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Effects of argon plasma pretreatment of Si wafers on Si-Si bonding based on Mo/Au interlayers 硅晶片氩等离子体预处理对Mo/Au夹层Si-Si键合的影响
IF 2.7 3区 材料科学 Q2 ENGINEERING, MECHANICAL Pub Date : 2023-05-15 DOI: 10.1088/2051-672X/acd569
Y. Qu, H. Bai, Wenbo Hu, Yuan Yuan, Shengli Wu, Hong Wang, H. Fan
To improve the bonding quality of Si-Si wafers bonded based on Mo/Au intermediate layers at room temperature, the surfaces of Si wafers were pretreated with argon plasma, and the effect of argon plasma pretreatment on Si-Si wafer bonding was analyzed by combining experimental and theoretical methods. Owing to the plasma treatment of Si wafers, the surface roughness of Si wafers was significantly reduced, and the bonded Si-Si samples had lower interfacial voidage. The average bonding strength of 11.46 MPa for the argon plasma pretreated Si-Si bonded samples is much higher than the bonding strength of 4.23 MPa for the unpretreated Si-Si bonded samples. The analysis of the fractured surface revealed that the fracture of the Si-Si bonded samples without argon plasma treatment occurred mainly at the Mo/Si interface, while the fracture of the plasma-treated Si-Si bonded samples arose mainly within the bulk Si. Molecular dynamics (MD) simulations suggest that strong atomic diffusion takes place at the Mo/Au interface, while Mo atoms hardly diffuse into the bulk Si. These results indicate that argon plasma pretreatment not only cleans and activates the Si wafer surface but also makes the Si wafer surface smooth, which helps to enhance the deposited Mo/Au film quality and the adhesion between the Mo film and the Si wafer.
为提高室温下Mo/Au中间层硅硅片的键合质量,对硅片表面进行了氩等离子体预处理,并通过实验和理论相结合的方法分析了氩等离子体预处理对硅硅片键合的影响。经过等离子体处理后,硅晶片表面粗糙度明显降低,结合后的硅-硅样品具有较低的界面空隙。经氩等离子体预处理的Si-Si结合样品的平均结合强度为11.46 MPa,远高于未经预处理的Si-Si结合样品的4.23 MPa。断裂面分析表明,未氩等离子体处理的Si-Si结合试样的断裂主要发生在Mo/Si界面,而等离子体处理的Si-Si结合试样的断裂主要发生在体Si内部。分子动力学(MD)模拟表明,Mo/Au界面发生了强烈的原子扩散,而Mo原子几乎没有扩散到体Si中。结果表明,氩等离子体预处理不仅能使硅片表面清洁活化,还能使硅片表面光滑,有利于提高沉积Mo/Au膜的质量,提高Mo膜与硅片的附着力。
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引用次数: 0
The investigation of wear properties of nanoparticle-reinforced epoxy composite material surfaces 纳米颗粒增强环氧复合材料表面磨损性能的研究
IF 2.7 3区 材料科学 Q2 ENGINEERING, MECHANICAL Pub Date : 2023-05-12 DOI: 10.1088/2051-672X/acd4d4
Serkan Apay, M. Kılınçel
This study added nano-sized Al2O3, Boron, and TiO2 powders to the epoxy polymer at 0.5% and 1% ratios. Abrasive wear resistance properties of nanoparticle-reinforced epoxy polymers were investigated. First cylindrical specimens with and without additives were prepared for realizing the experimental research. Pin-on discs were used for the wear test of epoxy samples. The mass losses were measured via a precision scale. According to the results, the boron nanoparticles have increased the epoxy specimens’ resistance. As a result of the experimental studies, it was observed that the wear resistance of the epoxy composite increased with each nano-sized powder added to the epoxy. SEM and optical profilometry investigated the composites’ friction coefficient and surface morphology. As a result of friction coefficient and wear weight loss tests, the highest wear resistance was obtained in 1% boron powder nano-reinforced epoxy composites. It was observed that the epoxy friction coefficient was in the range of 0.4–0.6, which decreased to the range of 0.2–0.4 with the addition of nano boron. The surface roughness value after epoxy wear was measured as 1.4 μm. With the addition of nano boron, this value was measured as 0.32 μm. Optical profilometry and SEM imaging results also support these values.
