Pub Date : 2020-05-01DOI: 10.1109/ICEDME50972.2020.00012
Jin Yang, Jing-Hao Luo, M. Fan, Shibin Lu
In this paper, based on first-principles calculations, we have carried out a comprehensive study of the hydrogenation effect on hexagonal silicon nitride (β-Si3N4). There are two types of nitrogen in β-Si3N4, we name them as N1 and N2. We choose nitrogen vacancy and silicon substitution as the main defects in Si3N4. For each defect, we first compare the retention characteristics of the modified Bader charge and trap energy before and after hydrogenation. The results show that hydrogenation will weaken the defects to maintain both electrons and holes. Moreover, the defect of silicon substitution at N2 site would only trap holes after hydrogenation. With regard to endurance characteristic, our studies reveal that the defects present differences after hydrogenation. For nitrogen vacancy, hydrogenation has no effect on endurance. However, the endurance of silicon substitution at N1 site degenerates after hydrogenation. Taking full account of retention and endurance, we deem that nitrogen vacancy is the better charge trap in hydrogenated silicon nitride storage layer.
{"title":"The effect of hydrogenation on silicon nitride storage layer: A first-principles investigation","authors":"Jin Yang, Jing-Hao Luo, M. Fan, Shibin Lu","doi":"10.1109/ICEDME50972.2020.00012","DOIUrl":"https://doi.org/10.1109/ICEDME50972.2020.00012","url":null,"abstract":"In this paper, based on first-principles calculations, we have carried out a comprehensive study of the hydrogenation effect on hexagonal silicon nitride (β-Si3N4). There are two types of nitrogen in β-Si3N4, we name them as N1 and N2. We choose nitrogen vacancy and silicon substitution as the main defects in Si3N4. For each defect, we first compare the retention characteristics of the modified Bader charge and trap energy before and after hydrogenation. The results show that hydrogenation will weaken the defects to maintain both electrons and holes. Moreover, the defect of silicon substitution at N2 site would only trap holes after hydrogenation. With regard to endurance characteristic, our studies reveal that the defects present differences after hydrogenation. For nitrogen vacancy, hydrogenation has no effect on endurance. However, the endurance of silicon substitution at N1 site degenerates after hydrogenation. Taking full account of retention and endurance, we deem that nitrogen vacancy is the better charge trap in hydrogenated silicon nitride storage layer.","PeriodicalId":155375,"journal":{"name":"2020 3rd International Conference on Electron Device and Mechanical Engineering (ICEDME)","volume":"32 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2020-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131498091","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2020-05-01DOI: 10.1109/ICEDME50972.2020.00108
Yonghong Tian, Gang Li, Jinniu Zhang, Yafeng Zhang, Min Zhang, Kaixin Chen, Jianzhi Gao, Hongbing Lu
Growth of diameter-controlled GeTe phase-change nanowires (NWs) on Si substrates is demonstrated by a Au catalyst-assisted chemical vapor deposition (CVD) technique. Besides Au catalyst size, GeTe source powder amount, an uncommon growth parameter, is also employed to control the diameter of GeTe NWs. The diameter of GeTe NWs shows an obvious increase with the increase of both Au catalyst size and GeTe powder amount. By effectively controlling the Au nanoparticle size and GeTe powder amount, the diameters of GeTe NWs can be tunable in a wide range of 150 to 280 nm. The effects of the Au nanoparticle size and GeTe powder amount on the diameter of GeTe NWs are revealed in terms of supersaturation detailedly based on the Gibbs–Thomson effect.
{"title":"Diameter-controlled Growth of GeTe Phase-change Nanowires via a Au Catalyst-assisted Vapor–liquid–solid Mechanism","authors":"Yonghong Tian, Gang Li, Jinniu Zhang, Yafeng Zhang, Min Zhang, Kaixin Chen, Jianzhi Gao, Hongbing Lu","doi":"10.1109/ICEDME50972.2020.00108","DOIUrl":"https://doi.org/10.1109/ICEDME50972.2020.00108","url":null,"abstract":"Growth of diameter-controlled GeTe phase-change nanowires (NWs) on Si substrates is demonstrated by a Au catalyst-assisted chemical vapor deposition (CVD) technique. Besides Au catalyst size, GeTe source powder amount, an uncommon growth parameter, is also employed to control the diameter of GeTe NWs. The diameter of GeTe NWs shows an obvious increase with the increase of both Au catalyst size and GeTe powder amount. By effectively controlling the Au nanoparticle size and GeTe powder amount, the diameters of GeTe NWs can be tunable in a wide range of 150 to 280 nm. The effects of the Au nanoparticle size and GeTe powder amount on the diameter of GeTe NWs are revealed in terms of supersaturation detailedly based on the Gibbs–Thomson effect.","PeriodicalId":155375,"journal":{"name":"2020 3rd International Conference on Electron Device and Mechanical Engineering (ICEDME)","volume":"919 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2020-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131825385","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2020-05-01DOI: 10.1109/ICEDME50972.2020.00008
Ping Gu, Guangyu Liu, Weiyi Wu, Siyu Li, Bin Liu
At present, military activities are deeply affected by the information revolution that has not been experienced before. As a part of military activities, equipment support activities are facing huge challenges and many problems have arisen. The ability is not equal to its ambition for traditional research method along with in-depth research, so it needs to quest for a new research angle of view. Through consulting electriferous particle’s movement in physics field, the paper introduced field thinking from comparability point of view based on spatial distributing of equipment support elements around battlefield and characteristic of support activities, and described support element and energy transfer in support activity with the theory and method of field theory as the basic for next application research. The apropos combination between natural science and military science has an important meaning for enrichment and development of equipment support theory.
