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Evidence of contact-induced variability in industrially-fabricated highly-scaled MoS2 FETs 工业化生产的高尺度 MoS2 FET 中接触诱发变异的证据
IF 9.1 2区 材料科学 Q1 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2024-07-14 DOI: 10.1038/s41699-024-00482-9
Luca Panarella, Ben Kaczer, Quentin Smets, Stanislav Tyaginov, Pablo Saraza Canflanca, Andrea Vici, Devin Verreck, Tom Schram, Dennis Lin, Theresia Knobloch, Tibor Grasser, César Lockhart de la Rosa, Gouri S. Kar, Valeri Afanas’ev
Evidence of microscopic inhomogeneities of the side source/drain contacts in 300 mm wafer integrated MoS2 field-effect transistors is presented. In particular, the presence of a limited number of low Schottky barrier spots through which channel carriers are predominantly injected is demonstrated by the dramatic current changes induced by individual charge traps located near the source contact. Two distinct types of “contact-impacting traps” are identified. Type-1 trap is adjacent to the contact interface and exchanges carriers with the metal. Its impact is only observable when the adjacent contact is the reverse-biased FET source and limits the channel current. Type-2 trap is located in the AlOx gate oxide interlayer, near the source contact, and exchanges carriers with the channel. Its capture/emission time constants exhibit both a gate and drain bias dependence due to the high sensitivity of the contact regions to the applied lateral and vertical fields. Unlike typical channel-impacting oxide traps, both types of reported defects affect the Schottky barrier height and width rather than the threshold voltage and result in giant random telegraph noise (RTN). These observations indicate that the contact quality and geometry play a fundamental role in the ultimate scaling of 2D FETs.
本文介绍了 300 mm 晶圆集成 MoS2 场效应晶体管源极/漏极侧触点微观不均匀性的证据。特别是,位于源极触点附近的单个电荷陷阱所引起的巨大电流变化证明了存在数量有限的低肖特基势垒点,沟道载流子主要通过这些点注入。我们发现了两种不同类型的 "接触影响陷阱"。第一类陷阱毗邻接触界面,与金属交换载流子。只有当邻近的触点是反向偏压场效应晶体管源时,才能观察到它的影响,并限制沟道电流。类型 2 陷阱位于 AlOx 栅极氧化物夹层中,靠近源极触点,与沟道交换载流子。由于接触区对施加的横向和纵向电场非常敏感,因此其捕获/发射时间常数与栅极和漏极偏压有关。与典型的影响沟道的氧化物陷阱不同,这两种类型的缺陷都会影响肖特基势垒的高度和宽度,而不是阈值电压,并导致巨大的随机电报噪声 (RTN)。这些观察结果表明,接触质量和几何形状对二维场效应晶体管的最终扩展起着根本性的作用。
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引用次数: 0
Relaxation effects in transition metal dichalcogenide bilayer heterostructures 过渡金属二卤化物双层异质结构中的弛豫效应
IF 9.1 2区 材料科学 Q1 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2024-07-14 DOI: 10.1038/s41699-024-00477-6
Wei Li, Thomas Brumme, Thomas Heine
While moiré structures in twisted bilayer transition metal dichalcogenides (TMDCs) have been studied for over a decade, the importance of lattice relaxation effects was pointed out only in 2021 by DiAngelo and MacDonald1, who reported the emergence of a Dirac cone upon relaxation. TMDCs of group 6 transition metals MX2 (M = Mo, W, X = S, Se) share layered structures with pronounced interlayer interactions, exhibiting a direct band gap when exfoliated to a two-dimensional (2D) monolayer. As their heterolayers are incommensurable, moiré structures are present in the bilayers even if stacked without a twist angle. This study addresses the challenge of accurately modeling and understanding the structural relaxation in twisted TMDC heterobilayers. We show that the typical experimental situation of finite-size flakes stacked upon larger flakes can reliably be modeled by fully periodic commensurate models. Our findings reveal significant lattice reconstruction in TMDC heterobilayers, which strongly depend on the twist angle. We can categorize the results in two principal cases: at or near the untwisted configurations of 0° and 60°, domains with matching lattice constants form and the two constituting layers exhibit significant in-phase corrugation—their out-of-plane displacements are oriented towards the same direction in all local stackings—while at large twist angles—deviating from the 0° and 60°—the two layers show an out-of-phase corrugation. In particular, we reveal that the lattice reconstruction results from the competition between the strain energy cost and the van der Waals energy gain. Additionally, our systematical study highlights structural disparities between heterostructures composed of different or identical chalcogen atoms. Our research not only confirms the reliability of using periodic commensurate models to predict heterostructure behavior but also enriches the understanding of TMDC bilayer heterostructures.
