首页 > 最新文献

2010 International Students and Young Scientists Workshop "Photonics and Microsystems"最新文献

英文 中文
Critical thickness of epitaxial thin films using Finite Element Method 用有限元法计算外延薄膜的临界厚度
T. Wcislo, M. Dąbrowska-szata, L. Gelczuk
In the paper, finite element methodology applied to critical thickness calculation has been presented. Semiconductor heterostructures have been applied to many electronic and optoelectronic devices. The performance and properties of epitaxial semiconductor thin film depend on the defects structure and stress-state of the film. During epitaxial growth first few layers are coherent with a substrate crystalline structure. As film thickness increases, growing stress causes nucleation of dislocations. This partially relaxes the strain due to lattice mismatch. A thickness at which this occurs is defined as a critical thickness. Calculation of critical thickness for the nucleation has been a subject of considerable study since the pioneering work of Frank and Van der Merve. Finite Element Method (FEM) is used to simulate the strained epitaxial layer and the substrate. Finally, approach to calculate the critical thickness on the basis of energy balance approach is presented.
本文介绍了有限元法在临界厚度计算中的应用。半导体异质结构已应用于许多电子和光电子器件中。外延半导体薄膜的性能和性能取决于薄膜的缺陷结构和应力状态。在外延生长过程中,前几层与衬底晶体结构相一致。随着薄膜厚度的增加,应力的增大引起位错的形核。这部分地松弛了由于晶格不匹配造成的应变。发生这种情况的厚度被定义为临界厚度。自Frank和Van der Merve的开创性工作以来,临界成核厚度的计算一直是一个相当重要的研究课题。采用有限元法对应变外延层和衬底进行了模拟。最后,提出了基于能量平衡法的临界厚度计算方法。
{"title":"Critical thickness of epitaxial thin films using Finite Element Method","authors":"T. Wcislo, M. Dąbrowska-szata, L. Gelczuk","doi":"10.1109/STYSW.2010.5714177","DOIUrl":"https://doi.org/10.1109/STYSW.2010.5714177","url":null,"abstract":"In the paper, finite element methodology applied to critical thickness calculation has been presented. Semiconductor heterostructures have been applied to many electronic and optoelectronic devices. The performance and properties of epitaxial semiconductor thin film depend on the defects structure and stress-state of the film. During epitaxial growth first few layers are coherent with a substrate crystalline structure. As film thickness increases, growing stress causes nucleation of dislocations. This partially relaxes the strain due to lattice mismatch. A thickness at which this occurs is defined as a critical thickness. Calculation of critical thickness for the nucleation has been a subject of considerable study since the pioneering work of Frank and Van der Merve. Finite Element Method (FEM) is used to simulate the strained epitaxial layer and the substrate. Finally, approach to calculate the critical thickness on the basis of energy balance approach is presented.","PeriodicalId":160376,"journal":{"name":"2010 International Students and Young Scientists Workshop \"Photonics and Microsystems\"","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-06-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128436703","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Fullerene based materials for ultra-low-k application 超低k应用的富勒烯基材料
K. Broczkowska, Jolanta Klocek, D. Friedrich, K. Henkel, K. Kolanek, A. Urbanowicz, D. Schmeißer, Mirosław Miller, E. Zschech
Fullerene-based materials are considered to be a candidate for ultra-low-k material applications. We have incorporated fullerene C60 into a siloxane material by means of the sol-gel method. Thickness of obtained film was investigated by atomic force microscope, dielectric constant was measured by the capacitance-voltage characterization (CV). Interactions between the components within the films were investigated by using X-ray photoelectron spectroscopy and near edge X-ray absorption fine structure spectroscopy. We found that the ratio of carbon, oxygen and silicon atoms within obtained film equals 2.7∶1.9∶1. The microscopic and CV investigations show that the sample's composition is inhomogenous although the fullerene's concentration within the material is low. However, dielectric constant is in the range of 2.3 to 2.5.