{"title":"A electromagnetic field theory for the wartime equipment support model","authors":"Ping Gu, Guangyu Liu, Weiyi Wu, Siyu Li, Bin Liu","doi":"10.1109/ICEDME50972.2020.00008","DOIUrl":"https://doi.org/10.1109/ICEDME50972.2020.00008","url":null,"abstract":"At present, military activities are deeply affected by the information revolution that has not been experienced before. As a part of military activities, equipment support activities are facing huge challenges and many problems have arisen. The ability is not equal to its ambition for traditional research method along with in-depth research, so it needs to quest for a new research angle of view. Through consulting electriferous particle’s movement in physics field, the paper introduced field thinking from comparability point of view based on spatial distributing of equipment support elements around battlefield and characteristic of support activities, and described support element and energy transfer in support activity with the theory and method of field theory as the basic for next application research. The apropos combination between natural science and military science has an important meaning for enrichment and development of equipment support theory.","PeriodicalId":155375,"journal":{"name":"2020 3rd International Conference on Electron Device and Mechanical Engineering (ICEDME)","volume":"121 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2020-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124692851","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2020-05-01DOI: 10.1109/ICEDME50972.2020.00156
D. P. He, Z. He, C. Liu
Collaborative filtering algorithm is the most popular algorithm applied to recommendation systems. However, it has been plagued by the cold start problem which seriously affects the effectiveness of recommendation. Aiming at users' cold start problem, we proposed a recommendation algorithm which combined tag data and Naive Bayes classification. Tag data was used to represent the users' attribute characteristics, and new and old users were matched by Naive Bayes classifier, which utilized the similar user groups to infer the interests of new users. After determining the categories of new users, we calculated the average rating information of users in this category for items to achieve Top-N recommendation. Experiments showed that the algorithm can achieve better RMSE in the problem of the cold start of users, and the recommendation accuracy was significantly improved.
{"title":"Recommendation Algorithm Combining Tag Data and Naive Bayes Classification","authors":"D. P. He, Z. He, C. Liu","doi":"10.1109/ICEDME50972.2020.00156","DOIUrl":"https://doi.org/10.1109/ICEDME50972.2020.00156","url":null,"abstract":"Collaborative filtering algorithm is the most popular algorithm applied to recommendation systems. However, it has been plagued by the cold start problem which seriously affects the effectiveness of recommendation. Aiming at users' cold start problem, we proposed a recommendation algorithm which combined tag data and Naive Bayes classification. Tag data was used to represent the users' attribute characteristics, and new and old users were matched by Naive Bayes classifier, which utilized the similar user groups to infer the interests of new users. After determining the categories of new users, we calculated the average rating information of users in this category for items to achieve Top-N recommendation. Experiments showed that the algorithm can achieve better RMSE in the problem of the cold start of users, and the recommendation accuracy was significantly improved.","PeriodicalId":155375,"journal":{"name":"2020 3rd International Conference on Electron Device and Mechanical Engineering (ICEDME)","volume":"99 6","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2020-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"120833847","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2020-05-01DOI: 10.1109/ICEDME50972.2020.00049
Zhongliang Yang, Zhen Lu, Zengjie Yang
Because of the complex working conditions of the arm, its structural design is very difficult. In this paper, the digging arm is integrated by structure and hydraulic systems, and it is designed forward. First a dynamics simulation model of the arm should be established by using dynamics analysis software MotionView and HyperStudy which is a parametric optimization software, the position of each hinge point of the hydraulic cylinder is optimized to find the maximum and minimum installation distances of the hydraulic cylinder which are the most suitable. The dynamic module MotioView is used to calculate the force of the arm under typical postures for determining the cylinder diameter and rod diameter of the hydraulic cylinder. At the same time, all parameters of the hydraulic cylinders are checked mechanically. After that, the compression and tensile stiffnesses of the hydraulic cylinder under typical working conditions are calculated according to the obtained hydraulic cylinder parameters so as to check the overall stiffness of the working arm. Finally, the working arm structure is refined and the structural strength under typical working conditions is analyzed to meet the design requirements. The optimization of the hinge point of the hydraulic cylinder, the design method of the hydraulic cylinder parameters and the stiffness checking method of the working arm described in this paper can be extended to other similar structural designs and have a certain reference significance.