本研究分别以0.5%和1%的比例向环氧聚合物中添加纳米Al2O3、硼和TiO2粉末。研究了纳米颗粒增强环氧聚合物的耐磨性。首先制备了添加和不添加添加剂的圆柱形试样进行实验研究。采用针盘对环氧树脂试样进行磨损试验。质量损失是通过精密秤测量的。结果表明,硼纳米颗粒提高了环氧树脂试件的耐蚀性。通过实验研究发现,每添加一种纳米粉末,环氧复合材料的耐磨性都有所提高。SEM和光学轮廓术研究了复合材料的摩擦系数和表面形貌。摩擦系数和磨损失重试验表明,1%硼粉纳米增强环氧复合材料的耐磨性最高。结果表明,环氧树脂的摩擦系数在0.4 ~ 0.6之间,纳米硼的加入使环氧树脂的摩擦系数减小到0.2 ~ 0.4。环氧磨损后的表面粗糙度值为1.4 μm。添加纳米硼后,该值为0.32 μm。光学轮廓术和扫描电镜成像结果也支持这些值。
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引用次数: 0
Improvement of lubrication performance of sliding pairs with multi-depth groove textures based on genetic algorithm 基于遗传算法的多深度沟槽织构滑动副润滑性能改进
IF 2.7 3区 材料科学 Q2 ENGINEERING, MECHANICAL Pub Date : 2023-05-11 DOI: 10.1088/2051-672X/acd46a
Shaojun Li, Zhenpeng Wu, B. Dong, Wenyan Luo, Hailong Song, Haotian Guo, And Qiqi Zhou
During the wear and tear process of bearings, the friction coefficient between the friction pairs can be effectively decreased by employing the suitable surface texture on the frition surface. In the study, the distribution and depth variation of the surface texture were used as variables, and the genetic algorithm was used for iterative optimization to obtain the optimal texture distribution and depth. The friction and wear performance of the rectangular texture bearing sliding blocks was optimized. The depth of the texture was represented by a 4-bit binary number, and different binary numbers were set to represent different texture depths. Finally, the genetic algorithm was used for continuous iteration and evolution to obtain the optimal texture combination. The study showed that, compared with the regular texture with a depth of 0.2 μm, the friction coefficient decreased by 15.0% under the optimal texture with a non-uniform depth. Simultaneously, compared with the regular 3 μm deep texture, texture with a optimized depth makes the friction coefficient decreased by 37.5%, and the minimum oil film thickness increased by 0.979 μm. The optimal texture and oil film thickness combination obtained from the study can effectively reduce solid contact force and alleviate mechanical wear.
