Pub Date : 2008-05-19DOI: 10.1109/FREQ.2008.4623012
M. Loschonsky, D. Eisele, A. Dadgar, A. Krost, S. Ballandras, L. Reindl
Metal-Organic-Vapor-Phase-Epitaxy (MOVPE) is a well established process for compound semiconductor layer growth especially of III-V semiconductors as InP, GaAs, and the nitrides GaN or AlN. In the case of the nitrides one can obtain highly oriented a-plane piezoelectric material, well suited for shear-microwave applications, by tilting the c-axis of the piezoelectric unit cell by 90deg to result in a-plane oriented crystallites. The high Q and insertion loss of filters is currently limited by the actual minimum of achievable layer thickness, where the surface is still smooth and pits-free. A lower temperature coefficient of the frequency as for longitudinal polarized waves is expected. We present results of fabrication and measurement of MOVPE grown a-plane and c-plane gallium nitride based surface acoustic wave resonators on r-plane sapphire substrates. Both types of materials were used to build up resonators and their S-parameters, temperature coefficients up to 200degC and wave velocities were measured. Also the wave characteristics under periodic metal grating were computed for the considered substrate configuration, allowing for the simulation of the experimental device using a mixed matrix approach. Both theoretical and experimental admittance of the SAW test devices are subsequently compared.
{"title":"Investigations of a-plane and c-plane GaN-based synchronous surface acoustic wave resonators","authors":"M. Loschonsky, D. Eisele, A. Dadgar, A. Krost, S. Ballandras, L. Reindl","doi":"10.1109/FREQ.2008.4623012","DOIUrl":"https://doi.org/10.1109/FREQ.2008.4623012","url":null,"abstract":"Metal-Organic-Vapor-Phase-Epitaxy (MOVPE) is a well established process for compound semiconductor layer growth especially of III-V semiconductors as InP, GaAs, and the nitrides GaN or AlN. In the case of the nitrides one can obtain highly oriented a-plane piezoelectric material, well suited for shear-microwave applications, by tilting the c-axis of the piezoelectric unit cell by 90deg to result in a-plane oriented crystallites. The high Q and insertion loss of filters is currently limited by the actual minimum of achievable layer thickness, where the surface is still smooth and pits-free. A lower temperature coefficient of the frequency as for longitudinal polarized waves is expected. We present results of fabrication and measurement of MOVPE grown a-plane and c-plane gallium nitride based surface acoustic wave resonators on r-plane sapphire substrates. Both types of materials were used to build up resonators and their S-parameters, temperature coefficients up to 200degC and wave velocities were measured. Also the wave characteristics under periodic metal grating were computed for the considered substrate configuration, allowing for the simulation of the experimental device using a mixed matrix approach. Both theoretical and experimental admittance of the SAW test devices are subsequently compared.","PeriodicalId":220442,"journal":{"name":"2008 IEEE International Frequency Control Symposium","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-05-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125118891","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2008-05-19DOI: 10.1109/FREQ.2008.4623035
N. Doy, G. McHale, P. Roach, M. Newton, C. Hardacre, R. Ge, R. Allen, J. Macinnes, M. Bown
Data for the physical properties of room temperature ionic liquids (RTIL) as a function of chemical composition is limited, owing to the expense and difficulty of producing large volumes of pure samples for characterization. In this work we demonstrate that the viscosity-density values, obtained using impedance analysis of a quartz crystal microbalance are consistent with those obtained using a viscometer and density meter, but only requires a sample volume two orders of magnitude smaller. We also demonstrate that the third harmonic yields closest correlation out of all the harmonics from the fundamental to the eleventh.
