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Silicon crystal growth and epitaxial layer deposition for VLSI devices 超大规模集成电路器件的硅晶体生长和外延层沉积
Pub Date : 1986-07-08 DOI: 10.1002/J.1538-7305.1986.TB00468.X
W. Davis, Robert J. Lavigna, D. L. Rehrig, Raymond E. Reusser, George Williams
Silicon for microelectronic devices is prepared by a complex process that converts polycrystalline material into a single crystal ingot of silicon weighing as much as 40 kilograms. The crystal must conform to precise mechanical, electrical, chemical, and crystallographic standards. The crystal ingot is sliced into wafers which are polished and covered with an epitaxial layer having the same crystal structure as the wafer but different electrical properties. Understanding and controlling the growth processes involved in producing the single-crystal ingot and the epitaxial layer is crucial to manufacturing the high-quality starting material for today's very large scale integrated circuits.
用于微电子器件的硅是通过一个复杂的过程制备的,该过程将多晶材料转化为重达40公斤的单晶硅锭。晶体必须符合精确的机械、电气、化学和晶体学标准。晶锭被切成晶圆,晶圆被抛光并覆盖有与晶圆具有相同晶体结构但电性能不同的外延层。了解和控制生产单晶铸锭和外延层的生长过程对于制造当今超大规模集成电路的高质量起始材料至关重要。
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引用次数: 1
Coherent lightwave communications 相干光波通信
Pub Date : 1985-12-01 DOI: 10.1117/12.967602
J. Salz
The chief objective of this paper is to develop a fundamental understanding of the effects of laser phase noise on the performance of coherent lightwave communication systems. A comprehensive treatment applicable to a wide variety of coherent receiver designs under a broad range of conditions is provided. Our models and analytical tools are developed in sufficient detail to encompass a broad range of applications. Formulas are derived for the bit error rate in homodyne and heterodyne Phase Shift Keying (PSK), Differential Phase Shift Keying (DPSK), Frequency Shift Keying (FSK) and on-off keying. Estimates are provided of the penalties accrued due to phase noise. Based on detailed mathematical analysis and estimates, we made several findings. Near quantum-limited receiver sensitivity can be achieved with PSK using homodyne detection only at signaling rates 3000 times greater than the laser linewidth. A receiver sensitivity 3 to 6 decibels poorer than the quantum limit can be achieved with heterodyne rather than homodyne detection. DPSK, for example, can operate at rates only 300 times greater than the laser linewidth. At lower rates, FSK is an attractive candidate. It can be designed to be extremely tolerant of phase noise by using wide frequency deviations.
本文的主要目的是对激光相位噪声对相干光波通信系统性能的影响有一个基本的认识。在广泛的条件下提供了适用于各种相干接收器设计的综合处理。我们的模型和分析工具开发的足够详细,以涵盖广泛的应用。推导了纯差和外差相移键控(PSK)、差分相移键控(DPSK)、频移键控(FSK)和开关键控的误码率公式。给出了由于相位噪声而产生的惩罚的估计。基于详细的数学分析和估计,我们有几个发现。近量子限制接收器灵敏度可以实现PSK使用纯差检测只有在信号速率大于激光线宽3000倍。接收机灵敏度比量子极限差3到6分贝可以通过外差而不是内差检测来实现。例如,DPSK的工作速率仅为激光线宽的300倍。在较低的利率下,FSK是一个有吸引力的候选人。通过使用宽频率偏差,它可以被设计成对相位噪声具有极大的容忍度。
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引用次数: 193
Design of the S system for data analysis 设计S系统进行数据分析
Pub Date : 1984-05-01 DOI: 10.1145/358189.358078
R. A. Becker, J. Chambers
S is a language and system for interactive data analysis and graphics. It emphasizes interactive analysis and graphics, ease of use, flexibility, and extensibility. While sharing many characteristics with other statistical systems, S differs significantly in its design goals, its implementation, and the way it is used. This paper presents some of the design concepts and implementation techniques in S and relates these general ideas in computing to the specific design goals for S and to other statistical systems.
S是一种交互式数据分析和图形化的语言和系统。它强调交互式分析和图形、易用性、灵活性和可扩展性。虽然S与其他统计系统有许多相同的特征,但它在设计目标、实现和使用方式上有很大的不同。本文介绍了S中的一些设计概念和实现技术,并将这些计算中的一般思想与S和其他统计系统的具体设计目标联系起来。
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引用次数: 25
AT&T innovation briefs AT&T创新简报
Pub Date : 1900-01-01 DOI: 10.15325/atttj.1996.6772885
Innovation Briefs are summaries of recent discoveries and developments within AT&T Bell Laboratories. Patents To Build On call attention to AT&T patents that may have commercial potential. Those wishing further information, or AT&T readers who would like to contribute future items, are encouraged to contact the AT&T Technical Journal editor.
创新简报是AT&T贝尔实验室最近的发现和发展的总结。对AT&T可能具有商业潜力的专利提出了关注。那些希望获得更多信息的人,或者愿意贡献未来项目的AT&T读者,鼓励与AT&T技术期刊编辑联系。
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引用次数: 0
AT&T innovation briefs AT&T创新简报
Pub Date : 1900-01-01 DOI: 10.1002/j.1538-7305.1993.tb00532.x
The briefs in this section are summaries of recent discoveries and developments within AT&T Bell Laboratories. AT&T readers who would like to contribute future items, and readers who would like further information as well, are encouraged to contact the AT&T Technical Journal editor.
本节的摘要是AT&T贝尔实验室最近的发现和发展的总结。希望提供未来项目的AT&T读者,以及希望获得更多信息的读者,可以联系AT&T技术期刊编辑。
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引用次数: 0
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AT&T Technical Journal
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