2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)最新文献
Pub Date : 2013-06-16DOI: 10.1109/TRANSDUCERS.2013.6627300
Xueqiu You, J. Pak
This paper describes a silk fibroin-encapsulated graphene field effect transistor (FET) enzymatic biosensor that utilizes silk protein as both device substrate and enzyme immobilization material. Glucose molecules are detected by the conductance change and the Dirac point shift of the graphene transistor as the glucose is oxidized by glucose oxidase that was immobilized in silk fibroin film on the graphene FET. This graphene FET biosensor detected glucose range in 3-10 mM, which covers the reference range for diabetes diagnostics. Because this fibroin-encapsulated graphene FET enzymatic biosensor is biocompatible, flexible, and long-term stable, it holds great promise for portable, wearable, and implantable continuous glucose monitoring applications.
{"title":"Silk stabilized graphene FET enzymatic glucose biosensor","authors":"Xueqiu You, J. Pak","doi":"10.1109/TRANSDUCERS.2013.6627300","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2013.6627300","url":null,"abstract":"This paper describes a silk fibroin-encapsulated graphene field effect transistor (FET) enzymatic biosensor that utilizes silk protein as both device substrate and enzyme immobilization material. Glucose molecules are detected by the conductance change and the Dirac point shift of the graphene transistor as the glucose is oxidized by glucose oxidase that was immobilized in silk fibroin film on the graphene FET. This graphene FET biosensor detected glucose range in 3-10 mM, which covers the reference range for diabetes diagnostics. Because this fibroin-encapsulated graphene FET enzymatic biosensor is biocompatible, flexible, and long-term stable, it holds great promise for portable, wearable, and implantable continuous glucose monitoring applications.","PeriodicalId":202479,"journal":{"name":"2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)","volume":"5 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-06-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115891562","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-06-16DOI: 10.1109/TRANSDUCERS.2013.6627358
M. Swanwick, P. Keathley, F. X. Kärtner, L. Velásquez-García
We report the design, fabrication, and experimental characterization of a novel ultrafast optical field emission cathode comprised of a large and dense array of nano-sharp high-aspect-ratio single-crystal silicon columns (>100,000 tips, 4.6-million tips.cm-2). The cathode emits electrons with as little as 25 nJ and can produce up to 2.54 pC electron bunches per laser pulse when interacting with 35 fs 800 nm laser pulses with a 765 μm by 80 μm elliptical spot size. This is the first report of current measurements from Si tip arrays using photo-field emission; in addition, this is the first demonstration of a photocathode array that, depending on the energy of the laser pulses, can emit in the multi-photon or the tunnelling regime.
{"title":"Ultrafast photo-triggered field emission cathodes using massive, uniform arrays of nano-sharp high-aspect-ratio silicon structures","authors":"M. Swanwick, P. Keathley, F. X. Kärtner, L. Velásquez-García","doi":"10.1109/TRANSDUCERS.2013.6627358","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2013.6627358","url":null,"abstract":"We report the design, fabrication, and experimental characterization of a novel ultrafast optical field emission cathode comprised of a large and dense array of nano-sharp high-aspect-ratio single-crystal silicon columns (>100,000 tips, 4.6-million tips.cm-2). The cathode emits electrons with as little as 25 nJ and can produce up to 2.54 pC electron bunches per laser pulse when interacting with 35 fs 800 nm laser pulses with a 765 μm by 80 μm elliptical spot size. This is the first report of current measurements from Si tip arrays using photo-field emission; in addition, this is the first demonstration of a photocathode array that, depending on the energy of the laser pulses, can emit in the multi-photon or the tunnelling regime.","PeriodicalId":202479,"journal":{"name":"2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)","volume":"32 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-06-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124294309","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-06-16DOI: 10.1109/TRANSDUCERS.2013.6627190
Z. Qian, Y. Hui, F. Liu, S. Kar, M. Rinaldi
This paper reports on the first demonstration of a high frequency (245 MHz) Graphene-Aluminum Nitride (G-AlN) nano plate resonator (NPR). For the first time, a two-dimensional (2D) electrically conductive graphene layer was integrated on top of an ultra-thin (500 nm) AlN nano plate and excited into a high frequency contour-extensional mode of vibration by piezoelectric transduction. Despite the reduced mass (~43%) and volume (~16%) and the increased sound velocity, hence resonant frequency (~23%), of the G-AlN NPR, unchanged device figure of merit (kt2·Q≈18) compared to the conventional AlN NPR was recorded, which demonstrates the great potential of the proposed technology for the implementation of a new class of ultra-sensitive and low noise G-AlN resonant sensors.
