Pub Date : 1900-01-01DOI: 10.1163/156856304773954278
D. Kozlowski, James F. Jones, J. Trinkle
Several LIGA (Lithography Galvonoforming Abforming) test mechanisms have been designed and fabricated to study tribology and performance attributes of LIGA mechanisms. The LIGA test mechanism studied in this paper is a ratchet drive mechanism consisting primarily of pawls, cams and springs, ranging in size from about one-half millimeter to tens of millimeters, of various nickel alloys fabricated using the LIGA process. To assemble the test mechanism, subassemblies are made by inserting force-e t pins into stacks of piece-parts. These pins are cut from 170 πm wire and range from 500 to 1000 πm in length. Human insertion of these pins is extremely dife cult due to their small size and tolerances required to perform the force-e t operation. This paper describes the tooling to permit fabrication, bulk handling and force-e t insertion of pins with the operator-guided automation required to achieve micron-scale tolerances using hybrid force/position control algorithms.
{"title":"Micro-scale force-fit insertion","authors":"D. Kozlowski, James F. Jones, J. Trinkle","doi":"10.1163/156856304773954278","DOIUrl":"https://doi.org/10.1163/156856304773954278","url":null,"abstract":"Several LIGA (Lithography Galvonoforming Abforming) test mechanisms have been designed and fabricated to study tribology and performance attributes of LIGA mechanisms. The LIGA test mechanism studied in this paper is a ratchet drive mechanism consisting primarily of pawls, cams and springs, ranging in size from about one-half millimeter to tens of millimeters, of various nickel alloys fabricated using the LIGA process. To assemble the test mechanism, subassemblies are made by inserting force-e t pins into stacks of piece-parts. These pins are cut from 170 πm wire and range from 500 to 1000 πm in length. Human insertion of these pins is extremely dife cult due to their small size and tolerances required to perform the force-e t operation. This paper describes the tooling to permit fabrication, bulk handling and force-e t insertion of pins with the operator-guided automation required to achieve micron-scale tolerances using hybrid force/position control algorithms.","PeriodicalId":150257,"journal":{"name":"Journal of Micromechatronics","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131573061","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1900-01-01DOI: 10.1163/156856305323383883
Xiao-Yang Huang, N. Nguyen
This paper presents the development of a peristaltic pump based on the printed circuit board (PCB) technique. The pump was fabricated by using PCB as the substrate material and standard PCB techniques (copper etching, soldering). The paper describes in details the development process including the numerical simulation of the pump effect, the investigation of the piezoelectric actuator, the fabrication and the characterization. A maximum flow rate of 3 ml/min can be achieved with a single peristaltic pump. One of the applications of the peristaltic pump is a self-cooling printed circuit board (SC-PCB). The SC-PCB consists of three peristaltic pumps, a channel system for fluid circulation, and a heat sink. The SC-PCB shows great potentials in thermal management of electronic devices.
{"title":"Development of a peristaltic pump in printed circuit boards","authors":"Xiao-Yang Huang, N. Nguyen","doi":"10.1163/156856305323383883","DOIUrl":"https://doi.org/10.1163/156856305323383883","url":null,"abstract":"This paper presents the development of a peristaltic pump based on the printed circuit board (PCB) technique. The pump was fabricated by using PCB as the substrate material and standard PCB techniques (copper etching, soldering). The paper describes in details the development process including the numerical simulation of the pump effect, the investigation of the piezoelectric actuator, the fabrication and the characterization. A maximum flow rate of 3 ml/min can be achieved with a single peristaltic pump. One of the applications of the peristaltic pump is a self-cooling printed circuit board (SC-PCB). The SC-PCB consists of three peristaltic pumps, a channel system for fluid circulation, and a heat sink. The SC-PCB shows great potentials in thermal management of electronic devices.","PeriodicalId":150257,"journal":{"name":"Journal of Micromechatronics","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127078286","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"From the Editors-in-Chief","authors":"R. Fearing, P. Dario, T. Fukuda","doi":"10.1163/156856300744623","DOIUrl":"https://doi.org/10.1163/156856300744623","url":null,"abstract":"","PeriodicalId":150257,"journal":{"name":"Journal of Micromechatronics","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126056462","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1900-01-01DOI: 10.1163/156856305323383900
Schmid, Seidel
For further optimization of the combustion process, the information about the actually injected fuel quantity is desirable, especially in diesel engines equipped with direct injection technology. A miniaturized hot-film anemometer with a titanium/platinum metallization on a low-temperature co-fired ceramics substrate was developed and integrated into a Common Rail injection nozzle. The micro-flow sensor proved its high performance and its capability over the complete fuel quantity map of a high pressure hydraulic injection system where drive pulses for the operation of the injector range between 0.3 ms and 1.5 ms at injection pressures up to 135 MPa (1350 bar). In correspondence with measurements of an injection amount indicator integrated into the hydraulic test bench, the injected fuel quantity and the opening behaviour of the orifice were derived from the sensor signals as a function of injection parameters. Assuming a power law dependence on the fluid velocity for the flow-sensitive portion of the heat-transfer coefficient, a value of 0.5 for the exponent was determined experimentally, in excellent agreement with theoretical predictions.
