Pub Date : 2013-08-01DOI: 10.1109/3M-NANO.2013.6737438
Ailong Zhang, Zhao Xin, Wu Ming, Xizeng Feng
It's of significance to study coating method of micro pattern, which plays an important role in the research of biological growth in cell scale. To avoid high cost for micro fabrication in traditional coating method and at the same time to improve flexibility, a novel coating approach based on microscopic injection system is proposed in the paper. In contrary to traditional micro injection, controlling pressure is just used to keep the balance of solution in injection pipette while interfacial force at tip between solution and substrate is used to drive out solution for coating. According to the proposed method, micro stripe and micro dot pattern coating are achieved in our experiment, which verifies the effectiveness of the method. Meanwhile, neural stem cells(NSCs) growth and distribution controlling results verifies the practical application value of the coating method.
{"title":"Coating method of micro pattern based on microscopic injection system","authors":"Ailong Zhang, Zhao Xin, Wu Ming, Xizeng Feng","doi":"10.1109/3M-NANO.2013.6737438","DOIUrl":"https://doi.org/10.1109/3M-NANO.2013.6737438","url":null,"abstract":"It's of significance to study coating method of micro pattern, which plays an important role in the research of biological growth in cell scale. To avoid high cost for micro fabrication in traditional coating method and at the same time to improve flexibility, a novel coating approach based on microscopic injection system is proposed in the paper. In contrary to traditional micro injection, controlling pressure is just used to keep the balance of solution in injection pipette while interfacial force at tip between solution and substrate is used to drive out solution for coating. According to the proposed method, micro stripe and micro dot pattern coating are achieved in our experiment, which verifies the effectiveness of the method. Meanwhile, neural stem cells(NSCs) growth and distribution controlling results verifies the practical application value of the coating method.","PeriodicalId":120368,"journal":{"name":"2013 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale","volume":"54 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121672359","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-08-01DOI: 10.1109/3M-NANO.2013.6737393
Z. Weng, An'gang Yuan, Weixun Mi, Wendan Zhang, Cuiting Wu, Zuobin Wang
We present the transition state of porous InP from three to two dimensions, which is explored during electrochemical etching at constant current density in NaCl solutions on n-InP(100) wafers. The `node' of the three dimensional structure revealed by scanning electron microscopy are consistent with the oscillatory periods, and that the smooth curve is corresponding to the uniformly vertical pores along with the <;001> direction. In addition, the onset and end of the oscillations shift ahead of times with increasing current densities. Furthermore, the transition of porous InP was discussed based on the surface curvature, the diffusion-control, and the reactive heat.
{"title":"Growth of porous InP: Transition from three to two dimensional structures","authors":"Z. Weng, An'gang Yuan, Weixun Mi, Wendan Zhang, Cuiting Wu, Zuobin Wang","doi":"10.1109/3M-NANO.2013.6737393","DOIUrl":"https://doi.org/10.1109/3M-NANO.2013.6737393","url":null,"abstract":"We present the transition state of porous InP from three to two dimensions, which is explored during electrochemical etching at constant current density in NaCl solutions on n-InP(100) wafers. The `node' of the three dimensional structure revealed by scanning electron microscopy are consistent with the oscillatory periods, and that the smooth curve is corresponding to the uniformly vertical pores along with the <;001> direction. In addition, the onset and end of the oscillations shift ahead of times with increasing current densities. Furthermore, the transition of porous InP was discussed based on the surface curvature, the diffusion-control, and the reactive heat.","PeriodicalId":120368,"journal":{"name":"2013 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale","volume":"33 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123007698","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-08-01DOI: 10.1109/3M-NANO.2013.6737427
J. Kuncova-Kallio, A. Jokinen, J. Sadowski, Niko Granqvist
Nanolaminates play a significant role in the precision optical components, and protective barrier coatings. We present a new non-destructive method for characterization of nanolaminates in terms of thickness and refractive index based on Multi-Parametric Surface Plasmon Resonance (MP-SPR). In this paper, we briefly compare novel MP-SPR technology and traditional ellipsometry approach and then show MP-SPR on three examples that would be difficult-to-measure with ellipsometry. In the first case, MP-SPR is used to measure thickness of Langmuir-Blodgett multilayer film of Cr-Au-SACd, where each SACd layer can be measured individually without averaging. In the second case, vacuum deposited Cr-Au-TaC (tetragonal amorphous carbon) is measured. In the third case, alternating nanolayers of Al2O3-Pt deposited by Atomic Layer Deposition are measured. This shows that Multi-Parametric Surface Plasmon Resonance (MP-SPR) overcomes drawbacks of traditional optical methods and enables measurements of metal (light absorbing) nanolaminates and of ultrathin nanolayers.