虽然人们对扭曲双层过渡金属二钙化物(TMDCs)中的摩尔纹结构已经研究了十多年,但直到 2021 年,DiAngelo 和 MacDonald1 才指出晶格弛豫效应的重要性,并报告了弛豫时出现的狄拉克锥。第 6 族过渡金属 MX2(M = Mo、W,X = S、Se)的 TMDC 具有明显的层间相互作用的层状结构,在剥离成二维(2D)单层时表现出直接带隙。由于它们的异层是不可比的,因此即使堆叠时没有扭曲角度,双层膜中也会出现摩尔纹结构。本研究解决了如何准确模拟和理解扭曲 TMDC 异质层结构弛豫的难题。我们的研究表明,有限尺寸的薄片堆叠在更大的薄片上这种典型的实验情况可以通过完全周期性的相称模型进行可靠建模。我们的研究结果表明,在 TMDC 异质层中存在明显的晶格重构现象,这与扭曲角度密切相关。我们可以将结果分为两种主要情况:在 0° 和 60° 的非扭曲构型下或其附近,形成了具有匹配晶格常数的畴,两个构成层表现出明显的同相波纹--在所有局部堆叠中,它们的面外位移都朝向同一方向;而在大扭曲角(不同于 0° 和 60°)下,两个层表现出失相波纹。我们特别发现,晶格重构是应变能耗与范德华能增益竞争的结果。此外,我们的系统研究还凸显了由不同或相同的查尔根原子组成的异质结构之间的结构差异。我们的研究不仅证实了使用周期相称模型预测异质结构行为的可靠性,还丰富了对 TMDC 双层异质结构的理解。
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引用次数: 0
Strain-induced activation of chiral-phonon emission in monolayer WS2 应变诱导激活单层 WS2 中的手性声子发射
IF 9.1 2区 材料科学 Q1 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2024-07-04 DOI: 10.1038/s41699-024-00479-4
Yiming Pan, Fabio Caruso
We report a theoretical investigation of the ultrafast dynamics of electrons and phonons in strained monolayer WS2 following photoexcitation. We show that strain substantially modifies the phase space for electron-phonon scattering, unlocking relaxation pathways that are unavailable in the pristine monolayer. In particular, strain triggers a transition between distinct dynamical regimes of the non-equilibrium lattice dynamics characterized by the emission of chiral phonons under high strain and linearly-polarized phonons under low strain. For valley-polarized electronic excitations, this mechanism can be exploited to selectively activate the emission of chiral phonons – phonons carrying a net angular momentum. Our simulations are based on state-of-the-art ab-initio methods and focus exclusively on realistic excitation and strain conditions that have already been achieved in recent experimental studies. Overall, strain emerges as a powerful tool for controlling chiral phonons emission and relaxation pathways in multivalley quantum materials.