{"title":"Study on an injection quantity sensor. II: Evaluation of the sensing element","authors":"Schmid, Seidel","doi":"10.1163/156856305323383900","DOIUrl":"https://doi.org/10.1163/156856305323383900","url":null,"abstract":"For further optimization of the combustion process, the information about the actually injected fuel quantity is desirable, especially in diesel engines equipped with direct injection technology. A miniaturized hot-film anemometer with a titanium/platinum metallization on a low-temperature co-fired ceramics substrate was developed and integrated into a Common Rail injection nozzle. The micro-flow sensor proved its high performance and its capability over the complete fuel quantity map of a high pressure hydraulic injection system where drive pulses for the operation of the injector range between 0.3 ms and 1.5 ms at injection pressures up to 135 MPa (1350 bar). In correspondence with measurements of an injection amount indicator integrated into the hydraulic test bench, the injected fuel quantity and the opening behaviour of the orifice were derived from the sensor signals as a function of injection parameters. Assuming a power law dependence on the fluid velocity for the flow-sensitive portion of the heat-transfer coefficient, a value of 0.5 for the exponent was determined experimentally, in excellent agreement with theoretical predictions.","PeriodicalId":150257,"journal":{"name":"Journal of Micromechatronics","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126290687","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1900-01-01DOI: 10.1163/156856306777544970
P. Lambert, S. Régnier
This paper gives a review of existing models used by other authors aiming at modeling micromanipulation tasks. It introduces the distinction between surface forces, which act even at distance (van der Waals (VDW), capillary and electrostatic forces) and contact forces, which are closely related to deformation and adhesion. Moreover, it presents our work on VDW and capillary forces: compared to existing approximations, these models allow to take more parameters into account such as, for example, statistical roughness in VDW forces or the volume of liquid in capillary forces. They could be used, for example, to build up new handling strategies as illustrated in the references cited in the paper. However, this paper focuses on fundamental models and does not present any specific microhandling strategy.
{"title":"Surface and contact forces models within the framework of microassembly","authors":"P. Lambert, S. Régnier","doi":"10.1163/156856306777544970","DOIUrl":"https://doi.org/10.1163/156856306777544970","url":null,"abstract":"This paper gives a review of existing models used by other authors aiming at modeling micromanipulation tasks. It introduces the distinction between surface forces, which act even at distance (van der Waals (VDW), capillary and electrostatic forces) and contact forces, which are closely related to deformation and adhesion. Moreover, it presents our work on VDW and capillary forces: compared to existing approximations, these models allow to take more parameters into account such as, for example, statistical roughness in VDW forces or the volume of liquid in capillary forces. They could be used, for example, to build up new handling strategies as illustrated in the references cited in the paper. However, this paper focuses on fundamental models and does not present any specific microhandling strategy.","PeriodicalId":150257,"journal":{"name":"Journal of Micromechatronics","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130010370","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1900-01-01DOI: 10.1163/156856302322756478
Yu Sun, M. Greminger, B. Nelson
This paper reports on a visual servoing system capable of 2DOF nanopositioning using a novel multi-axis electrostatic MEMS (MicroElectroMechanical System) device. The high-aspect ratio microactuator is bulk microfabricated, producing larger electrostatic forces and requiring lower actuation voltages compared to most existing electrostatic microactuators. A real-time sub-pixel feature tracking algorithm of nanometer resolution is incorporated into the visual servoing loop. A feedforward controller is designed to increase system response. Minimal system calibration is required. The resulting system is capable of visually servoing to a positioning precision of ±16 nm in two axes using the multi-axis microactuator and standard microscope optics with a CCD camera, despite a control rate of 30 Hz which reduces disturbance rejection capability. Potential applications of the system are for nanopositioning in nanomanipulation, such as in the manipulation of subcellular structures within biological cells.