在轴承的磨损过程中,通过在摩擦表面采用合适的表面纹理,可以有效地降低摩擦副之间的摩擦系数。本研究以表面纹理的分布和深度变化为变量,采用遗传算法进行迭代优化,得到最优的纹理分布和深度。对矩形织构轴承滑块的摩擦磨损性能进行了优化。纹理深度用4位二进制数表示,设置不同的二进制数表示不同的纹理深度。最后,利用遗传算法进行连续迭代进化,得到最优纹理组合。研究表明,与深度为0.2 μm的规则织构相比,深度不均匀的最佳织构摩擦系数降低了15.0%;同时,与常规3 μm深度织构相比,优化后的织构使摩擦系数降低了37.5%,最小油膜厚度增加了0.979 μm。研究得出的最佳织构和油膜厚度组合可以有效减小固体接触力,减轻机械磨损。
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引用次数: 1
Statistically representative estimators of multi-scale surface topography: example of aluminum blasted rough samples 多尺度表面形貌的统计代表性估计:以铝喷砂毛坯为例
IF 2.7 3区 材料科学 Q2 ENGINEERING, MECHANICAL Pub Date : 2023-05-11 DOI: 10.1088/2051-672X/acd469
C. Turbil, J. Cabrero, I. Simonsen, D. Vandembroucq, I. Gozhyk
The topography of a rough surface determines many of its physical properties, for instance, tribology, contact mechanics, optical properties etc. Nowadays, a deep understanding of such physical phenomena requires the knowledge of the topography at appropriate length scales. Apart from performing multi-scale measurements of the surface topography, it also requires the use of proper statistical estimators for the analysis of such topography maps. Moreover, when dealing with light scattering in the visible spectral range, the scale at which the estimators of local topography properties are defined is extremely important. Here we present a multi-scale and statistical study of the surface topography of blasted aluminum samples which all have rather different visual appearance. Various statistical estimators of surface topography are examined, including estimators related to the height distribution, the lateral correlation and local topology. The combination of these various estimators unveils a scale separation between a micro-scale roughness inherited from the initial cold-rolled aluminum surface and a large scale roughness fully controlled by the blasting process. A special emphasis is given to the crucial importance of length scales in the estimation of local slopes. The present analysis establishes a quantitative link between the statistical properties of the surface topography and the blasting process used to fabricate the samples.
粗糙表面的形貌决定了它的许多物理性质,例如摩擦学、接触力学、光学性质等。如今,要想深入理解这种物理现象,就需要对适当长度尺度的地形有一定的了解。除了对地表地形进行多尺度测量外,它还需要使用适当的统计估计器来分析这些地形图。此外,当处理可见光光谱范围内的光散射时,定义局部地形性质估计量的尺度是非常重要的。本文对具有不同视觉外观的喷砂铝试样的表面形貌进行了多尺度和统计研究。研究了各种表面形貌的统计估计,包括与高度分布、横向相关和局部拓扑有关的估计。这些估计值的组合揭示了从初始冷轧铝表面继承的微尺度粗糙度和由爆破过程完全控制的大尺度粗糙度之间的尺度分离。特别强调了长度尺度在估算局部坡度中的关键重要性。目前的分析建立了表面形貌的统计特性和用于制造样品的爆破过程之间的定量联系。
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引用次数: 1
Effect of rare–earth (Ce, La) compounds on the microstructure, mechanical and electrochemical corrosion characteristics of electroplated Ni films 稀土(Ce, La)化合物对电镀镍膜微观结构、力学和电化学腐蚀特性的影响
IF 2.7 3区 材料科学 Q2 ENGINEERING, MECHANICAL Pub Date : 2023-05-05 DOI: 10.1088/2051-672X/acd2f0
Haixiang Chen, Kun Wang, Zhanshan Wang
For optimizing the microstructure and performance of Ni–electroplating film, the soluble rare–Earth (RE) compounds CeCl3 or LaCl3 were introduced, which were electrodeposited on Cu substrate by direct current (DC) and pulse current (PC) methods, respectively. The surface characteristics of morphology, composition, and phase of obtained different deposits were investigated, and the relationship between the structure and the performance of internal stress, hardness, and electrochemical responses was discussed. The results show that both RE compounds were conducive to eliminating the surface pits by inhibiting the hydrogen evolution reaction, while did not co–deposit into the Ni film. Moreover, the preferred orientation of Ni (111) crystalline plane was altered into Ni (200) by LaCl3, and its combination with PC–electrodeposition further had a better grain refinement effect than CeCl3. Due to the formation of a relatively dense and fine deposit, the PC–electrodeposited Ni/LaCl3 film exhibited the highest hardness of 320 HV, lowest tensile stress of 55 MPa, and best electrochemical passivation protection, which effectively improved the comprehensive performance of Ni film and demonstrated a good prospect for industrial applications.
