2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)最新文献
Pub Date : 2013-06-16DOI: 10.1109/TRANSDUCERS.2013.6627029
Y. C. Chen, W. Hsu, S. H. Cheng, Y. T. Cheng
The paper presents both anti-inference packaging and effective calibration schemes for accurate current detection in household appliance using flexible current tags. The sensor with NiFe C-clamp stripes can effectively prevent electromagnetic interference (EMI) effect and reduce the measurement error down to less than 2%, while the external current source is placed 1cm away from the power cord to be detected. Meanwhile, an effective calibration scheme using two sensor coils with a designated separation is proposed and experimentally validated for accurate current detection based on a quadratic polynomial approximation.
{"title":"Anti-electromagnetic interference and calibration schemes of flexible current sensor tag for reliable current detection in household appliance","authors":"Y. C. Chen, W. Hsu, S. H. Cheng, Y. T. Cheng","doi":"10.1109/TRANSDUCERS.2013.6627029","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2013.6627029","url":null,"abstract":"The paper presents both anti-inference packaging and effective calibration schemes for accurate current detection in household appliance using flexible current tags. The sensor with NiFe C-clamp stripes can effectively prevent electromagnetic interference (EMI) effect and reduce the measurement error down to less than 2%, while the external current source is placed 1cm away from the power cord to be detected. Meanwhile, an effective calibration scheme using two sensor coils with a designated separation is proposed and experimentally validated for accurate current detection based on a quadratic polynomial approximation.","PeriodicalId":202479,"journal":{"name":"2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)","volume":"67 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-06-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131647529","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-06-16DOI: 10.1109/TRANSDUCERS.2013.6627323
U. Hassan, P. Bajaj, G. Damhorst, R. Bashir
Biomedical applications of micro and nanotechnology hold tremendous promise in diagnostics, therapeutic, and tissue engineering. Lab on chip devices can be used for the rapid and sensitive detection of biological entities including cells, bacteria, proteins and DNA. These microfluidic devices can provide for the sensitive and selective detection of CD4+ T cells for detection of HIV/AIDs for global health at point of care. Significant opportunities exist for rapid point-of-care detection of nucleic acid molecules from bacterial or viral agents of infection, for food borne pathogens. Tremendous opportunities exist in the development of cell-based bio-actuators, autonomous biological micro robots and cellular machines for a wide range of applications.
{"title":"Biomedical micro and nanotechnology: From lab-on-chip to building systems with cells","authors":"U. Hassan, P. Bajaj, G. Damhorst, R. Bashir","doi":"10.1109/TRANSDUCERS.2013.6627323","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2013.6627323","url":null,"abstract":"Biomedical applications of micro and nanotechnology hold tremendous promise in diagnostics, therapeutic, and tissue engineering. Lab on chip devices can be used for the rapid and sensitive detection of biological entities including cells, bacteria, proteins and DNA. These microfluidic devices can provide for the sensitive and selective detection of CD4+ T cells for detection of HIV/AIDs for global health at point of care. Significant opportunities exist for rapid point-of-care detection of nucleic acid molecules from bacterial or viral agents of infection, for food borne pathogens. Tremendous opportunities exist in the development of cell-based bio-actuators, autonomous biological micro robots and cellular machines for a wide range of applications.","PeriodicalId":202479,"journal":{"name":"2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)","volume":"30 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-06-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132965533","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-06-16DOI: 10.1109/TRANSDUCERS.2013.6626707
A. Bienaimé, C. Élie-Caille, T. Leblois
In this study, we developed a specific GaAs acoustic sensor adapted for molecules detection in biological media. The design was performed taking in mind that the device will be in contact with liquid. The resonant structure is a membrane. Microfabrication processes based on anisotropic chemical etching were used to obtain the right structure. The best performance was obtained in a (100) wafer with an electric field aligned along <;110> direction. For a membrane thickness of 50 μm, fR is close to 33.36 Mhz and the sensitivity is higher than for QCM and is similar to the values obtained using SPR techniques.