{"title":"Nanopositioning of a multi-axis microactuator using visual servoing","authors":"Yu Sun, M. Greminger, B. Nelson","doi":"10.1163/156856302322756478","DOIUrl":"https://doi.org/10.1163/156856302322756478","url":null,"abstract":"This paper reports on a visual servoing system capable of 2DOF nanopositioning using a novel multi-axis electrostatic MEMS (MicroElectroMechanical System) device. The high-aspect ratio microactuator is bulk microfabricated, producing larger electrostatic forces and requiring lower actuation voltages compared to most existing electrostatic microactuators. A real-time sub-pixel feature tracking algorithm of nanometer resolution is incorporated into the visual servoing loop. A feedforward controller is designed to increase system response. Minimal system calibration is required. The resulting system is capable of visually servoing to a positioning precision of ±16 nm in two axes using the multi-axis microactuator and standard microscope optics with a CCD camera, despite a control rate of 30 Hz which reduces disturbance rejection capability. Potential applications of the system are for nanopositioning in nanomanipulation, such as in the manipulation of subcellular structures within biological cells.","PeriodicalId":150257,"journal":{"name":"Journal of Micromechatronics","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129919518","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1900-01-01DOI: 10.1163/156856301753398145
T. Fukuda, F. Arai, A. Kawaji
In the biotechnology field, it is very difficult to manipulate microscopic material through human handling. There is a great need for a new experimental system that is easy to operate. In this paper, we show a 3D calibration technique for reducing positional errors of a glass pipette tip, attached to a micro-manipulator. We then propose a method of observing the manipulator tip with sub-micron order accuracy using a newly developed lighting method with an optical fiber. We also take into account the influence of the positional error of the z-axis introduced by the optical system. In the last part of this paper, we show effectiveness of these methods through experiments.
{"title":"3D calibration for micro-manipulation with precise position measurement","authors":"T. Fukuda, F. Arai, A. Kawaji","doi":"10.1163/156856301753398145","DOIUrl":"https://doi.org/10.1163/156856301753398145","url":null,"abstract":"In the biotechnology field, it is very difficult to manipulate microscopic material through human handling. There is a great need for a new experimental system that is easy to operate. In this paper, we show a 3D calibration technique for reducing positional errors of a glass pipette tip, attached to a micro-manipulator. We then propose a method of observing the manipulator tip with sub-micron order accuracy using a newly developed lighting method with an optical fiber. We also take into account the influence of the positional error of the z-axis introduced by the optical system. In the last part of this paper, we show effectiveness of these methods through experiments.","PeriodicalId":150257,"journal":{"name":"Journal of Micromechatronics","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134493053","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1900-01-01DOI: 10.1163/156856304773954250
J. Chu, Jian Lu, Wenhao Huang, Yan Yang
Pb(Zr,Ti)O 3 (PZT) films with thickness ranging from 2 μm to 10 μm have successfully been prepared using the sol-gel-based ceramic-ceramic 0-3 composite method, polyvinylpyrrolidone (PVP)-assisted sol-gel method and electrostatic spray deposition (ESD) with satisfied film properties on Pt/Ti/SiO 2 /Si substrate. Using PVP and PZT powders as additives, the critical thickness of sol-gel derived PZT film can be sufficiently increased to 0.9 μm and 0.5 μm, respectively. The crystal-orientation of the films was investigated by X-ray diffractometer. It was found that the use of buffer layer was effective to affect the film's nucleation and growth behavior and enhance the pervoskite (100) orientation. According to the atomic force microscope images, these films exhibit uniform grain size distribution. The relative dielectric constants of the film prepared by these modified sol-gel techniques, 1050, 600 and 960, were measured, which are satisfied for application in MEMS.