富勒烯基材料被认为是超低k材料应用的候选材料。我们通过溶胶-凝胶法将富勒烯C60掺入到硅氧烷材料中。用原子力显微镜研究了薄膜的厚度,用电容电压特性(CV)测量了介电常数。利用x射线光电子能谱和近边x射线吸收精细结构能谱研究了膜内各组分之间的相互作用。结果表明,薄膜中碳、氧、硅原子的比例为2.7∶1.9∶1。微观和CV研究表明,样品的组成是不均匀的,虽然材料中富勒烯的浓度很低。而介电常数在2.3 ~ 2.5之间。
{"title":"Fullerene based materials for ultra-low-k application","authors":"K. Broczkowska, Jolanta Klocek, D. Friedrich, K. Henkel, K. Kolanek, A. Urbanowicz, D. Schmeißer, Mirosław Miller, E. Zschech","doi":"10.1109/STYSW.2010.5714165","DOIUrl":"https://doi.org/10.1109/STYSW.2010.5714165","url":null,"abstract":"Fullerene-based materials are considered to be a candidate for ultra-low-k material applications. We have incorporated fullerene C60 into a siloxane material by means of the sol-gel method. Thickness of obtained film was investigated by atomic force microscope, dielectric constant was measured by the capacitance-voltage characterization (CV). Interactions between the components within the films were investigated by using X-ray photoelectron spectroscopy and near edge X-ray absorption fine structure spectroscopy. We found that the ratio of carbon, oxygen and silicon atoms within obtained film equals 2.7∶1.9∶1. The microscopic and CV investigations show that the sample's composition is inhomogenous although the fullerene's concentration within the material is low. However, dielectric constant is in the range of 2.3 to 2.5.","PeriodicalId":160376,"journal":{"name":"2010 International Students and Young Scientists Workshop \"Photonics and Microsystems\"","volume":"81 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-06-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130638399","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 9
Hardness of nanocrystalline TiO2 thin films doped with terbium 掺铽纳米TiO2薄膜的硬度
D. Wojcieszak, D. Kaczmarek, J. Domaradzki, E. Prociów, F. Placido, S. Lapp, M. Mazur
In this work influence of terbium dopant on hardness of nanocrystalline TiO2 thin films have been investigated. Thin films were manufactured by high energy reactive magnetron sputtering process. The structure of TiO2-matrix was modified by doping with 0.4 at. % of Tb. Undoped matrix had directly after deposition TiO2-rutile structure with 8.7 nm crystallites in size, while doping with Tb results in anatase structure with 11.7 nm crystallite sizes. Hardness of undoped nanocrystalline matrix was 14.3 GPa, which is two-times higher as-compared to standard TiO2 coatings. Incorporation of terbium into the matrix results in hardness decrease down to 10.7 GPa, what was directly connected with smaller density of the anatase as-compared to rutile structure.
本文研究了掺铽对纳米TiO2薄膜硬度的影响。采用高能反应磁控溅射法制备薄膜。通过掺杂0.4 at修饰tio2基体结构。%的Tb。未掺杂的基体沉积后形成晶粒尺寸为8.7 nm的tio2 -金红石结构,而掺杂Tb形成晶粒尺寸为11.7 nm的锐钛矿结构。未掺杂纳米晶基体的硬度为14.3 GPa,是标准TiO2涂层的2倍。在基体中掺入铽导致硬度下降到10.7 GPa,这与锐钛矿比金红石结构密度小直接相关。
{"title":"Hardness of nanocrystalline TiO2 thin films doped with terbium","authors":"D. Wojcieszak, D. Kaczmarek, J. Domaradzki, E. Prociów, F. Placido, S. Lapp, M. Mazur","doi":"10.1109/STYSW.2010.5714178","DOIUrl":"https://doi.org/10.1109/STYSW.2010.5714178","url":null,"abstract":"In this work influence of terbium dopant on hardness of nanocrystalline TiO2 thin films have been investigated. Thin films were manufactured by high energy reactive magnetron sputtering process. The structure of TiO2-matrix was modified by doping with 0.4 at. % of Tb. Undoped matrix had directly after deposition TiO2-rutile structure with 8.7 nm crystallites in size, while doping with Tb results in anatase structure with 11.7 nm crystallite sizes. Hardness of undoped nanocrystalline matrix was 14.3 GPa, which is two-times higher as-compared to standard TiO2 coatings. Incorporation of terbium into the matrix results in hardness decrease down to 10.7 GPa, what was directly connected with smaller density of the anatase as-compared to rutile structure.","PeriodicalId":160376,"journal":{"name":"2010 International Students and Young Scientists Workshop \"Photonics and Microsystems\"","volume":"303 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-06-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124327179","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Synthesis of zinc oxide nanospheres 氧化锌纳米球的合成
H. Tetrycz, M. Byrczek, O. Rac
We present a method for the synthesis of monodispersive ZnO colloidal spheres. The colloidal spheres are made from the solution of zinc acetate and polyethylene glycol (PEG) in the temperature 135°C. The obtained structures were investigated with scanning electron microscope (SEM) and transmission electron microscope. The structures received in the process are spheres with diameter 300 nm-1 µm. ZnO nanospheres have plenty of possibilities of application, for example in gas sensors or as a self-assembled material in photonic crystals.