{"title":"High sensitive mass detection in liquid using a piezoelectric GaAs membrane","authors":"A. Bienaimé, C. Élie-Caille, T. Leblois","doi":"10.1109/TRANSDUCERS.2013.6626707","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2013.6626707","url":null,"abstract":"In this study, we developed a specific GaAs acoustic sensor adapted for molecules detection in biological media. The design was performed taking in mind that the device will be in contact with liquid. The resonant structure is a membrane. Microfabrication processes based on anisotropic chemical etching were used to obtain the right structure. The best performance was obtained in a (100) wafer with an electric field aligned along <;110> direction. For a membrane thickness of 50 μm, fR is close to 33.36 Mhz and the sensitivity is higher than for QCM and is similar to the values obtained using SPR techniques.","PeriodicalId":202479,"journal":{"name":"2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)","volume":"23 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-06-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125198837","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-06-16DOI: 10.1109/TRANSDUCERS.2013.6627240
R. Sochol, C. Glick, A. Lu, M. Wah, T. Brubaker, Kye Y. Lee, K. Iwai, Luke P. Lee, Liwei Lin
Microfluidic components that are capable of autonomous “on-chip” operations at ultra-low Reynolds number (e.g., Re <; 0.2) are critical to the advancement of integrated fluidic circuitry for chemical and biological applications, including point-of-care (POC) molecular diagnostics and on-site chemical detection. Previously, researchers have utilized dynamic resistive elements, such as suspended microbeads and rotational microstructures, to rectify Re <; 0.2 flow; however, such systems require hydrodynamic forces to return the resistive elements to their “closed state” positions, allowing undesired reverse flow during this process. Conversely, double-layer “flap-type” check valves immediately return to their closed state in the absence of forward flow; unfortunately, such valves have exhibited limited functionality for Re <; ~0.3 flow. To overcome these issues, here we introduce single-layer microfluidic “spring” diodes, which utilize free-standing polymeric microsprings that: (i) compress to promote forward flow, (ii) return to the closed position in the absence of forward flow, and (iii) remain in the closed position to obstruct reverse flow. The free-standing microspring elements were constructed in situ via optofluidic lithography processes. Experimental results revealed an improvement in Di performance with increasing Re for Re <; 0.1; however, Di's were found to decrease for Re > 0.1. At maximum, we observed an experimental average Di of 4.10±0.01, corresponding to 0.075 <; Re <; 0.1 fluid flow.
{"title":"Single-layer microfluidic “spring” diodes via optofluidic lithography for ultra-low reynolds number applications","authors":"R. Sochol, C. Glick, A. Lu, M. Wah, T. Brubaker, Kye Y. Lee, K. Iwai, Luke P. Lee, Liwei Lin","doi":"10.1109/TRANSDUCERS.2013.6627240","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2013.6627240","url":null,"abstract":"Microfluidic components that are capable of autonomous “on-chip” operations at ultra-low Reynolds number (e.g., Re <; 0.2) are critical to the advancement of integrated fluidic circuitry for chemical and biological applications, including point-of-care (POC) molecular diagnostics and on-site chemical detection. Previously, researchers have utilized dynamic resistive elements, such as suspended microbeads and rotational microstructures, to rectify Re <; 0.2 flow; however, such systems require hydrodynamic forces to return the resistive elements to their “closed state” positions, allowing undesired reverse flow during this process. Conversely, double-layer “flap-type” check valves immediately return to their closed state in the absence of forward flow; unfortunately, such valves have exhibited limited functionality for Re <; ~0.3 