Pub Date : 2006-10-01DOI: 10.1109/ICSENS.2007.355887
S. Capone, M. Epifani, L. Francioso, D. Presicce, P. Siciliano, P. Carlucci
We developed a novel method to detect the presence of unburned diesel fuel in used diesel fuel engine oil. The method is based on the use of an array of different gas microsensors based on metal oxide thin films deposited by sol-gel technique on Si substrates. The sensor array, exposed to the volatile chemical species of different diesel fuel engine oil samples contaminated in different percentages by diesel fuel, resulted to be appreciable sensitive to them. Principal Component Analysis (PCA) applied to the sensor response data-set gave a first proof of the sensor array ability to discriminate among the differently diesel fuel diluted lubricating oils. Moreover, in order to get information about the headspace composition of the diesel fuel-contaminated engine oils used for gas-sensing tests, we analyzed the engine oil samples by Static Headspace Solid Phase Micro Extraction/Gas Chromatograph/Mass Spectrometer (SHS-SPME/GC/MS).
{"title":"A novel method based on gas microsensors to analyze diesel engine oil contaminated by diluent unburned diesel fuel","authors":"S. Capone, M. Epifani, L. Francioso, D. Presicce, P. Siciliano, P. Carlucci","doi":"10.1109/ICSENS.2007.355887","DOIUrl":"https://doi.org/10.1109/ICSENS.2007.355887","url":null,"abstract":"We developed a novel method to detect the presence of unburned diesel fuel in used diesel fuel engine oil. The method is based on the use of an array of different gas microsensors based on metal oxide thin films deposited by sol-gel technique on Si substrates. The sensor array, exposed to the volatile chemical species of different diesel fuel engine oil samples contaminated in different percentages by diesel fuel, resulted to be appreciable sensitive to them. Principal Component Analysis (PCA) applied to the sensor response data-set gave a first proof of the sensor array ability to discriminate among the differently diesel fuel diluted lubricating oils. Moreover, in order to get information about the headspace composition of the diesel fuel-contaminated engine oils used for gas-sensing tests, we analyzed the engine oil samples by Static Headspace Solid Phase Micro Extraction/Gas Chromatograph/Mass Spectrometer (SHS-SPME/GC/MS).","PeriodicalId":233838,"journal":{"name":"2006 5th IEEE Conference on Sensors","volume":"18 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2006-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116598020","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2006-10-01DOI: 10.1109/ICSENS.2007.355467
S. R. Green, B. J. Gregory, N. Gupta
In this paper a phase-change microactuator is presented for use in a dynamic Braille display. The state of the art for phase-change actuators is briefly discussed. Then, key design parameters are specified which lead to the formation of a concept. The concept is characterized in terms of the design parameters, and key performance metrics such as actuation time (135-285 ms), and average power consumption (30-40 mW) have been simulated. In comparison to recent literature, the response time is expected to be improved by over two orders of magnitude, whereas average power consumption is also reduced.
{"title":"Dynamic Braille Display Utilizing Phase-Change Microactuators","authors":"S. R. Green, B. J. Gregory, N. Gupta","doi":"10.1109/ICSENS.2007.355467","DOIUrl":"https://doi.org/10.1109/ICSENS.2007.355467","url":null,"abstract":"In this paper a phase-change microactuator is presented for use in a dynamic Braille display. The state of the art for phase-change actuators is briefly discussed. Then, key design parameters are specified which lead to the formation of a concept. The concept is characterized in terms of the design parameters, and key performance metrics such as actuation time (135-285 ms), and average power consumption (30-40 mW) have been simulated. In comparison to recent literature, the response time is expected to be improved by over two orders of magnitude, whereas average power consumption is also reduced.","PeriodicalId":233838,"journal":{"name":"2006 5th IEEE Conference on Sensors","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2006-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116610124","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2006-10-01DOI: 10.1109/ICSENS.2007.355864
Sang-Jin Kim, T. Ono, M. Esashi
Capacitive resonant mass sensing employing a single-crystalline silicon resonator with a thickness of 250 nm and electrical LC oscillator is presented, and the detectable minimum mass of 1times10-14 g is obtained in air. It was shown that capacitive detection is less affected to noise than optical detection from the experimental comparison. Using the theoretical model and experimental results, low frequency noise originated in gas adsorption-desorption on sensor surface is evaluated. Finally, mass/stress induced resonance frequency shift due to the adsorption of ethanol and moist vapor is successfully demonstrated.
