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Corrosion Control in Military Assets 军事资产腐蚀控制
Pub Date : 2016-12-01 DOI: 10.1557/OPL.2016.88
M. Schorr, B. Valdez, R. Salinas, Rogelio Ramos, N. Nedey, M. Curiel
The combat fields of modern wars, including the struggle against global terrorism, are localized in diverse, harsh regions: tropical, desert, artic, marine, with varied weather conditions, which adversely affect the corrosion performance of the equipment and facilities involved. For the sake of brevity, three groups of military mobile and fixed equipment and structures are dealt with: armored ground wheeled vehicles; naval aluminum vessels, and buildings and facilities for providing dwellings, weapons storage and services to the armed forces. They are usually made from carbon steel, aluminum alloys and reinforced concrete, because of their useful properties: high strength, easy availability and low cost. However, due to their limited corrosion resistance they should be protected by coatings (including military coatings), but primarily paint; cathodic protection and corrosion inhibitors. All these systems suffer from several types of localized corrosion and degradation: galvanic, pitting, intergranular, dealloying, cavitation, erosion, stress cracking, UV effects in plastics and organic coatings. The military assets require the implementation of corrosion control methods and techniques through all their stages: design, construction, installation and operation. Typical cases of corrosion will be presented based on the authors experience and knowledge.
现代战争的作战领域,包括打击全球恐怖主义的斗争,都局限于不同的恶劣地区:热带、沙漠、北极、海洋,气候条件多变,这对所涉及的设备和设施的腐蚀性能产生了不利影响。为简洁起见,本文将讨论三组军用移动和固定设备和结构:装甲地面轮式车辆;海军铝制船只,以及为武装部队提供住所、武器储存和服务的建筑物和设施。它们通常由碳钢,铝合金和钢筋混凝土制成,因为它们具有有用的特性:高强度,易于获得和低成本。然而,由于它们的耐腐蚀性有限,它们应该由涂料(包括军用涂料)保护,但主要是油漆;阴极保护和缓蚀剂。所有这些系统都遭受几种类型的局部腐蚀和降解:电偶、点蚀、晶间、合金化、空化、侵蚀、应力开裂、塑料和有机涂层中的紫外线效应。军事资产需要在其所有阶段实施腐蚀控制方法和技术:设计,施工,安装和操作。根据作者的经验和知识,将介绍典型的腐蚀案例。
{"title":"Corrosion Control in Military Assets","authors":"M. Schorr, B. Valdez, R. Salinas, Rogelio Ramos, N. Nedey, M. Curiel","doi":"10.1557/OPL.2016.88","DOIUrl":"https://doi.org/10.1557/OPL.2016.88","url":null,"abstract":"The combat fields of modern wars, including the struggle against global terrorism, are localized in diverse, harsh regions: tropical, desert, artic, marine, with varied weather conditions, which adversely affect the corrosion performance of the equipment and facilities involved. For the sake of brevity, three groups of military mobile and fixed equipment and structures are dealt with: armored ground wheeled vehicles; naval aluminum vessels, and buildings and facilities for providing dwellings, weapons storage and services to the armed forces. They are usually made from carbon steel, aluminum alloys and reinforced concrete, because of their useful properties: high strength, easy availability and low cost. However, due to their limited corrosion resistance they should be protected by coatings (including military coatings), but primarily paint; cathodic protection and corrosion inhibitors. All these systems suffer from several types of localized corrosion and degradation: galvanic, pitting, intergranular, dealloying, cavitation, erosion, stress cracking, UV effects in plastics and organic coatings. The military assets require the implementation of corrosion control methods and techniques through all their stages: design, construction, installation and operation. Typical cases of corrosion will be presented based on the authors experience and knowledge.","PeriodicalId":18884,"journal":{"name":"MRS Proceedings","volume":"5 1","pages":"1-8"},"PeriodicalIF":0.0,"publicationDate":"2016-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"87817724","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Instrumented System for Analysis of Concrete Resistivity 混凝土电阻率分析仪器系统