flow. To overcome these issues, here we introduce single-layer microfluidic “spring” diodes, which utilize free-standing polymeric microsprings that: (i) compress to promote forward flow, (ii) return to the closed position in the absence of forward flow, and (iii) remain in the closed position to obstruct reverse flow. The free-standing microspring elements were constructed in situ via optofluidic lithography processes. Experimental results revealed an improvement in Di performance with increasing Re for Re <; 0.1; however, Di's were found to decrease for Re > 0.1. At maximum, we observed an experimental average Di of 4.10±0.01, corresponding to 0.075 <; Re <; 0.1 fluid flow.","PeriodicalId":202479,"journal":{"name":"2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)","volume":"10 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-06-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131147703","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-06-16DOI: 10.1109/TRANSDUCERS.2013.6626876
Yu Zhao, Fei Yu, H. Cao, Honglong Chang, Xiaoxiao Zhang, T. Hsiai, Y. Tai
Heart, as the least regenerative organ in human, can regenerate in zebrafish even after up to 20% ventricle amputation without forming any scar tissue. The Electrocardiogram (ECG) recorded from multiple fixed locations around the heart with high spatial resolution can elucidate changes in cardiac electric phenotypes of injured and regenerating tissues. Therefore, a wearable zebrafish harness with a percutaneous planar electrode array was designed, fabricated and properly positioned to uncover the electrical conduction phenotypes during the zebrafish heart regeneration. The recording circuitry and data processing have also been developed and customized, paving the way to the future underwater wireless long-term ECG recording in real time.
{"title":"A wearable percutaneous implant for long term zebrafish epicardial ECG recording","authors":"Yu Zhao, Fei Yu, H. Cao, Honglong Chang, Xiaoxiao Zhang, T. Hsiai, Y. Tai","doi":"10.1109/TRANSDUCERS.2013.6626876","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2013.6626876","url":null,"abstract":"Heart, as the least regenerative organ in human, can regenerate in zebrafish even after up to 20% ventricle amputation without forming any scar tissue. The Electrocardiogram (ECG) recorded from multiple fixed locations around the heart with high spatial resolution can elucidate changes in cardiac electric phenotypes of injured and regenerating tissues. Therefore, a wearable zebrafish harness with a percutaneous planar electrode array was designed, fabricated and properly positioned to uncover the electrical conduction phenotypes during the zebrafish heart regeneration. The recording circuitry and data processing have also been developed and customized, paving the way to the future underwater wireless long-term ECG recording in real time.","PeriodicalId":202479,"journal":{"name":"2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)","volume":"27 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-06-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133112685","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-06-16DOI: 10.1109/TRANSDUCERS.2013.6627361
J. Coster, F. Ling, A. Witvrouw, I. Wolf
This paper reports on a new test structure that is designed for measuring adhesion forces that arise between contacting surfaces in microelectromechanical systems (MEMS). More specifically, the test structure allows one to measure the force that occurs when out-of-plane moving MEMS enter into mechanical contact with a bottom electrode. The test structure has been designed and fabricated in imec's poly-SiGe MEMS platform. A measurement procedure that relies on the use of a laser Doppler vibrometer (LDV) has been elaborated. The measurement results that were obtained at different pressure levels and in dry environments as well as in environments with varying levels of relative humidity show how van der Waals and other adhesion forces can be measured using the device.