{"title":"Characterization of nanolaminate thickness using multi-parametric surface plasmon resonance","authors":"J. Kuncova-Kallio, A. Jokinen, J. Sadowski, Niko Granqvist","doi":"10.1109/3M-NANO.2013.6737427","DOIUrl":"https://doi.org/10.1109/3M-NANO.2013.6737427","url":null,"abstract":"Nanolaminates play a significant role in the precision optical components, and protective barrier coatings. We present a new non-destructive method for characterization of nanolaminates in terms of thickness and refractive index based on Multi-Parametric Surface Plasmon Resonance (MP-SPR). In this paper, we briefly compare novel MP-SPR technology and traditional ellipsometry approach and then show MP-SPR on three examples that would be difficult-to-measure with ellipsometry. In the first case, MP-SPR is used to measure thickness of Langmuir-Blodgett multilayer film of Cr-Au-SACd, where each SACd layer can be measured individually without averaging. In the second case, vacuum deposited Cr-Au-TaC (tetragonal amorphous carbon) is measured. In the third case, alternating nanolayers of Al2O3-Pt deposited by Atomic Layer Deposition are measured. This shows that Multi-Parametric Surface Plasmon Resonance (MP-SPR) overcomes drawbacks of traditional optical methods and enables measurements of metal (light absorbing) nanolaminates and of ultrathin nanolayers.","PeriodicalId":120368,"journal":{"name":"2013 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale","volume":"327 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115767824","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-08-01DOI: 10.1109/3M-NANO.2013.6737451
Dali Liu, Lirong Qiu, Weiqian Zhao
A novel micro-Nano measurement method using confocal microscopy with super-resolution image restoration is proposed to achieve the measurement of all of the lateral dimensions of the line width step sample including the dimension that is smaller than the diffraction limit. In this method, first, the step is over-sampling scanned to obtain the intensity image data at focal plane; and then using the respective restoration to obtain super-resolution restoration images of the flat region and the bevel region; finally, the ideal profile is estimated from the restoration images and used to locate the edges of the structures to measure. Maximum likelihood estimation algorithm based on Markov filed is adopted for the image restoration. Experimental results of the measurement for the lateral dimensions of TGZ02 100nm height standard show that this method can accurately measure the period and all of the lateral dimensions of the step. The method reaches an average measurement value of 0.162μm for the bevel edge, and it is 0.015μm smaller than that measured by AFM.
{"title":"A novel micro-nano measurement method for line width using confocal microscopy with super-resolution image restoration","authors":"Dali Liu, Lirong Qiu, Weiqian Zhao","doi":"10.1109/3M-NANO.2013.6737451","DOIUrl":"https://doi.org/10.1109/3M-NANO.2013.6737451","url":null,"abstract":"A novel micro-Nano measurement method using confocal microscopy with super-resolution image restoration is proposed to achieve the measurement of all of the lateral dimensions of the line width step sample including the dimension that is smaller than the diffraction limit. In this method, first, the step is over-sampling scanned to obtain the intensity image data at focal plane; and then using the respective restoration to obtain super-resolution restoration images of the flat region and the bevel region; finally, the ideal profile is estimated from the restoration images and used to locate the edges of the structures to measure. Maximum likelihood estimation algorithm based on Markov filed is adopted for the image restoration. Experimental results of the measurement for the lateral dimensions of TGZ02 100nm height standard show that this method can accurately measure the period and all of the lateral dimensions of the step. The method reaches an average measurement value of 0.162μm for the bevel edge, and it is 0.015μm smaller than that measured by AFM.","PeriodicalId":120368,"journal":{"name":"2013 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale","volume":"1993 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131047730","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-08-01DOI: 10.1109/3M-NANO.2013.6737394
Chaolei Huang, Xiaojun Tian, Jie Liu, Wenxue Wang, Z. Dong, Lianqing Liu
CuO is an important p-type metal oxide semiconductor material and it has been used in many fields for its excellent physical and chemical properties, such as field effect transistors, photovoltaic cells, field emission nanodevices, and chemical and gas sensors. In this paper, CuO nanowires are synthesized by thermal oxidation of copper foil and suitable DEP parameters are chosen to assemble a single CuO nanowire on microelectrodes to fabricate a single CuO nanowire-based device. Experiments in this paper show that the single CuO nanowire-based device can work as field effect transistor and gas sensor. The single CuO nanowire device has a significant respond to the atmosphere with alcohol at room temperature, so it has potential to work as an alcohol gas sensor at room temperature. The single CuO nanowire device also has quick and significant respond to the humidity at room temperature and a novel liner relationship between conductivity and the relative humidity from 30% to 100%.