我们报告了对光激发后应变单层 WS2 中电子和声子超快动力学的理论研究。我们的研究表明,应变极大地改变了电子-声子散射的相空间,开启了原始单层无法获得的弛豫途径。特别是,应变触发了非平衡晶格动力学的不同动力学状态之间的转变,其特征是高应变下发射手性声子和低应变下发射线性偏振声子。对于谷极化电子激发,可以利用这种机制选择性地激活手性声子--携带净角动量的声子--的发射。我们的模拟基于最先进的非原位方法,并完全集中于近期实验研究中已经实现的现实激发和应变条件。总之,应变是控制多电荷量子材料中手性声子发射和弛豫途径的有力工具。
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引用次数: 0
Emerging topological multiferroics from the 2D Rice-Mele model 从二维赖斯-梅勒模型看新出现的拓扑多铁氧体
IF 9.1 2区 材料科学 Q1 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2024-06-29 DOI: 10.1038/s41699-024-00478-5
Patricio Vergara, Guidobeth Sáez, Mario Castro, Sebastián Allende, Álvaro S. Núñez
We introduce a two-dimensional dimerized lattice model that reveals a remarkable feature: the emergence of a complex, non-trivial topological multiferroic phase marked by zero Berry curvature and a significant Berry connection that influences the model’s bulk topology. This model extends the one-dimensional Rice-Mele Hamiltonian model to explore polarization-dependent topological properties in a 2D Su-Schrieffer-Heeger lattice, providing a detailed framework for studying the impact of symmetry-breaking and spatially varying potentials on electronic and spin properties. The findings are particularly relevant for spintronics, offering a foundation for topologically robust and electrically controlled spin-conducting edge states, with implications for developing advanced spin-dependent transport devices.
我们介绍了一个二维二聚化晶格模型,该模型揭示了一个显著特点:出现了一个复杂的、非三维拓扑多铁氧体相,其特征是贝里曲率为零,贝里连接显著影响模型的体拓扑。该模型扩展了一维赖斯-梅勒哈密顿模型,以探索二维苏-施里弗-希格晶格中依赖极化的拓扑特性,为研究对称性破坏和空间变化电势对电子和自旋特性的影响提供了一个详细的框架。这些发现与自旋电子学尤为相关,为拓扑稳健、电学可控的自旋导电边缘态提供了基础,对开发先进的自旋相关传输设备具有重要意义。
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引用次数: 0
Theory of coherent phonons coupled to excitons 与激子耦合的相干声子理论
IF 9.1 2区 材料科学 Q1 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2024-06-20 DOI: 10.1038/s41699-024-00474-9
Enrico Perfetto, Kai Wu, Gianluca Stefanucci
The interaction of excitons with lattice vibrations underlies the scattering from bright to dark excitons as well as the coherent modulation of the exciton energy. Unlike the former mechanism, which involves phonons with finite momentum, the latter can be exclusively attributed to coherent phonons with zero momentum. We here lay down the microscopic theory of coherent phonons interacting with resonantly pumped bright excitons and provide the explicit expression of the corresponding coupling. The coupling notably resembles the exciton-phonon one, but with a crucial distinction: it contains the bare electron-phonon matrix elements rather than the screened ones. Our theory predicts that the exciton energy features a polaronic-like red-shift and monochromatic oscillations or beatings, depending on the number of coupled optical modes. Both the red-shift and the amplitude of the oscillations are proportional to the excitation density and to the square of the exciton-coherent-phonon coupling. We validate our analytical findings through comparisons with numerical simulations of time-resolved optical absorbance in resonantly pumped MoS2 monolayers.
激子与晶格振动的相互作用是亮激子向暗激子散射以及激子能量相干调制的基础。前者涉及具有有限动量的声子,而后者则完全归因于具有零动量的相干声子。我们在此阐述了相干声子与共振泵浦亮激子相互作用的微观理论,并提供了相应耦合的明确表达式。该耦合与激子-声子耦合非常相似,但有一个重要区别:它包含裸电子-声子矩阵元素,而不是屏蔽元素。根据我们的理论预测,激子能量具有类似极子的红移和单色振荡或跳动,这取决于耦合光学模式的数量。红移和振荡幅度都与激发密度和激子-相干-声子耦合的平方成正比。我们通过与共振泵浦 MoS2 单层中时间分辨光吸收的数值模拟进行比较,验证了我们的分析结果。
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引用次数: 0
Full phonon dispersion along the stacking direction in nanoscale van der Waals materials by picosecond acoustics 通过皮秒声学研究纳米级范德瓦耳斯材料中沿堆积方向的全声子色散
IF 9.7 2区 材料科学 Q1 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2024-06-13 DOI: 10.1038/s41699-024-00475-8
Seong-Yeon Lee, Soungmin Bae, Seonyeong Kim, Suyong Jung, Kenji Watanabe, Takashi Taniguchi, Hannes Raebiger, Ki-Ju Yee
Phonon dispersion in crystals determines many important material properties, but its measurement usually requires large-scale facilities and is limited to bulk samples. Here, we demonstrate the measurement of full phonon dispersion along the stacking direction in nanoscale systems by using picosecond acoustics. A heterostructure sample was prepared consisting of layers of hexagonal boron nitride (hBN) sandwiching a thin layer of black phosphorus (BP), within which a strain pulse was generated by photoexcitation and observed with an optical probe in the BP layer. The strain pulse traverses to the few nanometer thick hBN layers, where it propagates to the edge and echoes back, like acoustic waves in Newton’s cradle. The echoes returning to the BP layer provide information on the frequency-dependent time-of-flight and group velocity dispersion of the sample system. The microscopic origin of the photoinduced strain pulse generation and its propagation is revealed from first principles. Phonon frequency combs observed in the Fourier transform spectrum confirm the strain wave round trips and demonstrate the feasibility of determining group velocity dispersion through photoacoustics.
