Pub Date : 2008-05-19DOI: 10.1109/FREQ.2008.4623051
Li Gun, Wu Fu-ping, Wei Jing-fa, Huang Xian-he
A highly precise and multifunctional timing system using the self development integrated GPS/BD time receiver is presented in this paper. The authors firstly designed an integrated GPS/BD (compass or Beidou navigation system of China) time receiver for time and frequency synchronization in a local network, and describing the main issues and the solution of the receiver implement in detail, and then focused on performance considerations. The receiver has been used as the major part to implement the timing system. The timing system can offer precise time code and frequency signal including standard frequency signal 5 MHz and 10 MHz, 1 pps and the serial time code data et al. The common view comparison technique is used in each sub-system for eliminating the common error of sources, and the observation data can be transferred between each station by wireless or internet. To keep the time synchronous precision within 10 ns between the master station and any slave station according to the observation results, phase shifting control and frequency division have been used which exploit their full level of performance. With the timing system, time comparisons are performed with a precision of 7.4 ns for a short baselines and 6.6 ns for a super short baseline. The result of traveling clock experiment indicates that the synchronous precision was 2.7 ns. The frequency stability of one second, 1.3 E-12 was achieved. The timing system can be used to supply high time and frequency signal for radar tracking, communication system, power grid and intelligent transportation system etc.
{"title":"Development of high precision and multifunctional timing system using integrated GPS/BD receiver","authors":"Li Gun, Wu Fu-ping, Wei Jing-fa, Huang Xian-he","doi":"10.1109/FREQ.2008.4623051","DOIUrl":"https://doi.org/10.1109/FREQ.2008.4623051","url":null,"abstract":"A highly precise and multifunctional timing system using the self development integrated GPS/BD time receiver is presented in this paper. The authors firstly designed an integrated GPS/BD (compass or Beidou navigation system of China) time receiver for time and frequency synchronization in a local network, and describing the main issues and the solution of the receiver implement in detail, and then focused on performance considerations. The receiver has been used as the major part to implement the timing system. The timing system can offer precise time code and frequency signal including standard frequency signal 5 MHz and 10 MHz, 1 pps and the serial time code data et al. The common view comparison technique is used in each sub-system for eliminating the common error of sources, and the observation data can be transferred between each station by wireless or internet. To keep the time synchronous precision within 10 ns between the master station and any slave station according to the observation results, phase shifting control and frequency division have been used which exploit their full level of performance. With the timing system, time comparisons are performed with a precision of 7.4 ns for a short baselines and 6.6 ns for a super short baseline. The result of traveling clock experiment indicates that the synchronous precision was 2.7 ns. The frequency stability of one second, 1.3 E-12 was achieved. The timing system can be used to supply high time and frequency signal for radar tracking, communication system, power grid and intelligent transportation system etc.","PeriodicalId":220442,"journal":{"name":"2008 IEEE International Frequency Control Symposium","volume":"17 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-05-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123790281","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2008-05-19DOI: 10.1109/FREQ.2008.4622949
D. Puccio, E. P. Eernisse
This work is a continuation of an earlier study on drive level dependence (DLD), wherein the resistance of a thickness-shear crystal changes at low drive levels as the drive level changes. The earlier work used a 2-D Finite Element Analysis (FEA) to show that a surface irregularity, such as an attached particle, causes rotational imbalance in the motion of a contoured thickness-shear crystal, which transfers motional energy from the trapped shear motion to flexural motion. The flexural motion transports motional energy to the mounts. Degradation in the Q due to this increased edge motion was inferred. This degradation in Q was strongly dependent on the location of the surface irregularity in the 2-D FEA model. The present work extends the analysis to 3-D FEA using an SC resonator along with a four-point clip mount with polyimide bonding agent. Damped eigenfrequency analysis is used to include loss in the mounting structure and directly calculate eigenmode Q as a function of the location of an attached particle on the resonator surface. The results are very informative. A 4.0E-11 kg mass can change the Q by up to 30%. The magnitude of the effect is strongly dependent on the lateral location of the mass on the surface. For example, the magnitude of the effect can change significantly between two points on the blank surface only 20 microns apart.
