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2020 19th IEEE Intersociety Conference on Thermal and Thermomechanical Phenomena in Electronic Systems (ITherm)最新文献

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Fabrication of Copper Compliant Iinterconnects on a Printed Circuit Board: An Additive Approach 印制电路板上铜兼容互连的制造:一种增材制造方法
T. Olatunji, Mahsa Montazeri, D. Huitink
The need to increase the power density in electronic devices is being limited by the reliability of power devices and its components. To counter this problem, devices will need to have nonconventional designs and features that can help mitigate thermal and mechanical stress concerns, in order to improve failure rates at critical locations within power devices and packages. A major problem plaguing power densification arises from the reliability of the device due to thermomechanical stresses and strains at interfaces that are amplified in harsh environment electronics such as in electric vehicle applications, where temperature extremes are common. One solution to enabling longer interconnect life lies in compliant interconnects, wherein various compliant geometries using photolithography-based approaches to fabricate suspended structures for allowing deflection between chip and substrate. These features reduce stress on the interconnection itself, resulting in improved lifetimes, particularly in solder joints. Yet these structures usually come at a cost of lateral many additional processing steps during interconnect fabrication. In this work, we present an additive approach to fabricate copper-plated compliant interconnects directly on printed circuit boards (PCBs). This approach can accomplish similar thermomechanical stress alleviation to formerly reported methods, but with fewer process steps, and new geometry availability. This work reports the fabrication procedure, process engineering and characterization in addition to the compliance evaluation for a semi-subtractive structure manufacturing process enabled through a novel additive manufacturing methodology.
提高电子器件功率密度的需求受到功率器件及其组件可靠性的限制。为了解决这个问题,器件需要具有非传统的设计和特性,以帮助减轻热应力和机械应力问题,从而提高电源器件和封装内关键位置的故障率。困扰功率致密化的一个主要问题来自于设备的可靠性,因为在恶劣环境的电子设备中,如电动汽车应用中,界面上的热机械应力和应变会被放大,而极端温度是常见的。实现更长的互连寿命的一种解决方案在于柔性互连,其中各种柔性几何形状使用基于光刻的方法来制造悬浮结构,以允许芯片和衬底之间的偏转。这些特性减少了互连本身的压力,从而提高了使用寿命,特别是在焊点上。然而,在互连制造过程中,这些结构通常以横向许多额外的加工步骤为代价。在这项工作中,我们提出了一种直接在印刷电路板(pcb)上制造镀铜兼容互连的增材方法。这种方法可以实现类似的热机械应力缓解以前报道的方法,但较少的工艺步骤,和新的几何可用性。这项工作报告了制造过程、工艺工程和表征,以及通过新型增材制造方法实现的半减法结构制造过程的符合性评估。
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引用次数: 0
Process Development and Performance Analysis of Additively Printed Humidity Sensor using Aerosol Jet Printing 气溶胶喷射打印增材打印湿度传感器工艺开发及性能分析
P. Lall, Jinesh Narangaparambil
Flexible and stretchable devices have attracted great interest in the printed electronics industry for health monitoring of critical infrastructure applications. Additive printing technology is gaining much popularity for fabrication of flexible circuits due to its ease of setup, cost-efficient and its ability of miniaturization. Aerosol Jet Printing is one of the methods of additive printing, which is a popular technology due to non-contact printing, precision and good quality print on flexible substrates, low setup time and reduction of fabrication cost. All these versatilities can be easily applied sensors for health monitoring. Ability to print sensors allows for a tighter integration into the underlying structures providing new opportunities for placement of sensor ever closer to the point of measurement than possible with discrete sensors. In this paper, the humidity sensor is designed and fabricated with the help of aerosol-jet printing on paper substrate. Two kinds of papers with different surface quality used in this study with varied number of passes of the printed conductive line. The printed sensors were tested under the controlled environment of 30°C and relative humidity varying in the range of 20% to 90%. The sensor was also tested for its performance in up sweep and down sweep of relative humidity to quantify the hysteresis. Long-term stability and repeatability have also been quantified.