{"title":"Small volume determination of the viscosity-density product for ionic liquids using quartz crystal harmonics","authors":"N. Doy, G. McHale, P. Roach, M. Newton, C. Hardacre, R. Ge, R. Allen, J. Macinnes, M. Bown","doi":"10.1109/FREQ.2008.4623035","DOIUrl":"https://doi.org/10.1109/FREQ.2008.4623035","url":null,"abstract":"Data for the physical properties of room temperature ionic liquids (RTIL) as a function of chemical composition is limited, owing to the expense and difficulty of producing large volumes of pure samples for characterization. In this work we demonstrate that the viscosity-density values, obtained using impedance analysis of a quartz crystal microbalance are consistent with those obtained using a viscometer and density meter, but only requires a sample volume two orders of magnitude smaller. We also demonstrate that the third harmonic yields closest correlation out of all the harmonics from the fundamental to the eleventh.","PeriodicalId":220442,"journal":{"name":"2008 IEEE International Frequency Control Symposium","volume":"7 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-05-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131864870","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2008-05-19DOI: 10.1109/FREQ.2008.4622975
Wenyan Wang, Chao Zhang, Zhitian Zhang, Yan Liu, G. Feng, Ji Wang
In the present study, the LFE (lateral field excitation) coupling coefficient and phase velocity for (yxl)-16.5deg LiTaO3 were calculated as a function of the angle psi, which indicates the direction of the driving electric field with respect to the crystallographic x-axis of the piezoelectric plate. Several LFE devices of 5 MHz were designed and fabricated in two groups: psi = 0deg and psi = plusmn90deg. The result shows that for the LFE device of psi = 0deg operating in water, the thickness shear mode (TSM) could be excited both by LFE and TFE (thickness field excitation). For psi = plusmn90deg, the TSM is launched only by TFE and the device is in fact a pseudo-LFE device. Similar investigation has also been done to AT-cut quartz. The result suggests that the reported LFE AT-cut acoustic wave sensors may well be possible a pseudo-LFE device or a combination of TFE and LFE.
{"title":"Investigation of pseudo-Lateral-Field-Excitation in (yxl)-16.5° LiTaO3","authors":"Wenyan Wang, Chao Zhang, Zhitian Zhang, Yan Liu, G. Feng, Ji Wang","doi":"10.1109/FREQ.2008.4622975","DOIUrl":"https://doi.org/10.1109/FREQ.2008.4622975","url":null,"abstract":"In the present study, the LFE (lateral field excitation) coupling coefficient and phase velocity for (yxl)-16.5deg LiTaO3 were calculated as a function of the angle psi, which indicates the direction of the driving electric field with respect to the crystallographic x-axis of the piezoelectric plate. Several LFE devices of 5 MHz were designed and fabricated in two groups: psi = 0deg and psi = plusmn90deg. The result shows that for the LFE device of psi = 0deg operating in water, the thickness shear mode (TSM) could be excited both by LFE and TFE (thickness field excitation). For psi = plusmn90deg, the TSM is launched only by TFE and the device is in fact a pseudo-LFE device. Similar investigation has also been done to AT-cut quartz. The result suggests that the reported LFE AT-cut acoustic wave sensors may well be possible a pseudo-LFE device or a combination of TFE and LFE.","PeriodicalId":220442,"journal":{"name":"2008 IEEE International Frequency Control Symposium","volume":"68 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-05-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133335709","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2008-05-19DOI: 10.1109/FREQ.2008.4623032
R. Haskell, D. Stevens, J. Andle, M. Chap
This paper introduces the use of thickness shear mode (TSM) resonators fabricated upon quartz micro cantilevers as a means for highly sensitive gas detection. Background literature is reviewed and clearly indicates the existence of various gas/film interactions that lend themselves to a variety of gas detection schemes. Among these are mass loading, film elasticity and stress-induced frequency changes. The following work clearly demonstrates the use of film stress-induced frequency change as a detection mechanism. Several cantilever and micro bridge designs have been devised to utilize frequency response change due to film stress-induced reactions. Using gaseous mercury and gold sensing films as a test case, the cantilever test results clearly show as much as a factor of 2.4 times the sensor response over a simple mass loaded inverted mesa structure. Additionally, the micro bridge sensor results demonstrate that film stress due to gas film interactions can be coupled into an active acoustic region even if the sensing film is isolated from the active acoustic area. Finally, preliminary results are shown for palladium coated cantilever responses to hydrogen gas.