{"title":"Mass Detection Using Capacitive Resonant Silicon Sensor","authors":"Sang-Jin Kim, T. Ono, M. Esashi","doi":"10.1109/ICSENS.2007.355864","DOIUrl":"https://doi.org/10.1109/ICSENS.2007.355864","url":null,"abstract":"Capacitive resonant mass sensing employing a single-crystalline silicon resonator with a thickness of 250 nm and electrical LC oscillator is presented, and the detectable minimum mass of 1times10-14 g is obtained in air. It was shown that capacitive detection is less affected to noise than optical detection from the experimental comparison. Using the theoretical model and experimental results, low frequency noise originated in gas adsorption-desorption on sensor surface is evaluated. Finally, mass/stress induced resonance frequency shift due to the adsorption of ethanol and moist vapor is successfully demonstrated.","PeriodicalId":233838,"journal":{"name":"2006 5th IEEE Conference on Sensors","volume":"12 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2006-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121375511","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2006-10-01DOI: 10.1109/ICSENS.2007.355718
E. Margallo-Balbás, H. Ruano-Suarez, T. Smit, P. French
Vertebral arthrodesis supported by cage devices is a successful surgical option for treating degenerative disorders of the spine. Despite the favourable results reported, the process of formation and maintenance of bone tissue is not well understood. Improving knowledge on these multifactorial biological mechanisms is crucial to advance the technique. Diffuse optical tomography (DOT), implemented with microfabricated optodes, is a promising way of monitoring bone growth in the spinal cage. In this paper, we present a preliminary study on the feasibility and value of such a system. The direct problem has been addressed numerically and through in-vitro measurements. Two scenarios of interbody fusion (creeping substitution and endochondral ossification) have been simulated using Monte Carlo techniques for several optode configurations. A 16times16 photodiode-based DOT system based on fibre-optics has been developed to validate the numerical results in conjunction with an in-vitro model of the biological problem. We have found that the small tissue volumes involved permit a Continuous Wave implementation based on LED's and photodiodes. The needed levels of optical power are compatible with operation from a telemetry link. Significant contrast has been found for the various stages of spinal fusion in the considered scenarios, which suggests that the inversion problem will be able to differentiate among them.
{"title":"Diffuse Optical Tomography in a Spinal Cage: Monte Carlo Simulation and in-Vitro Studies","authors":"E. Margallo-Balbás, H. Ruano-Suarez, T. Smit, P. French","doi":"10.1109/ICSENS.2007.355718","DOIUrl":"https://doi.org/10.1109/ICSENS.2007.355718","url":null,"abstract":"Vertebral arthrodesis supported by cage devices is a successful surgical option for treating degenerative disorders of the spine. Despite the favourable results reported, the process of formation and maintenance of bone tissue is not well understood. Improving knowledge on these multifactorial biological mechanisms is crucial to advance the technique. Diffuse optical tomography (DOT), implemented with microfabricated optodes, is a promising way of monitoring bone growth in the spinal cage. In this paper, we present a preliminary study on the feasibility and value of such a system. The direct problem has been addressed numerically and through in-vitro measurements. Two scenarios of interbody fusion (creeping substitution and endochondral ossification) have been simulated using Monte Carlo techniques for several optode configurations. A 16times16 photodiode-based DOT system based on fibre-optics has been developed to validate the numerical results in conjunction with an in-vitro model of the biological problem. We have found that the small tissue volumes involved permit a Continuous Wave implementation based on LED's and photodiodes. The needed levels of optical power are compatible with operation from a telemetry link. Significant contrast has been found for the various stages of spinal fusion in the considered scenarios, which suggests that the inversion problem will be able to differentiate among them.","PeriodicalId":233838,"journal":{"name":"2006 5th IEEE Conference on Sensors","volume":"11 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2006-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121617532","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2006-10-01DOI: 10.1109/ICSENS.2007.355852
A. Roncaglia, F. Mancarella, M. Sanmartin, I. Elmi, G. Cardinali, M. Severi
A method suited to perform wafer-level measurements of thermal conductivity on thin films by exploiting micromachined test structures is proposed. To this purpose, a measurement procedure able to compensate for instrumental offsets and sensitivity limits typically existing in a standard wafer-level electrical instrumentation, and to eliminate the influence of heat exchange through air is applied. In order to validate the technique, measurements on different thin films of interest in thermal MEMS fabrication are presented (LPCVD polycrystalline silicon, evaporated aluminum, LPCVD silicon oxide).
