Yeow
In this paper, a second-order sliding mode control (2-SMC) scheme, called twisting algorithm, is applied to control an electrostatically actuated 2D torsional MEMS micromirror. The proposed twisting algorithm is able to improve the transient and positioning performance of the controlled 2D micromirror including robustness against model uncertainties and external disturbances. The main advantages of the proposed scheme over the first-order SMCare chattering attenuation and enhanced positional accuracy. The closed-loop stability and higher performance of the micromirror under closed-loop control is verified though numerical simulations and experiments.
{"title":"Application of twisting algorithm to a 2D electrostatic MEMS micromirror","authors":"Hui Chen, M. Pallapa, Weijie Sun, Zhendong Sun, J. Yeow","doi":"10.1109/3M-NANO.2013.6737431","DOIUrl":"https://doi.org/10.1109/3M-NANO.2013.6737431","url":null,"abstract":"In this paper, a second-order sliding mode control (2-SMC) scheme, called twisting algorithm, is applied to control an electrostatically actuated 2D torsional MEMS micromirror. The proposed twisting algorithm is able to improve the transient and positioning performance of the controlled 2D micromirror including robustness against model uncertainties and external disturbances. The main advantages of the proposed scheme over the first-order SMCare chattering attenuation and enhanced positional accuracy. The closed-loop stability and higher performance of the micromirror under closed-loop control is verified though numerical simulations and experiments.","PeriodicalId":120368,"journal":{"name":"2013 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale","volume":"113 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126923731","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-08-01DOI: 10.1109/3M-NANO.2013.6737378
Benliang Zhu, Xianmin Zhang, Quan Zhang, S. Fatikow
This study is proposed to solve the compliant mechanism de facto hinge (point flexure) issue by developing a new problem formulation. The main idea is to introduce an additional objective function which is to minimize the distance between the outputs of two types finite element analysis (FEA). A ratio formed formulation is developed based on the method and examined within the continuum type topology optimization framework. Numerical examples are provided to confirm the validity of the proposed method. It is shown that the proposed method gives compliant mechanisms that completely free of one-node connected hinges.
{"title":"Topology optimization of hinge-free compliant mechanisms using a two-step FEA method","authors":"Benliang Zhu, Xianmin Zhang, Quan Zhang, S. Fatikow","doi":"10.1109/3M-NANO.2013.6737378","DOIUrl":"https://doi.org/10.1109/3M-NANO.2013.6737378","url":null,"abstract":"This study is proposed to solve the compliant mechanism de facto hinge (point flexure) issue by developing a new problem formulation. The main idea is to introduce an additional objective function which is to minimize the distance between the outputs of two types finite element analysis (FEA). A ratio formed formulation is developed based on the method and examined within the continuum type topology optimization framework. Numerical examples are provided to confirm the validity of the proposed method. It is shown that the proposed method gives compliant mechanisms that completely free of one-node connected hinges.","PeriodicalId":120368,"journal":{"name":"2013 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale","volume":"36 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125844181","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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