{"title":"Finite Element Analysis of thickness shear crystals with surface irregularities","authors":"D. Puccio, E. P. Eernisse","doi":"10.1109/FREQ.2008.4622949","DOIUrl":"https://doi.org/10.1109/FREQ.2008.4622949","url":null,"abstract":"This work is a continuation of an earlier study on drive level dependence (DLD), wherein the resistance of a thickness-shear crystal changes at low drive levels as the drive level changes. The earlier work used a 2-D Finite Element Analysis (FEA) to show that a surface irregularity, such as an attached particle, causes rotational imbalance in the motion of a contoured thickness-shear crystal, which transfers motional energy from the trapped shear motion to flexural motion. The flexural motion transports motional energy to the mounts. Degradation in the Q due to this increased edge motion was inferred. This degradation in Q was strongly dependent on the location of the surface irregularity in the 2-D FEA model. The present work extends the analysis to 3-D FEA using an SC resonator along with a four-point clip mount with polyimide bonding agent. Damped eigenfrequency analysis is used to include loss in the mounting structure and directly calculate eigenmode Q as a function of the location of an attached particle on the resonator surface. The results are very informative. A 4.0E-11 kg mass can change the Q by up to 30%. The magnitude of the effect is strongly dependent on the lateral location of the mass on the surface. For example, the magnitude of the effect can change significantly between two points on the blank surface only 20 microns apart.","PeriodicalId":220442,"journal":{"name":"2008 IEEE International Frequency Control Symposium","volume":"78 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-05-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114280878","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2008-05-19DOI: 10.1109/FREQ.2008.4623003
W. Wilson, D. Perey, G. Atkinson, R. Barclay
NASA aeronautical programs require integrated vehicle health monitoring (IVHM) to ensure the safety of the crew and the vehicles. Future IVHM sensors need to be small, light weight, inexpensive, and wireless. Surface acoustic wave (SAW) technology meets all of these constraints. In addition it operates in harsh environments and over wide temperature ranges, and it is inherently radiation hardened. This paper presents a survey of research opportunities for universities and industry to develop new sensors that address anticipated IVHM needs for aerospace vehicles. Potential applications of passive wireless SAW sensors from ground testing to high altitude aircraft operations are presented, along with some of the challenges and issues of the technology.
{"title":"Passive wireless SAW sensors for IVHM","authors":"W. Wilson, D. Perey, G. Atkinson, R. Barclay","doi":"10.1109/FREQ.2008.4623003","DOIUrl":"https://doi.org/10.1109/FREQ.2008.4623003","url":null,"abstract":"NASA aeronautical programs require integrated vehicle health monitoring (IVHM) to ensure the safety of the crew and the vehicles. Future IVHM sensors need to be small, light weight, inexpensive, and wireless. Surface acoustic wave (SAW) technology meets all of these constraints. In addition it operates in harsh environments and over wide temperature ranges, and it is inherently radiation hardened. This paper presents a survey of research opportunities for universities and industry to develop new sensors that address anticipated IVHM needs for aerospace vehicles. Potential applications of passive wireless SAW sensors from ground testing to high altitude aircraft operations are presented, along with some of the challenges and issues of the technology.","PeriodicalId":220442,"journal":{"name":"2008 IEEE International Frequency Control Symposium","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-05-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133229579","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2008-05-19DOI: 10.1109/FREQ.2008.4622965
N. Coluccelli, G. Galzerano, P. Laporta, L. Bonelli, A. Toncelli, A. Di Lieto, M. Tonelli, V. Calabrese, M. Norgia, A. Pesatori, C. Svelto
In this work a longitudinally pumped, widely tunable, solid state Yb:YLF laser was developed with special design for applications to optical frequency metrology, LIDAR measurements in the atmosphere and for absolute frequency stabilization. The YLF crystalline host, combined with efficient diode pumping, allows for wide wavelength tunability at around 1.03 mum. The novel laser source is being thoroughly characterized in terms of output power, spatial beam quality, single frequency output, and wavelength tunability.
