Pub Date : 1900-01-01DOI: 10.1163/156856304773954313
Kortschack, Fatikow
Miniaturized nanohandling robots or microrobots are widely used in different fields of application (e.g. microassembly, handling of biological cells or characterisation of nano layers), when a high positioning accuracy in the low μm or nm-range is required. A robot-based nanohandling station using a scanning electron microscope (SEM) or a light microscope is introduced. The microrobots working in that nanohandling station are driven by a novel actuator system. These actuators enable the microrobots to perform movements in coarse- and fine-positioning modes offering a nanometer precision. Preliminary to the long term aim to realize autonomous microrobots, the feasibility of the integration of an on-board power supply has been shown. First simple manipulation tasks performed with a newly developed microrobot are introduced as well.
{"title":"Development of a mobile nanohandling robot","authors":"Kortschack, Fatikow","doi":"10.1163/156856304773954313","DOIUrl":"https://doi.org/10.1163/156856304773954313","url":null,"abstract":"Miniaturized nanohandling robots or microrobots are widely used in different fields of application (e.g. microassembly, handling of biological cells or characterisation of nano layers), when a high positioning accuracy in the low μm or nm-range is required. A robot-based nanohandling station using a scanning electron microscope (SEM) or a light microscope is introduced. The microrobots working in that nanohandling station are driven by a novel actuator system. These actuators enable the microrobots to perform movements in coarse- and fine-positioning modes offering a nanometer precision. Preliminary to the long term aim to realize autonomous microrobots, the feasibility of the integration of an on-board power supply has been shown. First simple manipulation tasks performed with a newly developed microrobot are introduced as well.","PeriodicalId":150257,"journal":{"name":"Journal of Micromechatronics","volume":"21 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114768373","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1900-01-01DOI: 10.1163/156856302322756469
E. Enikov, K. Lazarov
This paper describes the development of a novel optically transparent electrostatic microgripper for assembly of micro-electromechanical systems (MEMS). The principle of operation, design and tests of the new device are described. Fabrication sequence and the materials used are also provided. The resulting gripping force is measured as a function of the applied voltage and compared with a parallel pate capacitor model. The frictional (in-plane) force was also determined for two common materials, silicon and nickel. As expected, a small amount of trapped interfacial charge was observed and characterized via scanning potential microscopy (SPM). The present work provides experimental data on the magnitude of the residual charge, the corresponding force, as well as charge decay data. Although undesirable, in the assembly of high-aspect-ratio interconnects, the part release can be achieved via path planning, since the parts are inserted into micro-machined slots. A simple demonstration assembly cell with image- and laser-based position-sensing modalities has also been described.
{"title":"An optically transparent gripper for micro-assembly","authors":"E. Enikov, K. Lazarov","doi":"10.1163/156856302322756469","DOIUrl":"https://doi.org/10.1163/156856302322756469","url":null,"abstract":"This paper describes the development of a novel optically transparent electrostatic microgripper for assembly of micro-electromechanical systems (MEMS). The principle of operation, design and tests of the new device are described. Fabrication sequence and the materials used are also provided. The resulting gripping force is measured as a function of the applied voltage and compared with a parallel pate capacitor model. The frictional (in-plane) force was also determined for two common materials, silicon and nickel. As expected, a small amount of trapped interfacial charge was observed and characterized via scanning potential microscopy (SPM). The present work provides experimental data on the magnitude of the residual charge, the corresponding force, as well as charge decay data. Although undesirable, in the assembly of high-aspect-ratio interconnects, the part release can be achieved via path planning, since the parts are inserted into micro-machined slots. A simple demonstration assembly cell with image- and laser-based position-sensing modalities has also been described.","PeriodicalId":150257,"journal":{"name":"Journal of Micromechatronics","volume":"33 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125809492","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1900-01-01DOI: 10.1163/156856306777924680
M. Savia, H. Koivo, Quan Zhou
This paper describes a numerical method to estimate adhesion forces that are present in different handling operations in the micro- and nanoworld. Emphasis is on the calculation of the van der Waals force, although the results can be generalized in a straightforward manner to also cover the electrostatic force. The presented method enables force calculation between objects that have arbitrary shapes and material properties together with arbitrary alignments relative to each other. The estimation accuracy is enhanced and the computational complexity is reduced by using surface formulation of the force instead of conventional volume formulation. The surface formulation also enables division of the surfaces into separate regions. This guarantees better accuracy in the computations and makes it possible to use only partial surfaces in the force evaluation.