Pub Date : 2016-12-01 DOI: 10.1557/OPL.2016.93
Karen Blanco, Víctor Manuel Moo Yam, T. P. López, J. R. L. Jiménez
As is well known, the corrosion of embedded steel reinforced depends strongly of the concrete resistivity, which is related directly with the water contained into its porous network. Environment plays an important role on resistivity, due to have a direct correspondence with the relative humidity and temperature. In these terms, ingress or output of water is favored or hampered by the environmental parameters, as well as its fluctuations. This work presents a proposal of instrumented system to generate a map of electrical resistivity at concrete samples by using superficial and embedded electrodes. Mathematical analysis of equivalent circuit revealed the importance of the impedance of electrodes utilized, to simplify measures. Concrete samples were exposed to different relative humidity focused to try to obtain the relation between relative humidity and resistivity. An array of two electrodes distributed in a matrix was manufactured to apply a signal of direct current at first electrode and measure the resultant current at second electrode. The system applies a programmed sequence of switch to turn on and turn off to realize measurements over established zone and, in this form, allows identify zones with potentials gradients. Also, do easy the monitoring of concrete resistivity evolution in function of time and humidity conditions.
众所周知,预埋钢筋的腐蚀在很大程度上取决于混凝土的电阻率,而电阻率与混凝土的多孔网络中所含的水直接相关。环境对电阻率起着重要的作用,因为它与相对湿度和温度有直接对应关系。在这些条件下,水的进入或输出受到环境参数及其波动的有利或阻碍。本工作提出了一种仪器系统的建议,通过使用表面和嵌入电极来生成混凝土样品的电阻率图。等效电路的数学分析揭示了电极阻抗对简化测量的重要性。将混凝土试样集中暴露在不同相对湿度下,试图获得相对湿度与电阻率之间的关系。制造了一种在矩阵中分布的两个电极阵列,在第一电极上施加直流信号,并在第二电极上测量合成电流。该系统应用一个可编程的开关序列来打开和关闭,以实现对既定区域的测量,并且在这种形式下,可以识别具有电位梯度的区域。同时,对混凝土电阻率随时间和湿度的变化规律进行监测。
{"title":"Instrumented System for Analysis of Concrete Resistivity","authors":"Karen Blanco, Víctor Manuel Moo Yam, T. P. López, J. R. L. Jiménez","doi":"10.1557/OPL.2016.93","DOIUrl":"https://doi.org/10.1557/OPL.2016.93","url":null,"abstract":"As is well known, the corrosion of embedded steel reinforced depends strongly of the concrete resistivity, which is related directly with the water contained into its porous network. Environment plays an important role on resistivity, due to have a direct correspondence with the relative humidity and temperature. In these terms, ingress or output of water is favored or hampered by the environmental parameters, as well as its fluctuations. This work presents a proposal of instrumented system to generate a map of electrical resistivity at concrete samples by using superficial and embedded electrodes. Mathematical analysis of equivalent circuit revealed the importance of the impedance of electrodes utilized, to simplify measures. Concrete samples were exposed to different relative humidity focused to try to obtain the relation between relative humidity and resistivity. An array of two electrodes distributed in a matrix was manufactured to apply a signal of direct current at first electrode and measure the resultant current at second electrode. The system applies a programmed sequence of switch to turn on and turn off to realize