提出了一种合成单分散氧化锌胶体球的方法。胶体球由醋酸锌和聚乙二醇(PEG)溶液在135℃的温度下制成。用扫描电镜(SEM)和透射电镜(tem)对所得结构进行了表征。在此过程中得到的结构是直径为300 nm-1µm的球体。ZnO纳米球具有广泛的应用前景,例如在气体传感器中或在光子晶体中作为自组装材料。
{"title":"Synthesis of zinc oxide nanospheres","authors":"H. Tetrycz, M. Byrczek, O. Rac","doi":"10.1109/STYSW.2010.5714157","DOIUrl":"https://doi.org/10.1109/STYSW.2010.5714157","url":null,"abstract":"We present a method for the synthesis of monodispersive ZnO colloidal spheres. The colloidal spheres are made from the solution of zinc acetate and polyethylene glycol (PEG) in the temperature 135°C. The obtained structures were investigated with scanning electron microscope (SEM) and transmission electron microscope. The structures received in the process are spheres with diameter 300 nm-1 µm. ZnO nanospheres have plenty of possibilities of application, for example in gas sensors or as a self-assembled material in photonic crystals.","PeriodicalId":160376,"journal":{"name":"2010 International Students and Young Scientists Workshop \"Photonics and Microsystems\"","volume":"120 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-06-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122408572","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
A short introduction of the POF usability lab at Harz University 简要介绍哈茨大学的POF可用性实验室
Ulrich Fischer-Hirchert, Jens-Uwe Just, C. Reinboth
Polymer optical fibers (POF) can be used for a large number of applications, most notably for data transmission. Although POF are used for a lot of medical as well as scientific applications, the technology is - as of yet - almost unknown to the contemporary consumer market.
聚合物光纤(POF)具有广泛的应用前景,尤其是在数据传输方面。虽然POF用于许多医疗和科学应用,但该技术-到目前为止-几乎不为当代消费市场所知。
{"title":"A short introduction of the POF usability lab at Harz University","authors":"Ulrich Fischer-Hirchert, Jens-Uwe Just, C. Reinboth","doi":"10.1109/STYSW.2010.5714164","DOIUrl":"https://doi.org/10.1109/STYSW.2010.5714164","url":null,"abstract":"Polymer optical fibers (POF) can be used for a large number of applications, most notably for data transmission. Although POF are used for a lot of medical as well as scientific applications, the technology is - as of yet - almost unknown to the contemporary consumer market.","PeriodicalId":160376,"journal":{"name":"2010 International Students and Young Scientists Workshop \"Photonics and Microsystems\"","volume":"06 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-06-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131055823","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Investigation of antistatic properties of spectacle lenses with antireflective coatings 抗反射涂层眼镜镜片的抗静电性能研究
M. Mazur, J. Domaradzki, D. Kaczmarek, K. Sieradzka, Jolanta Huk, Marta Karnicka, Lukasz Bielinski
Static electricity arises when two materials in contact are separated after rubbing and the speed of charge movement on surface is slow. Retained electrostatic charge on the surface of materials can create risks and problems in many areas of industry, for example films and light fabrics cling can attract airborne dust or semiconductor devices may be damaged. Therefore electrostatic dissipative and antistatic additives are used in many applications to avoid risks from static electricity. In case of optical lenses antistatic coatings can be used to avoid accumulation of static charge on their surfaces. Quantity of the charge deposited on samples surface and how quickly deposited charge migrated away from the surface was measured using fast response electrostatic fieldmeter. In this work the antistatic properties of optical lenses coated with different antireflective coatings were investigated and their ability to dissipate static electricity was determined. Static dissipation properties were investigated in relation to corona discharge time changes. It has been shown that increasing corona discharge time affected badly on charge decay time of optical lenses.
