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2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)最新文献

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FPGA-based object detection and classification inside scanning electron microscopes 基于fpga的扫描电子显微镜内目标检测与分类
C. Diederichs, S. Zimmermann, S. Fatikow
Object-detection and classification is a key task in micro- and nanohandling. The microscopy image is often the only available sensor to detect information about the positions and orientations of objects. Recently, Field Programmable Gate Arrays (FPGAs) have been used for scanning electron microscope (SEM) image acquisition. Such an FPGA image acquisition system is extended to perform basic image processing and on-line object detection. The connected component labeling algorithm for binary large object detection is presented and analyzed for its feasibility in terms of on-line object detection and classification. The features of binary large objects are discussed and analyzed for their feasibility with a single-pass connected component labeling approach, with focus on principal component analysis based features. It is shown that an FPGA implementation of the algorithm can be used to detect and classify carbon-nanotubes (CNTs) during image acquisition, allowing for fast object detection before the whole image is captured.
目标检测与分类是微纳处理中的关键问题。显微镜图像通常是唯一可用的传感器来检测有关物体的位置和方向的信息。近年来,现场可编程门阵列(fpga)已被用于扫描电子显微镜(SEM)的图像采集。对该FPGA图像采集系统进行了扩展,实现了基本的图像处理和在线目标检测。提出了一种用于二值大目标检测的连通分量标记算法,并从在线目标检测和分类的角度分析了该算法的可行性。讨论并分析了二元大物体特征的可行性,重点讨论了基于主成分分析的特征。结果表明,该算法的FPGA实现可用于在图像采集过程中检测和分类碳纳米管(CNTs),从而在捕获整个图像之前实现快速目标检测。
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引用次数: 2
Towards simple methods for mass production of suspended graphene 迈向大规模生产悬浮石墨烯的简单方法
H. Al-Mumen, F. Rao, Lixin Dong, Wen Li
This paper reports simple fabrication approaches that can be used to generate a suspended graphene sheet with the desired thickness, while eliminating the need for a crytical point dryer. Two methods have been developed to achieve a large suspended area of graphenes. In the first approach, SF6 plasma was used to make holes or channels with specific dimensions. Then micromechanical exfoliation was applied to deposit the graphene sheet suspended over these channels or holes. In the second method, we used SF6 plasma to make suspended graphenes by undercutting planar graphenes. To tune the number of graphene layers, thick graphene samples was etched layer by layer until the desired thickness was obtained. Additionally, the effect of using various plasmas etching (SF6 or O2) on the layer-by-layer graphene removal has been studied. Raman spectra of plasma-treated graphenes have shown higher amount of defects in case of SF6, specially for thin graphene sheet. However, these surface defects could be recovered by annealing the samples in an argon environment at about 1000 °C.
本文报道了一种简单的制造方法,可以用来产生具有所需厚度的悬浮石墨烯片,同时消除了对临界点干燥器的需要。已经开发了两种方法来实现石墨烯的大悬浮面积。在第一种方法中,SF6等离子体被用来制造具有特定尺寸的孔或通道。然后应用微机械剥离沉积悬浮在这些通道或孔上的石墨烯片。第二种方法是利用SF6等离子体对平面石墨烯进行下切制备悬浮石墨烯。为了调整石墨烯层数,一层一层地蚀刻厚的石墨烯样品,直到获得所需的厚度。此外,还研究了不同等离子体蚀刻(SF6或O2)对石墨烯逐层去除的影响。等离子体处理的石墨烯的拉曼光谱显示SF6的缺陷量较高,特别是对于薄石墨烯片。然而,这些表面缺陷可以通过在1000°C左右的氩气环境中退火来恢复。
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引用次数: 0
Large-scale assembly of single-walled carbon nanotube field effect transistor 单壁碳纳米管场效应晶体管的大规模组装
Ke Xu, Chengdong Wu, Xiaojun Tian, Haibo Yu, Z. Dong
This paper is to the assembly and fabrication for typical nano device-SWCNT FET for example, facing the large-scale assembly and fabrication for nano devices, and carrying out the experimental research. Assembly method of SWCNTs FET is by floating potential and dielectrophoresis principle. Six hundred devices were assembled less than per square centimeter. The experimental results showed that large-scale assembly was realized, and the success rate of ideal assembly for SWCNTs FET is achieved.