measurements over established zone and, in this form, allows identify zones with potentials gradients. Also, do easy the monitoring of concrete resistivity evolution in function of time and humidity conditions.","PeriodicalId":18884,"journal":{"name":"MRS Proceedings","volume":"58 1","pages":"1-6"},"PeriodicalIF":0.0,"publicationDate":"2016-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"86119377","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Effect of Stirring Speed in Hot Mixing Process of Modified Asphalt with SBS Copolymer on Polymeric Distribution and its Rheological Properties SBS共聚物改性沥青热混过程中搅拌速度对聚合物分布及流变性能的影响
Pub Date : 2016-12-01 DOI: 10.1557/OPL.2016.5
E. García, R. H. Nájera
The current work reports the effect of particle size on the rheological behavior of polymer modified asphalt PMA. The modified asphalt was generated with AC-20 asphalt precursor provided by Pemex Salamanca and Solprene® 416 provided by Dynasol Mexico. Solprene® 416 is a SBS star-type copolymer with 4 poly(b-styrene-b-butadiene) arms and Mw = 2.36X105 g/gmole. Modified asphalt samples were prepared with 3 wt % of SBS via hot mix process. Mixing time and temperature were kept constant at 4h and 180 °C. This study also varied the agitation in the mixing process: 500, 1000 and 1500 rpm. All PMAs shown sphere-shaped polymer particles as observed via fluorescent microscopy using a Carl Zeiss KS-300 system. Base asphalt and PMAs were also characterized through rheological measurements using a TA Instruments AR-G2 rheometer. Shear viscosity (η) and tan δ data shown that the flow resistance of the PMA increases as the size its polymer particles decreases. Since the size of the polymer particles decreases with the increase of the stirring speed, it is concluded that the stirring speed of the process determines the size of the polymer particles and so the mechanical resistance of the PMA.
本文报道了聚合物改性沥青聚丙烯酸甲酯的粒径对其流变行为的影响。改性沥青由Pemex Salamanca提供的AC-20沥青前驱体和Dynasol Mexico提供的Solprene®416合成。Solprene®416是一种SBS星型共聚物,具有4个聚(b-苯乙烯-b-丁二烯)臂,分子量为2.36 × 105克/摩尔。采用热混合法制备了SBS含量为3wt %的改性沥青样品。混合时间和温度保持在4h和180℃不变。本研究还改变了混合过程中的搅拌:500、1000和1500 rpm。通过卡尔蔡司KS-300系统的荧光显微镜观察,所有pma均显示球形聚合物颗粒。基础沥青和pma也通过使用TA Instruments AR-G2流变仪进行流变学测量来表征。剪切粘度(η)和tan δ数据表明,PMA的流动阻力随着聚合物颗粒尺寸的减小而增大。由于聚合物颗粒的尺寸随着搅拌速度的增加而减小,因此可以得出结论,搅拌速度决定了聚合物颗粒的尺寸,从而决定了PMA的机械阻力。
{"title":"Effect of Stirring Speed in Hot Mixing Process of Modified Asphalt with SBS Copolymer on Polymeric Distribution and its Rheological Properties","authors":"E. García, R. H. Nájera","doi":"10.1557/OPL.2016.5","DOIUrl":"https://doi.org/10.1557/OPL.2016.5","url":null,"abstract":"The current work reports the effect of particle size on the rheological behavior of polymer modified asphalt PMA. The modified asphalt was generated with AC-20 asphalt precursor provided by Pemex Salamanca and Solprene® 416 provided by Dynasol Mexico. Solprene® 416 is a SBS star-type copolymer with 4 poly(b-styrene-b-butadiene) arms and Mw = 2.36X105 g/gmole. Modified asphalt samples were prepared with 3 wt % of SBS via hot mix process. Mixing time and temperature were kept constant at 4h and 180 °C. This study also varied the agitation in the mixing process: 500, 1000 and 1500 rpm. All PMAs shown sphere-shaped polymer particles as observed via fluorescent microscopy using a Carl Zeiss KS-300 system. Base asphalt and PMAs were also characterized through rheological measurements using a TA Instruments AR-G2 rheometer. Shear viscosity (η) and tan δ data shown that the flow resistance of the PMA increases