{"title":"Novel diode pumped Yb:KYF4 and Yb:YLF4 lasers for optical frequency metrology at 1 μm / 0.5 μm","authors":"N. Coluccelli, G. Galzerano, P. Laporta, L. Bonelli, A. Toncelli, A. Di Lieto, M. Tonelli, V. Calabrese, M. Norgia, A. Pesatori, C. Svelto","doi":"10.1109/FREQ.2008.4622965","DOIUrl":"https://doi.org/10.1109/FREQ.2008.4622965","url":null,"abstract":"In this work a longitudinally pumped, widely tunable, solid state Yb:YLF laser was developed with special design for applications to optical frequency metrology, LIDAR measurements in the atmosphere and for absolute frequency stabilization. The YLF crystalline host, combined with efficient diode pumping, allows for wide wavelength tunability at around 1.03 mum. The novel laser source is being thoroughly characterized in terms of output power, spatial beam quality, single frequency output, and wavelength tunability.","PeriodicalId":220442,"journal":{"name":"2008 IEEE International Frequency Control Symposium","volume":"17 11 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-05-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132294124","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2008-05-19DOI: 10.1109/FREQ.2008.4623035
N. Doy, G. McHale, P. Roach, M. Newton, C. Hardacre, R. Ge, R. Allen, J. Macinnes, M. Bown
Data for the physical properties of room temperature ionic liquids (RTIL) as a function of chemical composition is limited, owing to the expense and difficulty of producing large volumes of pure samples for characterization. In this work we demonstrate that the viscosity-density values, obtained using impedance analysis of a quartz crystal microbalance are consistent with those obtained using a viscometer and density meter, but only requires a sample volume two orders of magnitude smaller. We also demonstrate that the third harmonic yields closest correlation out of all the harmonics from the fundamental to the eleventh.
{"title":"Small volume determination of the viscosity-density product for ionic liquids using quartz crystal harmonics","authors":"N. Doy, G. McHale, P. Roach, M. Newton, C. Hardacre, R. Ge, R. Allen, J. Macinnes, M. Bown","doi":"10.1109/FREQ.2008.4623035","DOIUrl":"https://doi.org/10.1109/FREQ.2008.4623035","url":null,"abstract":"Data for the physical properties of room temperature ionic liquids (RTIL) as a function of chemical composition is limited, owing to the expense and difficulty of producing large volumes of pure samples for characterization. In this work we demonstrate that the viscosity-density values, obtained using impedance analysis of a quartz crystal microbalance are consistent with those obtained using a viscometer and density meter, but only requires a sample volume two orders of magnitude smaller. We also demonstrate that the third harmonic yields closest correlation out of all the harmonics from the fundamental to the eleventh.","PeriodicalId":220442,"journal":{"name":"2008 IEEE International Frequency Control Symposium","volume":"7 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-05-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131864870","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2008-05-19DOI: 10.1109/FREQ.2008.4623032
R. Haskell, D. Stevens, J. Andle, M. Chap
This paper introduces the use of thickness shear mode (TSM) resonators fabricated upon quartz micro cantilevers as a means for highly sensitive gas detection. Background literature is reviewed and clearly indicates the existence of various gas/film interactions that lend themselves to a variety of gas detection schemes. Among these are mass loading, film elasticity and stress-induced frequency changes. The following work clearly demonstrates the use of film stress-induced frequency change as a detection mechanism. Several cantilever and micro bridge designs have been devised to utilize frequency response change due to film stress-induced reactions. Using gaseous mercury and gold sensing films as a test case, the cantilever test results clearly show as much as a factor of 2.4 times the sensor response over a simple mass loaded inverted mesa structure. Additionally, the micro bridge sensor results demonstrate that film stress due to gas film interactions can be coupled into an active acoustic region even if the sensing film is isolated from the active acoustic area. Finally, preliminary results are shown for palladium coated cantilever responses to hydrogen gas.