{"title":"Hinge point optimization and hydraulic cylinder parameter design of the digging arm","authors":"Zhongliang Yang, Zhen Lu, Zengjie Yang","doi":"10.1109/ICEDME50972.2020.00049","DOIUrl":"https://doi.org/10.1109/ICEDME50972.2020.00049","url":null,"abstract":"Because of the complex working conditions of the arm, its structural design is very difficult. In this paper, the digging arm is integrated by structure and hydraulic systems, and it is designed forward. First a dynamics simulation model of the arm should be established by using dynamics analysis software MotionView and HyperStudy which is a parametric optimization software, the position of each hinge point of the hydraulic cylinder is optimized to find the maximum and minimum installation distances of the hydraulic cylinder which are the most suitable. The dynamic module MotioView is used to calculate the force of the arm under typical postures for determining the cylinder diameter and rod diameter of the hydraulic cylinder. At the same time, all parameters of the hydraulic cylinders are checked mechanically. After that, the compression and tensile stiffnesses of the hydraulic cylinder under typical working conditions are calculated according to the obtained hydraulic cylinder parameters so as to check the overall stiffness of the working arm. Finally, the working arm structure is refined and the structural strength under typical working conditions is analyzed to meet the design requirements. The optimization of the hinge point of the hydraulic cylinder, the design method of the hydraulic cylinder parameters and the stiffness checking method of the working arm described in this paper can be extended to other similar structural designs and have a certain reference significance.","PeriodicalId":155375,"journal":{"name":"2020 3rd International Conference on Electron Device and Mechanical Engineering (ICEDME)","volume":"45 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2020-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129911503","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2020-05-01DOI: 10.1109/ICEDME50972.2020.00022
Jiajun Liu, Weishuo Li
It is difficult to find the temperature abnormity of the main electric circuit electrical connection equipment of the catenary. Once the temperature abnormity of the electrical connection equipment is caused, it will seriously affect the safe operation of the catenary. Therefore, a state evaluation system based on temperature monitoring technology and background management development technology is developed to monitor the temperature of the electrical connection equipment of the main electric circuit, and the collected temperature data is transmitted to the background system through wireless communication.The background system judges whether the equipment is in normal operation state, so as to discover the heating defects of the electrical connection equipment timely and effectively, At the same time, it is of great significance to ensure the safe and reliable operation of the catenary, to effectively monitor and evaluate the temperature of the electrical connection equipment of the main electric circuit.
{"title":"Research on the condition evaluation system of the main electric circuit electrical connection equipment of catenary","authors":"Jiajun Liu, Weishuo Li","doi":"10.1109/ICEDME50972.2020.00022","DOIUrl":"https://doi.org/10.1109/ICEDME50972.2020.00022","url":null,"abstract":"It is difficult to find the temperature abnormity of the main electric circuit electrical connection equipment of the catenary. Once the temperature abnormity of the electrical connection equipment is caused, it will seriously affect the safe operation of the catenary. Therefore, a state evaluation system based on temperature monitoring technology and background management development technology is developed to monitor the temperature of the electrical connection equipment of the main electric circuit, and the collected temperature data is transmitted to the background system through wireless communication.The background system judges whether the equipment is in normal operation state, so as to discover the heating defects of the electrical connection equipment timely and effectively, At the same time, it is of great significance to ensure the safe and reliable operation of the catenary, to effectively monitor and evaluate the temperature of the electrical connection equipment of the main electric circuit.","PeriodicalId":155375,"journal":{"name":"2020 3rd International Conference on Electron Device and Mechanical Engineering (ICEDME)","volume":"45 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2020-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115097554","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2020-05-01DOI: 10.1109/ICEDME50972.2020.00163
Yongdong Wei, Jihe Feng, Yuming Huang, Kaiwei Liu, Bin Ren
In order to solve the problems of slow convergence speed and avoid local optimum in the path planning of mobile robot, the basic genetic algorithm was improved and a method for path planning of mobile robot in static environment was proposed. In this paper, the shortest planning path and the adaptive smoothness are combined as the influencing factors of the individual fitness function value of the path, and a certain weight is assigned to these two factors. It improves the local optimal solution of the basic genetic algorithm, overcomes the shortcoming of precocity, and improves the global search ability of the algorithm. The simulation results show that the improved genetic algorithm is feasible and effective in the path planning of mobile robots.
