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2015 Symposium on Piezoelectricity, Acoustic Waves, and Device Applications (SPAWDA)最新文献

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Design of a cross-shaped piezoelectric motor with single driving foot 单驱动脚十字形压电电机的设计
Pub Date : 2015-12-28 DOI: 10.1109/SPAWDA.2015.7364436
Jun-kao Liu, Dongmei Xu, Yingxiang Liu, Xiu-hua Ni, Weishan Chen
A cross-shaped piezoelectric motor with length of 43mm and diameter of 11 mm was proposed in this paper. Two third bending modes were used to generate ellipse trajectory at the driving foot located at the vibrator's center. Sixteen pieces of piezoelectric ceramic plates with sizes of 5mm×3mm×1mm were used to excite two third bending modes. Sine and cosine voltages with effective value of 100V at the frequency of 54.696 kHz were applied to the piezoelectric ceramic plates in right and left sides of the vibrator. Symmetrical structure of the motor solved the problem of mode frequency degeneracy. Two excitation methods were put forward to excite two third bending vibrations. And effectiveness of the two excitation methods was compared by the transient analysis with finite element method. Transient analysis results showed that motion trajectories of nodes on the driving feet were three-dimensional and that ellipse motion in the XOY plane was fit to drive the motor, and the new excitation method improves the vibration amplitude in the OX and OY by 2 times and 4 times, respectively compared with the vibration amplitude excited by the traditional excitation method.
提出了一种长43mm、直径11mm的十字形压电电机。在振动器中心的驱动足处,采用两种三次弯曲模态生成椭圆轨迹。利用16块尺寸为5mm×3mm×1mm的压电陶瓷板激发了两种三次弯曲模态。在振动器左右两侧的压电陶瓷板上分别施加有效值为100V、频率为54.696 kHz的正弦、余弦电压。电机的对称结构解决了模态频率退化问题。提出了两种激励方法来激发三分之二弯曲振动。通过有限元瞬态分析,比较了两种激励方法的有效性。瞬态分析结果表明,驱动足节点的运动轨迹是三维的,适合在XOY平面上进行椭圆运动来驱动电机,与传统激励方法相比,新激励方法将OX和OY的振动幅值分别提高了2倍和4倍。
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引用次数: 0
Ultrasonic cutting of individual silver nanowires by a linearly vibrating micro tool 用线性振动微工具对单个银纳米线进行超声切割
Pub Date : 2015-12-28 DOI: 10.1109/SPAWDA.2015.7364442
Xu Wang, Jun-hui Hu
In this report, we demonstrate an ultrasonic nanowire cutting method, which uses the linear vibration of the tip of a micro tool and the fixing capability of the water molecules between the NW and substrate. The nanowires with a diameter from 50 nm to 400 nm are cut by the needle with the vibration velocity amplitude from 18-220 mm/s at 96.9 kHz. The dependency of the minimum cutting velocity and lower limit of the optimum cutting velocity range on the NW diameter is experimentally clarified. The incision quality is compared with that caused by an elliptical vibration of the micro cutting tool.
在本报告中,我们展示了一种超声波纳米线切割方法,该方法利用微型工具尖端的线性振动和水分子在NW和衬底之间的固定能力。在96.9 kHz频率下,以18 ~ 220 mm/s的振动速度切割直径为50 ~ 400 nm的纳米线。实验明确了最小切削速度和最佳切削速度范围下限与NW直径的关系。比较了微切削刀具椭圆振动对切口质量的影响。
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引用次数: 2
Controlled ultrasonic concentration of nano particles on a nonvibrating substrate 在非振动基板上控制纳米颗粒的超声浓度
Pub Date : 2015-12-28 DOI: 10.1109/SPAWDA.2015.7364439
Xiao-fei Wang, Jun-hui Hu
We show a method of concentrating nanoscale samples in a film of aqueous suspension on a stationary substrate (not in vibration), which employs the acoustic streaming generated by an ultrasonically vibrating needle parallel to and above the stationary substrate. The acoustic streaming eddy on the substrate surface brings nano particles (NPs) to the center of the eddy. Concentrated SiO2 nano particles with a diameter of 250 nm may form one circular spot on the stationary substrate, with a diameter up to 400 μm. The principles of the above phenomena are analyzed and verified by the finite element method.
