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Study on plastic deformation removal mechanism and dislocation change in nano‐grinding of single crystal silicon carbide with random rough surface 随机粗糙表面单晶碳化硅纳米研磨中塑性变形去除机理及位错变化研究
Pub Date : 2023-12-21 DOI: 10.1002/pssa.202300726
Dongling Yu, Haican Shen, Jinyu Chen, Jiao Li, Jianbo Le, Nanxing Wu
This investigation centers on exploring the plastic deformation removal mechanism and dislocation dynamics in the nano‐grinding of single crystal silicon carbide featuring a randomly rough surface. To simulate this, a novel approach combining the Weierstrass‐Mandelbrot fractal surface function with molecular dynamics is employed. Generate randomly rough surface contours using the Weierstrass‐Mandelbrot fractal surface function. By adjusting the fractal dimension, an ideal representation of single crystal silicon carbide with randomly rough surfaces is obtained. By combining plastic deformation detection methods, the process of workpiece sliding, plowing, and chip removal is thoroughly studied, and the plastic deformation removal mechanism of random rough surface grinding is explored; Combining post‐processing methods such as sheer strain and dislocation trajectory, analyze the morphological changes and transformation mechanisms of dislocations. Notably, at a grinding depth of 33.18nm, the activation of slip systems induces dislocation formation, enabling plastic deformation. Furthermore, at depths exceeding 144.00nm, the emergence of stacking faults on the random rough surface is observed. Throughout the grinding procedure, plastic deformation of debris occurs, leading to the formation of plastic bulges on both sides of the tool, the debris generated during processing does not significantly impact the defects encountered during secondary grinding of the rough surface.This article is protected by copyright. All rights reserved.
这项研究的核心是探索具有随机粗糙表面的单晶碳化硅纳米研磨过程中的塑性变形消除机制和位错动力学。为了模拟这一过程,我们采用了一种将魏尔斯特拉斯-曼德尔布罗特分形表面函数与分子动力学相结合的新方法。利用魏尔斯特拉斯-曼德尔布罗分形表面函数生成随机粗糙表面轮廓。通过调整分形维度,获得了具有随机粗糙表面的单晶碳化硅的理想表示。结合塑性变形检测方法,深入研究了工件滑动、犁耕和排屑过程,探索了随机粗糙表面磨削的塑性变形去除机理;结合峭度应变和位错轨迹等后处理方法,分析了位错的形态变化和转变机理。值得注意的是,在磨削深度为 33.18nm 时,滑移系统的激活诱发了位错的形成,从而实现了塑性变形。此外,在深度超过 144.00nm 时,随机粗糙表面上出现了堆积断层。在整个磨削过程中,碎屑发生塑性变形,导致在工具两侧形成塑性隆起,加工过程中产生的碎屑不会对粗糙表面二次磨削过程中遇到的缺陷产生重大影响。本文受版权保护,保留所有权利。
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引用次数: 0
Dual Stepped Gate Vertical Double Diffused MOSFET Technology with Enhanced Device Performance 器件性能更强的双阶梯栅垂直双扩散 MOSFET 技术
Pub Date : 2023-12-21 DOI: 10.1002/pssa.202300593
Devesh Singh Sidar, Onika Parmar, Zeesha Mishra
In this paper, Vertical Double Diffused MOSFET(VDMOS) with improved device structure is proposed. Gate engineering is applied in the proposed device and two devices namely dual stepped gate technology(DSGT) and modified dual stepped gate technology(m‐DSGT) are proposed here. Due to the effect of gate engineering switching ability is improved and area specific ON‐resistance is reduced. Devices are simulated using Silvaco Atlas software. Breakdown voltages for conventional and m‐DSGT are 278.63V and 280.02V, respectively, for VGS=0V. The current density of conventional and m‐DSGT devices is 49.2A/cm2 and 178.5A/cm2 under the conditions on gate drive voltage of 1V for VDS=10V. Using 2‐D numerical simulations, the electrical performance of both DSGT and m‐DSGT devices is examined. The results demonstrate 76.6% decrease in specific ON‐resistance, 4.22 times increase in current density and 26.67% faster switching speed compared to conventional VDMOS. Thus, improving the device performance.This article is protected by copyright. All rights reserved.
