Pub Date : 2006-10-01DOI: 10.1109/ICSENS.2007.355782
Ching-Hsiu Chen, Chia-Yen Lee, Shu-Ming Kuo, Che-Hsin Lin
This research presents a novel method to improve the sensing performance of capacitive-type humidity sensors by diffusing a deliquescent salt of magnesium chloride (MgCl2) into the thin PI sensing layer. PI sensing film is firstly photo patterned and then immersed into an inorganic salt solution of MgCl2 for salt diffusion process. Since MgCl2 salt deliquesces at the humidity higher than 33%RH, the water absorbability and the humidity response of the proposed humidity sensors are significantly enhanced due to the existence of trace deliquescent salts in the PI sensing film. The measured sensitivity of the proposed humidity sensor is 15 pF/%RH which is up to 750-fold larger than the pure PI-based humidity sensor for the case of 10-mum thick sensing film. In addition, the measured sensitivity is 81 pF/%RH for the case of 40-mum thick sensing layer which is up to 810-fold greater than the pure PI-based humidity sensor. The method proposed in this study is feasible of fabricating MEMS-based high-performance humidity sensors in a simple, reliable and low-cost way.
{"title":"High performance Humidity Sensor Based on Deliquescent Salt Diffused PI Film","authors":"Ching-Hsiu Chen, Chia-Yen Lee, Shu-Ming Kuo, Che-Hsin Lin","doi":"10.1109/ICSENS.2007.355782","DOIUrl":"https://doi.org/10.1109/ICSENS.2007.355782","url":null,"abstract":"This research presents a novel method to improve the sensing performance of capacitive-type humidity sensors by diffusing a deliquescent salt of magnesium chloride (MgCl2) into the thin PI sensing layer. PI sensing film is firstly photo patterned and then immersed into an inorganic salt solution of MgCl2 for salt diffusion process. Since MgCl2 salt deliquesces at the humidity higher than 33%RH, the water absorbability and the humidity response of the proposed humidity sensors are significantly enhanced due to the existence of trace deliquescent salts in the PI sensing film. The measured sensitivity of the proposed humidity sensor is 15 pF/%RH which is up to 750-fold larger than the pure PI-based humidity sensor for the case of 10-mum thick sensing film. In addition, the measured sensitivity is 81 pF/%RH for the case of 40-mum thick sensing layer which is up to 810-fold greater than the pure PI-based humidity sensor. The method proposed in this study is feasible of fabricating MEMS-based high-performance humidity sensors in a simple, reliable and low-cost way.","PeriodicalId":233838,"journal":{"name":"2006 5th IEEE Conference on Sensors","volume":"63 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2006-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115533149","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2006-10-01DOI: 10.1109/ICSENS.2007.355824
L. Pakula, P. French
In this paper an accelerometer, which measures the pull-in time to obtain the acceleration is presented. As the pull-in time is a semi digital signal, the output of the device can be measured with a full digital circuit. No analogue readout circuit is required. The sensitivity and nonlinearity are comparable with the differential capacitive sensing devices. The accelerometer has been fabricated by surface micromachining using Al as the mechanical layer and phosphosilicate glass as the sacrificial layer. The initial measurements have been performed.
{"title":"A Pull-in Operation Mode Accelerometer","authors":"L. Pakula, P. French","doi":"10.1109/ICSENS.2007.355824","DOIUrl":"https://doi.org/10.1109/ICSENS.2007.355824","url":null,"abstract":"In this paper an accelerometer, which measures the pull-in time to obtain the acceleration is presented. As the pull-in time is a semi digital signal, the output of the device can be measured with a full digital circuit. No analogue readout circuit is required. The sensitivity and nonlinearity are comparable with the differential capacitive sensing devices. The accelerometer has been fabricated by surface micromachining using Al as the mechanical layer and phosphosilicate glass as the sacrificial layer. The initial measurements have been performed.","PeriodicalId":233838,"journal":{"name":"2006 5th IEEE Conference on Sensors","volume":"11 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2006-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116103432","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2006-10-01DOI: 10.1109/ICSENS.2007.355737
Min-Chol Shin, Jeong-Gun Lee, K. Yun, J. Park
This paper describes a simple, inexpensive and easily constructed toxicity biosensor that uses freeze-dried bioluminescent bacteria, photobacterium phosphoreum IFO 13896. To compensate for bacterial activity, we apply a differential photometer circuit to measure bioluminescence. Instead of a photomultiplier tube, dual photodiodes were used to reduce the cost of the sensor system. The concentrations of toxic compounds causing 50% light loss (50% effective concentrations, EC50) were determined immediately and 30 min after rehydration of the bacteria from a freeze-dried state. The EC50 values at dual mode operation with differential amplification are nearly constant for the temperature range between 10 and 25degC, whereas the EC50 values at single mode operation increase with temperature, resulting in low sensitivity. The performance of the portable biosensor as a tool for determining p-nitrophenol, mercury, cadmium, and lead toxicity is demonstrated.