{"title":"Evaluation of adhesion forces between arbitrary objects for micromanipulation","authors":"M. Savia, H. Koivo, Quan Zhou","doi":"10.1163/156856306777924680","DOIUrl":"https://doi.org/10.1163/156856306777924680","url":null,"abstract":"This paper describes a numerical method to estimate adhesion forces that are present in different handling operations in the micro- and nanoworld. Emphasis is on the calculation of the van der Waals force, although the results can be generalized in a straightforward manner to also cover the electrostatic force. The presented method enables force calculation between objects that have arbitrary shapes and material properties together with arbitrary alignments relative to each other. The estimation accuracy is enhanced and the computational complexity is reduced by using surface formulation of the force instead of conventional volume formulation. The surface formulation also enables division of the surfaces into separate regions. This guarantees better accuracy in the computations and makes it possible to use only partial surfaces in the force evaluation.","PeriodicalId":150257,"journal":{"name":"Journal of Micromechatronics","volume":"299 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122096217","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1900-01-01DOI: 10.1163/156856306777924716
A. Eisinberg, K. Houston, I. Izzo, A. Menciassi, P. Dario, Rickard Gustafsson, U. Simu, S. Johansson
In this paper novel tools for micromanipulation are presented. The devices have been purposely designed for integration in small mobile micro-robots, aimed at performing co-operative precision manipulation and assembly tasks. Concerning the actuation, multilayer piezoceramic components were developed and employed. The selected fabrication techniques for the grippers are shape deposition manufacturing of polymer and electro-discharge machining of stainless steel, and different alternatives have been investigated in order to select the optimal design. Several prototypes have been fabricated and preliminary experimental tests have been performed, both regarding the characterization and the grasping capabilities.
{"title":"Design and fabrication of PZT-actuated tools for micromanipulation","authors":"A. Eisinberg, K. Houston, I. Izzo, A. Menciassi, P. Dario, Rickard Gustafsson, U. Simu, S. Johansson","doi":"10.1163/156856306777924716","DOIUrl":"https://doi.org/10.1163/156856306777924716","url":null,"abstract":"In this paper novel tools for micromanipulation are presented. The devices have been purposely designed for integration in small mobile micro-robots, aimed at performing co-operative precision manipulation and assembly tasks. Concerning the actuation, multilayer piezoceramic components were developed and employed. The selected fabrication techniques for the grippers are shape deposition manufacturing of polymer and electro-discharge machining of stainless steel, and different alternatives have been investigated in order to select the optimal design. Several prototypes have been fabricated and preliminary experimental tests have been performed, both regarding the characterization and the grasping capabilities.","PeriodicalId":150257,"journal":{"name":"Journal of Micromechatronics","volume":"16 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128785968","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1900-01-01DOI: 10.1163/156856302322756450
M. Gauthier, E. Piat
Biological objects were micromanipulated with a magnetic microactuator. These objects are pushed with a small ferromagnetic particle whose size can be as small as 10 × 10 × 5 μm3. This particle is called the manipulator and is moved thanks to a permanent magnet. This magnetic device allows the manipulation of objects in an extremely confined space. As biological objects are fragile, the force applied on them must be controlled during the manipulation. The model we present allows to determine the force applied by the device on the manipulated object. Several experimental measurements are presented in order to validate the model.