柔性和可拉伸设备在印刷电子工业中引起了极大的兴趣,用于关键基础设施应用的健康监测。增材打印技术由于其易于设置、成本效益和小型化能力,在柔性电路制造中越来越受欢迎。气溶胶喷射印刷是增材印刷的一种方法,由于非接触印刷、在柔性基材上印刷精度高、印刷质量好、安装时间短、制造成本低而成为一种流行的增材印刷技术。所有这些功能都可以很容易地应用于健康监测传感器。打印传感器的能力允许更紧密地集成到底层结构中,为放置比离散传感器更接近测量点的传感器提供了新的机会。本文利用气溶胶喷墨印刷技术在纸基上设计并制作了湿度传感器。本研究采用两种表面质量不同的纸张,印制导电线的道次也不同。打印的传感器在30°C和20% ~ 90%的相对湿度控制环境下进行测试。并对传感器的相对湿度上扫和下扫性能进行了测试,量化了传感器的滞后量。长期稳定性和可重复性也被量化。
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引用次数: 0
Effect of Dynamic Folding with Varying Fold Orientations and C-rates on Flexible Power Source Capacity Degradation 不同折叠方向和c -速率的动态折叠对柔性电源容量退化的影响
P. Lall, Ved Soni, Scott Miller
The major contributor to the boost in flexible power source research is the growing need for wearable devices, fitness accessories and biomedical equipment. Flexible batteries are required to sustain repetitive mechanical stresses during motion in addition to the usual desirable features such as high capacity, fast charge capability and low susceptibility towards degradation. The investigation of cyclic deformation of batteries is limited and the reported studies are conducted for a shorter number of flex cycles and that too with manual flexing instead of a deformation setup. The purpose of this research is to understand the degradation behavior of lithium ion batteries subjected to cyclic flexing deformation along with accelerated deep charge-discharge life cycling. Furthermore, the power sources are tested for the combined effect of mechanical and electrical loads by varying the charge C-Rate. By measuring the battery current and terminal voltage, assessment of its capacity and battery state of health is conducted. Finally, the state of health of the battery is correlated to these parameters with a regression model.
推动柔性电源研究的主要因素是对可穿戴设备、健身配件和生物医学设备日益增长的需求。除了通常期望的特性,如高容量、快速充电能力和低退化敏感性外,柔性电池还需要在运动过程中承受重复的机械应力。对电池的循环变形的研究是有限的,报道的研究是针对较短的弯曲循环次数,而且也是用人工弯曲代替变形装置。本研究的目的是了解锂离子电池在循环弯曲变形和加速深度充放电寿命循环下的降解行为。此外,通过改变电荷c -率来测试电源的机械和电气负载的综合影响。通过测量电池电流和端电压,对其容量和电池健康状态进行评估。最后,利用回归模型将电池的健康状态与这些参数进行关联。
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引用次数: 1
Modelling and Validation of a Switched Reluctance Motor Stator Tooth with Direct Coil Cooling 直接线圈冷却开关磁阻电机定子齿的建模与验证
J. Nonneman, S. Schlimpert, I. T’Jollyn, M. Paepe
This paper presents the modelling and validation of an advanced thermal lumped parameter (LP) model for a stator tooth of a switched reluctance motor (SRM) with a dry lateral slot cooling method. Standard and simple lumped parameter models for electric motors can insufficiently predict the temperature distribution within the components of the motor. In standard LP models, only several nodes are used to model each component, while more accurate models are needed to predict the effect of different cooling methods on the thermal performance of the motor without the need for experiments. A fully 3D thermal finite element (FE) model could be used but this would increase effort, complexity and computing time unnecessarily. Therefore, an advanced 3D LP model including the dry lateral slot cooling method was developed and validated based on experiments on a real stator tooth cooled with the modelled cooling method. The 3D LP model is extracted from a 2D FE radial simulation of the stator tooth and extended axially in 3D to include axial heat transfer. Experiments were performed with a setup consisting of one tooth of a SRM without rotor, but including stator iron, one winding and two triangular stainless steel tubes in the slots at both sides of the winding cooled by a 60/40% mixture by mass of water-glycol. The setup is equipped with several thermocouples integrated within the components to determine the component temperatures. Three inlet temperatures (20, 35 and 50°C) and four flow rates (2, 6, 9 and 13 l/min) of the coolant were tested at three different heat losses in the winding (10, 30 and 50 W). A comparison between the simulated and measured temperatures showed generally higher temperatures in the experiment. The presence of imperfections in the manufacturing of the experimental setup was determined as the cause of this offset. These imperfections result in lower material thermal conductivities and higher contact resistances than expected from scientific literature. After fitting those thermal properties on the measurements, similar simulated temperatures could be obtained as in the experiments.