{"title":"A Field-Portable Toxicity Tester using Bacterial Bioluminescence","authors":"Min-Chol Shin, Jeong-Gun Lee, K. Yun, J. Park","doi":"10.1109/ICSENS.2007.355737","DOIUrl":"https://doi.org/10.1109/ICSENS.2007.355737","url":null,"abstract":"This paper describes a simple, inexpensive and easily constructed toxicity biosensor that uses freeze-dried bioluminescent bacteria, photobacterium phosphoreum IFO 13896. To compensate for bacterial activity, we apply a differential photometer circuit to measure bioluminescence. Instead of a photomultiplier tube, dual photodiodes were used to reduce the cost of the sensor system. The concentrations of toxic compounds causing 50% light loss (50% effective concentrations, EC50) were determined immediately and 30 min after rehydration of the bacteria from a freeze-dried state. The EC50 values at dual mode operation with differential amplification are nearly constant for the temperature range between 10 and 25degC, whereas the EC50 values at single mode operation increase with temperature, resulting in low sensitivity. The performance of the portable biosensor as a tool for determining p-nitrophenol, mercury, cadmium, and lead toxicity is demonstrated.","PeriodicalId":233838,"journal":{"name":"2006 5th IEEE Conference on Sensors","volume":"37 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2006-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122305079","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2006-10-01DOI: 10.1109/ICSENS.2007.355822
Chih-Mimg Sun, Chuanwei Wang, D. Liu, M.S.-C. Lu, W. Fang, Chao-Jui Liang, H. Hsieh, T. Shing
This study presents a novel CMOS accelerometer with four sensing finger arrays. Moreover, additional springs are also employed for electrical routing. The sensing capacitance is increased for 80%, at the cost of the decreasing of proof mass for 20%. Thus, the sensitivity of the present accelerometer is still increased for near 44%. The measurement results show that the present accelerometer has a gain of 2.94 mV/g.
{"title":"A Novel CMOS MEMS Accelerometer with Four Sensing Finger Arrays","authors":"Chih-Mimg Sun, Chuanwei Wang, D. Liu, M.S.-C. Lu, W. Fang, Chao-Jui Liang, H. Hsieh, T. Shing","doi":"10.1109/ICSENS.2007.355822","DOIUrl":"https://doi.org/10.1109/ICSENS.2007.355822","url":null,"abstract":"This study presents a novel CMOS accelerometer with four sensing finger arrays. Moreover, additional springs are also employed for electrical routing. The sensing capacitance is increased for 80%, at the cost of the decreasing of proof mass for 20%. Thus, the sensitivity of the present accelerometer is still increased for near 44%. The measurement results show that the present accelerometer has a gain of 2.94 mV/g.","PeriodicalId":233838,"journal":{"name":"2006 5th IEEE Conference on Sensors","volume":"21 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2006-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121991570","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2006-10-01DOI: 10.1109/ICSENS.2007.355726
Chao Yang, D. Rairigh, A. Mason
Electrochemical impedance spectroscopy (EIS) is a powerful tool for characterizing biological materials, including lipid bilayers and many membrane proteins. However, traditional EIS methods are very slow at low frequencies, where these materials respond in biosensor applications. To enable dense arrays of biosensors based on tethered bilayer lipid membranes (tBLM), a new approach for EIS has been developed. This paper introduces a methodology and circuit that can rapidly perform EIS in the 1 mHz to 100 kHz frequency range. A circuit implementing this new approach has been realized in 0.5 mum CMOS technology with 3.3 voltage power supply. In the sub-hertz range where membrane protein biosensor response is most critical, the circuit can measure impedance with 8 bit resolution in 20 ms, three orders of magnitude faster than traditional integrator-based circuits. Though tailored for the low frequency spectrum in biosensor applications, the EIS circuit can be used to measure impedance in a wide range of sensory materials.