本文以典型的纳米器件——swcnts场效应管的组装与制造为例,面对纳米器件的大规模组装与制造,进行了实验研究。SWCNTs场效应管的组装方法采用浮电位和介电原理。在不到每平方厘米的地方组装了600个设备。实验结果表明,实现了大规模组装,达到了理想的SWCNTs场效应管组装成功率。
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引用次数: 0
Influence of processing parameter on nanoscale anodic oxidation by AFM 工艺参数对AFM纳米阳极氧化的影响
Y. Leng, Lianhe Dong, Yanjun Sun, Zhe Chen, Z. Ma
Combining the pressure sensor's oxidation insulating nanostructure fabrication this paper studied the impact of bias voltage, ambient temperature and humidity on the size of oxide dots during the AFM-based anodic oxidation nano-fabrication. Experimental results show that the size of oxide dots increases with the increasing bias voltage and ambient humidity, but too high bias voltage and ambient temperature will cause staircase phenomena on the surface of oxide dot; ambient temperature 22 °C, bias voltage 8V, humidity 50% and oxidation time 8s are relatively suitable processing parameters for the oxidation fabrication of n-type Si (100).
结合压力传感器氧化绝缘纳米结构的制备,研究了偏置电压、环境温度和湿度对原子力显微镜阳极氧化纳米结构中氧化点尺寸的影响。实验结果表明,氧化点的尺寸随偏置电压和环境湿度的增大而增大,但过高的偏置电压和环境温度会导致氧化点表面出现阶梯现象;环境温度22℃,偏置电压8V,湿度50%,氧化时间8s是氧化制备n型Si(100)较为适宜的工艺参数。
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引用次数: 0
Nanotribological behaviors of friction-induced hillocks on monocrystalline silicon 单晶硅摩擦诱导丘的纳米摩擦学行为
Long Hua, Bingjun Yu, Chen Song, L. Qian, Zhongrong Zhou
With an atomic force microscope, friction and wear behaviors of the friction induced hillocks on monocrystalline silicon were investigated. With the increase of normal load from one to twelve microNewtown, the friction force on silicon substrate showed a sharp increase at eight microNewtown, while the friction force on the hillocks kept a stably linear increase. Since no scratch damage was detected on the hillock below a contact pressure of ten point three gigaPascal, the friction induced hillocks on silicon can withstand the typical contact and sliding in dynamic devices. It was also noted that the friction induced hillock presented anisotropic friction and wear behaviors during scratching. The sliding parallel to the scanning direction for producing the hillock can reduce the friction in dynamic devices. This study can shed new light on potential application of the friction induced nanostructures.
利用原子力显微镜研究了单晶硅表面摩擦丘的摩擦磨损行为。随着法向载荷从1微纽镇增加到12微纽镇,硅衬底上的摩擦力在8微纽镇时急剧增加,而小丘上的摩擦力则保持稳定的线性增加。由于在接触压力低于10.3千兆帕斯卡的情况下,没有检测到划痕损伤,因此硅上的摩擦诱发的小丘可以承受动态设备中典型的接触和滑动。摩擦诱发丘在刮擦过程中表现出各向异性的摩擦磨损行为。平行于扫描方向的滑动产生小丘可以减少动态装置的摩擦。该研究为摩擦诱导纳米结构的潜在应用提供了新的思路。
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引用次数: 0
Investigating the relationship between CD20-Rituximab binding force and mechanical properties of Lymphom B cells using atomic force microscopy 利用原子力显微镜研究cd20 -利妥昔单抗结合力与淋巴B细胞力学性能的关系
Mi Li, Lianqing Liu, N. Xi, Yuechao Wang, Z. Dong, Xiubin Xiao, Weijing Zhang
The invention of atomic force microscopy (AFM) provides new technology for investigating the physiological activities at the single cell and single molecule levels. Lymphoma Raji cells were adsorbed onto the glass slides by coating the glass slides with poly-L-lysine. Rituximabs (anti-CD20 antibody) were linked onto the AFM tip by PEG linker and the CD20-Rituximab binding forces were measured on three lymphoma Raji cells. Then the mechanical properties of the Raji cells were dynamically measured after the Rituximab activation by obtaining force curves on the cell surface. The mechanical properties of lymphoma cells kept stable at the first 20-30 min, and then decreased markedly. Besides, as the CD20-Rituximab binding force increased, the mechanical properties decrease rate increased. The experimental results indicated that the Rituximab's effect is related to CD20-Rituximab binding force and can improve our understanding of Rituximab's variable efficacies in different patients.