{"title":"High sensitivity quartz cantilever gas sensors","authors":"R. Haskell, D. Stevens, J. Andle, M. Chap","doi":"10.1109/FREQ.2008.4623032","DOIUrl":"https://doi.org/10.1109/FREQ.2008.4623032","url":null,"abstract":"This paper introduces the use of thickness shear mode (TSM) resonators fabricated upon quartz micro cantilevers as a means for highly sensitive gas detection. Background literature is reviewed and clearly indicates the existence of various gas/film interactions that lend themselves to a variety of gas detection schemes. Among these are mass loading, film elasticity and stress-induced frequency changes. The following work clearly demonstrates the use of film stress-induced frequency change as a detection mechanism. Several cantilever and micro bridge designs have been devised to utilize frequency response change due to film stress-induced reactions. Using gaseous mercury and gold sensing films as a test case, the cantilever test results clearly show as much as a factor of 2.4 times the sensor response over a simple mass loaded inverted mesa structure. Additionally, the micro bridge sensor results demonstrate that film stress due to gas film interactions can be coupled into an active acoustic region even if the sensing film is isolated from the active acoustic area. Finally, preliminary results are shown for palladium coated cantilever responses to hydrogen gas.","PeriodicalId":220442,"journal":{"name":"2008 IEEE International Frequency Control Symposium","volume":"146 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-05-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132317034","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2008-05-19DOI: 10.1109/FREQ.2008.4622985
W. Zhou, Xiaoli Liu
This paper introduces four kinds of 2 GHz surface transverse wave resonators with low insertion loss, low Q on Y-rotated cuts of quartz perpendicular to the x-axis. There are same configure and number of transducers, reflector number, metal thickness via wave length.There are only difference that the number of short grating, and result in much difference. One of these can be 2.493 GHz, 7.8 dB of insertion loss, 4.89 MHz bandwith of 3 dB.
{"title":"2GHz STW resonators of low insertion loss, low Q","authors":"W. Zhou, Xiaoli Liu","doi":"10.1109/FREQ.2008.4622985","DOIUrl":"https://doi.org/10.1109/FREQ.2008.4622985","url":null,"abstract":"This paper introduces four kinds of 2 GHz surface transverse wave resonators with low insertion loss, low Q on Y-rotated cuts of quartz perpendicular to the x-axis. There are same configure and number of transducers, reflector number, metal thickness via wave length.There are only difference that the number of short grating, and result in much difference. One of these can be 2.493 GHz, 7.8 dB of insertion loss, 4.89 MHz bandwith of 3 dB.","PeriodicalId":220442,"journal":{"name":"2008 IEEE International Frequency Control Symposium","volume":"22 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-05-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114865806","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2008-05-19DOI: 10.1109/FREQ.2008.4623012
M. Loschonsky, D. Eisele, A. Dadgar, A. Krost, S. Ballandras, L. Reindl
Metal-Organic-Vapor-Phase-Epitaxy (MOVPE) is a well established process for compound semiconductor layer growth especially of III-V semiconductors as InP, GaAs, and the nitrides GaN or AlN. In the case of the nitrides one can obtain highly oriented a-plane piezoelectric material, well suited for shear-microwave applications, by tilting the c-axis of the piezoelectric unit cell by 90deg to result in a-plane oriented crystallites. The high Q and insertion loss of filters is currently limited by the actual minimum of achievable layer thickness, where the surface is still smooth and pits-free. A lower temperature coefficient of the frequency as for longitudinal polarized waves is expected. We present results of fabrication and measurement of MOVPE grown a-plane and c-plane gallium nitride based surface acoustic wave resonators on r-plane sapphire substrates. Both types of materials were used to build up resonators and their S-parameters, temperature coefficients up to 200degC and wave velocities were measured. Also the wave characteristics under periodic metal grating were computed for the considered substrate configuration, allowing for the simulation of the experimental device using a mixed matrix approach. Both theoretical and experimental admittance of the SAW test devices are subsequently compared.