{"title":"High sensitivity quartz cantilever gas sensors","authors":"R. Haskell, D. Stevens, J. Andle, M. Chap","doi":"10.1109/FREQ.2008.4623032","DOIUrl":"https://doi.org/10.1109/FREQ.2008.4623032","url":null,"abstract":"This paper introduces the use of thickness shear mode (TSM) resonators fabricated upon quartz micro cantilevers as a means for highly sensitive gas detection. Background literature is reviewed and clearly indicates the existence of various gas/film interactions that lend themselves to a variety of gas detection schemes. Among these are mass loading, film elasticity and stress-induced frequency changes. The following work clearly demonstrates the use of film stress-induced frequency change as a detection mechanism. Several cantilever and micro bridge designs have been devised to utilize frequency response change due to film stress-induced reactions. Using gaseous mercury and gold sensing films as a test case, the cantilever test results clearly show as much as a factor of 2.4 times the sensor response over a simple mass loaded inverted mesa structure. Additionally, the micro bridge sensor results demonstrate that film stress due to gas film interactions can be coupled into an active acoustic region even if the sensing film is isolated from the active acoustic area. Finally, preliminary results are shown for palladium coated cantilever responses to hydrogen gas.","PeriodicalId":220442,"journal":{"name":"2008 IEEE International Frequency Control Symposium","volume":"146 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-05-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132317034","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2008-05-19DOI: 10.1109/FREQ.2008.4623055
T. Muto, S. Watanabe, S. Wakamatsu, M. Koyama
The frequency stability of a crystal sensor in liquid is influenced by a decrease in Q value. Also, the frequency stability is influenced by the water pressure, liquid temperature, and etc. this paper shows a new method of realizing a highly precise crystal sensor by using two crystal sensors for the purpose of solving the above mentioned problem. In conclusion, it has been verified that a crystal resonator having two pairs of electrodes on one AT-cut crystal blank can be used for sensors in liquid for various applications.
{"title":"Examination for realization of a high precision crystal sensor","authors":"T. Muto, S. Watanabe, S. Wakamatsu, M. Koyama","doi":"10.1109/FREQ.2008.4623055","DOIUrl":"https://doi.org/10.1109/FREQ.2008.4623055","url":null,"abstract":"The frequency stability of a crystal sensor in liquid is influenced by a decrease in Q value. Also, the frequency stability is influenced by the water pressure, liquid temperature, and etc. this paper shows a new method of realizing a highly precise crystal sensor by using two crystal sensors for the purpose of solving the above mentioned problem. In conclusion, it has been verified that a crystal resonator having two pairs of electrodes on one AT-cut crystal blank can be used for sensors in liquid for various applications.","PeriodicalId":220442,"journal":{"name":"2008 IEEE International Frequency Control Symposium","volume":"24 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-05-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129218998","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2008-05-19DOI: 10.1109/FREQ.2008.4623112
G. Ernst, J. Lundstedt, T. Harben, P. Mclaren, J. Ho, D. Bogomolov, C. Stone
Many modern telecommunication systems rely on a common signal source to serve as a phase and frequency reference signal for the network. This source is often employed to synthesize microwave transmit and receive signals locally for gateway signal processing purposes and to serve as a reference for the remotely located signal sources in the network. This scheme has the advantage of providing end-to-end network synchronization and reducing the cost of the remote terminals by requiring a high-performance phase and frequency source only at the gateway site.
{"title":"Reducing phase noise degradation due to mechanical vibration on high performance quartz resonator oscillators for gateway applications","authors":"G. Ernst, J. Lundstedt, T. Harben, P. Mclaren, J. Ho, D. Bogomolov, C. Stone","doi":"10.1109/FREQ.2008.4623112","DOIUrl":"https://doi.org/10.1109/FREQ.2008.4623112","url":null,"abstract":"Many modern telecommunication systems rely on a common signal source to serve as a phase and frequency reference signal for the network. This source is often employed to synthesize microwave transmit and receive signals locally for gateway signal processing purposes and to serve as a reference for the remotely located signal sources in the network. This scheme has the advantage of providing end-to-end network synchronization and reducing the cost of the remote terminals by requiring a high-performance phase and frequency source only at the gateway site.","PeriodicalId":220442,"journal":{"name":"2008 IEEE International Frequency Control Symposium","volume":"2 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-05-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115551164","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2008-05-19DOI: 10.1109/FREQ.2008.4623103
S. Mohammadi, A. Eftekhar, W. Hunt, A. Adibi
Phononic crystals (PCs) are structures with periodic variations in their mechanical properties. PCs are especially of interest due to possibility of possessing frequency ranges in which propagation of elastic waves is completely prohibited; i.e., complete phononic band gaps (CPBGs). In this paper we first propose a PC slab structure created by a embedding a two dimensional array of void (air) inclusions in a solid slab with a finite thickness in the third dimension; using a plane wave expansion and a finite element code we show that wide CPBGs can be achieved by proper choice of geometrical parameters for the structure with void cylinders embedded in a thin silicon slab. Secondly, we report a CMOS-compatible fabrication procedure developed for fabrication and characterization of the proposed PC slabs operating at high frequencies (hundreds of megahertz to a few gigahertz). Using this fabrication procedure we fabricate and experimentally characterize the designed PC structures and show that strong attenuation (more than 30 dB) is observed in the transmission spectrum of elastic waves through eight layers of PC structure. The very good agreement between the frequency range of attenuation (119 MHz to 150 MHz) and the calculated CPBG provides an evidence of the validity and accuracy of our predictions of the existence of large CPBGs in the proposed structures. Using a PC structure with wide CPBG, a waveguide is fabricated by introducing a line defect in the PC structure. Characterization of the waveguide shows that high frequency (around 130 MHz) signals can be guided efficiently within the CPBG of the PC structure. These results show that the great capabilities of PCs can be utilized for realizing integrated micro/nano-mechanical devices with new and improved functionalities to be used in wireless communication and sensing applications.