as the size its polymer particles decreases. Since the size of the polymer particles decreases with the increase of the stirring speed, it is concluded that the stirring speed of the process determines the size of the polymer particles and so the mechanical resistance of the PMA.","PeriodicalId":18884,"journal":{"name":"MRS Proceedings","volume":"32 1","pages":"1-6"},"PeriodicalIF":0.0,"publicationDate":"2016-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"86720242","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 8
Investigating Anvil Alignment and Anvil Roughness on Flow Pattern Development in High-Pressure Torsion 高压扭转中砧对和砧粗糙度对流型发展的影响研究
Pub Date : 2016-07-07 DOI: 10.1557/OPL.2016.79
Yi Huang, M. Kawasaki, T. Langdon
High-pressure torsion (HPT) is a processing technique in which samples are subjected to a high pressure and torsional straining. Anvil alignment and anvil roughness are two important factors related to the successful application of the HPT processing technique. Using a two-phase duplex stainless steel as a model material, experiments were conducted by placing the anvils in different amounts of initial misalignment. Experiments show that the flow patterns (the development of double-swirl patterns) in HPT are dependent upon the alignment of the anvils within the HPT facility. Through carefully designed experiments, it is shown that the presence of a double-swirl is a feature of HPT processing when the initial positions of the anvils have a small lateral misalignment. The effect of the double-swirl patterns on the hardness evolution was also evaluated quantitatively. By comparing the flow patterns developed on the disc upper surface using both rough and smooth anvils with a fixed anvil misalignment, it was demonstrated that there are some differences in the flow patterns which are dependent upon the anvil surface roughness.
高压扭转(HPT)是一种将样品置于高压和扭转应变下的加工技术。顶砧对准和顶砧粗糙度是影响HPT加工技术成功应用的两个重要因素。以两相双相不锈钢为模型材料,通过放置不同初始偏差量的砧进行了实验。实验表明,HPT中的流动模式(双旋流模式的发展)依赖于HPT设备内砧的排列。通过精心设计的实验,表明双旋流的存在是HPT加工的一个特征,当砧的初始位置有一个小的横向错位。定量评价了双旋流模式对硬度演变的影响。通过比较在固定砧不对准的情况下,使用粗糙砧和光滑砧在圆盘上表面上形成的流动模式,证明了流动模式存在一些差异,这取决于砧表面粗糙度。
{"title":"Investigating Anvil Alignment and Anvil Roughness on Flow Pattern Development in High-Pressure Torsion","authors":"Yi Huang, M. Kawasaki, T. Langdon","doi":"10.1557/OPL.2016.79","DOIUrl":"https://doi.org/10.1557/OPL.2016.79","url":null,"abstract":"High-pressure torsion (HPT) is a processing technique in which samples are subjected to a high pressure and torsional straining. Anvil alignment and anvil roughness are two important factors related to the successful application of the HPT processing technique. Using a two-phase duplex stainless steel as a model material, experiments were conducted by placing the anvils in different amounts of initial misalignment. Experiments show that the flow patterns (the development of double-swirl patterns) in HPT are dependent upon the alignment of the anvils within the HPT facility. Through carefully designed experiments, it is shown that the presence of a double-swirl is a feature of HPT processing when the initial positions of the anvils have a small lateral misalignment. The effect of the double-swirl patterns on the hardness evolution was also evaluated quantitatively. By comparing the flow patterns developed on the disc upper surface using both rough and smooth anvils with a fixed anvil misalignment, it was demonstrated that there are some differences in the flow patterns which are dependent upon the anvil surface roughness.","PeriodicalId":18884,"journal":{"name":"MRS Proceedings","volume":"109 1","pages":""},"PeriodicalIF":0.0,"publicationDate":"2016-07-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"80703534","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Evaluation of Single Layer Hafnium Nitride Coated Tool for Metal Cutting 金属切削用单层氮化铪涂层刀具的评价
