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2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)最新文献

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Vision based 3D calibration of micromanipulator in microrobotic fiber characterization platform 基于视觉的微机器人纤维表征平台微机械臂三维标定
Yikun Xiong, M. von Essen, J. Hirvonen, P. Kallio
Calibration is of great significance in the development of automatic micromanipulation systems. This paper presents a novel vision based procedure for three dimensional (3D) calibration of micromanipulators. Two major issues in the proposed calibration approach - vision system calibration and manipulator kinematic calibration - are discussed in details in this paper. Verification and evaluation experiments are conducted using a 3D micromanipulator in a microrobotic fiber characterization platform. The results demonstrate that the proposed calibration approach is able to reduce the pose error below 5 micrometers.
标定在自动微操作系统的开发中具有重要意义。提出了一种新的基于视觉的微机械臂三维标定方法。本文详细讨论了所提出的标定方法中的两个主要问题——视觉系统标定和机械手运动学标定。利用三维微机械臂在微机器人纤维表征平台上进行了验证和评价实验。结果表明,所提出的标定方法能够将姿态误差减小到5微米以下。
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引用次数: 0
MEMS slide block locking mechanism based on elastic supporting structure 基于弹性支撑结构的MEMS滑块锁定机构
Fan Chenyang, Li Xiaojie, W. Falin
Aiming at the condition that when the Fuze MEMS (micro electro mechanical system) S&A system bears setback/centrifugal overload in an experiment, the clamping head of a setback/centrifugal slide block deforms considerably when entering the clamping seat of a base plate, so that the slide block cannot be locked successfully by the clamping seat of the base plate, this paper presents an MEMS slide block locking mechanism with an elastic supporting structure. The structure of the mechanism, which is contrary to the original structure, is that rigid barbs are arranged on the clamping head, and an elastic supporting arm is arranged on the base plate. The finite element simulation with ANSYS shows that when the clamping head and the clamping arm of the locking mechanism with the elastic supporting structure bear overload, the stress of the dangerous cross-section of the locking mechanism is reduced by 52%, compared with that of the original mechanism, so that plastic deformation is avoided, and the slide block can enter the clamping seat smoothly and locked. Therefore, it can provide selection and reference for the design of locking mechanisms of MEMS S&A system in future.
针对引信微机电系统(MEMS) S&A系统在实验中承受退退/离心过载时,退退/离心滑块夹头进入底板夹座时发生较大变形,导致滑块无法被底板夹座成功锁定的情况,设计了一种弹性支撑结构的MEMS滑块锁定机构。该机构的结构与原结构相反,在夹紧头上设有刚性倒钩,在底板上设有弹性支撑臂。利用ANSYS进行有限元仿真表明,采用弹性支承结构的锁紧机构的夹头和夹紧臂承受过载时,锁紧机构的危险截面应力比原机构减小52%,从而避免了塑性变形,滑块能够顺利进入夹紧座并锁紧。因此,可以为今后MEMS S&A系统锁紧机构的设计提供选择和参考。
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引用次数: 1
Tracking control of an electrostatic torsional micromirror beyond the pull-in limit with enhanced performance 静电扭转微镜超越拉入极限的跟踪控制与性能增强
Weijie Sun, J. Yeow, Zhendong Sun
In this paper, we will study the output-error-constrained tracking control problem of an electrostatic torsional micromirror beyond the pull-in limit. We will first show that this problem can be formulated as a robust output regulation problem and it further boils down to a robust regulation problem with output-constrained by adaptive internal model design, the solution of which would in turn lead to the solution of the original problem. Then we design a regulation controller for such a regulation problem by using the barrier Lyapunov function technique. Our adaptive control law ensures the electrostatic torsional micromirror with a enhanced tracking performance in the sense that the moveable micromirror can achieve the sinusoidal wave scanning of any frequency up to a full gap operation without contacts of the fixed bottom electrode, and furthermore, the estimated sinusoidal wave frequency converges to its real value.
在本文中,我们将研究静电扭转微镜超过拉入极限的输出误差约束跟踪控制问题。我们将首先表明,这个问题可以被表述为一个鲁棒输出调节问题,它进一步归结为一个鲁棒调节问题与输出约束的自适应内部模型设计,其解决将反过来导致原来的问题的解决。然后利用垒李雅普诺夫函数技术设计了一个调节控制器。本文提出的自适应控制律使静电扭转微镜具有较强的跟踪性能,即在不接触固定底电极的情况下,可实现任意频率的正弦波扫描,直至全间隙工作,并且估计的正弦波频率收敛于实际值。
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引用次数: 1
Finite element simulation of PTFE nano-film two-phase filter 聚四氟乙烯纳米膜两相滤波器的有限元模拟
Yankun Liu, W. Lou, Qingfang Shi, Mingru Guo, Peng Liu
With the development of nanotechnology and Micro-Electro-Mechanical System (MEMS) technology, micro-pores films are widely applied in the fabrication of important components of nano-devices and MEMS. It is found that micro-pores films have the effect on the separation of the two-phases and the fix of the phase interfaces, due to huge network structures and highly ordered distribution of pore structure. Based on the combined effects of the inertial impaction, the interception and the diffusion, PTFE membrane filter is adopted. Furthermore, we perform the simulation by the COMSOL Multiphysics, which reflects the filtering effect of the PTFE nano-film materials. Finally we study the simulation of the protective micro-particles in PTFE membrane materials.