{"title":"Dedicated test structure for the measurement of adhesion forces between contacting surfaces in MEMS devices","authors":"J. Coster, F. Ling, A. Witvrouw, I. Wolf","doi":"10.1109/TRANSDUCERS.2013.6627361","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2013.6627361","url":null,"abstract":"This paper reports on a new test structure that is designed for measuring adhesion forces that arise between contacting surfaces in microelectromechanical systems (MEMS). More specifically, the test structure allows one to measure the force that occurs when out-of-plane moving MEMS enter into mechanical contact with a bottom electrode. The test structure has been designed and fabricated in imec's poly-SiGe MEMS platform. A measurement procedure that relies on the use of a laser Doppler vibrometer (LDV) has been elaborated. The measurement results that were obtained at different pressure levels and in dry environments as well as in environments with varying levels of relative humidity show how van der Waals and other adhesion forces can be measured using the device.","PeriodicalId":202479,"journal":{"name":"2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)","volume":"18 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-06-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131676129","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-06-16DOI: 10.1109/TRANSDUCERS.2013.6626847
Y. S. Chen, L. Ke, C. Tung, C. Lu, C. C. Hu, C. H. Liu
We propose a forming method of hydrogel-based cell sheets for regenerating three dimensional lobule-mimetic constructions. Accumulating the cells are conventional methods of three dimensional designs. In this study, we have designed a cell sheet chip to form a poly (ethylene glycol) diacrylate (PEGDA)-based cell sheet by two methods. First method is to pattern cells by DEP force for mimicking the pattern of the hepatocyte in vivo. Second method is to embed cells by UV light for photopolymerizing the PEGDA-based cell sheet. Stacking chip was used to form multilayer PEGDA-based cell sheets. The three dimensional lobule-mimetic regeneration will have widespread the applications in tissue engineering and detoxication experiments.
{"title":"Three dimensional lobule-mimetic regeneration in vitro by PEGDA-based cell sheets","authors":"Y. S. Chen, L. Ke, C. Tung, C. Lu, C. C. Hu, C. H. Liu","doi":"10.1109/TRANSDUCERS.2013.6626847","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2013.6626847","url":null,"abstract":"We propose a forming method of hydrogel-based cell sheets for regenerating three dimensional lobule-mimetic constructions. Accumulating the cells are conventional methods of three dimensional designs. In this study, we have designed a cell sheet chip to form a poly (ethylene glycol) diacrylate (PEGDA)-based cell sheet by two methods. First method is to pattern cells by DEP force for mimicking the pattern of the hepatocyte in vivo. Second method is to embed cells by UV light for photopolymerizing the PEGDA-based cell sheet. Stacking chip was used to form multilayer PEGDA-based cell sheets. The three dimensional lobule-mimetic regeneration will have widespread the applications in tissue engineering and detoxication experiments.","PeriodicalId":202479,"journal":{"name":"2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)","volume":"15 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-06-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115339159","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-06-16DOI: 10.1109/TRANSDUCERS.2013.6626919
Hai Huang, Mengbing Liang, R. Tang, J. Oiler, T. Ma, Hongyu Yu
This paper reports a liquid-state low frequency micro-accelerometer based on molecular electronic transducer (MET) which senses movement of liquid electrolyte relative to fixed electrodes. The device employs a sub-microliter electrolyte droplet encapsulated in oil as the sensing body and MET electrodes as read-out mechanism. Silicon-based planar micro-fabrication technology is applied to simplify the fabrication and enable mass production. The device achieves sensitivity of 10.8 V/G (G = 9.81 m/s2) at 20 Hz with nearly flat response over the frequency range of 1-40 Hz and a low noise floor of 100 μG/√(Hz) at 20 Hz.