{"title":"Wafer-Level Measurement of Thermal Conductivity on Thin Films","authors":"A. Roncaglia, F. Mancarella, M. Sanmartin, I. Elmi, G. Cardinali, M. Severi","doi":"10.1109/ICSENS.2007.355852","DOIUrl":"https://doi.org/10.1109/ICSENS.2007.355852","url":null,"abstract":"A method suited to perform wafer-level measurements of thermal conductivity on thin films by exploiting micromachined test structures is proposed. To this purpose, a measurement procedure able to compensate for instrumental offsets and sensitivity limits typically existing in a standard wafer-level electrical instrumentation, and to eliminate the influence of heat exchange through air is applied. In order to validate the technique, measurements on different thin films of interest in thermal MEMS fabrication are presented (LPCVD polycrystalline silicon, evaporated aluminum, LPCVD silicon oxide).","PeriodicalId":233838,"journal":{"name":"2006 5th IEEE Conference on Sensors","volume":"87 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2006-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125105813","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2006-10-01DOI: 10.1109/ICSENS.2007.355562
Wen Wang, Shitang He, Shunzhou Li, Yong Pan
This paper presents a 158 MHz surface acoustic wave (SAW) gas sensor based on a novel SAW oscillator. As the oscillator element, a SAW delay line on ST-X quartz substrate with low insertion loss (less than 8 dB) and single mode selection capability was developed. Low insertion loss is implemented by electrode width control single phase unidirectional transducer (EWC/SPUDT) configuration. Single mode selection can be simply accomplished by comb transducer which is means of combination of frequency selectivity of two interdigital transducers (IDTs). Coupling of modes (COM) modeling is performed to predict device performance prior to fabrication. The measured frequency response S12 matched well with simulated results. The experimental results show that the baseline noise of the fabricated oscillators was typically up to ~0.7 times 10-7 in a laboratory environment with cooling step. The oscillator was successfully applied to gas sensor coated self-assembled composite monolayer as sensor material for dimethyl-methyl-phosphonate (DMMP), The sensitivity for low DMMP concentrations detection was evaluated as ~25 Hz/mg/m3, and the threshold detection limit was up to 0.5 mg/m3.