{"title":"Path planning of mobile robot based on improved genetic algorithm","authors":"Yongdong Wei, Jihe Feng, Yuming Huang, Kaiwei Liu, Bin Ren","doi":"10.1109/ICEDME50972.2020.00163","DOIUrl":"https://doi.org/10.1109/ICEDME50972.2020.00163","url":null,"abstract":"In order to solve the problems of slow convergence speed and avoid local optimum in the path planning of mobile robot, the basic genetic algorithm was improved and a method for path planning of mobile robot in static environment was proposed. In this paper, the shortest planning path and the adaptive smoothness are combined as the influencing factors of the individual fitness function value of the path, and a certain weight is assigned to these two factors. It improves the local optimal solution of the basic genetic algorithm, overcomes the shortcoming of precocity, and improves the global search ability of the algorithm. The simulation results show that the improved genetic algorithm is feasible and effective in the path planning of mobile robots.","PeriodicalId":155375,"journal":{"name":"2020 3rd International Conference on Electron Device and Mechanical Engineering (ICEDME)","volume":"7 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2020-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129832447","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2020-05-01DOI: 10.1109/ICEDME50972.2020.00084
Cao Lucui
As we all know, the exhaust of ordinary cars contains a lot of harmful gases, which not only endangers people's health, but also aggravates the process of the greenhouse effect. In addition, petroleum resources are non-renewable energy sources, and it is imperative to pick up new energy vehicles. As one of the more common new energy vehicles, electric vehicles use on-board power as the driving force and use electric motors to drive the vehicles, which not only meets the needs of urban vehicles, but also does not cause pollution and has less impact on the environment. However, the current development of electric vehicle technology is immature, and the failure of charging the vehicle may occur, which seriously affects the use and promotion of electric vehicles. Here, we analyze the faults that electric vehicles cannot be charged, and propose fault solutions, hoping to provide some help to workers in related fields.
{"title":"Maintenance Technology for Charging Failures in the New Energy Vehicles","authors":"Cao Lucui","doi":"10.1109/ICEDME50972.2020.00084","DOIUrl":"https://doi.org/10.1109/ICEDME50972.2020.00084","url":null,"abstract":"As we all know, the exhaust of ordinary cars contains a lot of harmful gases, which not only endangers people's health, but also aggravates the process of the greenhouse effect. In addition, petroleum resources are non-renewable energy sources, and it is imperative to pick up new energy vehicles. As one of the more common new energy vehicles, electric vehicles use on-board power as the driving force and use electric motors to drive the vehicles, which not only meets the needs of urban vehicles, but also does not cause pollution and has less impact on the environment. However, the current development of electric vehicle technology is immature, and the failure of charging the vehicle may occur, which seriously affects the use and promotion of electric vehicles. Here, we analyze the faults that electric vehicles cannot be charged, and propose fault solutions, hoping to provide some help to workers in related fields.","PeriodicalId":155375,"journal":{"name":"2020 3rd International Conference on Electron Device and Mechanical Engineering (ICEDME)","volume":"58 1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2020-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132252303","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2020-05-01DOI: 10.1109/ICEDME50972.2020.00011
Hao Chen, Xiao Yu, Xiaomeng Tan, Liming Xie
Intergranular corrosion is a kind of chemical or electrochemical corrosion on the metallic materials grain boundary. Owing to the higher impurity content in the inner grain of metal materials, the grain boundary would be more susceptible to corrosion than the inner one. After corrosion, the metal surface still maintains a certain metallic lustre, while the intergranular bonding force is significantly weakened and the mechanical properties are greatly reduced, which seriously affects the safety and reliability of the metallic components. In this paper, the cracked direct drinking water pipe used in a 220kV substation was investigated by means of macromorphology inspection, chemical composition analysis, scanning electron micrograph analysis, microstructure analysis and energy spectrum analysis. The result showed that intergranular corrosion was the main cause of cracking of the direct drinking water pipe and the chloridion in the medium further accelerated the corrosion of the pipe. In addition, targeted preventive measures were put forward in order to improve the intergranular corrosion resistance of the direct drinking water pipe and avoid the similar corrosion failure.