我们展示了一种将纳米级样品浓缩在固定基底(不振动)上的水悬浮液薄膜中的方法,该方法利用平行于固定基底并在其上方的超声振动针产生的声流。基片表面的声流涡流将纳米粒子带到涡流的中心。直径为250 nm的SiO2纳米颗粒可以在固定的衬底上形成一个直径为400 μm的圆形光斑。用有限元法对上述现象的原理进行了分析和验证。
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引用次数: 0
Pure mode axes of single crystal BaTeMo2O9 单晶BaTeMo2O9的纯模轴
Pub Date : 2015-12-28 DOI: 10.1109/SPAWDA.2015.7364434
Mei-ling Guo, Xue Bai, Jia Li, G. Zhou
The three-dimensional slowness surface method is used to investigate the pure mode axes of single crystal BaTeMo2O9 on the basis of the experimental data. The relationship of the slowness surface and pure mode axes is studied. Under the condition of taking account of the piezoelectric effect, the piezoelectrically stiffened elastic constants are calculated. Pure mode axes of the BaTeMo2O9 crystal are determined and plotted out on the slowness surfaces by software program. The result indicates that Y axis and Z axis are the pure mode axes of single crystal BaTeMo2O9. The validity of the result has been proved by theoretical calculation.
在实验数据的基础上,采用三维慢面法对BaTeMo2O9单晶的纯模轴进行了研究。研究了慢速面与纯模态轴的关系。在考虑压电效应的情况下,计算了压电加筋弹性常数。利用软件程序确定了BaTeMo2O9晶体的纯模轴,并在慢速表面上进行了绘制。结果表明,Y轴和Z轴是单晶BaTeMo2O9的纯模轴。理论计算证明了计算结果的有效性。
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引用次数: 1
Analysis of frequency characteristics of MEMS piezoelectric cantilever beam based energy harvester 基于MEMS压电悬臂梁的能量采集器频率特性分析
Pub Date : 2015-12-28 DOI: 10.1109/SPAWDA.2015.7364470
Jinhui Zhang, Sheng-lin Ma, L. Qin
In this paper, the parameters effect on resonant frequency of MEMS piezoelectric cantilever beam is studied by FEA simulation, which is aimed to provide estimation of the frequency error using simple beam formula for piezoelectric cantilever beam based vibration energy harvester. In the simulation, piezoelectric vibration energy harvester is simplified to a thin silicon cantilever beam with a proof mass attached at the free end; the frequency error (Er) was achieved from the difference of simulation value and the value determined by beam formula, and its three main parameters width to length ratio of cantilever beam, covering area of proof mass, and mass ratio of proof mass to cantilever mass are systematically analyzed with a range of 0.1 to 1, 0.05 to 0.6, 0.5 to 150 respectively; multiple linear regression analysis was used to evaluate these parameters effects. The results show that Er increases with each of these three parameters; the covering area of proof mass has the greatest effect on Er; the range of parameters should be carefully considered to avoid big frequency error using beam equation; the simulation results can be used to guide the design of piezoelectric cantilever beam based vibration energy harvester.