为了优化镀镍膜的微观结构和性能,采用直流(DC)和脉冲电流(PC)方法分别在Cu衬底上电沉积了可溶性稀土化合物CeCl3和LaCl3。研究了不同镀层的形貌、组成和物相特征,讨论了镀层结构与内应力、硬度和电化学响应性能的关系。结果表明,两种稀土化合物均能通过抑制析氢反应消除表面凹坑,而不会共沉积到Ni膜中。同时,LaCl3将Ni(111)晶面的择优取向改变为Ni(200),并与pc电沉积进一步结合,晶粒细化效果优于CeCl3。pc电沉积的Ni/LaCl3膜由于形成了致密而细小的镀层,其最高硬度为320 HV,最低拉伸应力为55 MPa,电化学钝化保护效果最佳,有效地提高了Ni膜的综合性能,具有良好的工业应用前景。
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引用次数: 0
Tribological behaviour of multi-shape photochemical textured surfaces 多形状光化学织构表面的摩擦学行为
IF 2.7 3区 材料科学 Q2 ENGINEERING, MECHANICAL Pub Date : 2023-04-27 DOI: 10.1088/2051-672X/acd0c6
Amirah Basir, S. Liza, K. Fukuda, N. A. Mat Tahir
The purpose of this paper is to investigate the effect of multi-shape photochemical textured (PCT) steel surfaces on tribological performance. The textured surface with specific arrangement was fabricated by photochemical texturing, a common technique implemented in the microelectronic mechanical systems (MEMS) industry. It involves photolithography and chemical etching processes. The multi-shape studied were circle with line (CL) and circle with wavy (CW). Fabricated samples’ surfaces were characterized by using a 3D optical profiler to check the produced texture’s dimension. The effect of six different etching times on the texture’s dimension was observed. Then, only two sizes of both multi-shape textures were considered for tribological characterization. It was conducted by using ball-on-disk tribo-tester under lubricated conditions. The results obtained are compared with the reference untextured (UT) surface. From the results, it is found that appropriate size and shape of texture could lead to good friction reduction and anti-wear behaviour. The smaller size, size A, of CL multi-shape presented a lower friction coefficient compared to size B. However, different size of CW multi-shape has no effect on the friction behaviour. This is believed due to higher area density of CW compared to CL resulting in detrimental effect on friction for both CW’s size. Additionally, CL(size A) textured surface shows improved tribological behaviour compared to UT surface as lower friction coefficient and better wear resistance is obtained. This is maybe due to effective lubricating layer formation, good debris trapping effect and lower contact stress of the CL(size A) textured surface. These beneficial effects were achieved under lubricating condition through an increase in applied load.