{"title":"Demonstration of large complete phononic band gaps and waveguiding in high-frequency silicon phononic crystal slabs","authors":"S. Mohammadi, A. Eftekhar, W. Hunt, A. Adibi","doi":"10.1109/FREQ.2008.4623103","DOIUrl":"https://doi.org/10.1109/FREQ.2008.4623103","url":null,"abstract":"Phononic crystals (PCs) are structures with periodic variations in their mechanical properties. PCs are especially of interest due to possibility of possessing frequency ranges in which propagation of elastic waves is completely prohibited; i.e., complete phononic band gaps (CPBGs). In this paper we first propose a PC slab structure created by a embedding a two dimensional array of void (air) inclusions in a solid slab with a finite thickness in the third dimension; using a plane wave expansion and a finite element code we show that wide CPBGs can be achieved by proper choice of geometrical parameters for the structure with void cylinders embedded in a thin silicon slab. Secondly, we report a CMOS-compatible fabrication procedure developed for fabrication and characterization of the proposed PC slabs operating at high frequencies (hundreds of megahertz to a few gigahertz). Using this fabrication procedure we fabricate and experimentally characterize the designed PC structures and show that strong attenuation (more than 30 dB) is observed in the transmission spectrum of elastic waves through eight layers of PC structure. The very good agreement between the frequency range of attenuation (119 MHz to 150 MHz) and the calculated CPBG provides an evidence of the validity and accuracy of our predictions of the existence of large CPBGs in the proposed structures. Using a PC structure with wide CPBG, a waveguide is fabricated by introducing a line defect in the PC structure. Characterization of the waveguide shows that high frequency (around 130 MHz) signals can be guided efficiently within the CPBG of the PC structure. These results show that the great capabilities of PCs can be utilized for realizing integrated micro/nano-mechanical devices with new and improved functionalities to be used in wireless communication and sensing applications.","PeriodicalId":220442,"journal":{"name":"2008 IEEE International Frequency Control Symposium","volume":"7 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-05-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114811904","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2008-05-19DOI: 10.1109/FREQ.2008.4622950
E. P. Eernisse, D. Puccio, R. Lucklum, U. Hempel
Lateral field electroded (LFE) sensors have been recently introduced that can study the permittivity and conductivity (electrical properties) of liquids in contact with the surface opposite the electroded side. The unique feature of these sensors is that the response depends in part on changes in the electrical field distribution in the quartz blank due to the electrical properties in the liquid. This work uses finite element analysis (FEA) to model the past plano-plano devices and a new plano-convex design as the electrical boundary conditions on the side opposite the electrodes change from free of surface charge to constant potential, either grounded or floating. Results are presented for the mode shapes, frequencies, and motional capacitance (Cm) of several modes present in the blanks. The Cm of the different modes changes dramatically between these electrical boundary condition extremes. The plano-convex design has better-defined mode shapes at the expense of sensing dynamic range.