电化学阻抗谱(EIS)是表征生物材料的有力工具，包括脂质双分子层和许多膜蛋白。然而，传统的EIS方法在低频时非常缓慢，而这些材料在生物传感器应用中有响应。为了实现基于系系双层脂质膜(tBLM)的生物传感器密集阵列，开发了一种新的EIS方法。本文介绍了一种在1mhz ~ 100khz频率范围内快速执行EIS的方法和电路。实现这种新方法的电路已在0.5 μ m CMOS技术和3.3电压电源上实现。在膜蛋白生物传感器响应最关键的亚赫兹范围内，该电路可以在20毫秒内以8位分辨率测量阻抗，比传统的基于积分器的电路快三个数量级。虽然为生物传感器应用中的低频频谱量身定制，但EIS电路可用于测量各种传感材料中的阻抗。
{"title":"On-Chip Electrochemical Impedance Spectroscopy for Biosensor Arrays","authors":"Chao Yang, D. Rairigh, A. Mason","doi":"10.1109/ICSENS.2007.355726","DOIUrl":"https://doi.org/10.1109/ICSENS.2007.355726","url":null,"abstract":"Electrochemical impedance spectroscopy (EIS) is a powerful tool for characterizing biological materials, including lipid bilayers and many membrane proteins. However, traditional EIS methods are very slow at low frequencies, where these materials respond in biosensor applications. To enable dense arrays of biosensors based on tethered bilayer lipid membranes (tBLM), a new approach for EIS has been developed. This paper introduces a methodology and circuit that can rapidly perform EIS in the 1 mHz to 100 kHz frequency range. A circuit implementing this new approach has been realized in 0.5 mum CMOS technology with 3.3 voltage power supply. In the sub-hertz range where membrane protein biosensor response is most critical, the circuit can measure impedance with 8 bit resolution in 20 ms, three orders of magnitude faster than traditional integrator-based circuits. Though tailored for the low frequency spectrum in biosensor applications, the EIS circuit can be used to measure impedance in a wide range of sensory materials.","PeriodicalId":233838,"journal":{"name":"2006 5th IEEE Conference on Sensors","volume":"100 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2006-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122026178","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2006-10-01DOI: 10.1109/ICSENS.2007.355520
W. Chung, V.K. Singh, R. Myllyla, Hyotaek Lim
Advances in sensor networking and location tracking technology enable many location-based applications but they create significant privacy risks. This paper describes our study on design of security enhanced indoor location-tracking system for in-building, ambient discovery application, location-dependent healthcare applications. Ceiling-mounted beacons are spread throughout the building which publish location information on RF and ultrasonic signals and allows applications running on mobile and static nodes to learn their physical location. The object to be tracked carries listener node, this node listens the beacons information as they arrived and forwards these beacons signals to the base station. A listener computes its position within the coordinate system, using the distances from multiple beacons with known beacon coordinates. This paper concentrates on privacy problem location aware sensor networks, since location information is especially privacy sensitive and potentially specific enough to reveal the identity of individuals. Also describe two ubiquitous home healthcare applications that use the location-tracking problem which we have implemented.
{"title":"Security Enhanced Indoor Location Tracking System for Ubiquitous Home Healthcare","authors":"W. Chung, V.K. Singh, R. Myllyla, Hyotaek Lim","doi":"10.1109/ICSENS.2007.355520","DOIUrl":"https://doi.org/10.1109/ICSENS.2007.355520","url":null,"abstract":"Advances in sensor networking and location tracking technology enable many location-based applications but they create significant privacy risks. This paper describes our study on design of security enhanced indoor location-tracking system for in-building, ambient discovery application, location-dependent healthcare applications. Ceiling-mounted beacons are spread throughout the building which publish location information on RF and ultrasonic signals and allows applications running on mobile and static nodes to learn their physical location. The object to be tracked carries listener node, this node listens the beacons information as they arrived and forwards these beacons signals to the base station. A listener computes its position within the coordinate system, using the distances from multiple beacons with known beacon coordinates. This paper concentrates on privacy problem location aware sensor networks, since location information is especially privacy sensitive and potentially specific enough to reveal the identity of individuals. Also describe two ubiquitous home healthcare applications that use the location-tracking problem which we have implemented.","PeriodicalId":233838,"journal":{"name":"2006 5th IEEE Conference on Sensors","volume":"16 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2006-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116834085","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2006-10-01DOI: 10.1109/ICSENS.2007.355579
A. Tuantranont, T. Lomas, K. Jaruwongrungsi, A. Jomphoak, A. Wisitsora-at
This work has focused on the design, finite element modeling and testing of a symmetrical Wheatstone MEMS cantilever beam with on-chip temperature sensors. The stress induced on gold surface with polysilicon piezoresistive sensing is demonstrated. In principle, adsorption of biochemical species on a functionalized surface of the microfabricated cantilever will cause a surface stress and consequently the cantilever bending. The sensing mechanism relies on the piezoresistive properties of the polysilicon wires encapsulated inside the beam. The beam is fabricated and bending analysis is performed so that the beam tip deflection could be predicted. The piezoresistor designs on the beams were varied, within certain constraints, so that external read-out circuit could measure the sensitivity of the sensing technique. The mass detection of 0.0058-0.0110 g is measured by the beam resistor series as a balanced Wheatstone bridge configuration. The voltage output of the bridge is directly proportional to the amount of bending in the MEMS cantilever. The temperature dependency and sensor performance have been characterized in experiments. Compensation by resisters on the substrate, which act as temperature sensors significantly reduces the temperature dependence effect.