本文提出了具有改进器件结构的垂直双扩散 MOSFET(VDMOS)。该器件采用了栅极工程技术,并提出了两种器件,即双阶梯栅极技术(DSGT)和改进型双阶梯栅极技术(m-DSGT)。由于栅极工程的影响,开关能力得到提高,面积比导通电阻降低。器件使用 Silvaco Atlas 软件进行了仿真。当 VGS=0V 时,传统和 m-DSGT 的击穿电压分别为 278.63V 和 280.02V。在 VDS=10V 时,栅极驱动电压为 1V 的条件下,传统和 m-DSGT 器件的电流密度分别为 49.2A/cm2 和 178.5A/cm2。通过二维数值模拟,考察了 DSGT 和 m-DSGT 器件的电气性能。结果表明,与传统 VDMOS 相比,比导通电阻降低了 76.6%,电流密度增加了 4.22 倍,开关速度提高了 26.67%。本文受版权保护。本文受版权保护。
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引用次数: 0
Dielectric and optical properties of δ‐Bi2O3 quaternary semiconducting solid solutions δ-Bi2O3四元半导体固溶体的介电和光学特性
Pub Date : 2023-12-12 DOI: 10.1002/pssa.202300800
A. Ramirez‐DelaCruz, M. Bocanegra-Bernal, M. Márquez-Torres, E. Venegas-Contreras, G. Rojas-George, A. Reyes-Rojas
Quaternary compositions of polycrystalline Bi1.74Dy0.14W0.12‐xScxO3 (x = 0.02, 0.03, 0.04, 0.05, 0.06) solid solutions were synthesized by the solid‐state reaction method. The 4a site symmetry of the space group occupied by Sc3+ ion retains the cubic fluorite‐type over a wide temperature range (450‐700 oC) for low Sc3+ content without losing the δ‐phase. Dielectric and ionic conductivity by complex impedance in the frequency range from 0.1 to 100 kHz suggests a temperature and Sc3+‐dependent relaxation process. The ionic conductivity increases with the Sc3+ content over the whole tested temperature range. An oxygen ion conductivity of 0.102 Scm‐1 at 700 oC and an activation energy of 0.32 eV was achieved for x=0.06. Optical properties and Rietveld refinement indicate a band gap reduction due to a bond length reduction (Bi‐O). These materials have potential in photocatalysis and water‐splitting technology due to their UV and visible region absorption capabilities.This article is protected by copyright. All rights reserved.
通过固态反应方法合成了多晶 Bi1.74Dy0.14W0.12-xScxO3 (x = 0.02, 0.03, 0.04, 0.05, 0.06) 固溶体的四元成分。在较低的 Sc3+ 含量下,Sc3+ 离子所占空间群的 4a 位对称性在较宽的温度范围(450-700 oC)内保持了立方萤石型,而没有失去 δ 相。在 0.1 至 100 kHz 的频率范围内,通过复阻抗测量介电导率和离子电导率表明了一个与温度和 Sc3+ 有关的弛豫过程。在整个测试温度范围内,离子电导率随 Sc3+ 含量的增加而增加。当 x=0.06 时,700 oC 时的氧离子电导率为 0.102 Scm-1,活化能为 0.32 eV。光学特性和里特维尔德细化表明,由于键长减少(Bi-O),带隙减小。这些材料具有紫外线和可见光吸收能力,因此在光催化和水分离技术方面具有潜力。本文受版权保护。
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引用次数: 0
Numerical Simulation of Highly Sensitive Ga2O3 Pressure Sensor 高灵敏度 Ga2O3 压力传感器的数值模拟
Pub Date : 2023-12-12 DOI: 10.1002/pssa.202300534
Phuc Hong Than, Tuan Ngoc Dao, Yasushi Takaki
This paper presents beta‐gallium oxide (β‐Ga2O3) Micro Electro Mechanical Systems (MEMS) strain/pressure sensors as a way to enhance sensitivity. The model consists of four piezoresistive strain gauges connected in a Wheatstone Bridge configuration. The MEMS model was simulated from 0 Pa to 50 kPa, resulting in an output signal range of ‐3 mV to 16 mV and a responsivity of 0.38 mV/kPa. Our simulation also showed that as temperature increased, the resistance of the piezoresistive material in the MEMS decreased, leading to changes in the output signals. The reliable device effectively utilizes the full Wheatstone Bridge configuration to compensate for temperature‐related influences. These early results suggest that Ga2O3‐based MEMS devices have great potential for use in high‐temperature pressure sensor applications in the future.This article is protected by copyright. All rights reserved.
