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Two-dimensional vision-based autonomous microparticle manipulation using a nanoprobe 基于二维视觉的纳米探针自主微粒操作
Pub Date : 1900-01-01 DOI: 10.1163/156856306777924671
M. Sitti, C. Pawashe
Autonomous micromanipulation has been an emerging interest in constructing and assembling micro-objects. Manual assembly and manipulation of small-scale objects through teleoperation is possible; however, autonomy is necessary for large-volume manipulation and manufacturing. In this study, we discuss a two-dimensional autonomous manipulation system, which is based on an optical microscope and a nanoprobe. We demonstrate the manipulation of polystyrene and silica microspheres, which are detected through image processing using the generalized Hough transform. Using an atomic force microscope nanoprobe as an end-effector, microspheres are autonomously pushed to a user-defined configuration. Furthermore, we demonstrate motion planning in micromanipulation by using the Wavefront expansion algorithm, which is necessary in manipulating microspheres without colliding into obstacles. In experiments, we successfully demonstrate the automatic arrangement of 4.5 μm polystyrene and 5 μm silica microspheres into user-defined patterns with an average precision of around 0.5 μm, which is limited by the microscope imaging resolution. This autonomous microparticle arrangement system could be applied to fabricate mold templates for micro/nanoprinting and prototyping micro/nanodevices.
在构建和组装微型物体方面,自主微操作已经成为一种新兴的兴趣。通过远程操作手动组装和操纵小型物体是可能的;然而,对于大规模操作和制造来说,自主性是必要的。在这项研究中,我们讨论了一个基于光学显微镜和纳米探针的二维自主操作系统。我们演示了对聚苯乙烯和二氧化硅微球的操作,这些微球是通过使用广义霍夫变换进行图像处理来检测的。使用原子力显微镜纳米探针作为末端执行器,微球被自动推送到用户定义的配置。此外,我们利用波前展开算法演示了微操作中的运动规划,这是操纵微球而不碰撞到障碍物所必需的。在实验中,我们成功地演示了4.5 μm聚苯乙烯和5 μm二氧化硅微球自动排列成用户自定义的图案,平均精度约为0.5 μm,受显微镜成像分辨率的限制。该自主微粒排列系统可用于微/纳米打印和微/纳米器件原型制作模具模板。
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引用次数: 30
In-pipe wireless micro robot 管道内无线微型机器人
Pub Date : 1900-01-01 DOI: 10.1163/156856301760132150
T. Sasaya, N. Kawahara, K. Tsuruta
We have been developing an In-pipe Wireless Micro Robot for inspection of the inner surface of pipes, in collaboration with DENSO, Toshiba and SANYO under the Japanese national R&D project 'Micromachine Technology' of METI. The micro robot consists of many devices, a CCD camera for visual inspection, an actuator for locomotion, control circuits for system control, a microwave antenna and a photovoltaic device for energy supply and communication. The robot moves in a 10 mm diameter pipe without wire and observes the inner surface of the pipe. Through the project, the technologies of the component devices and the system have been developed. Several important results have been obtained on both technologies. For the device technologies, high-performance micro component devices have been developed. For the systematization technologies, the functions, simulation, packaging and assembling of the system have been studied. Through the development of the micro robot, we have successfully confirmed the wireless in-pipe locomotion and wireless image data communication of 2 frames per second.
我们一直在与日本电装、东芝和三洋合作,在日本经济产业省的国家研发项目“微机械技术”下,开发一种用于检测管道内表面的管道内无线微型机器人。微型机器人由许多装置组成,用于视觉检测的CCD摄像机,用于运动的执行器,用于系统控制的控制电路,微波天线和用于供电和通信的光伏装置。机器人在直径10mm的无导线管道中移动,观察管道的内表面。通过本课题的研究,对该系统的组成器件和系统技术进行了研究。在这两种技术上都取得了一些重要的成果。在器件技术方面,高性能微元件器件得到了发展。在系统化技术方面,对系统的功能、仿真、封装和装配进行了研究。通过对微型机器人的开发,我们成功地确定了无线管道内运动和每秒2帧的无线图像数据通信。
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引用次数: 18
Diamagnetic suspension system for small rotors 小转子抗磁悬挂系统
Pub Date : 1900-01-01 DOI: 10.1163/156856301753398154
R. Moser, H. Bleuler, J. Sandtner
A novel frictionless motor-bearing combination, featuring a passive five degrees of freedom (DOF) suspension system is presented in this paper. In conventional frictionless systems, levitation is achieved by means of feedback controlled electromagnetics or electrostatics (active bearings), permanent magnets in combination with displacement (passive bearings) or by superconductive repulsion of permanent magnets. Earnshaw's theorem discards the possibility of passive static magnetic levitation, but by taking advantage of the diamagnetic effect, a passive magnetic system can be stabilized. In the proposed system, all the degrees of freedom of a disc-shaped magnetic rotor, except its rotation around the main axis, are stabilized using the diamagnetic properties of materials such as bismuth and graphite. As the weight of the rotor is compensated with a permanent magnet, the proposed system can make use of the weak diamagnetic repelling forces, presenting the only known principle for 'real' levitation (no energy input) at room temperature. The presented approach leads to very compact energy-saving solutions. The principle of diamagnetic levitation is well known and understood. The presented experimental work adds radial stiffness to the classic three degrees of freedom suspension and powers the rotor using an induction motor. The realized motor is hardly bigger than one cubic centimeter and turns with up to 800 rpm. This paper intends to draw attention to this uncommon method of levitation and to show that it could be used to design micro-mechatronical actuators.