{"title":"An electrolyte droplet-based low frequency accelerometer based on molecular electronic transducer","authors":"Hai Huang, Mengbing Liang, R. Tang, J. Oiler, T. Ma, Hongyu Yu","doi":"10.1109/TRANSDUCERS.2013.6626919","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2013.6626919","url":null,"abstract":"This paper reports a liquid-state low frequency micro-accelerometer based on molecular electronic transducer (MET) which senses movement of liquid electrolyte relative to fixed electrodes. The device employs a sub-microliter electrolyte droplet encapsulated in oil as the sensing body and MET electrodes as read-out mechanism. Silicon-based planar micro-fabrication technology is applied to simplify the fabrication and enable mass production. The device achieves sensitivity of 10.8 V/G (G = 9.81 m/s2) at 20 Hz with nearly flat response over the frequency range of 1-40 Hz and a low noise floor of 100 μG/√(Hz) at 20 Hz.","PeriodicalId":202479,"journal":{"name":"2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)","volume":"312 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-06-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115625625","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-06-16DOI: 10.1109/TRANSDUCERS.2013.6627156
V. Laukhin, V. Lebedev, E. Laukhina, Raúl Martín, J. Pastor, Rosa Villa, J. Aguiló, C. Rovira, J. Veciana
The purpose of this paper is the development of devices for monitoring the intraocular pressure (IOP) variations in a non-invasive way. The importance of the problem is caused by the need of a glaucoma diagnostic by control of the IOP in patients. It has been shown [1] that monitoring of the IOP variations over 24 h may change the glaucoma management of patients. Here we present a new prototype of an IOP sensing device based on a commercial hybrid contact lens (HCL) that provides a greater comfort for patients. Although the HCL was equipped with the same sensing BL film as in [2], in the sensing lens fabrication, a new design approach has been used. This approach allowed the use of different parts of the same BL film gauge as the pressure sensor and temperature effect compensator.
{"title":"Hybrid contact lens capable of intraocular pressure monitoring in noninvasive way","authors":"V. Laukhin, V. Lebedev, E. Laukhina, Raúl Martín, J. Pastor, Rosa Villa, J. Aguiló, C. Rovira, J. Veciana","doi":"10.1109/TRANSDUCERS.2013.6627156","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2013.6627156","url":null,"abstract":"The purpose of this paper is the development of devices for monitoring the intraocular pressure (IOP) variations in a non-invasive way. The importance of the problem is caused by the need of a glaucoma diagnostic by control of the IOP in patients. It has been shown [1] that monitoring of the IOP variations over 24 h may change the glaucoma management of patients. Here we present a new prototype of an IOP sensing device based on a commercial hybrid contact lens (HCL) that provides a greater comfort for patients. Although the HCL was equipped with the same sensing BL film as in [2], in the sensing lens fabrication, a new design approach has been used. This approach allowed the use of different parts of the same BL film gauge as the pressure sensor and temperature effect compensator.","PeriodicalId":202479,"journal":{"name":"2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)","volume":"44 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-06-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115644579","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-06-16DOI: 10.1109/TRANSDUCERS.2013.6627309
Ai Qun Liu, W. Zhu, Q. Song, R. F. Huang, S. Ting, Jinghua Teng, X. Zhang
In this paper, we demonstrate a metamaterial tunable filter with liquid metal, which can be tuned by changing the air pressure within the channels. In experiment, it measures a 3.3-GHz tuning range for the tunable metmaterial unit with the working wavelength of 11.27 GHz. The tuning of 9 × 9 unit array is demonstrated. Different from traditional metamaterials, the metal patterns of the tunable metamaterial filter are liquid state which can be reshaped once fabricated. The liquid state metal pattern not only advances in flexible tuning method, but also results in large tuning range for vast applications, such as tunable filter, accelerometer and optical switch.
{"title":"Microfluidic tunable metamaterial for gigahertz filter array","authors":"Ai Qun Liu, W. Zhu, Q. Song, R. F. Huang, S. Ting, Jinghua Teng, X. Zhang","doi":"10.1109/TRANSDUCERS.2013.6627309","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2013.6627309","url":null,"abstract":"In this paper, we demonstrate a metamaterial tunable filter with liquid metal, which can be tuned by changing the air pressure within the channels. In experiment, it measures a 3.3-GHz tuning range for the tunable metmaterial unit with the working wavelength of 11.27 GHz. The tuning of 9 × 9 unit array is demonstrated. Different from traditional metamaterials, the metal patterns of the tunable metamaterial filter are liquid state which can be reshaped once fabricated. The liquid state metal pattern not only advances in flexible tuning method, but also results in large tuning range for vast applications, such as tunable filter, accelerometer and optical switch.","PeriodicalId":202479,"journal":{"name":"2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)","volume":"194 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-06-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115728594","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)
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