本文介绍了β-氧化镓(β-Ga2O3)微机电系统(MEMS)应变/压力传感器,作为提高灵敏度的一种方法。该模型由四个压阻应变片组成,以惠斯通桥配置连接。对 MEMS 模型进行了 0 Pa 至 50 kPa 的模拟,结果输出信号范围为 -3 mV 至 16 mV,响应度为 0.38 mV/kPa。我们的模拟还表明,随着温度的升高,MEMS 中压阻材料的电阻会减小,从而导致输出信号发生变化。这种可靠的装置有效地利用了全惠斯通电桥配置来补偿与温度有关的影响。这些早期结果表明,基于 Ga2O3 的 MEMS 器件在未来的高温压力传感器应用中具有巨大潜力。本文受版权保护。
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引用次数: 0
Lattice‐Mismatched Epitaxy of InAs on (111)A‐Oriented Substrate: Metamorphic Layer Growth and Self‐Assembly of Quantum Dots 面向 (111)A 基底上 InAs 的晶格错配外延:变质层生长和量子点的自组装
Pub Date : 2023-12-12 DOI: 10.1002/pssa.202300767
T. Mano, Akihiro Ohtake, Takashi Kuroda
This paper reviews recent developments in the lattice‐mismatched epitaxy of InAs on (111)A‐oriented substrates and related research topics, in which the presence or absence of the misfit dislocations is controlled via prescribed growth sequences. When InAs is grown on GaAs (111)A substrates under standard growth conditions, a unique lattice‐relaxation mechanism occurs. A misfit dislocation network is formed at the initial stage of InAs growth, that is followed by the layer‐by‐layer growth of relaxed InAs films. The InAs/GaAs (111)A heterostructure is being applied in infrared photodetectors which have a new operating principle that employs the high density dislocations at the interface. The InAs/GaAs (111)A heterostructure is also useful for the growth of InGaAs layers: a nearly lattice‐relaxed InGaAs containing different concentrations of indium can be formed by inserting a thin‐InAs layer between the InGaAs and GaAs. These InGaAs layers can be used as virtual substrates with a desired lattice constant for a range of devices. In addition to the formation of lattice‐relaxed structures, dislocation‐free InAs QDs can be formed on InP (111)A substrates by applying droplet epitaxy. The C3v symmetry of the (111)A surface makes it possible to form symmetric InAs quantum dots that emit entangled photon pairs at telecommunication wavelengths.This article is protected by copyright. All rights reserved.
本文回顾了在面向(111)A基底上的InAs晶格错配外延及相关研究课题的最新进展,其中错配位错的存在与否是通过规定的生长序列来控制的。在标准生长条件下,在砷化镓 (111)A 基底上生长 InAs 时,会出现一种独特的晶格松弛机制。在 InAs 生长的初始阶段会形成错配位错网络,随后逐层生长出松弛的 InAs 薄膜。InAs/GaAs(111)A 异质结构正被应用于红外光探测器中,该探测器的新工作原理是利用界面上的高密度位错。InAs/GaAs(111)A 异质结构还可用于生长 InGaAs 层:通过在 InGaAs 和 GaAs 之间插入一薄层 InAs,可形成含有不同浓度铟的近乎晶格松弛的 InGaAs。这些 InGaAs 层可用作虚拟衬底,具有一系列器件所需的晶格常数。除了形成晶格松弛结构外,还可以通过液滴外延技术在 InP (111)A 基底上形成无位错 InAs QD。(111)A表面的C3v对称性使得形成对称InAs量子点成为可能,这种量子点可在电信波长上发射纠缠光子对。本文受版权保护。
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引用次数: 0
Organic Nanomolecular Electronics: From Fundamental Aspects to Device Applications 有机纳米分子电子学:从基础到器件应用
Pub Date : 2023-12-01 DOI: 10.1002/pssa.202300847
Shyam S. Pandey, Kazuhiro Marumoto, Takaaki Manaka
The organic photofunctional materials bearing the fl exibility, softness and capability of facile large active area fabrication will bene fi t the fi elds of biomedical/biomimetic devices like sensors, soft actuators, and fl exible and wearable optoelectronic devices, which are cumbersome to achieve utilizing conventional inorganic semiconductors. It is worth to mention that that the functions of optoelectronic devices mostly originate from electronic states at the interface between constituent organic materials by the depth of the nanometric region. The intricate interactions and cooperative existence amongst various components of the living organism indicate the possibility of the realization of ef fi - cient multifunctional devices. Therefore, the investigations of electronic behaviour, mass transport, energy transfer and molecular alignments near the interface are signi fi cantly important and suggest to us the unknown functions that can be developed into molecular electronics. This special issue has been dedicated to the 13th International Conference on Nano-Molecular Electronics (ICNME-2022), which was held from December 12-14, 2022 at the Tokyo Institute of Technology, Ookayama, Tokyo, Japan. The