当接触的两种材料在摩擦后分离,并且电荷在表面的运动速度较慢时,就会产生静电。保留在材料表面的静电电荷会在许多工业领域产生风险和问题,例如薄膜和轻织物粘附会吸引空气中的灰尘或半导体器件可能损坏。因此,静电耗散和抗静电添加剂在许多应用中使用,以避免静电的风险。对于光学镜片,可以使用防静电涂层,以避免在其表面积聚静电荷。利用快速响应静电场计测量了沉积在样品表面的电荷量以及沉积电荷从表面迁移的速度。本文研究了涂有不同防反射涂层的光学透镜的抗静电性能,并测定了它们的静电耗散能力。研究了静电耗散特性与电晕放电时间变化的关系。研究表明,增加电晕放电时间对光学透镜的电荷衰减时间有较大影响。
{"title":"Investigation of antistatic properties of spectacle lenses with antireflective coatings","authors":"M. Mazur, J. Domaradzki, D. Kaczmarek, K. Sieradzka, Jolanta Huk, Marta Karnicka, Lukasz Bielinski","doi":"10.1109/STYSW.2010.5714169","DOIUrl":"https://doi.org/10.1109/STYSW.2010.5714169","url":null,"abstract":"Static electricity arises when two materials in contact are separated after rubbing and the speed of charge movement on surface is slow. Retained electrostatic charge on the surface of materials can create risks and problems in many areas of industry, for example films and light fabrics cling can attract airborne dust or semiconductor devices may be damaged. Therefore electrostatic dissipative and antistatic additives are used in many applications to avoid risks from static electricity. In case of optical lenses antistatic coatings can be used to avoid accumulation of static charge on their surfaces. Quantity of the charge deposited on samples surface and how quickly deposited charge migrated away from the surface was measured using fast response electrostatic fieldmeter. In this work the antistatic properties of optical lenses coated with different antireflective coatings were investigated and their ability to dissipate static electricity was determined. Static dissipation properties were investigated in relation to corona discharge time changes. It has been shown that increasing corona discharge time affected badly on charge decay time of optical lenses.","PeriodicalId":160376,"journal":{"name":"2010 International Students and Young Scientists Workshop \"Photonics and Microsystems\"","volume":"14 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-06-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129635412","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Influence of droplet size and surface preparation of TiO2 on contact angle determination 二氧化钛液滴尺寸和表面制备对接触角测定的影响
M. Maciejewski, D. Wojcieszak, M. Mazur, M. Zielinski, D. Kaczmarek, J. Domaradzki, E. Prociów
Nowadays, much attention is paid to thin films surface wettability parameter. Hydrophobic coatings are well used for water repellant materials, while hydrophilic thin films are often used in anti-fogging applications. Titanium dioxide is one of the best materials for thin film coatings applications, due to its electrical, optical, chemical and physical properties such as photocatalysis, high transparency in visible light or high hardness. In this paper, surface wettability of TiO2 thin films was researched. Influence of droplet size and sample preparation method on calculation of contact angle was investigated. It was concluded, that pre- measurement sample handling as well as measurement procedure had huge impact on obtained results.
目前,薄膜表面润湿性参数的研究备受关注。疏水涂层很好地用于防水材料,而亲水薄膜通常用于防雾应用。二氧化钛是薄膜涂层应用的最佳材料之一,因为它具有电学,光学,化学和物理性质,如光催化,在可见光下的高透明度或高硬度。本文对TiO2薄膜的表面润湿性进行了研究。研究了液滴尺寸和样品制备方法对接触角计算的影响。结果表明,测量前的样品处理和测量程序对测量结果有很大的影响。
{"title":"Influence of droplet size and surface preparation of TiO2 on contact angle determination","authors":"M. Maciejewski, D. Wojcieszak, M. Mazur, M. Zielinski, D. Kaczmarek, J. Domaradzki, E. Prociów","doi":"10.1109/STYSW.2010.5714179","DOIUrl":"https://doi.org/10.1109/STYSW.2010.5714179","url":null,"abstract":"Nowadays, much attention is paid to thin films surface wettability parameter. Hydrophobic coatings are well used for water repellant materials, while hydrophilic thin films are often used in anti-fogging applications. Titanium dioxide is one of the best materials for thin film coatings applications, due to its electrical, optical, chemical and physical properties such as photocatalysis, high transparency in visible light or high hardness. In this paper, surface wettability of TiO2 thin films was researched. Influence of droplet size and sample preparation method on calculation of contact angle was investigated. It was concluded, that pre- measurement sample handling as well as measurement procedure had huge impact on obtained results.","PeriodicalId":160376,"journal":{"name":"2010 International Students and Young Scientists Workshop \"Photonics and Microsystems\"","volume":"4 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-06-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128660989","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Effect of acidic environment on the shape and size of the 1D nano-and microstructures of zinc oxide 酸性环境对氧化锌一维纳米微结构形状和尺寸的影响
M. Fiedot, H. Teterycz, P. Halek, M. Malewicz
In this paper we presented influence of acidity on nanopowder structure prepared in reaction of precipitation. Zinc oxide was prepared from zinc nitrate and sodium hydroxide with the participation of the microwave field. The investigation revealed that the grain size of zinc oxide and their microstructure significantly depends on the solution pH. The microstructures obtained in the more alkaline reaction conditions have greater the aspect ratio.