本文的目的是研究多形状光化学织构(PCT)钢表面对摩擦学性能的影响。利用微电子机械系统(MEMS)中常用的光化学织构技术,制备了具有特定排列的织构表面。它涉及光刻和化学蚀刻工艺。所研究的多形态有圆带线(CL)和圆带波(CW)。利用三维光学轮廓仪对制备样品的表面进行表征,以检查所产生的纹理尺寸。观察了6种不同刻蚀时间对织构尺寸的影响。然后,只考虑两种多形状纹理的两种尺寸进行摩擦学表征。在润滑条件下,利用球盘摩擦试验机进行了试验。所得结果与参考的未纹理(UT)表面进行了比较。结果表明,适当的织构尺寸和形状可以获得良好的减摩和抗磨性能。尺寸较小的连续波多形A的摩擦系数低于尺寸b,而不同尺寸的连续波多形对摩擦行为没有影响。这被认为是由于连续油管的面积密度比连续油管高,这对两种连续油管的摩擦力都有不利影响。此外,与UT表面相比,CL(尺寸A)织构表面具有更好的摩擦学性能,摩擦系数更低,耐磨性更好。这可能是由于有效的润滑层形成,良好的碎屑捕获效果和CL(尺寸A)织构表面较低的接触应力。这些有益的效果是在润滑条件下通过增加施加的载荷来实现的。
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引用次数: 0
Non-integral model-based scatterometry for CD metrology of single high-aspect-ratio microstructures 基于非积分模型的散射测量法在单一高纵横比微结构CD测量中的应用
IF 2.7 3区 材料科学 Q2 ENGINEERING, MECHANICAL Pub Date : 2023-04-27 DOI: 10.1088/2051-672X/acd0c5
Wei-Hsin Chein, Fu-Sheng Yang, Zih-Ying Fu, Liang-Chia Chen
This article presents an innovative model-based scatterometry method for CD metrology of single high-aspect-ratio (HAR) microstructures, which are increasingly utilized in advanced packaging, especially as vertical interconnects in three-dimensional integrated circuits. The rapidly growing aspect ratio of these HAR structures makes it challenging to monitor their critical dimensions (CD). Furthermore, conventional spectral reflectometry or scatterometry measurements on periodic metrology targets on the scribe lines of the wafer are inadequate in providing a reliable correlation with the in-die structures due to the integral nature of these measurements, which can result in additional measurement errors compared to measuring individual in-die structures. To address these challenges, we propose a novel scatterometry system that can achieve high-precision single-structure measurement of fine-pitch HAR structures with significantly improved light efficiency over conventional optical methods. Our system takes advantage of the high spatial coherence of the supercontinuum laser source and an optical NA-controlled design concept for precise light beam shaping, enabling high spatial resolution and superior light efficiency in measurements. Furthermore, we demonstrate a model-based measurement scheme that uses a virtual optical system for complete characterization of the sample profile. The experimental results show that the proposed system can accurately measure RDL structures with fine nominal spacing as small as 1 μm and an aspect ratio of 3:1 with high fidelity.
本文提出了一种创新的基于模型的散射测量方法,用于单个高纵横比(HAR)微结构的CD测量,这些微结构越来越多地应用于先进封装,特别是三维集成电路中的垂直互连。这些HAR结构的长宽比迅速增长,使得监测它们的临界尺寸(CD)变得具有挑战性。此外,传统的光谱反射法或散射法测量在晶圆片划线上的周期性测量目标上,由于这些测量的整体性质,在提供与模内结构的可靠相关性方面是不够的,与测量单个模内结构相比,这可能导致额外的测量误差。为了解决这些挑战,我们提出了一种新的散射测量系统,该系统可以实现对细间距HAR结构的高精度单结构测量,并且比传统光学方法显着提高了光效。我们的系统利用了超连续激光源的高空间相干性和精确光束整形的光学na控制设计概念,在测量中实现了高空间分辨率和卓越的光效。此外,我们展示了一种基于模型的测量方案,该方案使用虚拟光学系统来完成样品轮廓的表征。实验结果表明,该系统可以精确测量标称间距小至1 μm、宽高比为3:1的RDL结构,并具有较高的保真度。
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引用次数: 0
Effect of surface texture on the tribological behavior of sliding electrical contact interface 表面织构对滑动电接触界面摩擦学行为的影响
IF 2.7 3区 材料科学 Q2 ENGINEERING, MECHANICAL Pub Date : 2023-04-26 DOI: 10.1088/2051-672X/acd075
Dongwei Wang, Xiao Chen, Faqiang Li, Bo Wan, Bin Liu, Yang Zhao, Xianguo Qing
Two kinds of textured surfaces, i.e. square pit-textured surface (SPTS) and round pit-textured surface (RPTS), are manufactured on the flat specimen surface, respectively. A series of current-carrying tests are carried out to detect the ability of surface texture in affecting the tribological behaviors. Results show that the friction coefficient and friction force of RPTS is the lowest among all the surfaces. Moreover, the RPTS shows the best potential in suppressing the generation of friction-induced vibration (FIV). Although the contact resistance of RPTS is slightly larger than that of other surfaces, the continuity of electrical contact is acceptable. Worn surface analysis is performed to illustrate the different tribological performances of these surfaces. Finite element analysis is also performed to provide reasonable explanation for the test phenomenon.