晶体中的声子色散决定了许多重要的材料特性,但其测量通常需要大型设备,且仅限于块状样品。在这里,我们展示了利用皮秒声学测量纳米级系统中沿堆叠方向的全声子色散。制备的异质结构样品由六方氮化硼(hBN)层和一薄层黑磷(BP)层组成,在黑磷层中通过光激发产生应变脉冲,并用光学探针在黑磷层中进行观测。应变脉冲穿过几纳米厚的 hBN 层,在边缘传播并回波,就像牛顿摇篮中的声波一样。返回 BP 层的回波提供了样品系统频率相关的飞行时间和群速度色散信息。从第一原理揭示了光诱导应变脉冲产生及其传播的微观起源。在傅立叶变换频谱中观察到的声子频率梳确认了应变波的往返,并证明了通过光声学确定群速度频散的可行性。
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引用次数: 0
Large-area phosphorene for stable carbon-based perovskite solar cells 用于稳定碳基过氧化物太阳能电池的大面积磷烯
IF 9.7 2区 材料科学 Q1 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2024-06-08 DOI: 10.1038/s41699-024-00476-7
Purevlkham Myagmarsereejid, Selengesuren Suragtkhuu, Quang Thang Trinh, Tim Gould, Nam‐Trung Nguyen, Munkhjargal Bat-Erdene, Eric Campbell, Minh Tam Hoang, Wei-Hsun Chiu, Qin Li, Hongxia Wang, Yu Lin Zhong, Munkhbayar Batmunkh
Carbon-based perovskite solar cells (c-PSCs) have attracted increasing attention due to their numerous advantages including ease of fabrication, the potential of assembling flexible devices, low manufacturing costs as well as large-scale production. However, c-PSCs suffer from the limited hole extraction and high charge carrier recombination due to the inadequate interface contact between the carbon electrode and perovskite film. Herein, we report the fabrication of planar c-PSCs with high efficiency and excellent stability by employing electrochemically produced large-area phosphorene flakes as a hole-transporting layer (HTL). Large-area phosphorene shows well-aligned band energy levels with the perovskite, and thus led to the efficient hole extraction and the reduced hysteresis behaviour. Consequently, while exhibiting excellent stability under various harsh testing conditions, the devices with phosphorene HTL delivered a power conversion efficiency of over 15% with an open-circuit voltage of 1.082 V, which is the highest reported value for c-PSCs without traditional hole transporting materials to date.