Pub Date : 2016-01-01 DOI: 10.1557/OPL.2016.91
J. Devia, W. A. Chaparro, J. Lizarazo
{"title":"Evaluation of Single Layer Hafnium Nitride Coated Tool for Metal Cutting","authors":"J. Devia, W. A. Chaparro, J. Lizarazo","doi":"10.1557/OPL.2016.91","DOIUrl":"https://doi.org/10.1557/OPL.2016.91","url":null,"abstract":"","PeriodicalId":18884,"journal":{"name":"MRS Proceedings","volume":"10 1","pages":""},"PeriodicalIF":0.0,"publicationDate":"2016-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"81917847","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 5
Synthesis of SBA-15/MCM-41 bimodal mesoporous silica SBA-15/MCM-41双峰介孔二氧化硅的合成
Pub Date : 2016-01-01 DOI: 10.1557/OPL.2016.47
L. Jaramillo, W. Henao, E. Pabón-Gelves
{"title":"Synthesis of SBA-15/MCM-41 bimodal mesoporous silica","authors":"L. Jaramillo, W. Henao, E. Pabón-Gelves","doi":"10.1557/OPL.2016.47","DOIUrl":"https://doi.org/10.1557/OPL.2016.47","url":null,"abstract":"","PeriodicalId":18884,"journal":{"name":"MRS Proceedings","volume":"35 1","pages":""},"PeriodicalIF":0.0,"publicationDate":"2016-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"80924539","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Structural and Optical Properties of Co-doped HfO2 Multi-layer Deposited by Spray Pyrolysis Technique 喷雾热解法制备共掺杂HfO2多层膜的结构和光学性质
Pub Date : 2016-01-01 DOI: 10.1557/OPL.2016.50
R. Radámes, J. Mendoza, Z. A. Valderrama, L. Lartundo-Rojas, J. A. Góngora
{"title":"Structural and Optical Properties of Co-doped HfO2 Multi-layer Deposited by Spray Pyrolysis Technique","authors":"R. Radámes, J. Mendoza, Z. A. Valderrama, L. Lartundo-Rojas, J. A. Góngora","doi":"10.1557/OPL.2016.50","DOIUrl":"https://doi.org/10.1557/OPL.2016.50","url":null,"abstract":"","PeriodicalId":18884,"journal":{"name":"MRS Proceedings","volume":"9 1","pages":""},"PeriodicalIF":0.0,"publicationDate":"2016-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"90241923","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Superficial and electrical characterization of thin films based on Chitosan/polypyrrole/MWCNT 壳聚糖/聚吡咯/纳米碳纳米管薄膜的表面和电学特性
Pub Date : 2016-01-01 DOI: 10.1557/OPL.2016.76
A. Olarte-Paredes, R. Salgado-Delgado, A. Salgado-Delgado, E. Rubio-Rosas, E. García-Hernández, Z. Vargas-Galarza
{"title":"Superficial and electrical characterization of thin films based on Chitosan/polypyrrole/MWCNT","authors":"A. Olarte-Paredes, R. Salgado-Delgado, A. Salgado-Delgado, E. Rubio-Rosas, E. García-Hernández, Z. Vargas-Galarza","doi":"10.1557/OPL.2016.76","DOIUrl":"https://doi.org/10.1557/OPL.2016.76","url":null,"abstract":"","PeriodicalId":18884,"journal":{"name":"MRS Proceedings","volume":"288 1","pages":""},"PeriodicalIF":0.0,"publicationDate":"2016-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"76902073","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Thermal and mechanical properties of nanocomposites based on polyethylene and Mg/Al hydrotalcite 聚乙烯/镁铝水滑石纳米复合材料的热力学性能
Pub Date : 2016-01-01 DOI: 10.1557/OPL.2016.48
L. Jaramillo, J. Posada-Correa, E. Pabón-Gelves, E. Ramos-Ramírez, N. Gutiérrez-Ortega