提出了一种新型无摩擦电机-轴承组合的被动五自由度悬架系统。在传统的无摩擦系统中,悬浮是通过反馈控制的电磁或静电(主动轴承)、永磁体与位移(被动轴承)的结合或永磁体的超导排斥来实现的。恩肖定理摒弃了被动静态磁悬浮的可能性,但利用抗磁效应,可以使被动磁系统稳定下来。在所提出的系统中,圆盘形磁转子的所有自由度,除了绕主轴旋转外,都是利用铋和石墨等材料的抗磁性来稳定的。由于转子的重量由永磁体补偿,所提出的系统可以利用弱抗磁性排斥力,在室温下提出“真实”悬浮(无能量输入)的唯一已知原理。提出的方法导致非常紧凑的节能解决方案。反磁悬浮的原理是众所周知的。提出的实验工作增加径向刚度的经典三自由度悬架和动力转子使用感应电机。所实现的电机几乎不大于一立方厘米,转速高达800转。本文旨在引起人们对这种罕见的悬浮方法的注意,并表明它可以用于设计微机电致动器。
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引用次数: 18
Steady-state analysis of a precision hydraulic flow control servovalve using the finite element method 用有限元法对精密液压流量控制伺服阀进行稳态分析
Pub Date : 1900-01-01 DOI: 10.1163/156856306777544952
Singaperumal, S. Hiremath, R. Kumar
In the present paper, an attempt has been made to simulate the steady-state operation of the jet pipe Electro-Hydraulic ServoValve (EHSV) using the Finite Element Method (FEM). The jet pipe servovalve has two stages and consists of two main assemblies: first-stage torque motor assembly and second-stage valve assembly. Between the first and second stage there is a mechanical feedback to stabilize the valve operation. Each assembly has various delicate and precise components. The finite element analysis has been carried out on jet pipe and feedback spring assembly. The analysis shows that the stiffness of flexure tube and feedback spring assembly plays the major role in achieving steady-state valve operation. The stiffness of these components is obtained through the FEM and these results are validated with experiment. The commercial ABAQUS finite element code has been used for the simulation. The mathematical model of the jet pipe EHSV has been developed and simulated using MATLAB to study the spool dynamics with the main emphasis on the steady-state valve operation. The required simulation parameters, like moment of inertia, stiffness of the components and lever arm length. are obtained from the FEM.
本文尝试用有限元法对射流管式电液伺服阀(EHSV)的稳态运行进行仿真。射流管伺服阀有两级,由两个主要组件组成:第一级扭矩电机组件和第二级阀组件。在第一级和第二级之间有一个机械反馈来稳定阀门的运行。每个组件都有各种精致而精确的组件。对射流管和反馈弹簧总成进行了有限元分析。分析表明,柔性管和反馈弹簧总成的刚度对实现阀的稳态运行起主要作用。通过有限元分析得到了各构件的刚度,并进行了实验验证。采用商用ABAQUS有限元程序进行仿真。建立了射流管道EHSV的数学模型,并利用MATLAB对其进行了仿真,研究了阀芯的动力学特性,重点研究了阀芯的稳态运行。所需的仿真参数,如转动惯量、部件刚度和杠杆臂长度。由有限元法得到。
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引用次数: 9
Miniature mobile robots for plume tracking and source localization research 用于羽流跟踪和源定位研究的微型移动机器人
Pub Date : 1900-01-01 DOI: 10.1163/156856301760132141
Steven E. Eskridge, J. Hurtado, R. Byrne, J. Harrington, E. Heller, D. Adkins
Cooperating robots have the potential to achieve tasks more quickly and with a higher probability of success than a single robot acting alone. This paper describes a system of miniature mobile robots and the algorithms used to demonstrate cooperative plume tracking and source localization. The robots share sensor information, but individually decide a course of action based on their estimate of the plume field. This algorithm was implemented on a group of miniature mobile robots capable of measuring temperature plumes. Experimental results are presented for a representative test run. We also describe a 'next-generation' miniature mobile robot under development that occupies only 0.25 cubic inches in volume.
