T. Fujii, S. Shoji, T. Nojima, A. Yotsumoto, K. Hosokawa, I. Endo
As the first step toward the 'lab on a chip' or 'cell on a chip' concept, several microbiochemical reactors were fabricated using conventional MEMS (microelectromechanical systems) techniques: silicon anisotropic etching and glass-silicon anodic bonding. The microreactors have main reaction channels which are 14 mm long, 200-800 μm wide, and 20 μm deep. In these channels, enzymatic reactions - luciferin-luciferase reaction and cell-free mRNA translation - were demonstrated. Luminescence induced by the luciferin-luciferase reaction was observed in two ways, by photograph on a high-speed film and sensitive video imaging. In both cases, diffusion-based mixing in the microreactors was clearly visualized. In the cell-free protein synthesis experiment, the amount of polyphenylalanine, which was synthesized by translating polyuridylic acid template in the microreactors, was determined using radioisotope assay.
{"title":"Microbiochemical reactors for enzymatic reactions including cell-free mRNA translation","authors":"T. Fujii, S. Shoji, T. Nojima, A. Yotsumoto, K. Hosokawa, I. Endo","doi":"10.1163/156856300744687","DOIUrl":"https://doi.org/10.1163/156856300744687","url":null,"abstract":"As the first step toward the 'lab on a chip' or 'cell on a chip' concept, several microbiochemical reactors were fabricated using conventional MEMS (microelectromechanical systems) techniques: silicon anisotropic etching and glass-silicon anodic bonding. The microreactors have main reaction channels which are 14 mm long, 200-800 μm wide, and 20 μm deep. In these channels, enzymatic reactions - luciferin-luciferase reaction and cell-free mRNA translation - were demonstrated. Luminescence induced by the luciferin-luciferase reaction was observed in two ways, by photograph on a high-speed film and sensitive video imaging. In both cases, diffusion-based mixing in the microreactors was clearly visualized. In the cell-free protein synthesis experiment, the amount of polyphenylalanine, which was synthesized by translating polyuridylic acid template in the microreactors, was determined using radioisotope assay.","PeriodicalId":150257,"journal":{"name":"Journal of Micromechatronics","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115298955","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1900-01-01DOI: 10.1163/156856305323383892
Seidel, Schmid
For 'on board' diagnosis purposes of the injected fuel quantity, ceramic flow sensor chips with a diameter of 2.2 mm were integrated into finished Common Rail injection nozzles of the valve covered orifice (VCO) or mini-sac hole (MSH) class. The influence of this integration step on the hydraulic performance of the high-precision injector nozzles which led to an optimized process flow with a minimized disturbance of the fluidic properties was investigated. Electron-discharge machining and electron-beam welding technology proved to be the key technologies for this integration process, providing a reliable solution for injection pressures ranging up to 135 MPa (1350 bar). With a high-pressure hydraulic test bench the decrease in the injected fuel quantity as a function of welding parameters was determined for both nozzle classes. The geometrical distortion of the nozzle was mainly attributed to a radial bending of the nozzle tip and is dominated by the heat concentration during the welding process. In comparison, the integration of the ceramic sensor chip causes lower distortion values. By reducing the thermal energy input during welding a negligible influence of the complete integration process with respect to the hydraulic performance of original orifices is demonstrated at MSH injection nozzles.