原子力显微镜(AFM)的发明为研究单细胞和单分子水平的生理活动提供了新的技术。将聚l -赖氨酸涂在玻片上,将淋巴瘤Raji细胞吸附在玻片上。将抗cd20抗体利妥昔单抗(rituximab)通过PEG连接到AFM尖端,并在3个淋巴瘤Raji细胞上测定cd20 -利妥昔单抗的结合体力。通过获得细胞表面的受力曲线,动态测定了利妥昔单抗活化后Raji细胞的力学性能。淋巴瘤细胞力学性能在前20 ~ 30 min保持稳定,后明显下降。此外,随着cd20 -利妥昔单抗结合力的增加,力学性能下降率也随之增加。实验结果表明,利妥昔单抗的作用与cd20 -利妥昔单抗的结结力有关,可以提高我们对利妥昔单抗在不同患者中不同疗效的认识。
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引用次数: 0
A simple synthesis and characterization of PbTe nano-particles PbTe纳米颗粒的简单合成与表征
Hong-quan Liu, Fei-Xiang Hao, Jie Guo, Yijie Gu, Qing-kun He, H. Cui
PbTe nanopowders with different morphology were prepared by a simple chemical synthesis. Similar cubic nanoparticles have been successfully synthesized by using Pb(NO3)2 and Na2TeO3 as the precursors, and NaBH4 as the reductant. The single PbTe phase is confirmed from XRD pattern, and obvious width of XRD peaks occur. The size of powders is distributed from 20nm to 70nm in a typical process according to observation from SEM and TEM images. Based on HRTEM observation, PbTe nanopowders with an amorphous layer show polyhedron feature. In different crystallization stages, there is different morphology due to competition between surface energy and crystal face energy. The globular, polyhedron and cubic particles belongs to different growth stages, respectively. Possible growth mechanisms of PbTe were also discussed.
采用简单的化学合成方法制备了不同形貌的PbTe纳米粉体。以Pb(NO3)2和Na2TeO3为前驱体,NaBH4为还原剂,成功合成了类似的立方纳米颗粒。XRD谱图证实了单PbTe相的存在,并且出现了明显的XRD峰宽。通过SEM和TEM图像观察,典型工艺中粉末的粒径分布在20nm ~ 70nm之间。基于HRTEM观察,具有非晶层的PbTe纳米粉体呈现多面体特征。在不同的结晶阶段,由于表面能和晶面能的竞争,形成了不同的结晶形态。球状颗粒、多面体颗粒和立方颗粒分别属于不同的生长阶段。讨论了PbTe可能的生长机理。
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引用次数: 1
Periodic sub-wavelength surface-relief structures for antireflection 用于抗反射的周期性亚波长表面浮雕结构
X. Gu, W. Liu, W. Zhang, F. Zhang, L. Yuan, Y. Y. Wang, C. Peng
Periodic sub-wavelength nanocones were simulated for antireflection with three different heights: 300, 500 and 700 nm on Si substrate. On the top of nanocones, we add a layer of Ni and SiO2 with the thicknesses of 10 nm, 20 nm and 30 nm. The reflective characteristics of nanostructures with or without nanomasks were studied by rigorous coupled-wave analysis (RCWA).