在平面试样表面上分别制备了方坑织构表面(SPTS)和圆坑织构表面(RPTS)两种纹理表面。为了检测表面织构对摩擦磨损性能的影响,进行了一系列载流试验。结果表明,RPTS的摩擦系数和摩擦力在所有表面中最低。此外,RPTS在抑制摩擦诱发振动(FIV)方面表现出最好的潜力。虽然RPTS的接触电阻略大于其他表面,但电接触的连续性是可以接受的。对磨损表面进行了分析,以说明这些表面的不同摩擦学性能。对试验现象进行了有限元分析,给出了合理的解释。
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引用次数: 1
Effects of surface topography through laser texturing on the surface characteristics of zirconia-based dental materials: surface hydrophobicity, antibacterial behavior, and cellular response 激光加工表面形貌对氧化锆基牙科材料表面特性的影响:表面疏水性、抗菌行为和细胞反应
IF 2.7 3区 材料科学 Q2 ENGINEERING, MECHANICAL Pub Date : 2023-04-26 DOI: 10.1088/2051-672X/acd076
Arash Ghalandarzadeh, M. Ganjali, M. Hosseini
The continuous need for high-performance implants that provide significant biological properties has led to extensive research into the topographic patterns of bioceramics in recent years. Their excellent aesthetics, biocompatibility, low plaque affinity, and ability to reproduce a natural-looking appearance have contributed to their success in dentistry. 3 mol% Yttria-stabilized zirconia (3YSZ) is gaining popularity as a material for dental implants due to its excellent mechanical properties and minimal degradation when exposed to body temperature. However, such materials show limited biological and antibacterial performance for dental applications. The purpose of this work was to develop microtopographies on the surface of 3YSZ ceramic by laser ablation technique, in order to improve its biological response and antibacterial behaviors. Two types of microtextures, including micro-grooves and micro-channels geometries were fabricated onto the zirconia ceramics using the laser ablation technique. The effects of different microtextures on the wettability, biological and antibacterial behaviors of 3YSZ ceramics were studied. The results indicate that all of the microstructure patterns are capable of improving the performance of 3YSZ. Wettability is a decisive factor that determines the antibacterial performance of textured zirconia ceramics. The microtextured surfaces all display hydrophobic behavior, thus yielding an effective improvement of antibacterial performance for 3YSZ ceramics. Cell-surface interactions were assessed for 7 days on both zirconia textured surfaces and a nontextured control with pre-osteoblast MC3T3-E1 cells. The obtained results showed the positive influence of textured zirconia surfaces on cell biological response.