碳基包晶石太阳能电池(c-PSCs)具有众多优点,包括易于制造、可组装柔性器件、制造成本低以及可大规模生产,因此受到越来越多的关注。然而,由于碳电极和包晶薄膜之间的界面接触不足,c-PSCs 存在空穴萃取受限和电荷载流子高重组的问题。在此,我们报告了利用电化学方法制备的大面积磷烯薄片作为空穴传输层(HTL),制备出具有高效率和优异稳定性的平面 c-PSCs 的情况。大面积磷烯显示出与过氧化物晶石完全一致的带能级,从而实现了高效的空穴萃取并减少了滞后行为。因此,带有磷烯 HTL 的器件在各种苛刻的测试条件下表现出卓越的稳定性,其功率转换效率超过 15%,开路电压为 1.082 V,这是迄今为止所报道的不使用传统空穴传输材料的 c-PSC 的最高值。
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引用次数: 0
Tailored plasmon polariton landscape in graphene/boron nitride patterned heterostructures 石墨烯/氮化硼图案异质结构中的定制等离子体极化子景观
IF 9.7 2区 材料科学 Q1 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2024-05-24 DOI: 10.1038/s41699-024-00469-6
Neven Golenić, Stefano de Gironcoli, Vito Despoja
Surface plasmon polaritons (SPPs), which are electromagnetic modes representing collective oscillations of charge density coupled with photons, have been extensively studied in graphene. This has provided a solid foundation for understanding SPPs in 2D materials. However, the emergence of wafer-transfer techniques has led to the creation of various quasi-2D van der Waals heterostructures, highlighting certain gaps in our understanding of their optical properties in relation to SPPs. To address this, we analyzed electromagnetic modes in graphene/hexagonal-boron-nitride/graphene heterostructures on a dielectric Al2O3 substrate using the full ab initio RPA optical conductivity tensor. Our theoretical model was validated through comparison with recent experiments measuring evanescent in-phase Dirac and out-of-phase acoustic SPP branches. Furthermore, we investigate how the number of plasmon branches and their dispersion are sensitive to variables such as layer count and charge doping. Notably, we demonstrate that patterning of the topmost graphene into nanoribbons provides efficient Umklapp scattering of the bottommost Dirac plasmon polariton (DP) into the radiative region, resulting in the conversion of the DP into a robust infrared-active plasmon. Additionally, we show that the optical activity of the DP and its hybridization with inherent plasmon resonances in graphene nanoribbons are highly sensitive to the doping of both the topmost and bottommost graphene layers. By elucidating these optical characteristics, we aspire to catalyze further advancements and create new opportunities for innovative applications in photonics and optoelectronic integration.
石墨烯中的表面等离子体极化子(SPPs)是一种电磁模式,代表了电荷密度与光子耦合的集体振荡。这为了解二维材料中的 SPPs 奠定了坚实的基础。然而,晶圆转移技术的出现导致了各种准二维范德瓦尔斯异质结构的产生,凸显了我们对其与 SPPs 相关的光学特性认识上的某些差距。为了解决这个问题,我们使用全 ab initio RPA 光传导张量分析了电介质 Al2O3 衬底上的石墨烯/六方硼氮化物/石墨烯异质结构中的电磁模式。我们的理论模型与最近测量蒸发相内狄拉克和相外声波 SPP 分支的实验进行了比较验证。此外,我们还研究了等离子体分支的数量及其分散如何对层数和电荷掺杂等变量敏感。值得注意的是,我们证明了将最顶层的石墨烯图案化为纳米带可将最底层的狄拉克等离子体极化子(DP)有效地散射到辐射区域,从而将 DP 转换为强大的红外活性等离子体。此外,我们还证明了 DP 的光学活性及其与石墨烯纳米带中固有等离子体共振的杂化对最顶层和最底层石墨烯层的掺杂高度敏感。通过阐明这些光学特性,我们希望推动进一步的进步,并为光子学和光电集成的创新应用创造新的机遇。
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引用次数: 0
Controlled epitaxy and patterned growth of one-dimensional crystals via surface treatment of two-dimensional templates 通过二维模板的表面处理实现一维晶体的可控外延和图案化生长
IF 9.7 2区 材料科学 Q1 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2024-05-16 DOI: 10.1038/s41699-024-00473-w
Myeongjin Jang, Minseol Kim, Sol Lee, Minseok Kwon, Hani Kang, Kihyun Lee, Jinsub Park, Anh Tuan Hoang, Jong-Hyun Ahn, Yangjin Lee, Kwanpyo Kim
Mixed-dimensional van der Waals (vdW) heterostructures offer promising platforms for exploring interesting phenomena and functionalities. To exploit their full potential, precise epitaxial processes and well-defined heterointerfaces between different components are essential. Here, we control the growth of one-dimensional (1D) vdW microwires on hexagonal crystals via plasma treatment of the growth templates. AgCN serves as a model 1D system for examining the dependence of the nucleation and growth parameters on the surface treatment conditions and substrate types. The oxygen-plasma-treated transition metal dichalcogenides form step edges mediated by formation of surface metal oxides, leading to robust AgCN epitaxy with an enhanced nucleation density and low horizontal growth rates. Monte Carlo simulations reproduce the experimentally observed growth behaviors and unveil the crucial growth parameters, such as surface diffusivity. The plasma treatment results in distinct effects on graphite and hexagonal boron nitride templates, which undergo plasma-induced amorphization and deactivation of the AgCN vdW epitaxy. We achieve the selective growth of AgCN microwires on graphite using the deactivated vdW epitaxy. This study offers significant insights into the impact of surface treatment on 1D vdW epitaxy, opening avenues for controlled fabrication of mixed-dimensional vdW heterostructures.