随着纳米技术和微机电系统(MEMS)技术的发展,微孔薄膜在纳米器件和微机电系统的重要部件制造中得到了广泛的应用。研究发现,微孔膜由于其巨大的网状结构和高度有序的孔结构分布,对两相的分离和相界面的固定有一定的影响。基于惯性冲击、拦截和扩散的综合作用,采用了聚四氟乙烯膜滤波器。利用COMSOL Multiphysics软件进行了模拟,模拟结果反映了聚四氟乙烯纳米薄膜材料的过滤效果。最后对聚四氟乙烯膜材料中保护微粒的模拟进行了研究。
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引用次数: 0
The effects of ultrasonic vibration on surface finish and tool wear in end-milling machining 超声波振动对立铣削加工表面光洁度和刀具磨损的影响
C. Li, Min Yeop Kim, T. Ko, Jong Kweon Park
Conventionally, tool wear is very high or fracture when processing high hardness steel by milling method. So, we attempted to design a fixture apparatus for hybrid machining process (HMP) by ultrasonic vibration using finite element method. Now this fixture apparatus has been manufactured. We can do many types of hybrid machining experiments using this fixture. And then the milling machining was conducted to compare the effects of the ultrasonic vibration. The results showed that the tool wear and surface roughness with ultrasonic vibration was smoother than without the fixture vibration. This result could be explained as accelerating the heat transfer by ultrasonic vibration.
传统的铣削方法加工高硬度钢时,刀具磨损非常大或断裂。为此,尝试采用有限元法设计一种超声振动混合加工夹具。现在这个夹具已经制造出来了。使用该夹具可以进行多种类型的混合加工实验。然后进行铣削加工,比较超声振动的影响。结果表明,超声振动后的刀具磨损和表面粗糙度均比无夹具振动时的刀具光滑。这一结果可以解释为超声振动加速了传热。
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引用次数: 3
Extending femtosecond laser fabrication of micro- and nanoscale structures from a planar to non-planar metal surface 将飞秒激光加工的微纳米结构从平面扩展到非平面金属表面
H. Tao, X. Tan, Lingtian Diao, Xiao-wei Song, Z. Hao, Jingquan Lin, Bin Chen
Micro- and nanoscale structures on a material surface formed by femotosecond laser processing have greatly changed its optical characteristics. In this work, the coloring of Al surface has been realized with scanning focused femtosecond laser beam on the Al surface. We further apply femtosecond laser filamentation to form micro- and nano-structures on a spherical Al surface, resulting in a black appearance of the spherical Al. This work opens ways to fabricate strong light-trapping micro- and nano-structure on a non-planar surface without the complexity of a 4-axis sample control.
飞秒激光加工在材料表面形成微纳米结构,极大地改变了材料的光学特性。本文利用扫描聚焦飞秒激光束在铝表面实现了铝表面着色。我们进一步应用飞秒激光灯丝在球形铝表面形成微纳米结构,导致球形铝的黑色外观。这项工作开辟了在非平面表面制造强光捕获微纳米结构的方法,而无需复杂的4轴样品控制。
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引用次数: 1
Motion control of a 2-DOF decoupled compliant mechanism using H∞ synthesis 基于H∞综合的二自由度解耦柔性机构运动控制
Yanding Qin, Yanling Tian, Dawei Zhang, Weiguo Gao, B. Shirinzadeh, U. Bhagat, L. Clark
A decoupled piezo-driven compliant mechanism has been designed and manufactured to track 2-DOF trajectories. Although it features decoupled characteristics, the small cross axis coupling can result in poor tracking performance in 2-DOF trajectories. For such structures, the damping ratio is so small that the modal vibrations are likely to be excited, which greatly degrade its positioning accuracy. In this paper, an H∞ controller is designed to make the closed-loop system match a well-damped second order system. The H∞ controller effectively suppresses the modal vibrations and further reduces the cross axis coupling motions. Experimental results show that the mechanism's tracking performance in 2-DOF trajectories is significantly improved.