{"title":"Fabrication of a single CuO nanowire-based gas sensor working at room temperature","authors":"Chaolei Huang, Xiaojun Tian, Jie Liu, Wenxue Wang, Z. Dong, Lianqing Liu","doi":"10.1109/3M-NANO.2013.6737394","DOIUrl":"https://doi.org/10.1109/3M-NANO.2013.6737394","url":null,"abstract":"CuO is an important p-type metal oxide semiconductor material and it has been used in many fields for its excellent physical and chemical properties, such as field effect transistors, photovoltaic cells, field emission nanodevices, and chemical and gas sensors. In this paper, CuO nanowires are synthesized by thermal oxidation of copper foil and suitable DEP parameters are chosen to assemble a single CuO nanowire on microelectrodes to fabricate a single CuO nanowire-based device. Experiments in this paper show that the single CuO nanowire-based device can work as field effect transistor and gas sensor. The single CuO nanowire device has a significant respond to the atmosphere with alcohol at room temperature, so it has potential to work as an alcohol gas sensor at room temperature. The single CuO nanowire device also has quick and significant respond to the humidity at room temperature and a novel liner relationship between conductivity and the relative humidity from 30% to 100%.","PeriodicalId":120368,"journal":{"name":"2013 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale","volume":"17 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114593062","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-08-01DOI: 10.1109/3M-NANO.2013.6737430
Hui-Jie Zhu, Zhong-he Jin, Shi-chang Hu, Wei Ma, Yidong Liu
Variable-area capacitor with tuning capability is used to control the drive mode of MEMS gyroscopes for constant-frequency oscillation. The proposed control approach tunes the drive axis natural frequency to a preselected frequency and regulates the amplitude of the drive axis vibration. The algorithm mainly implemented using a field-programmable-gate-array (FPGA) is tested on a MEMS gyroscope operating at atmospheric pressure which is of our own manufacture. First measurement results of the novel digital prototype show the amplitude variance of the detected signal of drive axis is 26ppm in an hour while the phase variance is 45ppm.
{"title":"Drive mode control for MEMS gyroscopes with electrostatically tunable structure","authors":"Hui-Jie Zhu, Zhong-he Jin, Shi-chang Hu, Wei Ma, Yidong Liu","doi":"10.1109/3M-NANO.2013.6737430","DOIUrl":"https://doi.org/10.1109/3M-NANO.2013.6737430","url":null,"abstract":"Variable-area capacitor with tuning capability is used to control the drive mode of MEMS gyroscopes for constant-frequency oscillation. The proposed control approach tunes the drive axis natural frequency to a preselected frequency and regulates the amplitude of the drive axis vibration. The algorithm mainly implemented using a field-programmable-gate-array (FPGA) is tested on a MEMS gyroscope operating at atmospheric pressure which is of our own manufacture. First measurement results of the novel digital prototype show the amplitude variance of the detected signal of drive axis is 26ppm in an hour while the phase variance is 45ppm.","PeriodicalId":120368,"journal":{"name":"2013 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130257089","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-08-01DOI: 10.1109/3M-NANO.2013.6737432
Li Xiang, Gutian Zhao, Di Zhang, Yunfei Chen
At room temperature ion-ion correlations and counterions volume effect play a crucial role in the description of the electrical double layer of colloidal particles. In fact, in many instances, the inclusion of the short range correlations between ions in the study of the ionic distribution and the consideration of the ion's size lead to quite different results with respect to the classical treatment (where ions are assumed to be points). In particular, these discrepancies become more noticeable for highly charged particles in the presence of moderate or highly multivalent counterion concentrations. Moreover, it can be shown that the existence of an electrolyte mixture consisting of multi- and monovalent counterions may cause that system to become overcharged, a feature that cannot be predicted from a classical point of view based on the Boltzmann distribution function. In order to explore the charge inversion in electrolyte mixtures of trivalent and monovalent ions, the interaction of mica surfaces in two different concentrations of LaCl3 before and after adding NaCl is investigated through the surface force apparatus(SFA) and these experimental results can demonstrate that the charge inversion is indeed enhanced by a monovalent salt.