{"title":"245 MHz graphene-aluminum nitride nano plate resonator","authors":"Z. Qian, Y. Hui, F. Liu, S. Kar, M. Rinaldi","doi":"10.1109/TRANSDUCERS.2013.6627190","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2013.6627190","url":null,"abstract":"This paper reports on the first demonstration of a high frequency (245 MHz) Graphene-Aluminum Nitride (G-AlN) nano plate resonator (NPR). For the first time, a two-dimensional (2D) electrically conductive graphene layer was integrated on top of an ultra-thin (500 nm) AlN nano plate and excited into a high frequency contour-extensional mode of vibration by piezoelectric transduction. Despite the reduced mass (~43%) and volume (~16%) and the increased sound velocity, hence resonant frequency (~23%), of the G-AlN NPR, unchanged device figure of merit (kt2·Q≈18) compared to the conventional AlN NPR was recorded, which demonstrates the great potential of the proposed technology for the implementation of a new class of ultra-sensitive and low noise G-AlN resonant sensors.","PeriodicalId":202479,"journal":{"name":"2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)","volume":"277 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-06-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114485876","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-06-16DOI: 10.1109/TRANSDUCERS.2013.6627278
Q. Shen, W. Yuan, Xiaoping Li, Y. Hao, Jianbing Xie, Honglong Chang
This paper reports an orthogonal analysis method for decoupling on structural parameters of microthrusters. Geometrical parameters that impact the performance of microthruster are sorted by range analysis, which is first used to explore how to fully decouple structural parameters. The results show that the throat width affects the thrust seriously. Although the average specific impulse (ASI) decreases at the beginning and then increases when increasing half convergence angle and throat radius of curvature, both of them have less influence on the ASI than exit-to-throat section ratio and half divergence angle as a whole. A MEMS solid propellant thruster (MSPT) was carried out to prove its feasibility.
{"title":"A fully decoupled design method for MEMS microthruster based on orthogonal analysis","authors":"Q. Shen, W. Yuan, Xiaoping Li, Y. Hao, Jianbing Xie, Honglong Chang","doi":"10.1109/TRANSDUCERS.2013.6627278","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2013.6627278","url":null,"abstract":"This paper reports an orthogonal analysis method for decoupling on structural parameters of microthrusters. Geometrical parameters that impact the performance of microthruster are sorted by range analysis, which is first used to explore how to fully decouple structural parameters. The results show that the throat width affects the thrust seriously. Although the average specific impulse (ASI) decreases at the beginning and then increases when increasing half convergence angle and throat radius of curvature, both of them have less influence on the ASI than exit-to-throat section ratio and half divergence angle as a whole. A MEMS solid propellant thruster (MSPT) was carried out to prove its feasibility.","PeriodicalId":202479,"journal":{"name":"2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)","volume":"16 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-06-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114545424","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-06-16DOI: 10.1109/TRANSDUCERS.2013.6626892
Y. B. Lin, Y. Tzeng, M. Dai, C. K. Liu, L. Liao, H. Chien, Y. S. Chen, K. Wang
This study presents a dynamic multi-force field platform for micro thermoelectric generator (μTEG) assembly. The platform consists of a guide template and an alignment template. The dynamic force fields are provided by gravitational force and magnetic force. The thermolegs are confined by an anti-static ITO cubical well. Without using any redundant thermolegs, the assembly process can achieve 100% yield within 13 minutes. P-type and N-type TEG legs are assembled and transferred to the top and bottom electrodes, respectively. After hot pressing, a 6×6 and a 10×10 Bi2+xTe3-x μTEG array are packaged for testing. The TEG array generates a power of 1.29 mW for a ΔT of 65.9°C under optimized external load of 22.3 Ohm.
{"title":"Multi-force-field assisted self-assembly process of thermoelectric device","authors":"Y. B. Lin, Y. Tzeng, M. Dai, C. K. Liu, L. Liao, H. Chien, Y. S. Chen, K. Wang","doi":"10.1109/TRANSDUCERS.2013.6626892","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2013.6626892","url":null,"abstract":"This study presents a dynamic multi-force field platform for micro thermoelectric generator (μTEG) assembly. The platform consists of a guide template and an alignment template. The dynamic force fields are provided by gravitational force and magnetic force. The thermolegs are confined by an anti-static ITO cubical well. Without using any redundant thermolegs, the assembly process can achieve 100% yield within 13 minutes. P-type and N-type TEG legs are assembled and transferred to the top and bottom electrodes, respectively. After hot pressing, a 6×6 and a 10×10 Bi2+xTe3-x μTEG array are packaged for testing. The TEG array generates a power of 1.29 mW for a ΔT of 65.9°C under optimized external load of 22.3 Ohm.","PeriodicalId":202479,"journal":{"name":"2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)","volume":"480 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-06-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116190498","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-06-16DOI: 10.1109/TRANSDUCERS.2013.6626689
E. Comini
Metal oxides are an appealing class of materials having electrical properties ranging from insulating to conductors. Considerable advances have been made concerning preparation and integration of metal oxides in sensing devices. Different morphologies have been proposed and functional tests have been made in different experimental conditions showing the good performances and also the limitations of metal oxides chemical sensors.