本文建立了一种基于干式侧槽冷却方法的开关磁阻电机定子齿的高级热集总参数(LP)模型并进行了验证。标准的和简单的电机集总参数模型不能充分地预测电机部件内部的温度分布。在标准的LP模型中,仅使用几个节点对每个组件进行建模,而需要更精确的模型来预测不同冷却方式对电机热性能的影响,而无需进行实验。可以使用全三维热有限元(FE)模型,但这会增加不必要的工作量、复杂性和计算时间。为此,建立了包含干侧槽冷却方法的先进三维定子齿模型,并在采用该方法冷却的实际定子齿上进行了实验验证。三维LP模型是从定子齿的二维有限元径向模拟中提取的,并在轴向上进行三维扩展,以包括轴向传热。实验装置由无转子的SRM的一个齿组成,但包括定子铁,一个绕组和绕组两侧槽中的两个三角形不锈钢管,由60/40%的水-乙二醇混合物冷却。该装置配备了几个热电偶集成在组件内,以确定组件温度。在三种不同的绕组热损失(10、30和50 W)下,对冷却剂的三种进口温度(20、35和50°C)和四种流量(2、6、9和13 l/min)进行了测试。模拟温度和测量温度之间的比较表明,实验温度普遍更高。实验装置制造中存在的缺陷被确定为造成这种偏移的原因。这些缺陷导致较低的材料热导率和较高的接触电阻比预期的科学文献。将这些热性能与测量值拟合后,可以得到与实验相似的模拟温度。
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引用次数: 4
Optimization of Manifold Mmicrochannel Heat Sink Based on Equivalent Resistance Model 基于等效电阻模型的流形微通道散热器优化设计
Weihao Li, Longguang Zhu, Feng Ji, Jinling Yu, Yufeng Jin, Wei Wang
In the study of chip heat dissipation, micro-channel heat sinks have been widely used. Microchannel heat sink have a variety of structures, among which the manifold structure is used more because of its better heat dissipation performance. However, the manifold structure has the problem of uneven flow distribution. In order to solve this problem, this paper uses the principle of similar flow resistance and resistance to establish the equivalent resistance model of the manifold microchannel. This model simulates the equivalent resistance network by MATLAB, simulates the change of the flow channel by changing Rr, simulates the change of the distribution channel by changing Rd, and simulates the outlet position by changing the position of the negative electrode of the power supply. The results of the circuit simulation are used as a direction guide, and thermal simulation is performed using COMSOLTM. The optimization of the reaction channel, the distribution channel and the outlet position of the manifold structure is completed. Finally, a uniform flow distribution was achieved, and the variance of the surface temperature of the heat source was reduced by 66%. It can be seen from experiments that the equivalent resistance model has an important role in guiding the optimization direction in the research of microchannel heat sink with manifold structure.
在芯片散热研究中,微通道散热片得到了广泛的应用。微通道散热器有多种结构,其中流形结构因其散热性能较好而应用较多。然而,流形结构存在着流动分布不均匀的问题。为了解决这一问题,本文利用相似流阻和阻力原理,建立了流形微通道的等效阻力模型。该模型通过MATLAB对等效电阻网络进行仿真,通过改变Rr来模拟流道的变化,通过改变Rd来模拟配电通道的变化,通过改变电源负极的位置来模拟出口位置。以电路仿真结果为导向,利用COMSOLTM软件进行热仿真。完成了反应通道、配流通道和歧管结构出口位置的优化。最后,实现了均匀的流动分布,热源表面温度的方差减小了66%。从实验可以看出,等效电阻模型在流形结构微通道散热器的研究中具有重要的指导优化方向的作用。
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引用次数: 2
System-Level Thermal Modeling and Its Significance in Electronics Packaging 系统级热建模及其在电子封装中的意义
Sevket U. Yuruker, R. Mandel, P. McCluskey, M. Ohadi
Thermal management of electronics has been a major limiting factor in achieving high-power, high-performance systems. Isolating various heat dissipating components from each other becomes significantly difficult as increasingly higher packaging densities are targeted. Thus, components with different heat dissipation rates and allowable temperatures are thermally coupled due to increased proximity. The packaging configuration, positioning of the active components and the chosen heat removal techniques play an important role in determining the overall power consumption, efficiency, reliability and expected lifetime. Consequently, evaluation of the electro-thermal characteristics on the system-level becomes as critical as the component-level in order to adequately capture the effects that components have on each other. Also, through a system-level evaluation, limiting quantities such as the maximum ambient temperature, the cooling sequence of the components and the flow routing can be ascertained for a given assembly. Optimization of the design, selection of the appropriate working fluid and prevention of catastrophic failures such as thermal runaway, can be possible through utilization of a system-level thermal model. This study presents a MATLAB based system-level thermal model with an iterative solver that incorporates temperature dependent characteristics. The model is used to design and optimize the thermal management approach of a high-power full bridge DC-DC converter module. Comparison of various flow routing configurations and heat removal modes’ effect on overall performance, along with other advantageous conclusions drawn through several design iterations are performed using the system-level model and are illustrated in detail.