研究了酸度对沉淀法制备的纳米粉体结构的影响。以硝酸锌和氢氧化钠为原料,在微波场作用下制备氧化锌。研究发现,氧化锌的晶粒尺寸及其微观结构与溶液ph有显著的关系,在碱性越强的反应条件下得到的微观结构具有更大的纵横比。
{"title":"Effect of acidic environment on the shape and size of the 1D nano-and microstructures of zinc oxide","authors":"M. Fiedot, H. Teterycz, P. Halek, M. Malewicz","doi":"10.1109/STYSW.2010.5714167","DOIUrl":"https://doi.org/10.1109/STYSW.2010.5714167","url":null,"abstract":"In this paper we presented influence of acidity on nanopowder structure prepared in reaction of precipitation. Zinc oxide was prepared from zinc nitrate and sodium hydroxide with the participation of the microwave field. The investigation revealed that the grain size of zinc oxide and their microstructure significantly depends on the solution pH. The microstructures obtained in the more alkaline reaction conditions have greater the aspect ratio.","PeriodicalId":160376,"journal":{"name":"2010 International Students and Young Scientists Workshop \"Photonics and Microsystems\"","volume":"47 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-06-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128230114","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Application of AFM microscope as a nanolithography tool 原子力显微镜作为纳米光刻工具的应用
M. Ramiączek-Krasowska, J. Prażmowska, A. Szyszka, R. Paszkiewicz, M. Tlaczala
The lithography as a basic process determines properties of microelectronic device. The main area of investigation is the resolution of the lithography operation. The resolution of optical lithography is insufficient for creation of gate electrodes in dedicated to high frequency operation transistors. The scaling ability causes increased interest in using of atomic force microscope (AFM) as nanolithography tool. In the paper, the results of the nanoscratching lithography by using AFM are presented. In this method a pattern is created in mechanical interaction of the AFM tip and the samples surface.
光刻工艺是决定微电子器件性能的基本工艺。调查的主要领域是光刻操作的分辨率。光学光刻的分辨率不足以制造专用于高频操作晶体管的栅电极。原子力显微镜(AFM)作为纳米光刻工具的应用越来越受到人们的关注。本文介绍了利用原子力显微镜进行纳米刻蚀的结果。该方法在AFM针尖与样品表面的力学相互作用中产生了一个图案。
{"title":"Application of AFM microscope as a nanolithography tool","authors":"M. Ramiączek-Krasowska, J. Prażmowska, A. Szyszka, R. Paszkiewicz, M. Tlaczala","doi":"10.1109/STYSW.2010.5714172","DOIUrl":"https://doi.org/10.1109/STYSW.2010.5714172","url":null,"abstract":"The lithography as a basic process determines properties of microelectronic device. The main area of investigation is the resolution of the lithography operation. The resolution of optical lithography is insufficient for creation of gate electrodes in dedicated to high frequency operation transistors. The scaling ability causes increased interest in using of atomic force microscope (AFM) as nanolithography tool. In the paper, the results of the nanoscratching lithography by using AFM are presented. In this method a pattern is created in mechanical interaction of the AFM tip and the samples surface.","PeriodicalId":160376,"journal":{"name":"2010 International Students and Young Scientists Workshop \"Photonics and Microsystems\"","volume":"2 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-06-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127813910","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Sheet resistance and optical properties of ITO thin films deposited by magnetron sputtering with different O2/Ar flow ratio 不同O2/Ar流量比下磁控溅射ITO薄膜的片电阻和光学性能
M. Mazur, J. Domaradzki, D. Kaczmarek, S. Moh, F. Placido
Transparent conducting indium-tin oxide (ITO) thin films play a very important role in the field of optoelectronic devices such as photovoltaic cells and flat panel display devices. ITO films display low electrical resistance and high transmittance in the visible range of the optical spectrum [1].