{"title":"Study on an injection quantity sensor. I: Evaluation of the integration procedure","authors":"Seidel, Schmid","doi":"10.1163/156856305323383892","DOIUrl":"https://doi.org/10.1163/156856305323383892","url":null,"abstract":"For 'on board' diagnosis purposes of the injected fuel quantity, ceramic flow sensor chips with a diameter of 2.2 mm were integrated into finished Common Rail injection nozzles of the valve covered orifice (VCO) or mini-sac hole (MSH) class. The influence of this integration step on the hydraulic performance of the high-precision injector nozzles which led to an optimized process flow with a minimized disturbance of the fluidic properties was investigated. Electron-discharge machining and electron-beam welding technology proved to be the key technologies for this integration process, providing a reliable solution for injection pressures ranging up to 135 MPa (1350 bar). With a high-pressure hydraulic test bench the decrease in the injected fuel quantity as a function of welding parameters was determined for both nozzle classes. The geometrical distortion of the nozzle was mainly attributed to a radial bending of the nozzle tip and is dominated by the heat concentration during the welding process. In comparison, the integration of the ceramic sensor chip causes lower distortion values. By reducing the thermal energy input during welding a negligible influence of the complete integration process with respect to the hydraulic performance of original orifices is demonstrated at MSH injection nozzles.","PeriodicalId":150257,"journal":{"name":"Journal of Micromechatronics","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123862034","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1900-01-01DOI: 10.1163/156856306777924644
S. Fatikow, T. Sievers
In this paper, current research work on an automated nanohandling station using mobile microrobots is presented. For the automated positioning of mobile microrobots a closed-loop control system is necessary, usually using data from pose sensors for the degrees of freedom (DOF) of the microrobot are needed. Mobile microrobots with piezo slip-stick actuation mostly do not have internal pose sensors to determine a global pose. This paper focuses on the continuous pose estimation (tracking) of mobile microrobots by external visual sensors. One possibility for fast pose estimation is the application of video cameras in combination with image processing algorithms as global sensors. However, for pose estimation with accuracy in the nanometer range high-resolution sensors are necessary. In consideration of resolution, image acquisition time and depth of focus a scanning electron microscope (SEM) is a powerful sensor for high-resolution pose estimation of a microrobot. On the other hand, the use of a SEM requires high demands on the image processing. High update rates of the pose data for the robot control require a short image acquisition time of the SEM images. As a result, the image noise increases as frame averaging or averaging of the detector signal is time consuming. This paper presents two approaches to tracking a micro-object in a SEM image stream. First, a cross-correlation algorithm is described, which enables pose estimation (x, y, ϕ) in extremely noised images in real-time. Afterwards object tracking with active contours is presented. This approach allows real-time tracking with more than 3 DOF by using shape spaces, instead of defining large model sets as it is necessary for correlation-based pattern matching.
{"title":"Real-time object tracking for the robot-based nanohandling in a scanning electron microscope","authors":"S. Fatikow, T. Sievers","doi":"10.1163/156856306777924644","DOIUrl":"https://doi.org/10.1163/156856306777924644","url":null,"abstract":"In this paper, current research work on an automated nanohandling station using mobile microrobots is presented. For the automated positioning of mobile microrobots a closed-loop control system is necessary, usually using data from pose sensors for the degrees of freedom (DOF) of the microrobot are needed. Mobile microrobots with piezo slip-stick actuation mostly do not have internal pose sensors to determine a global pose. This paper focuses on the continuous pose estimation (tracking) of mobile microrobots by external visual sensors. One possibility for fast pose estimation is the application of video cameras in combination with image processing algorithms as global sensors. However, for pose estimation with accuracy in the nanometer range high-resolution sensors are necessary. In consideration of resolution, image acquisition time and depth of focus a scanning electron microscope (SEM) is a powerful sensor for high-resolution pose estimation of a microrobot. On the other hand, the use of a SEM requires high demands on the image processing. High update rates of the pose data for the robot control require a short image acquisition time of the SEM images. As a result, the image noise increases as frame averaging or averaging of the detector signal is time consuming. This paper presents two approaches to tracking a micro-object in a SEM image stream. First, a cross-correlation algorithm is described, which enables pose estimation (x, y, ϕ) in extremely noised images in real-time. Afterwards object tracking with active contours is presented. This approach allows real-time tracking with more than 3 DOF by using shape spaces, instead of defining large model sets as it is necessary for correlation-based pattern matching.","PeriodicalId":150257,"journal":{"name":"Journal of Micromechatronics","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123222442","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1900-01-01DOI: 10.1163/156856305323383919
H. Pham, I. Chen, H. Yeh
This paper presents the design of a selective-actuation flexure parallel mechanism that can provide three de-coupled micro-motions along the X -, Y - and Z -axes. This mechanism can be used as an ultra-precision positioning system. The modeling of this flexure parallel mechanism is then established based on a pseudo-rigid-body model with consideration of deformation of the flexure member. The factor of deformation allows us to formulate the accurate kinematics analysis of the flexure mechanism. Via this modeling, dimension and free shape of the mechanism are determined based on the criteria of isotropic resolution transmission scale. An experiment was set up to verify the modeling and the design. The experiment shows the advantage of the proposed model versus the model currently used. The similarity of the resolutions obtained from the experiment and predicted by the optimal design shows the validity of the resolution evaluation and the optimal design.