与单独行动的机器人相比,合作机器人有可能更快地完成任务,并且成功率更高。本文描述了一个微型移动机器人系统,以及用于演示协同羽流跟踪和源定位的算法。这些机器人共享传感器信息,但根据它们对羽流场的估计,各自决定行动路线。该算法在一组能够测量温度羽流的微型移动机器人上实现。给出了具有代表性的试验结果。我们还描述了正在开发的“下一代”微型移动机器人,其体积仅为0.25立方英寸。
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引用次数: 30
Fabrication of aluminum electrodes by water and light 水和光制备铝电极
Pub Date : 1900-01-01 DOI: 10.1163/156856304773954296
B. Cahill, D. Haefliger, A. Stemmer
Rapid fabrication of 1-5-μm-wide aluminum electrodes by a flexible, inexpensive and high-resolution process is demonstrated. The electrodes are produced by scanning a cw focused laser beam of 488 nm wavelength over an aluminum thin film of 50-100 nm thickness immersed in pure water and removing the metal by local low-power laser-thermal corrosion. The process is performed on a set-up operating in common laboratory conditions. The aluminum patterning requires only several milliwatts of laser light, which allows the use of inexpensive light sources and makes it especially suitable for structuring metal films on heat-sensitive materials such as polymers. Interdigitated microelectrode arrays on poly(dimethylsiloxane) and SU-8 resist are fabricated without damaging the substrate. By taking advantage of the intrinsic 3D processing capability of laser machining and thick film techniques developed for polymer-based microsystems, multilayered electrode structures in SU-8 are produced. Interconnections between the different electrode layers are realized via holes drilled through the intermediate polymer by laser ablation in air and subsequent metallization. The rapid prototyping of an asymmetric electrode array for electrohydrodynamic pumping within 4 h is demonstrated. Successful testing of the device by pumping of water provided evidence of correct electrode operation.
采用灵活、廉价和高分辨率的工艺快速制备了1-5 μm宽的铝电极。采用488 nm波长的连续波聚焦激光束对浸在纯水中的50-100 nm厚度的铝薄膜进行扫描,并通过局部低功率激光热腐蚀去除金属来制备电极。该过程是在一个在普通实验室条件下操作的装置上进行的。铝的图案只需要几毫瓦的激光,这允许使用廉价的光源,使其特别适合在热敏材料(如聚合物)上构造金属薄膜。在不破坏衬底的情况下,在聚二甲基硅氧烷和SU-8抗蚀剂上制备了互指微电极阵列。利用激光加工固有的三维加工能力和为聚合物基微系统开发的厚膜技术,在SU-8中生产了多层电极结构。不同电极层之间的互连是通过激光在空气中烧蚀和随后的金属化在中间聚合物上钻孔来实现的。介绍了一种用于电流体动力泵送的非对称电极阵列在4小时内的快速成型过程。通过抽水成功地测试了该装置,为正确的电极操作提供了证据。
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引用次数: 0
Capillary Pressure Microinjection of Living Adherent Cells: Challenges in Automation 活贴壁细胞的毛细管压力显微注射:自动化的挑战
Pub Date : 1900-01-01 DOI: 10.1163/156856306777924653
P. Kallio, J. Kuncova-Kallio
This paper is divided into two parts. The first part describes the current status and the general challenges of developing automatic microrobotics systems for microinjection of adherent mammalian cells. The discussion covers applications and the review and challenges of the components of a capillary pressure microinjection system: a micromanipulator, a microinjector, a microcapillary, a vision system and an environment control system. The second part of the paper describes the research performed on the automatic capillary pressure microinjection at Tampere University of Technology. The advanced microinjection system includes two micromanipulators, a microinjector, a vision system and a control system. The control system comprises motion control schemes for the micromanipulators to accurately position a microcapillary, to precisely penetrate a cell membrane and to deliver information on the injection to the operator. A novel injection guidance system, being part of the control system, comprises an impedance measurement device and a user interface which provide information on the detection of the capillary–membrane contact, capillary clogging and capillary breakage. Results show a remarkable increase of the injection success from 40 to 65% when the injection guidance system is used.
本文分为两部分。第一部分描述了用于哺乳动物细胞贴壁显微注射的自动微型机器人系统的现状和一般挑战。讨论了毛细管压力微注射系统的应用和组成部分的回顾和挑战:微操作器、微注射器、微毛细管、视觉系统和环境控制系统。第二部分介绍了坦佩雷理工大学对自动毛细管压力显微注射的研究情况。先进的显微注射系统包括两个微操作器、一个显微注射器、一个视觉系统和一个控制系统。控制系统包括微操作器的运动控制方案,以精确定位微毛细管,精确穿透细胞膜并将注射信息传递给操作员。一种新型的注射引导系统,作为控制系统的一部分,包括阻抗测量装置和提供检测毛细管-膜接触、毛细管堵塞和毛细管破裂信息的用户界面。结果表明,采用喷射导向系统后,喷射成功率从40%提高到65%。
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引用次数: 29
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Journal of Micromechatronics
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