{"title":"Symmetrical Wheatstone Microcantilever Sensor with On-chip Temperature Sensors","authors":"A. Tuantranont, T. Lomas, K. Jaruwongrungsi, A. Jomphoak, A. Wisitsora-at","doi":"10.1109/ICSENS.2007.355579","DOIUrl":"https://doi.org/10.1109/ICSENS.2007.355579","url":null,"abstract":"This work has focused on the design, finite element modeling and testing of a symmetrical Wheatstone MEMS cantilever beam with on-chip temperature sensors. The stress induced on gold surface with polysilicon piezoresistive sensing is demonstrated. In principle, adsorption of biochemical species on a functionalized surface of the microfabricated cantilever will cause a surface stress and consequently the cantilever bending. The sensing mechanism relies on the piezoresistive properties of the polysilicon wires encapsulated inside the beam. The beam is fabricated and bending analysis is performed so that the beam tip deflection could be predicted. The piezoresistor designs on the beams were varied, within certain constraints, so that external read-out circuit could measure the sensitivity of the sensing technique. The mass detection of 0.0058-0.0110 g is measured by the beam resistor series as a balanced Wheatstone bridge configuration. The voltage output of the bridge is directly proportional to the amount of bending in the MEMS cantilever. The temperature dependency and sensor performance have been characterized in experiments. Compensation by resisters on the substrate, which act as temperature sensors significantly reduces the temperature dependence effect.","PeriodicalId":233838,"journal":{"name":"2006 5th IEEE Conference on Sensors","volume":"22 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2006-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129033176","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2006-10-01DOI: 10.1109/ICSENS.2007.355500
J. Yeow, J. She
This electronic document is a "live" A capacitive humidity sensor, fabricated by depositing multi-wall carbon nanotubes (MWCNTs) on one of the stainless steel substrates, is presented for moisture detection at room temperature. When compared to a sensor without CNTs, CNT-enhanced sensor has a capacitance response of 60-200% more when the humidity is under 70% relative humidity (RH), and 300%-3000% more if RH level goes over 70%. The detection and recovery response times are on the order of seconds. The performance is comparable to a commercial sensor from Honeywell that is used as a benchmark throughout the experiments. Our results demonstrate that nano-materials like MWCNTs, can naturally form porous nano-structures, which can potentially realize a miniature capacitive humidity sensor with a higher sensing resolution. The gain in performance is attributed to capillary condensation effect. The capillary condensation effect, that is facilitated by the porous nanostructures of random aligned MWCNTs, is discussed in this paper template. The various components of your paper [title, text, heads, etc.] are already defined on the style sheet, as illustrated by the portions given in this document.
{"title":"Capacitive Humidity Sensing using Carbon Nanotube Enabled Capillary Condensation","authors":"J. Yeow, J. She","doi":"10.1109/ICSENS.2007.355500","DOIUrl":"https://doi.org/10.1109/ICSENS.2007.355500","url":null,"abstract":"This electronic document is a \"live\" A capacitive humidity sensor, fabricated by depositing multi-wall carbon nanotubes (MWCNTs) on one of the stainless steel substrates, is presented for moisture detection at room temperature. When compared to a sensor without CNTs, CNT-enhanced sensor has a capacitance response of 60-200% more when the humidity is under 70% relative humidity (RH), and 300%-3000% more if RH level goes over 70%. The detection and recovery response times are on the order of seconds. The performance is comparable to a commercial sensor from Honeywell that is used as a benchmark throughout the experiments. Our results demonstrate that nano-materials like MWCNTs, can naturally form porous nano-structures, which can potentially realize a miniature capacitive humidity sensor with a higher sensing resolution. The gain in performance is attributed to capillary condensation effect. The capillary condensation effect, that is facilitated by the porous nanostructures of random aligned MWCNTs, is discussed in this paper template. The various components of your paper [title, text, heads, etc.] are already defined on the style sheet, as illustrated by the portions given in this document.","PeriodicalId":233838,"journal":{"name":"2006 5th IEEE Conference on Sensors","volume":"36 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2006-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129532473","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2006-10-01DOI: 10.1109/ICSENS.2007.355601
M. Consales, M. Pisco, P. Pilla, A. Cusano, A. Buosciolo, M. Giordano, R. Viter, V. Smyntyna
Recently, the capability of a SnO2 based silica optical fiber (SOF) sensors to detect ammonia at room temperature in water environment has been for the first time demonstrated [1-3]. The SOF probes were deposited onto the fiber end by the simple and low cost Electrostatic Spray Pyrolysis technique (ESP), which allows to change the layers features by changing the deposition parameters. Here, it is experimentally demonstrated that modifications of the optical near field behavior occur when the sensitive overlay exhibits peaks with dimensions comparable with the light wavelength (1.55 mum). In addition, the influence of the SnO2 layers morphology on the room temperature sensing performances against ammonia, in water environment, is preliminarily investigated. To the aim, before performing the ammonia adsorption measurements, the topography and the optical near field profile for different SnO2-based sensors have been analyzed by a very complex instrumentation able to perform simultaneous atomic force microscopy (AFM) and scanning near-field optical microscopy (SNOM) imaging.