{"title":"Investigations of a-plane and c-plane GaN-based synchronous surface acoustic wave resonators","authors":"M. Loschonsky, D. Eisele, A. Dadgar, A. Krost, S. Ballandras, L. Reindl","doi":"10.1109/FREQ.2008.4623012","DOIUrl":"https://doi.org/10.1109/FREQ.2008.4623012","url":null,"abstract":"Metal-Organic-Vapor-Phase-Epitaxy (MOVPE) is a well established process for compound semiconductor layer growth especially of III-V semiconductors as InP, GaAs, and the nitrides GaN or AlN. In the case of the nitrides one can obtain highly oriented a-plane piezoelectric material, well suited for shear-microwave applications, by tilting the c-axis of the piezoelectric unit cell by 90deg to result in a-plane oriented crystallites. The high Q and insertion loss of filters is currently limited by the actual minimum of achievable layer thickness, where the surface is still smooth and pits-free. A lower temperature coefficient of the frequency as for longitudinal polarized waves is expected. We present results of fabrication and measurement of MOVPE grown a-plane and c-plane gallium nitride based surface acoustic wave resonators on r-plane sapphire substrates. Both types of materials were used to build up resonators and their S-parameters, temperature coefficients up to 200degC and wave velocities were measured. Also the wave characteristics under periodic metal grating were computed for the considered substrate configuration, allowing for the simulation of the experimental device using a mixed matrix approach. Both theoretical and experimental admittance of the SAW test devices are subsequently compared.","PeriodicalId":220442,"journal":{"name":"2008 IEEE International Frequency Control Symposium","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-05-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125118891","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2008-05-19DOI: 10.1109/FREQ.2008.4623066
I. Kone, Bertrand Dubus, Lionel Buchaillot, Alexandre Reinhardt, Fabrice Casset, Marc Aid, J. F. Carpentier, Pascal Ancey
This paper describes the design of resonators using waves guided in a piezoelectric layer located above a Bragg mirror. Such a resonator is suitable for the intermediate frequency (IF) and high frequency (HF) ranges. In the IF (about 600 MHz) band, maximum quality factor is achieved when exploiting the second guided mode (analogous to the S0 Lamb wave). In the HF band (about 2 GHz), a higher order mode (similar to the S1 Lamb wave) provides high coupling factors.
{"title":"Resonator using Guided waves in a piezoelectric layer above a Bragg mirror","authors":"I. Kone, Bertrand Dubus, Lionel Buchaillot, Alexandre Reinhardt, Fabrice Casset, Marc Aid, J. F. Carpentier, Pascal Ancey","doi":"10.1109/FREQ.2008.4623066","DOIUrl":"https://doi.org/10.1109/FREQ.2008.4623066","url":null,"abstract":"This paper describes the design of resonators using waves guided in a piezoelectric layer located above a Bragg mirror. Such a resonator is suitable for the intermediate frequency (IF) and high frequency (HF) ranges. In the IF (about 600 MHz) band, maximum quality factor is achieved when exploiting the second guided mode (analogous to the S0 Lamb wave). In the HF band (about 2 GHz), a higher order mode (similar to the S1 Lamb wave) provides high coupling factors.","PeriodicalId":220442,"journal":{"name":"2008 IEEE International Frequency Control Symposium","volume":"84 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-05-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123825945","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2008-05-19DOI: 10.1109/FREQ.2008.4623106
D. Gachon, J. Masson, E. Courjon, Y. Gruson, S. Ballandras
Bulk acoustic waves excited in thin piezoelectric films have revealed their capabilities for addressing the problem of high frequency RF filters and frequency sources (above 1 GHz). In this paper, we propose an alternative to thin film deposition consisting in single crystal wafers bonded on substrate (high quality) and thinned down, allowing for plate thickness close to 30 mum. This has been achieved on 3 inches wafers and allows for an accurate selection of the wave characteristics.
{"title":"Frequency sources and filters applications using high overtone bulk acoustic resonators exhibiting high Q.f product","authors":"D. Gachon, J. Masson, E. Courjon, Y. Gruson, S. Ballandras","doi":"10.1109/FREQ.2008.4623106","DOIUrl":"https://doi.org/10.1109/FREQ.2008.4623106","url":null,"abstract":"Bulk acoustic waves excited in thin piezoelectric films have revealed their capabilities for addressing the problem of high frequency RF filters and frequency sources (above 1 GHz). In this paper, we propose an alternative to thin film deposition consisting in single crystal wafers bonded on substrate (high quality) and thinned down, allowing for plate thickness close to 30 mum. This has been achieved on 3 inches wafers and allows for an accurate selection of the wave characteristics.","PeriodicalId":220442,"journal":{"name":"2008 IEEE International Frequency Control Symposium","volume":"15 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-05-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124873620","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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