{"title":"Fabrication of thick Pb(Zr,Ti)O3 (PZT) films by modified sol–gel methods for application in MEMS","authors":"J. Chu, Jian Lu, Wenhao Huang, Yan Yang","doi":"10.1163/156856304773954250","DOIUrl":"https://doi.org/10.1163/156856304773954250","url":null,"abstract":"Pb(Zr,Ti)O 3 (PZT) films with thickness ranging from 2 μm to 10 μm have successfully been prepared using the sol-gel-based ceramic-ceramic 0-3 composite method, polyvinylpyrrolidone (PVP)-assisted sol-gel method and electrostatic spray deposition (ESD) with satisfied film properties on Pt/Ti/SiO 2 /Si substrate. Using PVP and PZT powders as additives, the critical thickness of sol-gel derived PZT film can be sufficiently increased to 0.9 μm and 0.5 μm, respectively. The crystal-orientation of the films was investigated by X-ray diffractometer. It was found that the use of buffer layer was effective to affect the film's nucleation and growth behavior and enhance the pervoskite (100) orientation. According to the atomic force microscope images, these films exhibit uniform grain size distribution. The relative dielectric constants of the film prepared by these modified sol-gel techniques, 1050, 600 and 960, were measured, which are satisfied for application in MEMS.","PeriodicalId":150257,"journal":{"name":"Journal of Micromechatronics","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132936268","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1900-01-01DOI: 10.1163/156856304773954304
Quan Zhou, Albut Aurelian, Bo Chang, C. Corral, H. Koivo
Environmental conditions such as temperature and humidity can influence the adhesion forces, material and microtribological properties of microparts. To have a good understanding of microassembly, it is essential to study the influences of environmental conditions on the microassembly process and system. This paper presents our research in environmentally controlled microassembly. We have developed a microassembly system with controlled environment, which consists of an environmental control system and a microassembly platform. The environmental control system controls the environmental conditions including temperature and humidity in a closed chamber, providing a clean and vibration isolated environment for microassembly. The temperature can be controlled in the range of -10-40°C and relative humidity in the range of 5-80% RH. The microassembly platform, which is installed in the environmental control system, contains microrobotic instruments such as microgrippers, micromanipulator, positioning stages, microdispenser, ultraviolet light source, microscopes, etc. Experiments on the influences of environmental conditions on microassembly instruments and pick-and-place operations are systematically performed. The results are analyzed and presented.
{"title":"Microassembly system with controlled environment","authors":"Quan Zhou, Albut Aurelian, Bo Chang, C. Corral, H. Koivo","doi":"10.1163/156856304773954304","DOIUrl":"https://doi.org/10.1163/156856304773954304","url":null,"abstract":"Environmental conditions such as temperature and humidity can influence the adhesion forces, material and microtribological properties of microparts. To have a good understanding of microassembly, it is essential to study the influences of environmental conditions on the microassembly process and system. This paper presents our research in environmentally controlled microassembly. We have developed a microassembly system with controlled environment, which consists of an environmental control system and a microassembly platform. The environmental control system controls the environmental conditions including temperature and humidity in a closed chamber, providing a clean and vibration isolated environment for microassembly. The temperature can be controlled in the range of -10-40°C and relative humidity in the range of 5-80% RH. The microassembly platform, which is installed in the environmental control system, contains microrobotic instruments such as microgrippers, micromanipulator, positioning stages, microdispenser, ultraviolet light source, microscopes, etc. Experiments on the influences of environmental conditions on microassembly instruments and pick-and-place operations are systematically performed. The results are analyzed and presented.","PeriodicalId":150257,"journal":{"name":"Journal of Micromechatronics","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129359173","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1900-01-01DOI: 10.1163/156856306777544943
D. Haliyo, F. Dionnet, S. Régnier
This paper presents our work in developing an autonomous micromanipulation system. The originality of our system is that it takes advantage of adhesion forces to grip micro-objects using an AFM (Atomic Force Microscopy) probe. A theoretical analysis of rolling conditions is carried out in order to achieve precise release of an object picked-up by adhesion. Vision control, based on the specificities of optical microscopy, and force control, based on the analysis of the AFM probe, are established. Experiments validate the employed techniques and the proposed manipulation mode.
{"title":"Controlled rolling of microobjects for autonomous manipulation","authors":"D. Haliyo, F. Dionnet, S. Régnier","doi":"10.1163/156856306777544943","DOIUrl":"https://doi.org/10.1163/156856306777544943","url":null,"abstract":"This paper presents our work in developing an autonomous micromanipulation system. The originality of our system is that it takes advantage of adhesion forces to grip micro-objects using an AFM (Atomic Force Microscopy) probe. A theoretical analysis of rolling conditions is carried out in order to achieve precise release of an object picked-up by adhesion. Vision control, based on the specificities of optical microscopy, and force control, based on the analysis of the AFM probe, are established. Experiments validate the employed techniques and the proposed manipulation mode.","PeriodicalId":150257,"journal":{"name":"Journal of Micromechatronics","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116810122","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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