透明导电氧化铟锡(ITO)薄膜在光伏电池、平板显示器件等光电器件领域发挥着非常重要的作用。ITO薄膜在可见光范围内电阻低,透光率高[1]。
{"title":"Sheet resistance and optical properties of ITO thin films deposited by magnetron sputtering with different O2/Ar flow ratio","authors":"M. Mazur, J. Domaradzki, D. Kaczmarek, S. Moh, F. Placido","doi":"10.1109/STYSW.2010.5714168","DOIUrl":"https://doi.org/10.1109/STYSW.2010.5714168","url":null,"abstract":"Transparent conducting indium-tin oxide (ITO) thin films play a very important role in the field of optoelectronic devices such as photovoltaic cells and flat panel display devices. ITO films display low electrical resistance and high transmittance in the visible range of the optical spectrum [1].","PeriodicalId":160376,"journal":{"name":"2010 International Students and Young Scientists Workshop \"Photonics and Microsystems\"","volume":"20 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-06-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125625161","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
期刊
2010 International Students and Young Scientists Workshop "Photonics and Microsystems"
全部 Acc. Chem. Res. ACS Applied Bio Materials ACS Appl. Electron. Mater. ACS Appl. Energy Mater. ACS Appl. Mater. Interfaces ACS Appl. Nano Mater. ACS Appl. Polym. Mater. ACS BIOMATER-SCI ENG ACS Catal. ACS Cent. Sci. ACS Chem. Biol. ACS Chemical Health & Safety ACS Chem. Neurosci. ACS Comb. Sci. ACS Earth Space Chem. ACS Energy Lett. ACS Infect. Dis. ACS Macro Lett. ACS Mater. Lett. ACS Med. Chem. Lett. ACS Nano ACS Omega ACS Photonics ACS Sens. ACS Sustainable Chem. Eng. ACS Synth. Biol. Anal. Chem. BIOCHEMISTRY-US Bioconjugate Chem. BIOMACROMOLECULES Chem. Res. Toxicol. Chem. Rev. Chem. Mater. CRYST GROWTH DES ENERG FUEL Environ. Sci. Technol. Environ. Sci. Technol. Lett. Eur. J. Inorg. Chem. IND ENG CHEM RES Inorg. Chem. J. Agric. Food. Chem. J. Chem. Eng. Data J. Chem. Educ. J. Chem. Inf. Model. J. Chem. Theory Comput. J. Med. Chem. J. Nat. Prod. J PROTEOME RES J. Am. Chem. Soc. LANGMUIR MACROMOLECULES Mol. Pharmaceutics Nano Lett. Org. Lett. ORG PROCESS RES DEV ORGANOMETALLICS J. Org. Chem. J. Phys. Chem. J. Phys. Chem. A J. Phys. Chem. B J. Phys. Chem. C J. Phys. Chem. Lett. Analyst Anal. Methods Biomater. Sci. Catal. Sci. Technol. Chem. Commun. Chem. Soc. Rev. CHEM EDUC RES PRACT CRYSTENGCOMM Dalton Trans. Energy Environ. Sci. ENVIRON SCI-NANO ENVIRON SCI-PROC IMP ENVIRON SCI-WAT RES Faraday Discuss. Food Funct. Green Chem. Inorg. Chem. Front. Integr. Biol. J. Anal. At. Spectrom. J. Mater. Chem. A J. Mater. Chem. B J. Mater. Chem. C Lab Chip Mater. Chem. Front. Mater. Horiz. MEDCHEMCOMM Metallomics Mol. Biosyst. Mol. Syst. Des. Eng. Nanoscale Nanoscale Horiz. Nat. Prod. Rep. New J. Chem. Org. Biomol. Chem. Org. Chem. Front. PHOTOCH PHOTOBIO SCI PCCP Polym. Chem.
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
0
微信
客服QQ
Book学术公众号 扫码关注我们
反馈
×
意见反馈
请填写您的意见或建议
请填写您的手机或邮箱
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
现在去查看 取消
×
提示
确定
Book学术官方微信
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术
文献互助 智能选刊 最新文献 互助须知 联系我们:info@booksci.cn
Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。
Copyright © 2023 Book学术 All rights reserved.
ghs 京公网安备 11010802042870号 京ICP备2023020795号-1