电子产品的热管理一直是实现高功率、高性能系统的主要限制因素。随着越来越高的封装密度的目标,将各种散热组件相互隔离变得非常困难。因此,具有不同散热率和允许温度的组件由于接近度的增加而热耦合。封装配置、有源元件的定位和所选择的散热技术在决定整体功耗、效率、可靠性和预期寿命方面发挥着重要作用。因此,为了充分捕捉组件之间的相互影响,系统级的电热特性评估与组件级的评估同样重要。此外,通过系统级评估,可以确定给定组件的极限数量,如最高环境温度、组件的冷却顺序和流动路线。通过利用系统级热模型,可以优化设计,选择合适的工作流体,防止热失控等灾难性故障。本研究提出了一个基于MATLAB的系统级热模型,并结合了温度相关特性的迭代求解器。利用该模型对大功率全桥DC-DC变换器模块的热管理方法进行了设计和优化。利用系统级模型,比较了各种流动路径配置和散热模式对整体性能的影响,以及通过多次设计迭代得出的其他有利结论,并进行了详细说明。
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引用次数: 2
A Dynamic Simulation Framework for the Analysis of Battery Electric Vehicle Thermal Management Systems 纯电动汽车热管理系统分析的动态仿真框架
Tyler J. Shelly, J. Weibel, D. Ziviani, E. Groll
As vehicle electrification is expanding in response to more stringent emissions standards and shifting consumer preferences, extending the driving range remains critical to broadening the adoption of battery electric vehicles (BEV). This challenge can be addressed in part through more efficient operation of the thermal management system in BEVs, which has a significant influence on range and performance, especially under extreme weather conditions. This study develops a simulation framework for the analysis of a BEV thermal management systems under long-range test procedures defined by the Multi-Cycle Test (MCT). A baseline thermal management system configuration is defined to reflect those typically found in long-range BEVs, so as to provide insight into the design and performance of current systems. Parametric studies are conducted across a range of ambient conditions from 0 °C to 40 °C and drive cycles including urban/city (UDDS), highway (HFEDS), and constant speed cycles. Operating temperature setpoints for the cabin, battery, electronics, and other components are met using the standard system configuration, albeit with significant deleterious impacts on vehicle range and cycle control. At low ambient temperatures, a maximum 30% decrease in driving range is predicted. Across the parametric values investigated, the choice of cabin setpoint temperature affects the driving range on the order of ~10% across heating and cooling cases. The transient drive cycle response for representative cooling cases is presented and reveals oscillations in system behavior about the chosen setpoints; these oscillations are a direct result of the secondary loop liquid cooling architecture. As a result of the present study, perspectives on alternative system configurations that offer battery thermal management and cabin comfort as well as the integration of waste heat recovery are outlined as future work.