{"title":"Thermal and mechanical properties of nanocomposites based on polyethylene and Mg/Al hydrotalcite","authors":"L. Jaramillo, J. Posada-Correa, E. Pabón-Gelves, E. Ramos-Ramírez, N. Gutiérrez-Ortega","doi":"10.1557/OPL.2016.48","DOIUrl":"https://doi.org/10.1557/OPL.2016.48","url":null,"abstract":"","PeriodicalId":18884,"journal":{"name":"MRS Proceedings","volume":"98 2","pages":""},"PeriodicalIF":0.0,"publicationDate":"2016-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"72588054","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Stress Reduction of Amorphous Silicon Deposited by PECVD PECVD沉积非晶硅的应力降低研究
Pub Date : 2016-01-01 DOI: 10.1557/OPL.2016.26
César Pérez, C. Reyes-Betanzo
Amorphous silicon (α-Si) was deposited on glass substrates by PECVD at different deposition conditions in order to characterize the residual stress on the film. Subsequently, a thermal-annealing was applied for different times at 400 °C in a N 2 atmosphere, aiming to reduce the stress in the films. The deposition power was between 15 and 30 W at 13.56 MHz, the pressure in the chamber was adjusted in a range from 600 to 900 mTorr, and the temperature was varied from 140 to 200 °C. The stress was determined by using the Stoney equation, measuring the curvature and thickness of the α-Si films with a stylus profilometer. A deposition rate between 7-24 nm/min was obtained, and the time for thermal-annealing needed to reduce the stress was reduced from 10 to 2-4 h, obtaining a minimum compressive stress of 17 MPa. With this value of stress, it was possible to use the α-Si as masking material for wet etching of glass during the manufacturing of microfluidic devices, in order to obtain microstructures in the glass with 150 μm in depth.
采用PECVD法在不同沉积条件下将非晶硅(α-Si)沉积在玻璃衬底上,以表征薄膜上的残余应力。随后,在氮气气氛下,在400°C下进行不同次数的热退火,旨在降低薄膜中的应力。在13.56 MHz下,沉积功率在15 ~ 30 W之间,腔内压力在600 ~ 900 mTorr之间调节,温度在140 ~ 200℃之间变化。利用Stoney方程确定了α-Si薄膜的应力,并用触针轮廓仪测量了α-Si薄膜的曲率和厚度。获得了7 ~ 24 nm/min的沉积速率,降低应力所需的热退火时间从10 ~ 2 ~ 4 h缩短至17 MPa。在此应力值下,可以利用α-Si作为掩蔽材料在微流控器件制造过程中湿法蚀刻玻璃,从而获得深度为150 μm的玻璃微结构。
{"title":"Stress Reduction of Amorphous Silicon Deposited by PECVD","authors":"César Pérez, C. Reyes-Betanzo","doi":"10.1557/OPL.2016.26","DOIUrl":"https://doi.org/10.1557/OPL.2016.26","url":null,"abstract":"Amorphous silicon (α-Si) was deposited on glass substrates by PECVD at different deposition conditions in order to characterize the residual stress on the film. Subsequently, a thermal-annealing was applied for different times at 400 °C in a N 2 atmosphere, aiming to reduce the stress in the films. The deposition power was between 15 and 30 W at 13.56 MHz, the pressure in the chamber was adjusted in a range from 600 to 900 mTorr, and the temperature was varied from 140 to 200 °C. The stress was determined by using the Stoney equation, measuring the curvature and thickness of the α-Si films with a stylus profilometer. A deposition rate between 7-24 nm/min was obtained, and the time for thermal-annealing needed to reduce the stress was reduced from 10 to 2-4 h, obtaining a minimum compressive stress of 17 MPa. With this value of stress, it was possible to use the α-Si as masking material for wet etching of glass during the manufacturing of microfluidic devices, in order to obtain microstructures in the glass with 150 μm in depth.","PeriodicalId":18884,"journal":{"name":"MRS Proceedings","volume":"15 1","pages":"109-116"},"PeriodicalIF":0.0,"publicationDate":"2016-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"74108069","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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