{"title":"Analysis on Intergranular Corrosion of Direct Drinking Water Pipe Used in 22OkV Substation","authors":"Hao Chen, Xiao Yu, Xiaomeng Tan, Liming Xie","doi":"10.1109/ICEDME50972.2020.00011","DOIUrl":"https://doi.org/10.1109/ICEDME50972.2020.00011","url":null,"abstract":"Intergranular corrosion is a kind of chemical or electrochemical corrosion on the metallic materials grain boundary. Owing to the higher impurity content in the inner grain of metal materials, the grain boundary would be more susceptible to corrosion than the inner one. After corrosion, the metal surface still maintains a certain metallic lustre, while the intergranular bonding force is significantly weakened and the mechanical properties are greatly reduced, which seriously affects the safety and reliability of the metallic components. In this paper, the cracked direct drinking water pipe used in a 220kV substation was investigated by means of macromorphology inspection, chemical composition analysis, scanning electron micrograph analysis, microstructure analysis and energy spectrum analysis. The result showed that intergranular corrosion was the main cause of cracking of the direct drinking water pipe and the chloridion in the medium further accelerated the corrosion of the pipe. In addition, targeted preventive measures were put forward in order to improve the intergranular corrosion resistance of the direct drinking water pipe and avoid the similar corrosion failure.","PeriodicalId":155375,"journal":{"name":"2020 3rd International Conference on Electron Device and Mechanical Engineering (ICEDME)","volume":"16 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2020-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133477892","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2020-05-01DOI: 10.1109/ICEDME50972.2020.00010
Chao Li, Lei Huang, Juntang Yuan, Zhenhua Wang
The weak adhesion of DLC films has always been a poser and a hot issuer in the previous researches of DLC films. In order to satisfy the cutting requirement of difficult-to-cut materials and adapt to the severe service conditions, the methods to improve adhesion must be more efficient and convenient. The Ti plasma etching treatment was carried out by mid-frequency magnetron sputtering method. A Ti-DLC film was deposited on the etching treated surface. The film thickness and surface roughness were measured by stylus profiler. The surface morphology was characterized by SEM. The composition of DLC films was characterized by micro Raman spectrometer. The adhesion strength was measured by liner-loading scratch tester. The etching treatment removed a micro layer of 407nm on the substrate and increased the surface roughness from 3.50nm to 18.26nm. The surface WC crystals were exposed and partly broken by Ti plasma. Compared with the DLC films on non-treated surface and Ti layer, the DLC films on etching treated surface had the highest adhesion strength of 34.14N. The DLC films had similar compositions, so the adhesion difference came from the surface treatments instead of the inherent properties of DLC films. The Ti plasma etching treatment removed a micro layer of substrate material and it brought higher chemical activity, which contributed to improve the adhesion. The increased roughness deferred the continuous spalling of DLC film in the scratch test. The changes worked together to improve the adhesion strength of DLC films.
{"title":"Enhanced adhesion of Ti-DLC films by Ti plasma etching treatment","authors":"Chao Li, Lei Huang, Juntang Yuan, Zhenhua Wang","doi":"10.1109/ICEDME50972.2020.00010","DOIUrl":"https://doi.org/10.1109/ICEDME50972.2020.00010","url":null,"abstract":"The weak adhesion of DLC films has always been a poser and a hot issuer in the previous researches of DLC films. In order to satisfy the cutting requirement of difficult-to-cut materials and adapt to the severe service conditions, the methods to improve adhesion must be more efficient and convenient. The Ti plasma etching treatment was carried out by mid-frequency magnetron sputtering method. A Ti-DLC film was deposited on the etching treated surface. The film thickness and surface roughness were measured by stylus profiler. The surface morphology was characterized by SEM. The composition of DLC films was characterized by micro Raman spectrometer. The adhesion strength was measured by liner-loading scratch tester. The etching treatment removed a micro layer of 407nm on the substrate and increased the surface roughness from 3.50nm to 18.26nm. The surface WC crystals were exposed and partly broken by Ti plasma. Compared with the DLC films on non-treated surface and Ti layer, the DLC films on etching treated surface had the highest adhesion strength of 34.14N. The DLC films had similar compositions, so the adhesion difference came from the surface treatments instead of the inherent properties of DLC films. The Ti plasma etching treatment removed a micro layer of substrate material and it brought higher chemical activity, which contributed to improve the adhesion. The increased roughness deferred the continuous spalling of DLC film in the scratch test. The changes worked together to improve the adhesion strength of DLC films.","PeriodicalId":155375,"journal":{"name":"2020 3rd International Conference on Electron Device and Mechanical Engineering (ICEDME)","volume":"20 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2020-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132681585","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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