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Development of Calibration and Verification Standards in Microstrip to 60 GHz 60 GHz微带校准与验证标准的制定
Pub Date : 1989-11-01 DOI: 10.1109/ARFTG.1989.323953
W. Oldfield
This paper discusses the development of microstrip standards for calibration and accuracy verification. Calibration standards for both OPEN-SHORT-LOAD and LRL are explored. The standards were developed for use in the newly developed Wiltron microstrip test fixture. Test data to confirm the quality of the calibrations is presented. Practical techniques for making multiport microstrip measurements without the need of special test fixtures are discussed.
本文讨论了用于校准和精度验证的微带标准的发展。探讨了开-短负荷和LRL的标定标准。这些标准是为新开发的Wiltron微带测试夹具而开发的。给出了验证校准质量的测试数据。讨论了在不需要特殊测试夹具的情况下进行多端口微带测量的实用技术。
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引用次数: 1
On-Wafer Microwave Standards at NIST NIST的晶圆微波标准
Pub Date : 1989-11-01 DOI: 10.1109/ARFTG.1989.323951
Dylan F. Williams
The National Institute of Standards and Technology has begun a program to develop standards and calibration services for microwave wafer-level probing systems. The standards will be based on planar transmission lines and are designed to support measurements between 1 and 40 GHz. The program objectives, organization, and plans are discussed.
美国国家标准与技术研究所已经开始了一项为微波晶圆级探测系统开发标准和校准服务的计划。该标准将基于平面传输线,旨在支持1至40 GHz之间的测量。讨论了项目的目标、组织和计划。
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引用次数: 6
Limitations of Characterizing mm-Wave MODFETs with Microwave Probes 微波探针表征毫米波modfet的局限性
Pub Date : 1989-11-01 DOI: 10.1109/ARFTG.1989.323960
B. Hughes, H. Kondoh, J. Perdomo, P. Tasker
The accuracy of microwave probing is not adequate for the characterization of MODFETs used in the most demanding mm-wave circuit applications. Accuracy of 5 % for most device model circuit elements is desireable. This requirement demands accuracies of 1 fF, 1 pH, 0.08 ¿ and 0.1 pS. Examples are given demonstrating why this accuracy is desired and the calibration errors limiting this accuracy. The pads normally used to allow contact of the probes to the devices introduce parasitic capacitances that are significant (e.g., Cgd = 1.8 fF) for small mm-wave devices. The standard calibration technique does not account for the pads. It is shown that the pad capacitances can not be simply subtracted because of 3 body capacitance effects. The pads also move the reference planes back from the intrinsic device; this effect appears as inductances that have a significant effect on the model for larger MODFETs. For example, an error of 10 pH in the gate inductance of a 350 ¿m wide MODFET reduces the modelled gain of a narrow-band 42 GHz amp by 3 dB. Measurements of the standard Load-Open-Short-Thru calibration reflection standards using a Load-Reflect-Thru calibration suggest that the open capacitance accuracy is worse than 3 fF. Modelling showed that an error 0.1 pS in the transmission reflection planes produces an Rgs error of 10 % for active MODFETs and 50 % for passive MODFET. Experiments suggest the error is worse than 0.1 pS.
微波探测的精度不足以表征最苛刻的毫米波电路应用中使用的modfet。对于大多数器件模型电路元件来说,5%的精度是理想的。这一要求要求精度为1 fF, 1 pH, 0.08¿和0.1 pS。给出的例子说明了为什么需要这种精度以及限制这种精度的校准误差。通常用于使探头接触器件的焊盘会引入寄生电容,这对于小型毫米波器件来说是非常重要的(例如,Cgd = 1.8 fF)。标准校准技术不考虑焊盘。结果表明,由于三体电容效应,焊盘电容不能简单地减去。垫也将参考平面从固有装置移动回来;对于较大的modfet,这种效应表现为对模型有显著影响的电感。例如,350 μ m宽MODFET的栅极电感误差为10 pH会使42 GHz窄带放大器的模拟增益降低3 dB。使用负载-反射-通校准对标准负载-开-短通校准反射标准的测量表明,开电容精度低于3ff。建模表明,在传输反射平面上,0.1 pS的误差会导致有源MODFET的Rgs误差为10%,无源MODFET的Rgs误差为50%。实验表明,误差小于0.1 pS。
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引用次数: 5
Wafer-Level ANA Calibrations at NIST NIST的晶圆级ANA校准
Pub Date : 1989-11-01 DOI: 10.1109/ARFTG.1989.323952
R. Marks, Kurt Phillips
The National Institute of Standards and Technology has begun a program supporting on-wafer scattering parameter measurements. In contrast to many previous NIST endeavors, this program seeks to transfer methodology into industrial measurement laboratories. The subject of this paper is the development of calibration techniques and algorithms, rather than physical standards, for the measurement of on-wafer scattering parameters. In particular, we discuss a TRL-based method which uses transmission lines as standards but includes redundant measurements to improve calibration accuracy and bandwidth.
美国国家标准与技术研究所已经开始了一项支持晶圆上散射参数测量的计划。与许多以前的NIST的努力相比,这个项目寻求将方法转移到工业测量实验室。本文的主题是校准技术和算法的发展,而不是物理标准,为测量片上散射参数。我们特别讨论了一种基于trl的方法,该方法使用传输线作为标准,但包括冗余测量以提高校准精度和带宽。
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引用次数: 16
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34th ARFTG Conference Digest
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