{"title":"Exploring charge inversion in electrolyte mixtures of trivalent and monovalent ions","authors":"Li Xiang, Gutian Zhao, Di Zhang, Yunfei Chen","doi":"10.1109/3M-NANO.2013.6737432","DOIUrl":"https://doi.org/10.1109/3M-NANO.2013.6737432","url":null,"abstract":"At room temperature ion-ion correlations and counterions volume effect play a crucial role in the description of the electrical double layer of colloidal particles. In fact, in many instances, the inclusion of the short range correlations between ions in the study of the ionic distribution and the consideration of the ion's size lead to quite different results with respect to the classical treatment (where ions are assumed to be points). In particular, these discrepancies become more noticeable for highly charged particles in the presence of moderate or highly multivalent counterion concentrations. Moreover, it can be shown that the existence of an electrolyte mixture consisting of multi- and monovalent counterions may cause that system to become overcharged, a feature that cannot be predicted from a classical point of view based on the Boltzmann distribution function. In order to explore the charge inversion in electrolyte mixtures of trivalent and monovalent ions, the interaction of mica surfaces in two different concentrations of LaCl3 before and after adding NaCl is investigated through the surface force apparatus(SFA) and these experimental results can demonstrate that the charge inversion is indeed enhanced by a monovalent salt.","PeriodicalId":120368,"journal":{"name":"2013 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale","volume":"411 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126335409","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
With the rapid development of nano science and precision engineering, a positioning system with high resolution is indispensable to meet the requirement of precise positioning. This paper presents the design and modeling of a flexure-based positioning stage with the functionality of resolution enhancement. To achieve high enhancement ratio, two sets of displacement reduction mechanisms are incorporated and configured serially in a monolithic symmetrical design. Following the assumption that the flexure hinge can be equivalent to an ideal revolute joint with a torsional spring, theoretical models are established to analyze the resolution enhancement ratio and dynamic performance of the positioning stage. Moreover, finite element analysis (FEA) is conducted to study the performances of the mechanism and verify the theoretical models. The results show that the proposed mechanism can achieve a resolution enhancement ratio of 18.75 to improve the positioning performance, and the first order natural frequency of the mechanism is 535.5Hz, which guarantees the bandwidth of the positioning operation.
{"title":"A novel positioning stage with resolution enhancement functionality for nano manipulation","authors":"Chongrui Du, Weihai Chen, Xiantao Sun, Yunjie Wu, Jianbin Zhang, Wenjie Chen","doi":"10.1109/3M-NANO.2013.6737407","DOIUrl":"https://doi.org/10.1109/3M-NANO.2013.6737407","url":null,"abstract":"With the rapid development of nano science and precision engineering, a positioning system with high resolution is indispensable to meet the requirement of precise positioning. This paper presents the design and modeling of a flexure-based positioning stage with the functionality of resolution enhancement. To achieve high enhancement ratio, two sets of displacement reduction mechanisms are incorporated and configured serially in a monolithic symmetrical design. Following the assumption that the flexure hinge can be equivalent to an ideal revolute joint with a torsional spring, theoretical models are established to analyze the resolution enhancement ratio and dynamic performance of the positioning stage. Moreover, finite element analysis (FEA) is conducted to study the performances of the mechanism and verify the theoretical models. The results show that the proposed mechanism can achieve a resolution enhancement ratio of 18.75 to improve the positioning performance, and the first order natural frequency of the mechanism is 535.5Hz, which guarantees the bandwidth of the positioning operation.","PeriodicalId":120368,"journal":{"name":"2013 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale","volume":"11 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128057828","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-08-01DOI: 10.1109/3M-NANO.2013.6737439
M. Helal, W. Rong, Lining Sun
Micro-electromechanical Systems is a rapidly growing field that will permeate our everyday lives in the coming decades. Recently, the evolution in microelectronics of combining mechanical and electrical functions has brought about an exciting new field micro/nano-electro-mechanical system. Compliant mechanisms can play an important role in the design of micro-devices for micro-electro-mechanical systems applications. Compliant mechanism is flexible structures that generate desired motion by undergoing elastic deformations. The concept of structural optimization has been more and more widely accepted in many engineering fields. The structural optimization can result in a much more reasonable and economical structure design. In this investigation, structure optimization is applied for designing two-dimensional micro/nano angular-table compliant mechanism. The interface between Malab and Ansys were shown to obtain the optimal shape of the compliant mechanism. Structure design optimization of the two-dimension micro/nano angular-table with S-shape compliant structure was shown and all results are illustrated.