{"title":"Metal oxide nano wires chemical sensor: Present status and future challenges","authors":"E. Comini","doi":"10.1109/TRANSDUCERS.2013.6626689","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2013.6626689","url":null,"abstract":"Metal oxides are an appealing class of materials having electrical properties ranging from insulating to conductors. Considerable advances have been made concerning preparation and integration of metal oxides in sensing devices. Different morphologies have been proposed and functional tests have been made in different experimental conditions showing the good performances and also the limitations of metal oxides chemical sensors.","PeriodicalId":202479,"journal":{"name":"2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)","volume":"12 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-06-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121894947","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-06-16DOI: 10.1109/TRANSDUCERS.2013.6627222
F. Qiu, R. Mhanna, L. Zhang, Y. Ding, K. Sugihara, M. Zenobi‐Wong, B. Nelson
Inspired by flagellar propulsion of bacterial such as E. coli, artificial bacterial flagella (ABFs) are magnetic swimming microrobots with helical shapes. ABFs can perform precise three-dimensional (3D) navigation in liquids under low-strength rotating magnetic fields making them attractive tools for drug delivery applications. Further functionalization of these swimming microrobots is necessary to optimize their performance of biomedical tasks. We report here for the first time the successful functionalization of titanium-coated ABFs with temperature-sensitive dipalmitoylphosphatidylcholine (DPPC) liposomes. Adsorption of intact liposomes on titanium was assessed using quartz crystal microbalance with dissipation monitoring (QCM-D). The adsorption of fluorescently labeled liposomes on the surface of ABFs was confirmed with confocal laser scanning microscopy (CLSM) images. Functionalized ABFs (f-ABFs) can be loaded with both hydrophilic and hydrophobic drugs, and controlled drug release triggered by temperature. ABFs have a great potential to be used in targeted and controlled drug delivery and for in vivo sensing.
{"title":"Artificial bacterial flagella functionalized with temperature-sensitive liposomes for biomedical applications","authors":"F. Qiu, R. Mhanna, L. Zhang, Y. Ding, K. Sugihara, M. Zenobi‐Wong, B. Nelson","doi":"10.1109/TRANSDUCERS.2013.6627222","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2013.6627222","url":null,"abstract":"Inspired by flagellar propulsion of bacterial such as E. coli, artificial bacterial flagella (ABFs) are magnetic swimming microrobots with helical shapes. ABFs can perform precise three-dimensional (3D) navigation in liquids under low-strength rotating magnetic fields making them attractive tools for drug delivery applications. Further functionalization of these swimming microrobots is necessary to optimize their performance of biomedical tasks. We report here for the first time the successful functionalization of titanium-coated ABFs with temperature-sensitive dipalmitoylphosphatidylcholine (DPPC) liposomes. Adsorption of intact liposomes on titanium was assessed using quartz crystal microbalance with dissipation monitoring (QCM-D). The adsorption of fluorescently labeled liposomes on the surface of ABFs was confirmed with confocal laser scanning microscopy (CLSM) images. Functionalized ABFs (f-ABFs) can be loaded with both hydrophilic and hydrophobic drugs, and controlled drug release triggered by temperature. ABFs have a great potential to be used in targeted and controlled drug delivery and for in vivo sensing.","PeriodicalId":202479,"journal":{"name":"2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)","volume":"111 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-06-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"117244684","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-06-16DOI: 10.1109/TRANSDUCERS.2013.6627209
J. Heo, Y. Lim, H. Shin
We introduce a hydrogen gas sensor based on a suspended monolithic carbon nanowire structure. This structure provides selective and sensitive hydrogen sensing capability and unique advantages overcoming limitation of on-plane nanostructure based sensors. The fabrication of suspended carbon nanowire consists of simple two-step conventional microfabrication processes; photolithography and pyrolysis. The monolithic structure ensures perfect ohmic contact between the nanowire and the electrical contact pads. 20 ppm of hydrogen was successfully detected by a suspended monolithic carbon nanowire (width = 300 nm, thickness = 600 nm, distance between the nanowire and the substrate = 7.3 μm) coated wiht a 10-nm-thick palladium layer.