设计并制造了一种解耦压电驱动柔性机构,用于跟踪二自由度轨迹。虽然它具有解耦特性,但较小的交叉轴耦合会导致二自由度轨迹的跟踪性能较差。对于这种结构,阻尼比很小,容易激发模态振动,极大地降低了其定位精度。本文设计了一个H∞控制器,使闭环系统与良好阻尼的二阶系统相匹配。H∞控制器有效地抑制了模态振动,进一步减小了跨轴耦合运动。实验结果表明,该机构在二自由度轨迹上的跟踪性能得到了显著提高。
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引用次数: 2
Numerical investigation of size and chirality effects on mechanical properties of graphene nanoribbons 尺寸和手性对石墨烯纳米带力学性能影响的数值研究
Y. Shu, L. Qi, Zhen-Feng Sun, Hejun Li
A molecular structural mechanics model, based on a link between molecular and solid mechanics, was built to evaluate mechanical properties of graphene nanoribbons (GNRs). This model can describe the true state of GNRs more realistically comparing to other simulation methods because of considering the structure and properties of the carbon-carbon bonds. GNRs with different edge types, such as armchair and zigzag types, were simulated under a uniaxial load by using the proposed model. The Young's moduli of GNRs were obtained. Then the influence of edge type and size of GNRs on Young's modulus was also investigated. The results show that GNRs have a similar Young's modulus to carbon nanotubes, which is in good agreement with the previous studies, indicating that the proposed molecular structural mechanics model can be used to predicate the mechanical properties of GNRs.
基于分子力学和固体力学之间的联系,建立了分子结构力学模型来评价石墨烯纳米带的力学性能。由于考虑了碳-碳键的结构和性质,与其他模拟方法相比,该模型可以更真实地描述gnr的真实状态。利用该模型对不同边缘类型(如扶手椅型和之字形型)的gnr进行了单轴载荷下的仿真研究。得到了gnr的杨氏模量。然后研究了gnr的边缘类型和尺寸对杨氏模量的影响。结果表明,gnr具有与碳纳米管相似的杨氏模量,这与前人的研究结果吻合较好,表明所建立的分子结构力学模型可用于预测gnr的力学性能。
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引用次数: 0
Technology of in situ charge promotes the development of MEMS safety and arming device 原位装药技术促进了微机电系统安全防护装置的发展
Zou Jinlong, Li Xiaojie, Lei Yaru
Based on the reading and the analyzing of relative literatures, this paper introduced basic concepts and fabrication processes of two in situ charge technologies - porous silicon energetic material and converting porous metal to primary explosive based on silicon process, and analyzed the structures and working principles of the micro-donators with two in situ charge technologies. This paper also introduced latest process of explosive train of the MEMS S&A. On these bases, the structure and working principle of silicon MEMS S&A proposed by US army was discussed, and this MEMS S&A is based on in situ charge and suitable for wafer-level mass fabrication. Some views about the development of the silicon MEMS S&A were also put forward.
在阅读和分析相关文献的基础上,介绍了多孔硅含能材料和基于硅工艺的多孔金属转化原爆两种原位装药技术的基本概念和制备工艺,分析了两种原位装药技术的微给药体结构和工作原理。本文还介绍了MEMS S&A爆炸串的最新工艺。在此基础上,讨论了美国军方提出的硅MEMS S&A的结构和工作原理,认为该MEMS S&A基于原位装药,适合于圆片级批量制造。最后对硅MEMS S&A的发展提出了一些看法。
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引用次数: 0
Electrothermal effect on the electrical resistivity of single carbon nanocoils 电热效应对单碳纳米线圈电阻率的影响
Ming-Dao Wu, Cheng-Chun Huang, W. Shih, S. Fatikow
We electrothermally determined the internal electrical resistivity of a single carbon nanocoil (CNC) which was assembled on the AFM tip. A heat-transfer modeling which considered the Joule's heat was employed to extract the electrical resistivity. The current and resistance of the loop circuits were applied in the calculation in which the thermal measurement was not required. During the electrical measurement, the overall resistance of the heating loop depended on the current variation and decreased abruptly at the beginning of the measurement. It was suggested that the contact resistances between the CNC and metal electrodes were eliminated due to the shortened difference of the work functions between the two materials. The developed electrothermal model agreed well with the experiment at steady state and gave the CNC resistivity of 1.64*10-4~8.81*10-4 Ω-m. This result confirmed the amorphous phase of the synthesized CNC.
我们用电热法测定了装配在AFM尖端上的单个碳纳米线圈(CNC)的内部电阻率。采用考虑焦耳热的传热模型提取了电阻率。在不需要进行热测量的情况下,将回路的电流和电阻应用于计算。在电测量过程中,加热回路的总电阻随电流变化而变化,在测量开始时突然减小。分析认为,由于两种材料之间的功函数差缩短,消除了CNC电极与金属电极之间的接触电阻。所建立的电热模型与稳态实验结果吻合较好,得到的CNC电阻率为1.64 × 10-4~8.81 × 10-4 Ω-m。这一结果证实了合成CNC的非晶相。
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引用次数: 0
期刊
2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)
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