{"title":"Structure design optimization of micro/nano angular-table with S-shape compliant structure","authors":"M. Helal, W. Rong, Lining Sun","doi":"10.1109/3M-NANO.2013.6737439","DOIUrl":"https://doi.org/10.1109/3M-NANO.2013.6737439","url":null,"abstract":"Micro-electromechanical Systems is a rapidly growing field that will permeate our everyday lives in the coming decades. Recently, the evolution in microelectronics of combining mechanical and electrical functions has brought about an exciting new field micro/nano-electro-mechanical system. Compliant mechanisms can play an important role in the design of micro-devices for micro-electro-mechanical systems applications. Compliant mechanism is flexible structures that generate desired motion by undergoing elastic deformations. The concept of structural optimization has been more and more widely accepted in many engineering fields. The structural optimization can result in a much more reasonable and economical structure design. In this investigation, structure optimization is applied for designing two-dimensional micro/nano angular-table compliant mechanism. The interface between Malab and Ansys were shown to obtain the optimal shape of the compliant mechanism. Structure design optimization of the two-dimension micro/nano angular-table with S-shape compliant structure was shown and all results are illustrated.","PeriodicalId":120368,"journal":{"name":"2013 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale","volume":"16 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127981375","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-08-01DOI: 10.1109/3M-NANO.2013.6737435
Sadia Sarahnaz, Om Prakash Gujela, N. Afzulpurkar
ZnO nanorods are grown on p-type silicon substrates coated with a light emitting polymer PFO. Powdered PFO is mixed in toluene and spun coated on the Si substrate and heated before growing ZnO nanorods on them. PMMA solution in toluene is then spun coated on the nanorods to work as an insulating layer and the tips were etched using oxygen plasma. With Au and Al metal being used as top and bottom contacts, we fabricate a hybrid light emitting diode structure. In this work, we report the electrical and optical performances of the fabricated light emitting diode with a hybrid structure of Au/ZnO nanorods/PFO/ p-Si/Al. This fabricated heterojunction LED with 1 dimensional ZnO nanostructures exhibited IV characteristics of diode and photoluminescence were observed in a broad yellow-green spectrum.
{"title":"Fabrication of light emitting diode with ZnO nanorods on polymer coated silicon substrate","authors":"Sadia Sarahnaz, Om Prakash Gujela, N. Afzulpurkar","doi":"10.1109/3M-NANO.2013.6737435","DOIUrl":"https://doi.org/10.1109/3M-NANO.2013.6737435","url":null,"abstract":"ZnO nanorods are grown on p-type silicon substrates coated with a light emitting polymer PFO. Powdered PFO is mixed in toluene and spun coated on the Si substrate and heated before growing ZnO nanorods on them. PMMA solution in toluene is then spun coated on the nanorods to work as an insulating layer and the tips were etched using oxygen plasma. With Au and Al metal being used as top and bottom contacts, we fabricate a hybrid light emitting diode structure. In this work, we report the electrical and optical performances of the fabricated light emitting diode with a hybrid structure of Au/ZnO nanorods/PFO/ p-Si/Al. This fabricated heterojunction LED with 1 dimensional ZnO nanostructures exhibited IV characteristics of diode and photoluminescence were observed in a broad yellow-green spectrum.","PeriodicalId":120368,"journal":{"name":"2013 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale","volume":"42 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116296741","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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