conference was of the open style and provided a unique platform for researchers from industry and academia interested in fundamental and applied aspects of functional organic materials, including liquid crystals, polymeric materials, biomaterials etc. to interact and exchange scienti fi c ideas. The program of this conference consisted of the plenary talk, keynote lecture, invited talk, oral and poster presentations. The conference consisted of 8 versatile sessions such as organic semiconductor materials and devices I & II, Fabrication and characterization of organic and molecular devices I & II, Bioelectronics, AI and materials informatics, Organic-Inorganic hybrid material and applications, and Haptic, wearable, fl exible devices and applications. A total of 125 papers (39 Oral and 86 poster) have been contributed from universities, research laboratories and companies in Japan and overseas. The topics of electrical, optical, and physical properties at
有机光功能材料具有可扩展性、柔软性和易于大面积制造的特点,将为生物医学/仿生设备(如传感器、软致动器和可扩展和可穿戴光电设备)的发展带来益处,而传统的无机半导体则难以实现这些功能。值得一提的是,光电器件的功能大多源自纳米级有机材料界面上的电子状态。生物体各组成部分之间错综复杂的相互作用和合作存在,表明了实现高效多功能设备的可能性。因此,对界面附近的电子行为、质量传输、能量传递和分子排列的研究具有重要意义,并为我们提供了可开发成分子电子学的未知功能。第 13 届国际纳米分子电子学会议(ICNME-2022)于 2022 年 12 月 12-14 日在日本东京大冈山的东京工业大学举行,本特刊专门介绍该会议。会议为开放式,为对液晶、高分子材料、生物材料等功能有机材料的基础和应用方面感兴趣的工业界和学术界研究人员提供了一个独特的互动交流平台。本次会议的议程包括全体大会发言、主题演讲、特邀演讲、口头和海报展示。会议包括 8 个多功能分会,如有机半导体材料与器件 I 和 II、有机与分子器件的制造与表征 I 和 II、生物电子学、人工智能与材料信息学、有机-无机混合材料与应用,以及触觉、可穿戴、可飞行器件与应用。来自日本和海外的大学、研究实验室和公司共提交了 125 篇论文(39 篇口头论文和 86 篇海报论文)。会议主题包括电学、光学和物理性质,以及可穿戴设备的应用。
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引用次数: 0
Synthesis and Characterization of Large‐Area Nanometer‐Thin β‐Ga2O3 Films from Oxide Printing of Liquid Metal Gallium 利用液态金属镓的氧化物印刷合成大面积纳米级薄 β-Ga2O3 薄膜并确定其特性
Pub Date : 2020-04-22 DOI: 10.1002/pssa.201901007
Jacqueline Cooke, Leila Ghadbeigi, Rujun Sun, A. Bhattacharyya, Yunshan Wang, M. Scarpulla, S. Krishnamoorthy, B. Sensale‐Rodriguez
Herein, wafer‐scale Ga2O3 films are shown, which are synthesized by oxide printing of liquid metal Ga on SiO2/Si and sapphire substrates. This process enables highly uniform ≈2 nm‐thick films over ≫1 mm2 areas. The physical properties of these films (as‐deposited and after annealing in ambient conditions) are investigated. X‐ray photoelectron spectroscopy indicates that the as‐prepared films contain significant fractions (up to 8% wt) of Ga metal residue, which completely converts to Ga2O3 after annealing. Results from Raman spectroscopy confirm the presence of β‐phase in annealed samples. Transmission electron microscopy images indicate that the films are composed of polycrystalline domains. Photoluminescence is observed in all samples, depicting the typical spectrum of Ga2O3 with four emission bands. After annealing, the luminescence intensity increases across all samples, which is attributed to an enhancement in crystallinity. Also, the relative intensity of the blue emission decreases after annealing, which is consistent with a transition from bluish to greenish color in the films. This observation is associated with a change in defect population upon annealing. Overall, these results demonstrate that oxide printing of liquid metal gallium is a simple process that, upon annealing of the resulting films, leads to nanometer‐thin β‐Ga2O3 films over wafer‐scale areas.
本文展示了通过在二氧化硅/硅和蓝宝石基底上进行液态金属镓的氧化物印刷而合成的晶圆级 Ga2O3 薄膜。这种工艺能在≫1 平方毫米的面积上形成高度均匀的≈2 纳米厚的薄膜。研究了这些薄膜的物理性质(沉积时和在环境条件下退火后)。X 射线光电子能谱显示,在制备的薄膜中含有大量(高达 8%重量比)的 Ga 金属残留物,这些残留物在退火后会完全转化为 Ga2O3。拉曼光谱结果证实退火样品中存在 β 相。透射电子显微镜图像显示,薄膜由多晶畴组成。在所有样品中都观察到了光致发光,描绘了具有四个发射带的典型 Ga2O3 光谱。退火后,所有样品的发光强度都有所增加,这归因于结晶度的提高。此外,退火后蓝色发射的相对强度降低,这与薄膜颜色从蓝色向绿色过渡相一致。这一现象与退火后缺陷群的变化有关。总之,这些结果表明,液态金属镓的氧化物印刷是一种简单的工艺,在所得薄膜退火后,可在晶圆级面积上形成纳米级薄的β-Ga2O3 薄膜。
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引用次数: 12
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physica status solidi (a)
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