随着更严格的排放标准和消费者偏好的转变,汽车电气化正在扩大,延长行驶里程对于扩大纯电动汽车(BEV)的采用仍然至关重要。这一挑战可以通过更有效地运行纯电动汽车的热管理系统来解决,热管理系统对行驶里程和性能有重大影响,特别是在极端天气条件下。本研究开发了一个模拟框架,用于分析由多循环测试(MCT)定义的远程测试程序下的BEV热管理系统。基线热管理系统配置的定义是为了反映远程纯电动汽车的典型配置,从而提供对当前系统设计和性能的深入了解。参数研究是在0°C到40°C的环境条件下进行的,驾驶周期包括城市/城市(UDDS)、高速公路(HFEDS)和恒速循环。驾驶室、电池、电子设备和其他部件的工作温度设定值使用标准系统配置来满足,尽管这会对车辆的续航里程和循环控制产生重大的有害影响。在较低的环境温度下,预计行驶里程最多减少30%。在所调查的参数值中,客舱设定点温度的选择在加热和冷却情况下对行驶里程的影响约为10%。给出了典型冷却工况的瞬态驱动周期响应,揭示了所选设定值下系统行为的振荡;这些振荡是二次回路液体冷却结构的直接结果。根据目前的研究结果,对提供电池热管理和客舱舒适性以及废热回收集成的替代系统配置的观点被概述为未来的工作。
{"title":"A Dynamic Simulation Framework for the Analysis of Battery Electric Vehicle Thermal Management Systems","authors":"Tyler J. Shelly, J. Weibel, D. Ziviani, E. Groll","doi":"10.1109/ITherm45881.2020.9190543","DOIUrl":"https://doi.org/10.1109/ITherm45881.2020.9190543","url":null,"abstract":"As vehicle electrification is expanding in response to more stringent emissions standards and shifting consumer preferences, extending the driving range remains critical to broadening the adoption of battery electric vehicles (BEV). This challenge can be addressed in part through more efficient operation of the thermal management system in BEVs, which has a significant influence on range and performance, especially under extreme weather conditions. This study develops a simulation framework for the analysis of a BEV thermal management systems under long-range test procedures defined by the Multi-Cycle Test (MCT). A baseline thermal management system configuration is defined to reflect those typically found in long-range BEVs, so as to provide insight into the design and performance of current systems. Parametric studies are conducted across a range of ambient conditions from 0 °C to 40 °C and drive cycles including urban/city (UDDS), highway (HFEDS), and constant speed cycles. Operating temperature setpoints for the cabin, battery, electronics, and other components are met using the standard system configuration, albeit with significant deleterious impacts on vehicle range and cycle control. At low ambient temperatures, a maximum 30% decrease in driving range is predicted. Across the parametric values investigated, the choice of cabin setpoint temperature affects the driving range on the order of ~10% across heating and cooling cases. The transient drive cycle response for representative cooling cases is presented and reveals oscillations in system behavior about the chosen setpoints; these oscillations are a direct result of the secondary loop liquid cooling architecture. As a result of the present study, perspectives on alternative system configurations that offer battery thermal management and cabin comfort as well as the integration of waste heat recovery are outlined as future work.","PeriodicalId":193052,"journal":{"name":"2020 19th IEEE Intersociety Conference on Thermal and Thermomechanical Phenomena in Electronic Systems (ITherm)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2020-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129799853","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 7
Fabrication of a Low Cost Flexible Micro-Device for Measuring Fiber Thermal Conductivity 一种低成本柔性光纤热导率微测量装置的研制
Andrew Latulippe, Y. Ait-El-Aoud, R. Osgood, Hongwei Sun
Introduced is a low cost "cantilever" like device that is capable of generating heat and simultaneously measuring temperature. The device is fabricated on flexible polyimide substrate using a photolithography process to form thin gold heater patterns. Heat generation is concentrated at the tip of the cantilever using Joule heating from a direct current. The heater functions as an RTD capable of accurate temperature measurements. The device is used to measure the thermal conductivity of small, high aspect ratio structures such as fibers by measuring the thermal resistance using a parallel resistance model. Using a thin platinum wire as a reference material, accurate values for thermal conductivity are obtained.
介绍了一种低成本的“悬臂”式装置,它能够产生热量并同时测量温度。该装置使用光刻工艺在柔性聚酰亚胺基板上制造以形成薄金加热器图案。利用直流电的焦耳加热,产生的热量集中在悬臂的尖端。加热器的功能是作为一个能够精确测量温度的RTD。该装置用于测量小的、高纵横比结构(如纤维)的热导率,方法是使用并联电阻模型测量热阻。使用细铂丝作为参考材料,获得了准确的导热系数值。
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引用次数: 1
Thermal Aware 3-D Floorplanning on Multi-stacked Board of Smart Phone 智能手机多层板热感知三维平面规划
Youngsang Cho, Heejung Choi, Heeseok Lee, Yunkyeok Im, Hoi-Jin Lee, Youngmin Shin
In this paper, we analyze the heat generation characteristics of components in a multi-stack PCB (Printed Circuit Board) structure of smart phone and find the optimized structure of components placement to minimize system temperature. The PCB in a smart device is conventionally composed of a single layer, so that components are placed on one side or both sides of single PCB. However, as the performance of components goes up, power consumption and the battery size have been gradually increased in order to maximize the running time. Accordingly, in order to increase the battery size in limited space of the smart phone, it is necessary to reduce PCB area on which the components are mounted. Recently, mobile phone makers are gradually adopting a new structure in which PCBs are stacked in multiple layers to increase mounting area. As a result, the heat generation phenomenon needs to be examined from a different viewpoint than the existing single layer PCB structure. In case of existing single-layer PCB, components can be contacted to heat spreader (heat pipe, bracket, metal or graphite sheet) through TIM. On the other hand, in case of multi-layer PCB configuration, components in between two boards have no direct contact with heat spreader and it makes chip temperature higher than before. We analyze chip temperature for different board placement of multi-stacked PCB in smart phone considering thermal performance. The location of high power components such as AP (Application Processor), RF, PMIC, CP (Communication Processor), and Flash Memory was a parameter. Finally, we can find optimal configuration that minimizes the max junction temperature for multiple power scenario.