{"title":"Development of a hydrogen gas sensor based on a suspended monolithic carbon nanowire platform","authors":"J. Heo, Y. Lim, H. Shin","doi":"10.1109/TRANSDUCERS.2013.6627209","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2013.6627209","url":null,"abstract":"We introduce a hydrogen gas sensor based on a suspended monolithic carbon nanowire structure. This structure provides selective and sensitive hydrogen sensing capability and unique advantages overcoming limitation of on-plane nanostructure based sensors. The fabrication of suspended carbon nanowire consists of simple two-step conventional microfabrication processes; photolithography and pyrolysis. The monolithic structure ensures perfect ohmic contact between the nanowire and the electrical contact pads. 20 ppm of hydrogen was successfully detected by a suspended monolithic carbon nanowire (width = 300 nm, thickness = 600 nm, distance between the nanowire and the substrate = 7.3 μm) coated wiht a 10-nm-thick palladium layer.","PeriodicalId":202479,"journal":{"name":"2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-06-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125939335","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-06-16DOI: 10.1109/TRANSDUCERS.2013.6627205
Lei Xu, Zhengfei Dai, Tie Li, G. Duan, W. Cai, Yuelin Wang
Ultra-high performances of low power, high sensitivity, and fast response was achieved in a novel micro/nano gas sensor that fused a microhotplatform (MHP) and a monolayer of ordered porous SnO2 nanofilm. Based on the MHP with a platinum microheater and interdigital electrode (IDE), a highly ordered SnO2 porous film was in-situ synthesized using a polystyrene sphere monolayer colloidal crystal template. Test results indicated that the sensor was sensitive to 100 ppb ethanol with a sensitivity of 1.6 (Rair/Rgas), a power consumption of 25 mW and a response time less than 2 s. The detection limit of the sensor was calculated as 9 ppb.
{"title":"Ultra high performance gas sensor based on IC compatible fusion of micromachined hotplatform and nanostructured porous film","authors":"Lei Xu, Zhengfei Dai, Tie Li, G. Duan, W. Cai, Yuelin Wang","doi":"10.1109/TRANSDUCERS.2013.6627205","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2013.6627205","url":null,"abstract":"Ultra-high performances of low power, high sensitivity, and fast response was achieved in a novel micro/nano gas sensor that fused a microhotplatform (MHP) and a monolayer of ordered porous SnO2 nanofilm. Based on the MHP with a platinum microheater and interdigital electrode (IDE), a highly ordered SnO2 porous film was in-situ synthesized using a polystyrene sphere monolayer colloidal crystal template. Test results indicated that the sensor was sensitive to 100 ppb ethanol with a sensitivity of 1.6 (Rair/Rgas), a power consumption of 25 mW and a response time less than 2 s. The detection limit of the sensor was calculated as 9 ppb.","PeriodicalId":202479,"journal":{"name":"2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)","volume":"2 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-06-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125078026","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-06-16DOI: 10.1109/TRANSDUCERS.2013.6627253
Wei Bian, Xiaoming Wu, L. Bu, X. Wang, Litian Liu
In this paper, a novel electrostatic vibration energy harvester based on PTFE electrets and metal ball cluster is presented, which is designed for multiple axes and wideband frequency vibration applications. The advancements of the energy harvester include: (1) converting both vertical and horizontal vibration energy into electric energy; (2) low and wide frequency response; (3) simple structure and fabrication processes. Experimental results show that the device produces more power in vertical than in horizontal direction. From 10Hz to 30Hz, there is no sharp drop of output power on the frequency response trace of the device. The maximum peak output power reaches 25μW with vibration condition of 5mm @ 30Hz. For a 0.5μF capacitance load, the maximum charging power is 6.5nW.
{"title":"Multiple axes vibration energy harvester based on PTFE and metal balls","authors":"Wei Bian, Xiaoming Wu, L. Bu, X. Wang, Litian Liu","doi":"10.1109/TRANSDUCERS.2013.6627253","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2013.6627253","url":null,"abstract":"In this paper, a novel electrostatic vibration energy harvester based on PTFE electrets and metal ball cluster is presented, which is designed for multiple axes and wideband frequency vibration applications. The advancements of the energy harvester include: (1) converting both vertical and horizontal vibration energy into electric energy; (2) low and wide frequency response; (3) simple structure and fabrication processes. Experimental results show that the device produces more power in vertical than in horizontal direction. From 10Hz to 30Hz, there is no sharp drop of output power on the frequency response trace of the device. The maximum peak output power reaches 25μW with vibration condition of 5mm @ 30Hz. For a 0.5μF capacitance load, the maximum charging power is 6.5nW.","PeriodicalId":202479,"journal":{"name":"2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-06-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129756667","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)
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