本文通过有限元仿真研究了MEMS压电悬臂梁谐振频率的参数影响,为基于压电悬臂梁的振动能量采集器提供基于简单梁公式的频率误差估计。在仿真中,将压电振动能量采集器简化为自由端附有证明质量的硅悬臂梁;通过模拟值与梁公式确定值的差异得到频率误差(Er),并对其三个主要参数悬臂梁宽长比、证明质量覆盖面积、证明质量与悬臂质量的质量比分别在0.1 ~ 1,0.05 ~ 0.6、0.5 ~ 150范围内进行系统分析;采用多元线性回归分析评价这些参数的影响。结果表明,Er随这三个参数的增大而增大;证明质量覆盖面积对Er的影响最大;采用波束方程时应慎重考虑参数的取值范围,避免出现较大的频率误差;仿真结果可用于指导基于压电悬臂梁的振动能量采集器的设计。
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引用次数: 9
Potential of Al2O3/GaN/Sapphire layered structure for high temperature SAW sensors Al2O3/GaN/蓝宝石层状结构用于高温SAW传感器的潜力
Pub Date : 2015-12-28 DOI: 10.1109/SPAWDA.2015.7364451
S. Zhgoon, O. Legrani, O. Elmazria, T. Aubert, M. Elhosni, Hamza Mersni, L. Lefevre, S. Hage-Ali
This paper describes the investigation of the potential of packageless structures for acoustic wave sensor applications based on Al2O3/IDT/GaN/Sapphire structure. The finite elements modeling predicts the possibility of acoustically isolated waveguiding layer acoustic wave (WLAW) to propagate inside this structure with very low displacement at the top surface of the topmost Al2O3 layer. This layer serves as a protecting layer against oxidation of internal layers as well as an acoustically isolating layer, providing a mean for packageless packaging of this structure. The modeling results get confirmation in experiments with the precursor IDT/GaN/Sapphire structure thus supporting hopes on the predicted correct operation of the final Al2O3/IDT/GaN/Sapphire structure.
本文介绍了基于Al2O3/IDT/GaN/蓝宝石结构的无封装结构在声波传感器应用中的潜力。有限元模型预测了声隔离波导层声波(WLAW)在该结构内部传播的可能性,声波在最上层Al2O3层的上表面以非常低的位移传播。该层作为保护层防止内层氧化以及隔音层,为这种结构的无包装包装提供了一种手段。模拟结果在前驱体IDT/GaN/蓝宝石结构的实验中得到了证实,从而为预测的最终Al2O3/IDT/GaN/蓝宝石结构的正确运行提供了希望。
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引用次数: 1
Working principle and design of a linear ultrasonic motor with ring-type stator 环形定子直线超声电机的工作原理及设计
Pub Date : 2015-12-28 DOI: 10.1109/SPAWDA.2015.7364435
Ji-peng Yan, Yingxiang Liu, S. Shi, Xiu-hua Ni, Huaiyin Xiong
This paper presents a new idea for constructing ring-type linear ultrasonic motor. The stator of proposed motor contains two driving feet, sixteen pieces of piezoelectric ceramic plates and three rings-inner ring, middle ring and outer ring. The proposed ultrasonic motor forms elliptical movements on the driving feet by the superposition of stretching and bending vibration of the metal rings. This paper presents the working principle of proposed motor. By using FEM method, the proposed motor is designed and analyzed. By adjusting the structure parameters, the resonance frequencies of two working modes were tuned to be close. And by transient analysis, the elliptical motion trajectories of nodes on the driving feet are obtained and verify the theoretical feasibility.
本文提出了一种构造环形直线超声电机的新思路。所提出的电机定子包含两个驱动脚,16块压电陶瓷片和三个环——内环、中环和外环。所提出的超声电机通过金属环的拉伸和弯曲振动叠加在驱动足上形成椭圆运动。本文介绍了该电机的工作原理。采用有限元法对该电机进行了设计和分析。通过调整结构参数,使两种工作模式的谐振频率趋于接近。通过瞬态分析,得到了驱动足节点的椭圆运动轨迹,验证了理论可行性。
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引用次数: 1
First-principles study on the electronic structure and optical properties of Mn-doped NaNbO3 mn掺杂NaNbO3的电子结构和光学性质的第一性原理研究
Pub Date : 2015-12-28 DOI: 10.1109/SPAWDA.2015.7364445
Shulan Zhou, Xiao-dong Han, Xian Zhao, Xiang-ping Jiang
The electronic structure and optical properties of pure and Mn doped NaNbO3 are investigated employing the first principle method based on the density functional theory. The results indicate that the hybridization of Nb 4d and O 2p states play an important role on the piezoelectricity of NaNbO3. The calculated formation energies show that Mn prefers to built into Na sites. Moreover, Mn doping leads to the redistribution of charge density and a red shift of absorption to visible light region in the absorption edge.