本文分析了智能手机多堆叠PCB (Printed Circuit Board)结构中元器件的产热特性,找到了器件放置的优化结构,使系统温度降到最低。智能设备中的PCB通常由单层组成,因此组件放置在单个PCB的一侧或两侧。然而,随着组件性能的提高,功耗和电池尺寸逐渐增加,以最大限度地延长运行时间。因此,为了在有限的智能手机空间中增加电池的尺寸,必须减少安装组件的PCB面积。最近,手机制造商正在逐步采用pcb多层堆叠的新结构,以增加安装面积。因此,需要从与现有单层PCB结构不同的角度来检查发热现象。如果现有的单层PCB,元件可以通过TIM接触到散热器(热管,支架,金属或石墨片)。另一方面,在多层PCB配置的情况下,两块板之间的元件与散热器没有直接接触,这使得芯片温度比以前更高。从热性能的角度分析了智能手机中不同板置方式下多层堆叠PCB的芯片温度。AP(应用处理器)、RF、PMIC、CP(通信处理器)、Flash Memory等大功率元件的位置是一个参数。最后,我们可以找到在多种功率情况下最大结温最小的最优配置。
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引用次数: 2
Simulation Method of Ultra-Thin Silicon Wafers Warpage 超薄硅片翘曲的模拟方法
Mei-Ling Wu, Wei-Jhih Wong
As the electronic products, such as smart phones, notebooks, and micro-control parts for vehicles, are becoming increasingly popular and their size continues do decrease, there is also a need to reduce the volume of ultra-thin silicon wafers while improving their performance. At present, backside grinding is typically used for this purpose, and requires that the wafer is placed on the chuck of a self-rotating wheel, while controlling the feed rate in order to reduce wafer thickness. Although this process is efficient and effective, it may result in subsurface damage, surface cracks, micro-cracks, warpage, and other undesirable effects. One of its main drawbacks is residual stress, which becomes more pronounced in very thin wafers, as this increases rigidity. Stoney equation is widely used to examine the residual stress and curvature radius in a silicon wafer due to the backside grinding process. However, the relationship between the residual stress generated in the wafer during the grinding process and the process parameters is rarely analyzed through simulations. This gap is addressed in the present study, whereby the finite element method (FEM) is adopted to examine the effects of different process parameters, as well as wafer thickness, on the residual stress. As dynamic simulation is adopted, this allows the process parameters to be adjusted at runtime to predict the residual stress, while Stoney’s equation is employed to predict the influence of different process parameters on warpage. Based on the obtained results, the wafer warpage caused by the process can be predicted with acceptable accuracy, which can in turn be used to optimize the process parameter values to minimize wafer warpage.
随着智能手机、笔记本电脑和汽车微控制部件等电子产品的日益普及,其尺寸不断减小,也需要在提高其性能的同时减少超薄硅片的体积。目前一般采用后磨,要求将晶圆片置于自转轮的卡盘上,同时控制进给速度,以减小晶圆片厚度。虽然这个过程是高效和有效的,但可能会导致亚表面损伤、表面裂纹、微裂纹、翘曲和其他不良影响。其主要缺点之一是残余应力,这在非常薄的晶圆中变得更加明显,因为这增加了刚性。Stoney方程被广泛应用于硅片背面磨削过程中残余应力和曲率半径的计算。然而,通过仿真分析磨削过程中硅片内残余应力与工艺参数之间的关系却很少。本研究解决了这一差距,采用有限元法(FEM)来研究不同工艺参数以及晶圆厚度对残余应力的影响。由于采用动态仿真,因此可以在运行时调整工艺参数来预测残余应力,而采用Stoney方程来预测不同工艺参数对翘曲的影响。根据得到的结果,可以以可接受的精度预测工艺引起的晶圆翘曲,从而可以用于优化工艺参数值以最小化晶圆翘曲。
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引用次数: 0
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2020 19th IEEE Intersociety Conference on Thermal and Thermomechanical Phenomena in Electronic Systems (ITherm)
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