{"title":"Influence of Layers Morphology on the Sensitivity of SnO2-based Optical Fiber Sensors","authors":"M. Consales, M. Pisco, P. Pilla, A. Cusano, A. Buosciolo, M. Giordano, R. Viter, V. Smyntyna","doi":"10.1109/ICSENS.2007.355601","DOIUrl":"https://doi.org/10.1109/ICSENS.2007.355601","url":null,"abstract":"Recently, the capability of a SnO2 based silica optical fiber (SOF) sensors to detect ammonia at room temperature in water environment has been for the first time demonstrated [1-3]. The SOF probes were deposited onto the fiber end by the simple and low cost Electrostatic Spray Pyrolysis technique (ESP), which allows to change the layers features by changing the deposition parameters. Here, it is experimentally demonstrated that modifications of the optical near field behavior occur when the sensitive overlay exhibits peaks with dimensions comparable with the light wavelength (1.55 mum). In addition, the influence of the SnO2 layers morphology on the room temperature sensing performances against ammonia, in water environment, is preliminarily investigated. To the aim, before performing the ammonia adsorption measurements, the topography and the optical near field profile for different SnO2-based sensors have been analyzed by a very complex instrumentation able to perform simultaneous atomic force microscopy (AFM) and scanning near-field optical microscopy (SNOM) imaging.","PeriodicalId":233838,"journal":{"name":"2006 5th IEEE Conference on Sensors","volume":"22 5 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2006-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129833481","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2006-10-01DOI: 10.1109/ICSENS.2007.355572
W. Cho, Kunnyun Kim, Kang Ryeol Lee, Yong-kook Kim, Dae-Sung Lee, W. Kim, N. Cho, Kwangbum Park, Hyo-Derk Park, J. Park, B. Ju
We present the fabrication process and the characteristics of a flexible tactile sensor by silicon micromachining, polymer processing and packaging technologies. The fabrication process for the tactile sensor was composed of in the fabrication of sensor chips and their packaging on the flexible printed circuit board (FPCB). The variation rate of resistance was about 4.6%/N when normal force was applied. This sensor can be used to sense touch, pressure, and slip because the signals are is are determined by the variations of resistance of the metal strain gauge for normal and shear force in tactile sensor.
{"title":"Flexible Tactile Sensor Fabricated using Polymer Membrane","authors":"W. Cho, Kunnyun Kim, Kang Ryeol Lee, Yong-kook Kim, Dae-Sung Lee, W. Kim, N. Cho, Kwangbum Park, Hyo-Derk Park, J. Park, B. Ju","doi":"10.1109/ICSENS.2007.355572","DOIUrl":"https://doi.org/10.1109/ICSENS.2007.355572","url":null,"abstract":"We present the fabrication process and the characteristics of a flexible tactile sensor by silicon micromachining, polymer processing and packaging technologies. The fabrication process for the tactile sensor was composed of in the fabrication of sensor chips and their packaging on the flexible printed circuit board (FPCB). The variation rate of resistance was about 4.6%/N when normal force was applied. This sensor can be used to sense touch, pressure, and slip because the signals are is are determined by the variations of resistance of the metal strain gauge for normal and shear force in tactile sensor.","PeriodicalId":233838,"journal":{"name":"2006 5th IEEE Conference on Sensors","volume":"49 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2006-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121433184","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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