采用基于密度泛函理论的第一性原理方法研究了纯纳米bo3和Mn掺杂纳米bo3的电子结构和光学性质。结果表明,n4d态和o2p态的杂化对NaNbO3的压电性有重要影响。计算的形成能表明Mn倾向于嵌入Na位点。此外,Mn的掺杂导致了电荷密度的重新分布和吸收边缘向可见光区域的吸收红移。
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引用次数: 0
Development of cryptophane A-coated SAW methane gas sensor 隐烷a包覆SAW甲烷气体传感器的研制
Pub Date : 2015-12-28 DOI: 10.1109/SPAWDA.2015.7364459
Haoliang Hu, Wen Wang, S. He, Yong Pan, Caihong Zhang, C. Dong
Accurately measurement and monitor on methane gas (CH4) concentration is an urgent problem to be solved in the purpose of safety and process control in homes, industries and mines. This paper proposed a new surface acoustic wave (SAW) based methane gas sensor, which was coated by a supra-molecular cryptophane A (CrypA). A differential SAW oscillator with excellent frequency stability was performed, and the two-port SAW resonator with low insertion and high Q-value was designed as the feedback element of the oscillator. CrypA was deposited along the SAW propagation path of the sensing device by drop-coating. Fast response and excellent repeatability were observed in methane gas sensing experiment at room temperature (20°C), and the estimated detection limit and measured sensitivity in CH4 dynamic range of 0.2%~5% was evaluated as ~0.05% and ~204Hz/%, respectively.
甲烷气体(CH4)浓度的准确测量与监测是家庭、工业和矿山安全与过程控制中迫切需要解决的问题。提出了一种基于表面声波(SAW)的新型甲烷气体传感器,该传感器采用超分子隐烷a (cryptophana)包覆。设计了一种具有良好频率稳定性的差分声表面波振荡器,并设计了低插入高q值的双端口声表面波谐振器作为振荡器的反馈元件。采用滴涂法沿传感器件的声表面波传播路径沉积隐波。在室温(20℃)条件下进行的甲烷气体传感实验具有快速响应和良好的重复性,在0.2%~5%的CH4动态范围内估计检出限和测量灵敏度分别为~0.05%和~204Hz/%。
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引用次数: 0
Experimental research on acoustic emission characteristics in damage process of different meso-structural specimens 不同细观结构试件损伤过程声发射特性试验研究
Pub Date : 2015-12-28 DOI: 10.1109/SPAWDA.2015.7364532
Ying Zhang, Ze-ming Wen, Bin Li, Hao Wu
In order to study the effect of different meso-structural on the acoustic emission (AE) characteristics of the material damage process, Different heat treatment methods were used to get the coarse grain and fine grain of Q345 specimens. And the acoustic emission monitoring of the single axis stretching process was carried out. The results show that: the acoustic emission hits, amplitude and energy can reflect and describe the damage process of specimens. Normal specimens of AE signals were small and low strength, fine specimens compared with normal specimens were more active. Because of the coarse grains, the performance of the specimen was degraded and more prone to damage, so the acoustic emission activity was the most active.
为了研究不同细观结构对材料损伤过程声发射特性的影响,采用不同的热处理方法分别获得了Q345试样的粗晶和细晶。并对单轴拉伸过程进行了声发射监测。结果表明:声发射命中数、振幅和能量能够反映和描述试件的损伤过程。正常试件的声发射信号较小,强度较低,精细试件比正常试件更活跃。由于晶粒粗大,试样的性能下降,更容易发生损伤,因此声发射活性最活跃。
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引用次数: 4
期刊
2015 Symposium on Piezoelectricity, Acoustic Waves, and Device Applications (SPAWDA)
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