{"title":"Micro-motion selective-actuation X Y Z flexure parallel mechanism: design and modeling","authors":"H. Pham, I. Chen, H. Yeh","doi":"10.1163/156856305323383919","DOIUrl":"https://doi.org/10.1163/156856305323383919","url":null,"abstract":"This paper presents the design of a selective-actuation flexure parallel mechanism that can provide three de-coupled micro-motions along the X -, Y - and Z -axes. This mechanism can be used as an ultra-precision positioning system. The modeling of this flexure parallel mechanism is then established based on a pseudo-rigid-body model with consideration of deformation of the flexure member. The factor of deformation allows us to formulate the accurate kinematics analysis of the flexure mechanism. Via this modeling, dimension and free shape of the mechanism are determined based on the criteria of isotropic resolution transmission scale. An experiment was set up to verify the modeling and the design. The experiment shows the advantage of the proposed model versus the model currently used. The similarity of the resolutions obtained from the experiment and predicted by the optimal design shows the validity of the resolution evaluation and the optimal design.","PeriodicalId":150257,"journal":{"name":"Journal of Micromechatronics","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114545393","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
This paper proposes and demonstrates the feasibility of a new generation of compliant piezoelectric microconveyers for microobjects based on the cooperation of arrayed direct-drive standing wave ultrasonic motors (microSWUMs). Their operating principles, which combine active frictional contact mechanisms with electromagnetic field-based friction drive control, are analyzed. A prototype of a planar-type ultrasonic motor incorporating 48 arrayed microSWUMs, whose overall dimensions are 47 × 29 mm2, has been realized through the use of a flexible active metallic sheet (stator) which acts as a mobile platform. An experimental characterization has been carried out in order to identify the main physical and technological limitations specific to millimeter scale standing wave motors. The corresponding results indicate that powerful force/speed characteristics on the millimeter scale can be expected, i.e. high output force density around 20 mN · mm-2, a carried load ratio reaching 1 kg · cm-2, a traveling distance without displacement restrictions, and a nanometer resolution of positioning.
{"title":"Design of a flexible conveyer microrobot with electromagnetic field-based friction drive control for microfactory stations","authors":"Antoine Ferreira","doi":"10.1163/156856300744669","DOIUrl":"https://doi.org/10.1163/156856300744669","url":null,"abstract":"This paper proposes and demonstrates the feasibility of a new generation of compliant piezoelectric microconveyers for microobjects based on the cooperation of arrayed direct-drive standing wave ultrasonic motors (microSWUMs). Their operating principles, which combine active frictional contact mechanisms with electromagnetic field-based friction drive control, are analyzed. A prototype of a planar-type ultrasonic motor incorporating 48 arrayed microSWUMs, whose overall dimensions are 47 × 29 mm2, has been realized through the use of a flexible active metallic sheet (stator) which acts as a mobile platform. An experimental characterization has been carried out in order to identify the main physical and technological limitations specific to millimeter scale standing wave motors. The corresponding results indicate that powerful force/speed characteristics on the millimeter scale can be expected, i.e. high output force density around 20 mN · mm-2, a carried load ratio reaching 1 kg · cm-2, a traveling distance without displacement restrictions, and a nanometer resolution of positioning.","PeriodicalId":150257,"journal":{"name":"Journal of Micromechatronics","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122331618","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
In this paper, we provide an overview of miniaturized biochemical analysis system components and specifically discuss the micromachined metallic pipette arrays (MPA) and the micromachined electrical field-flow fractionation system (μ-EFFF). The MPA are arrays of hollow metallic pipettes extending from a silicon substrate. These arrays are used in macroscale spatial manipulation of samples in the pl to μl range. The μ-EFFF system is composed of a micromachined flow channel with integrated electrodes for application of static electric fields. The system is used for separation and analysis of biological molecules and colloids. The design, fabrication, and characterization of the MPA and the μ-EFFF are described. In addition, the integration of the components using micromechatronics technologies is discussed.