{"title":"An electromagnetic micromanipulation system for single-cell manipulation","authors":"M. Gauthier, E. Piat","doi":"10.1163/156856302322756450","DOIUrl":"https://doi.org/10.1163/156856302322756450","url":null,"abstract":"Biological objects were micromanipulated with a magnetic microactuator. These objects are pushed with a small ferromagnetic particle whose size can be as small as 10 × 10 × 5 μm3. This particle is called the manipulator and is moved thanks to a permanent magnet. This magnetic device allows the manipulation of objects in an extremely confined space. As biological objects are fragile, the force applied on them must be controlled during the manipulation. The model we present allows to determine the force applied by the device on the manipulated object. Several experimental measurements are presented in order to validate the model.","PeriodicalId":150257,"journal":{"name":"Journal of Micromechatronics","volume":"48 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129469448","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1900-01-01DOI: 10.1163/156856302766647152
Bergander, Clavel, Breguet
In this paper we introduce micro-positioning systems dedicated to the manipulation of biological samples. Stick-Slip actuators offer considerable advantages for high-resolution positioning compared to traditional hydraulic or motorized manipulators. As previous setups and experiments have shown, a frequently used parallel cinematic structure for positioning purposes based on StickSlip actuators with three PZT elements is not always well suited because x and y motion can not be well decoupled. Therefore, new systems with a serial kinematic structure have been developed. The proposed devices provide the same capabilities as existing motorized stages and hydraulic manipulators, but with higher resolution and at a lower cost and a very compact size. A small xy stage, as well as a 3 dof micromanipulator, has been developed, which may be used in place of the traditional micromanipulation tools. The proposed solutions have been realized in prototypes, and experimental results are discussed.
{"title":"Micropositioners for microscopy applications and microbiology based on piezoelectric actuators","authors":"Bergander, Clavel, Breguet","doi":"10.1163/156856302766647152","DOIUrl":"https://doi.org/10.1163/156856302766647152","url":null,"abstract":"In this paper we introduce micro-positioning systems dedicated to the manipulation of biological samples. Stick-Slip actuators offer considerable advantages for high-resolution positioning compared to traditional hydraulic or motorized manipulators. As previous setups and experiments have shown, a frequently used parallel cinematic structure for positioning purposes based on StickSlip actuators with three PZT elements is not always well suited because x and y motion can not be well decoupled. Therefore, new systems with a serial kinematic structure have been developed. The proposed devices provide the same capabilities as existing motorized stages and hydraulic manipulators, but with higher resolution and at a lower cost and a very compact size. A small xy stage, as well as a 3 dof micromanipulator, has been developed, which may be used in place of the traditional micromanipulation tools. The proposed solutions have been realized in prototypes, and experimental results are discussed.","PeriodicalId":150257,"journal":{"name":"Journal of Micromechatronics","volume":"77 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121041929","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1900-01-01DOI: 10.1163/156856301753398136
E. Enikov, B. Nelson, Ge Yang, B. Vikramaditya
A general assembly strategy for assembling hybrid magnetic MEMS devices is proposed. The scaling of MEMS devices leads to the dominance of surface-effect forces such as electrostatic, surface-tension and van der Waals forces. The contact phase of an assembly task is complicated by the presence of these surface-effect forces and magnetic forces. Assembly strategies must account for the presence of these forces in order to guarantee successful repeatable assemblies. A detailed model for the magnetic interaction of microparts is developed and experimentally verified. This model is used to synthesize assembly strategies for micromagnetic parts. A flexible automated assembly workcell has also been developed to validate and demonstrate the proposed microassembly strategies.