混合维范德华(vdW)异质结构为探索有趣的现象和功能提供了前景广阔的平台。要充分挖掘其潜力,精确的外延工艺和不同成分之间定义明确的异质界面至关重要。在这里,我们通过对生长模板进行等离子体处理,控制一维(1D)vdW 微线在六方晶体上的生长。以 AgCN 为一维模型系统,研究成核和生长参数与表面处理条件和基底类型的关系。经氧等离子体处理的过渡金属二钙化物在表面金属氧化物的介导下形成阶梯边,导致 AgCN 外延生长强劲,成核密度提高,水平生长率降低。蒙特卡罗模拟再现了实验观察到的生长行为,并揭示了关键的生长参数,如表面扩散率。等离子体处理对石墨和六方氮化硼模板产生了不同的影响,石墨和六方氮化硼模板在等离子体的诱导下发生非晶化,并使 AgCN vdW 外延失活。我们利用失活 vdW 外延技术在石墨上实现了 AgCN 微线的选择性生长。这项研究深入揭示了表面处理对一维 vdW 外延的影响,为控制制造混合维 vdW 异质结构开辟了道路。
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引用次数: 0
CVD graphene contacts for lateral heterostructure MoS2 field effect transistors 用于横向异质结构 MoS2 场效应晶体管的 CVD 石墨烯触点
IF 9.7 2区 材料科学 Q1 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2024-05-10 DOI: 10.1038/s41699-024-00471-y
Daniel S. Schneider, Leonardo Lucchesi, Eros Reato, Zhenyu Wang, Agata Piacentini, Jens Bolten, Damiano Marian, Enrique G. Marin, Aleksandra Radenovic, Zhenxing Wang, Gianluca Fiori, Andras Kis, Giuseppe Iannaccone, Daniel Neumaier, Max C. Lemme
Intensive research has been carried out on two-dimensional materials, in particular molybdenum disulfide, towards high-performance field effect transistors for integrated circuits1. Fabricating transistors with ohmic contacts is a challenging task due to the formation of a high Schottky barrier that severely limits the performance of the transistors for real-world applications. Graphene-based heterostructures can be used in addition to, or as a substitute for unsuitable metals. In this paper, we present lateral heterostructure transistors made of scalable chemical vapor-deposited molybdenum disulfide and chemical vapor-deposited graphene achieving a low contact resistances of about 9 kΩ·µm and high on/off current ratios of 108. Furthermore, we also present a theoretical model calibrated on our experiments showing further potential for scaling transistors and contact areas into the few nanometers range and the possibility of a substantial performance enhancement by means of layer optimizations that would make transistors promising for use in future logic integrated circuits.
人们对二维材料(尤其是二硫化钼)进行了深入研究,以开发用于集成电路的高性能场效应晶体管1。由于会形成高肖特基势垒,严重限制了晶体管在实际应用中的性能,因此制造具有欧姆触点的晶体管是一项具有挑战性的任务。基于石墨烯的异质结构可以作为不合适金属的补充或替代品。在本文中,我们介绍了由可扩展的化学气相沉积二硫化钼和化学气相沉积石墨烯制成的横向异质结构晶体管,其接触电阻低至约 9 kΩ-µm,导通/关断电流比高达 108。此外,我们还提出了一个根据我们的实验进行校准的理论模型,显示了将晶体管和接触面积扩展到几纳米范围的进一步潜力,以及通过层优化大幅提高性能的可能性,这将使晶体管有望用于未来的逻辑集成电路。
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引用次数: 0
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