{"title":"Integrated micromachined components for biological analysis systems","authors":"A. B. Frazier, I. Papautsky, B. Gale, K. Caldwell","doi":"10.1163/156856300744678","DOIUrl":"https://doi.org/10.1163/156856300744678","url":null,"abstract":"In this paper, we provide an overview of miniaturized biochemical analysis system components and specifically discuss the micromachined metallic pipette arrays (MPA) and the micromachined electrical field-flow fractionation system (μ-EFFF). The MPA are arrays of hollow metallic pipettes extending from a silicon substrate. These arrays are used in macroscale spatial manipulation of samples in the pl to μl range. The μ-EFFF system is composed of a micromachined flow channel with integrated electrodes for application of static electric fields. The system is used for separation and analysis of biological molecules and colloids. The design, fabrication, and characterization of the MPA and the μ-EFFF are described. In addition, the integration of the components using micromechatronics technologies is discussed.","PeriodicalId":150257,"journal":{"name":"Journal of Micromechatronics","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126863623","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1900-01-01DOI: 10.1163/156856301760132097
G. Caprari, T. Estier, R. Siegwart
Design of mobile micro-robot (MMR) is still a challenge due to the restricted availability of basic components. However, the number of highly integrated microelectronic and micromechanical components is growing fast. Nevertheless, its integration to a micro-system requires a good knowledge of all the interactions between sensor, actuator, computation and energy source. Often compromises between performance and power consumption have to be found. This paper gives the basic considerations for building mobile micro-robots. The major scaling effects are presented and their impact on micro-system design is discussed. The mobile micro-robot Alice (Fig. 1), having the size of a sugar cube, is presented and discussed in the context of scaling laws. It has an autonomy of around 10 hours and is able to navigate based on simple behaviors like obstacle avoidance or wall following.
{"title":"Fascination of down scaling — Alice the sugar cube robot","authors":"G. Caprari, T. Estier, R. Siegwart","doi":"10.1163/156856301760132097","DOIUrl":"https://doi.org/10.1163/156856301760132097","url":null,"abstract":"Design of mobile micro-robot (MMR) is still a challenge due to the restricted availability of basic components. However, the number of highly integrated microelectronic and micromechanical components is growing fast. Nevertheless, its integration to a micro-system requires a good knowledge of all the interactions between sensor, actuator, computation and energy source. Often compromises between performance and power consumption have to be found. This paper gives the basic considerations for building mobile micro-robots. The major scaling effects are presented and their impact on micro-system design is discussed. The mobile micro-robot Alice (Fig. 1), having the size of a sugar cube, is presented and discussed in the context of scaling laws. It has an autonomy of around 10 hours and is able to navigate based on simple behaviors like obstacle avoidance or wall following.","PeriodicalId":150257,"journal":{"name":"Journal of Micromechatronics","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122041288","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1900-01-01DOI: 10.1163/156856306777924626
Yantao Shen, N. Xi, Bo Song, W. Li, C. Pomeroy
The objective of this paper is to develop a networked cooperative environment to achieve human/robot cooperation for reliable and dependable remote microassembly. At a microscale, surface adhesion forces, such as van der Waals, surface tension and electrostatic forces, become stronger than the downward gravitational force. For a reliable and dependable tele-microassembly, it is absolutely necessary to allow close monitoring of the magnitude and direction of those micro-forces interacting with microdevices during the assembly process. In this paper, based on integrating an in situ polyvinylidene fluoride piezoelectric micro-force sensing tool with a resolution in the range of μN, and using event-synchronization for the feedback of assembly video and micro-force, the developed networked human/robot cooperative platform can greatly advance applications in tele-microassembly. As a result, the reliable and dependable human/robot cooperative assembly operations can be achieved and extended to the single or multiple remote work-cells through a local area network or the Internet. This platform has been used successfully to perform a remote assembly of surface MEMS structures with the event-synchronized micro-force/visual feedback via the Internet between USA and Hong Kong.
{"title":"Networked human/robot cooperative environment for tele-assembly of MEMS devices","authors":"Yantao Shen, N. Xi, Bo Song, W. Li, C. Pomeroy","doi":"10.1163/156856306777924626","DOIUrl":"https://doi.org/10.1163/156856306777924626","url":null,"abstract":"The objective of this paper is to develop a networked cooperative environment to achieve human/robot cooperation for reliable and dependable remote microassembly. At a microscale, surface adhesion forces, such as van der Waals, surface tension and electrostatic forces, become stronger than the downward gravitational force. For a reliable and dependable tele-microassembly, it is absolutely necessary to allow close monitoring of the magnitude and direction of those micro-forces interacting with microdevices during the assembly process. In this paper, based on integrating an in situ polyvinylidene fluoride piezoelectric micro-force sensing tool with a resolution in the range of μN, and using event-synchronization for the feedback of assembly video and micro-force, the developed networked human/robot cooperative platform can greatly advance applications in tele-microassembly. As a result, the reliable and dependable human/robot cooperative assembly operations can be achieved and extended to the single or multiple remote work-cells through a local area network or the Internet. This platform has been used successfully to perform a remote assembly of surface MEMS structures with the event-synchronized micro-force/visual feedback via the Internet between USA and Hong Kong.","PeriodicalId":150257,"journal":{"name":"Journal of Micromechatronics","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126988749","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1900-01-01DOI: 10.1163/156856301753398172
M. Bétemps, C. Anthierens
Micro Electro Mechanical Systems (MEMS) are integrated in many current products and are not only the concern of military defence or medicine. Nowadays, many different types of microactuators exist which use different types of energy and perform a variety of movements. Several applications require small systems to inspect confined and hostile places. Vapour generators in nuclear plants comprise of 3000 to 5000 vertical pipes of 17 mm diameter. These pipes endure high mechanical constraints and have to be inspected to detect possible cracks. Our study is based on the design, modelling and implementation of a microrobot able to move upwards within and carry sensors into these pipes. It moves as an inchworm and is composed of 2 blocking modules that brace the robot on the pipe sides, and one stretching module that creates a step. This actuator is pneumatic and composed of metal bellows. By this original design, the microrobot has a good power-to-volume ratio and it can carry a load of 600 g. Its good positioning accuracy has been proved over a 90 mm course where the error of positioning is less than 60 μm.