{"title":"Finite Element Analysis of Lateral Field excited thickness shear sensors","authors":"E. P. Eernisse, D. Puccio, R. Lucklum, U. Hempel","doi":"10.1109/FREQ.2008.4622950","DOIUrl":"https://doi.org/10.1109/FREQ.2008.4622950","url":null,"abstract":"Lateral field electroded (LFE) sensors have been recently introduced that can study the permittivity and conductivity (electrical properties) of liquids in contact with the surface opposite the electroded side. The unique feature of these sensors is that the response depends in part on changes in the electrical field distribution in the quartz blank due to the electrical properties in the liquid. This work uses finite element analysis (FEA) to model the past plano-plano devices and a new plano-convex design as the electrical boundary conditions on the side opposite the electrodes change from free of surface charge to constant potential, either grounded or floating. Results are presented for the mode shapes, frequencies, and motional capacitance (Cm) of several modes present in the blanks. The Cm of the different modes changes dramatically between these electrical boundary condition extremes. The plano-convex design has better-defined mode shapes at the expense of sensing dynamic range.","PeriodicalId":220442,"journal":{"name":"2008 IEEE International Frequency Control Symposium","volume":"137 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-05-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127420656","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2008-05-19DOI: 10.1109/FREQ.2008.4623075
L. Khine, M. Palaniapan, L. Shao, W. Wong
Characterization of Lame-mode square resonators with different straight-beam anchor lengths, structural layer thickness, and number of anchor support reveals that there is likely an optimal range of anchor designs that provide high quality factor (Q) above one million, along with low motional resistance. Shorter anchor length restricts resonator vibrations and motional resistance could be increased by 3.5 times compared to resonators with longer anchor length. Two-anchor support design is able to achieve higher Qpsilas but results in higher motional resistance compared to four-anchor support. When structural thickness is reduced from 25 mum to 10 mum, Q gets degraded but still maintained above one million.
{"title":"Characterization of SOI Lamé-mode square resonators","authors":"L. Khine, M. Palaniapan, L. Shao, W. Wong","doi":"10.1109/FREQ.2008.4623075","DOIUrl":"https://doi.org/10.1109/FREQ.2008.4623075","url":null,"abstract":"Characterization of Lame-mode square resonators with different straight-beam anchor lengths, structural layer thickness, and number of anchor support reveals that there is likely an optimal range of anchor designs that provide high quality factor (Q) above one million, along with low motional resistance. Shorter anchor length restricts resonator vibrations and motional resistance could be increased by 3.5 times compared to resonators with longer anchor length. Two-anchor support design is able to achieve higher Qpsilas but results in higher motional resistance compared to four-anchor support. When structural thickness is reduced from 25 mum to 10 mum, Q gets degraded but still maintained above one million.","PeriodicalId":220442,"journal":{"name":"2008 IEEE International Frequency Control Symposium","volume":"51 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-05-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125275246","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2008-05-19DOI: 10.1109/FREQ.2008.4623058
T. Watanabe, S. Yamauchi, T. Terasawa
An all-digital PLL that generates arbitrary output clock frequencies with only one reference clock frequency is presented. The method adopted in this study uses multiplying/dividing numbers with decimals. A ring-delay-line (RDL) consisting of 32 stages makes it possible for both the frequency detector and digitally-controlled oscillator to have a common time base, resulting in this unique clock generator. Evaluation experiments were conducted using a 0.18-mum CMOS test chip of 0.096 mm2. In the case of a reference clock frequency of 60 kHz and multiplying number of 16.666, we confirmed a 999.96 kHz output clock with 11.6 ppm frequency error and 540 ps jitter standard deviation.
提出了一种仅使用一个参考时钟频率就能产生任意输出时钟频率的全数字锁相环。本研究采用的方法是用小数乘/除数。由32级组成的环延迟线(RDL)使频率检测器和数字控制振荡器具有共同的时基成为可能，从而产生这种独特的时钟发生器。评价实验采用0.096 mm2的0.18 mm CMOS测试芯片进行。在参考时钟频率为60 kHz，乘法数为16.666的情况下，我们确定了999.96 kHz的输出时钟，频率误差为11.6 ppm，抖动标准偏差为540 ps。
{"title":"An all-digital PLL using frequency multiplying/dividing number with decimals in 0.18-μm digital CMOS","authors":"T. Watanabe, S. Yamauchi, T. Terasawa","doi":"10.1109/FREQ.2008.4623058","DOIUrl":"https://doi.org/10.1109/FREQ.2008.4623058","url":null,"abstract":"An all-digital PLL that generates arbitrary output clock frequencies with only one reference clock frequency is presented. The method adopted in this study uses multiplying/dividing numbers with decimals. A ring-delay-line (RDL) consisting of 32 stages makes it possible for both the frequency detector and digitally-controlled oscillator to have a common time base, resulting in this unique clock generator. Evaluation experiments were conducted using a 0.18-mum CMOS test chip of 0.096 mm2. In the case of a reference clock frequency of 60 kHz and multiplying number of 16.666, we confirmed a 999.96 kHz output clock with 11.6 ppm frequency error and 540 ps jitter standard deviation.","PeriodicalId":220442,"journal":{"name":"2008 IEEE International Frequency Control Symposium","volume":"54 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-05-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125825649","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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