在硅衬底上模拟了三种不同高度(300、500和700 nm)的周期性亚波长纳米锥的抗反射性能。在纳米锥的顶部,我们添加了一层厚度分别为10 nm、20 nm和30 nm的Ni和SiO2。采用严格耦合波分析(RCWA)方法研究了带或不带纳米掩膜的纳米结构的反射特性。
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引用次数: 1
2D robotic control of a planar dielectrophoresis-based system 平面介电泳系统的二维机器人控制
Mohamed Kharboutly Alexandre Melis, A. Bolopion, N. Chaillet, Michaël Gauthier
Nanosciences have recently proposed a lot of proofs of concept of innovative nanocomponents and especially nanosensors. Going from the current proofs of concept on this scale to reliable industrial systems requires the emergence of a new generation of manufacturing methods able to move, position and sort micro-nano-components. We propose to develop `No Weight Robots-NWR' that use noncontact transmission of movement (e.g. dielectrophoresis, magnetophoresis) to manipulate micro-nano-objects which could enable simultaneous high throughput and high precision. This paper focuses on developing a 2D robotic control of the trajectory of a micro-object manipulated by a dielectrophoresis system. A 2D dynamic model is used to establish an open loop control law by a numerical inversion. Exploiting this control law, a high speed trajectory tracking (10 Hz) and high precision positioning can be achieved. Several simulated and experimental results are shown to evaluate this control strategy and discuss its performance.
近年来,纳米科学提出了许多创新纳米元件,特别是纳米传感器概念的证明。从目前这种规模的概念证明到可靠的工业系统,需要新一代能够移动、定位和分类微纳米组件的制造方法的出现。我们建议开发“无重量机器人- nwr”,它使用非接触运动传输(如介电电泳,磁泳)来操纵微纳米物体,可以同时实现高通量和高精度。本文主要研究了一种二维机器人控制的微物体的运动轨迹。采用二维动力学模型,通过数值反演建立开环控制律。利用该控制律,可以实现高速(10hz)轨迹跟踪和高精度定位。仿真和实验结果对该控制策略进行了评价,并对其性能进行了讨论。
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引用次数: 1
Characterizing leakage current in silicon nanowire-based field-effect transistors by applying pseudo-random sequences 用伪随机序列表征硅纳米线场效应晶体管的漏电流
T. Roinila, Xiao Yu, A. Gao, Tie Li, J. Verho, M. Vilkko, P. Kallio, Yuelin Wang, J. Lekkala
Development of miniaturized devices that enable rapid and direct recognition of small molecules has become a growing research area in various fields of nanotechnology. Silicon nanowire-based field-effect transistors (SiNW FETs) have been experimentally demonstrated for direct, label free, highly selective, and real-time detection of biological and chemical targets at very low concentrations. The detection of a target is based on the variation of conductance of the nanowire channel which is seen in the voltage-current behavior between the drain and source. Some current, known as leakage current, flows between the gate and drain, and affects the current between the drain and source in noise-like manner. The current is extremely low at DC, and can be ignored in most cases. Recent studies suggest, however, that the leakage current is likely to exhibit frequency-dependent characteristics. Recognizing such properties can possibly take great advantage in developing new detection technologies utilizing SiNW FETs. This paper applies the maximum-length binary sequence (MLBS) and spectrum method, and presents fast frequency-domain methods which can be used to measure and characterize the leakage current. Experimental measurements are shown from an n-type SiNW FET. The results clearly indicate the existence of the mentioned frequency-dependent characteristics.
在纳米技术的各个领域中,开发能够快速和直接识别小分子的小型化设备已成为一个日益增长的研究领域。基于硅纳米线的场效应晶体管(SiNW fet)已经被实验证明可以在非常低的浓度下直接、无标签、高选择性和实时检测生物和化学目标。目标的检测是基于纳米线通道电导的变化,这是在漏极和源极之间的电压-电流行为中看到的。一些电流,称为漏电流,在栅极和漏极之间流动,并以类似噪声的方式影响漏极和源极之间的电流。直流电流极低,在大多数情况下可以忽略。然而,最近的研究表明,泄漏电流可能表现出频率相关的特性。认识到这些特性可以在利用SiNW场效应管开发新的检测技术方面发挥很大的优势。本文应用最大长度二值序列法和频谱法,提出了一种快速测量和表征泄漏电流的频域方法。实验测量显示了一个n型SiNW场效应管。结果清楚地表明上述频率相关特性的存在。
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引用次数: 3
期刊
2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)
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