{"title":"Microassembly of hybrid magnetic MEMS","authors":"E. Enikov, B. Nelson, Ge Yang, B. Vikramaditya","doi":"10.1163/156856301753398136","DOIUrl":"https://doi.org/10.1163/156856301753398136","url":null,"abstract":"A general assembly strategy for assembling hybrid magnetic MEMS devices is proposed. The scaling of MEMS devices leads to the dominance of surface-effect forces such as electrostatic, surface-tension and van der Waals forces. The contact phase of an assembly task is complicated by the presence of these surface-effect forces and magnetic forces. Assembly strategies must account for the presence of these forces in order to guarantee successful repeatable assemblies. A detailed model for the magnetic interaction of microparts is developed and experimentally verified. This model is used to synthesize assembly strategies for micromagnetic parts. A flexible automated assembly workcell has also been developed to validate and demonstrate the proposed microassembly strategies.","PeriodicalId":150257,"journal":{"name":"Journal of Micromechatronics","volume":"18 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123935523","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1900-01-01DOI: 10.1163/156856306777924635
G. Venture, D. Haliyo, A. Micaelli, S. Régnier
This paper presents a coupling method in order to establish force-feedback user interaction with a micromanipulator. The presented control scheme design is based on stability considerations and, hence, allows unconditional stable operation independently on the haptic interface, micromanip- ulator and scaling ratios on force and position. Experimental comparison of proposed coupling with a common force-position coupling is also included.
{"title":"Force-feedback coupling for micro-handling applications","authors":"G. Venture, D. Haliyo, A. Micaelli, S. Régnier","doi":"10.1163/156856306777924635","DOIUrl":"https://doi.org/10.1163/156856306777924635","url":null,"abstract":"This paper presents a coupling method in order to establish force-feedback user interaction with a micromanipulator. The presented control scheme design is based on stability considerations and, hence, allows unconditional stable operation independently on the haptic interface, micromanip- ulator and scaling ratios on force and position. Experimental comparison of proposed coupling with a common force-position coupling is also included.","PeriodicalId":150257,"journal":{"name":"Journal of Micromechatronics","volume":"30 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115322252","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
In this paper, a fine particle manipulation system using a piezoresistive microcantilever, which is normally utilized in Atomic Force Microscopy, as the manipulator and force sensor, and a top-view Optical Microscope (OM) as the vision sensor is proposed. Modeling and control of the interaction forces among the manipulator, particle and surface have been realized for moving particles with sizes less than 3 μm on a silicon substrate in 2D. The microcantilever behaves also as a force sensor which enables contact point detection, real-time force measurements, and surface alignment sensing. A 2D OM real-time image feedback constitutes the main user interface, where the operator uses mouse cursor and keyboard for defining the tasks for the cantilever motion controller. Preliminary particle manipulation experiments are demonstrated for 2.02 and 1 μm gold-coated latex particles, and it is shown that the system can be utilized in 2D micro particle assembling.
{"title":"Two-dimensional fine particle positioning under an optical microscope using a piezoresistive cantilever as a manipulator","authors":"M. Sitti, H. Hashimoto","doi":"10.1163/156856300744650","DOIUrl":"https://doi.org/10.1163/156856300744650","url":null,"abstract":"In this paper, a fine particle manipulation system using a piezoresistive microcantilever, which is normally utilized in Atomic Force Microscopy, as the manipulator and force sensor, and a top-view Optical Microscope (OM) as the vision sensor is proposed. Modeling and control of the interaction forces among the manipulator, particle and surface have been realized for moving particles with sizes less than 3 μm on a silicon substrate in 2D. The microcantilever behaves also as a force sensor which enables contact point detection, real-time force measurements, and surface alignment sensing. A 2D OM real-time image feedback constitutes the main user interface, where the operator uses mouse cursor and keyboard for defining the tasks for the cantilever motion controller. Preliminary particle manipulation experiments are demonstrated for 2.02 and 1 μm gold-coated latex particles, and it is shown that the system can be utilized in 2D micro particle assembling.","PeriodicalId":150257,"journal":{"name":"Journal of Micromechatronics","volume":"21 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125348890","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1900-01-01DOI: 10.1163/156856304773954241
B. Nelson
{"title":"Special Issue on Microfactories","authors":"B. Nelson","doi":"10.1163/156856304773954241","DOIUrl":"https://doi.org/10.1163/156856304773954241","url":null,"abstract":"","PeriodicalId":150257,"journal":{"name":"Journal of Micromechatronics","volume":"5 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126567879","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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