{"title":"Design and control of a pneumatic microrobot for in-pipe inspection of nuclear pipes","authors":"M. Bétemps, C. Anthierens","doi":"10.1163/156856301753398172","DOIUrl":"https://doi.org/10.1163/156856301753398172","url":null,"abstract":"Micro Electro Mechanical Systems (MEMS) are integrated in many current products and are not only the concern of military defence or medicine. Nowadays, many different types of microactuators exist which use different types of energy and perform a variety of movements. Several applications require small systems to inspect confined and hostile places. Vapour generators in nuclear plants comprise of 3000 to 5000 vertical pipes of 17 mm diameter. These pipes endure high mechanical constraints and have to be inspected to detect possible cracks. Our study is based on the design, modelling and implementation of a microrobot able to move upwards within and carry sensors into these pipes. It moves as an inchworm and is composed of 2 blocking modules that brace the robot on the pipe sides, and one stretching module that creates a step. This actuator is pneumatic and composed of metal bellows. By this original design, the microrobot has a good power-to-volume ratio and it can carry a load of 600 g. Its good positioning accuracy has been proved over a 90 mm course where the error of positioning is less than 60 μm.","PeriodicalId":150257,"journal":{"name":"Journal of Micromechatronics","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130272088","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1900-01-01DOI: 10.1163/156856306777924662
Quan Zhou, P. Korhonen, J. Laitinen, S. Sjövall
The demand for automatic quality inspection of individual micro-components has increased strongly in the micro-optoelectronics industry. In many cases, quality inspection of those micro-components needs dexterous microhandling. However, automatic dexterous handling of microcomponents is a very challenging issue which is barely explored. This paper presents a high-DOF (degrees of freedom) automatic dexterous handling and inspection system for micro-optoelectronic components using a novel 6-DOF piezoelectric microgripper. The control system includes three hierarchical layers: an actuator control layer, a motion planning layer and a mission control layer. Machine vision is applied in automatic manipulation. The performance of the system is demonstrated in a vision-based automatic inspection task for 300 × 300 × 100- μ m-sized optoelectronics components and reached a cycle time of 7.1 ± 0.3 s.
{"title":"Automatic dextrous microhandling based on a 6-DOF microgripper","authors":"Quan Zhou, P. Korhonen, J. Laitinen, S. Sjövall","doi":"10.1163/156856306777924662","DOIUrl":"https://doi.org/10.1163/156856306777924662","url":null,"abstract":"The demand for automatic quality inspection of individual micro-components has increased strongly in the micro-optoelectronics industry. In many cases, quality inspection of those micro-components needs dexterous microhandling. However, automatic dexterous handling of microcomponents is a very challenging issue which is barely explored. This paper presents a high-DOF (degrees of freedom) automatic dexterous handling and inspection system for micro-optoelectronic components using a novel 6-DOF piezoelectric microgripper. The control system includes three hierarchical layers: an actuator control layer, a motion planning layer and a mission control layer. Machine vision is applied in automatic manipulation. The performance of the system is demonstrated in a vision-based automatic inspection task for 300 × 300 × 100- μ m-sized optoelectronics components and reached a cycle time of 7.1 ± 0.3 s.","PeriodicalId":150257,"journal":{"name":"Journal of Micromechatronics","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121402464","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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