近年来,对高性能植入物的持续需求导致了对生物陶瓷地形模式的广泛研究。其优异的美观性、生物相容性、低菌斑亲和力和重现自然外观的能力促成了其在牙科领域的成功。3mol %钇稳定氧化锆(3YSZ)由于其优异的机械性能和暴露在体温下最小的降解,作为一种牙科植入材料越来越受欢迎。然而,这些材料在牙科应用方面的生物和抗菌性能有限。本研究的目的是利用激光烧蚀技术在3YSZ陶瓷表面建立微形貌,以提高其生物反应和抗菌性能。利用激光烧蚀技术在氧化锆陶瓷表面制备了微沟槽和微通道两种微结构。研究了不同微结构对3YSZ陶瓷润湿性、生物性能和抗菌性能的影响。结果表明,所有的微观结构模式都能提高3YSZ的性能。润湿性是决定结构氧化锆陶瓷抗菌性能的决定性因素。微织构表面均表现出疏水性,从而有效地提高了3YSZ陶瓷的抗菌性能。在成骨前MC3T3-E1细胞的氧化锆纹理表面和非纹理对照组上评估细胞表面相互作用7天。实验结果表明,氧化锆表面结构对细胞生物学反应有积极的影响。
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引用次数: 0
Development of fused metrology methods for the analysis of hip implant tribology 髋关节植入物摩擦学分析的融合计量方法的发展
IF 2.7 3区 材料科学 Q2 ENGINEERING, MECHANICAL Pub Date : 2023-04-24 DOI: 10.1088/2051-672X/accfb3
Joe Pashley, L. Blunt, P. Bills, R. Racasan
In order to advance the study of wear phenomena involved in total hip implants a fused metrology system has been designed and constructed. The novel fixture system has been designed and built to facilitate large area surface measurement for hip implant bearing wear. The system allows coordinate measurement machine (CMM) wear map data to be used for precise positional targeting of areal surface metrology using high spatial resolution optical interferometry. The complete measurement process allows Coordinate Measuring Machine measurement and surface metrology datasets to be ‘fused’ thus facilitating carefully positioned wear scar analysis. The fixture utilises two digital rotary stages, in a gimble configuration, to precisely position the bearing component during CMM measurement and surface metrology. To test the effectiveness of the fixture system a cohort of explanted large metal-on-metal (MoM) femoral heads were assessed. Application of the fixture system allowed a set of grouped surface measurements were taken within the wear area, the wear area boundary region, and at unworn locations across the femoral heads. Additionally, a series of stitched surface measurements are taken through the entire wear area and combined into a single surface measurement. The ‘fusion’ method, allowed areas of roughening (or smoothing) to be estimated and overlayed on the corresponding CMM wear map. The developed fixture system allows for better understanding of hip implant performance. Combined with areal surface metrology parameters such as areal average surface roughness Sa, developed surface area ration Sdr and areal surface skewness, Ssk the system could be utilised understand the wear mechanisms for both explanted, in-vitro and in-vivo wear testing and also detailed quality inspection of newly manufactured components. The significance of the system deployment is that wear location and detailed mechanism can be studied simultaneously, thus delivering understanding of typical wear mechanisms and hence the fixture becomes a tool for developing increased implant life through understanding surface interactions.
为了推进全髋关节植入物磨损现象的研究,设计并构建了融合测量系统。设计并制造了一种新型夹具系统,以方便髋关节植入物轴承磨损的大面积表面测量。该系统允许坐标测量机(CMM)磨损图数据用于使用高空间分辨率光学干涉测量法进行面形测量的精确定位。完整的测量过程允许坐标测量机测量和表面计量数据集“融合”,从而便于仔细定位磨损疤痕分析。夹具利用两个数字旋转阶段,在一个gimble配置,以精确定位轴承组件在三坐标测量和表面计量。为了测试夹具系统的有效性,对一组外植的大型金属对金属(MoM)股骨头进行了评估。夹具系统的应用允许在磨损区域、磨损区域边界区域和股骨头未磨损位置进行一组表面测量。此外,通过整个磨损区域进行一系列缝合表面测量,并将其合并为单个表面测量。“融合”方法允许粗化(或平滑)区域被估计并覆盖在相应的三坐标测量机磨损图上。开发的夹具系统可以更好地了解髋关节植入物的性能。结合面平均表面粗糙度Sa、发育表面积比Sdr和面表面偏度Ssk等面表面计量参数,该系统可以用于了解外植体、体外和体内磨损测试的磨损机理,并对新制造的部件进行详细的质量检测。该系统部署的意义在于,可以同时研究磨损位置和详细机制,从而了解典型的磨损机制,从而使夹具成为通过了解表面相互作用来延长植入物寿命的工具。
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引用次数: 0
期刊
Surface Topography: Metrology and Properties
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