{"title":"Enhanced Sensitivity of SAW Gas Sensor Based on High Frequency Stability Oscillator","authors":"Wen Wang, Shitang He, Shunzhou Li, Yong Pan","doi":"10.1109/ICSENS.2007.355562","DOIUrl":"https://doi.org/10.1109/ICSENS.2007.355562","url":null,"abstract":"This paper presents a 158 MHz surface acoustic wave (SAW) gas sensor based on a novel SAW oscillator. As the oscillator element, a SAW delay line on ST-X quartz substrate with low insertion loss (less than 8 dB) and single mode selection capability was developed. Low insertion loss is implemented by electrode width control single phase unidirectional transducer (EWC/SPUDT) configuration. Single mode selection can be simply accomplished by comb transducer which is means of combination of frequency selectivity of two interdigital transducers (IDTs). Coupling of modes (COM) modeling is performed to predict device performance prior to fabrication. The measured frequency response S12 matched well with simulated results. The experimental results show that the baseline noise of the fabricated oscillators was typically up to ~0.7 times 10-7 in a laboratory environment with cooling step. The oscillator was successfully applied to gas sensor coated self-assembled composite monolayer as sensor material for dimethyl-methyl-phosphonate (DMMP), The sensitivity for low DMMP concentrations detection was evaluated as ~25 Hz/mg/m3, and the threshold detection limit was up to 0.5 mg/m3.","PeriodicalId":233838,"journal":{"name":"2006 5th IEEE Conference on Sensors","volume":"15 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2006-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122394397","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2006-10-01DOI: 10.1109/ICSENS.2007.355551
S. Yamada, H. Goto, A. Okamoto, I. Shibasaki, K. Nishimura
We could accurately detect the rotation angle or speed of the spindle axis of the motors used for industrial purposes by using a combination of an iron gear and a magnetic sensor device with a bias permanent magnet. The relation between the accuracy of detecting the rotation angle and the deviation from the sine curve of the output signal from the magnetic sensors was studied by analyzing the magnetic field. A device made from a bridged pair of magneto-resistance (MR) elements demonstrated the smallest deviation and the best accuracy of three kinds of magnetic sensors, such as a bridged pair of MR-elements, a bridged pair of MR-single element and a fixed resistor, and a Hall element (HE) used as a magnetic sensor. The results were also verified from experiments.
{"title":"Application of Sn-doped InSb Single Crystal Thin Film Magneto-resistance Devices to Detecting Gear-rotation Speed","authors":"S. Yamada, H. Goto, A. Okamoto, I. Shibasaki, K. Nishimura","doi":"10.1109/ICSENS.2007.355551","DOIUrl":"https://doi.org/10.1109/ICSENS.2007.355551","url":null,"abstract":"We could accurately detect the rotation angle or speed of the spindle axis of the motors used for industrial purposes by using a combination of an iron gear and a magnetic sensor device with a bias permanent magnet. The relation between the accuracy of detecting the rotation angle and the deviation from the sine curve of the output signal from the magnetic sensors was studied by analyzing the magnetic field. A device made from a bridged pair of magneto-resistance (MR) elements demonstrated the smallest deviation and the best accuracy of three kinds of magnetic sensors, such as a bridged pair of MR-elements, a bridged pair of MR-single element and a fixed resistor, and a Hall element (HE) used as a magnetic sensor. The results were also verified from experiments.","PeriodicalId":233838,"journal":{"name":"2006 5th IEEE Conference on Sensors","volume":"134 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2006-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122528501","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2006-10-01DOI: 10.1109/ICSENS.2007.355749
Jae-Sung Kong, Sang-Heon Kim, Dong-Kyu Sung, Jang-Kyoo Shin, H. Yonezu
In this paper, a vision chip for edge detection based on the structure of a biological retina is introduced. The key advantage of the structure is high speed of operation. However, the charge accumulation time of a conventional active pixel sensor limits its operation speed. In order to enhance the operation speed, a logarithmic APS using a metal-oxide-semiconductor-type photodetector was applied into the vision chip. By applying a MOS-type photodetector to a logarithmic APS, we could achieve sufficient output swing for a bio-inspired vision chip. We fabricated a 160times120 bio-inspired complementary metal-oxide-semiconductor vision chip using 0.35 mum two-poly four-metal complementary metal-oxide-semiconductor technology, and then investigated.
{"title":"A 160×120 Bio-Inspired Vision Chip for Edge Detection Using a MOS-type Photodetector for Logarithmic Active Pixel Sensor","authors":"Jae-Sung Kong, Sang-Heon Kim, Dong-Kyu Sung, Jang-Kyoo Shin, H. Yonezu","doi":"10.1109/ICSENS.2007.355749","DOIUrl":"https://doi.org/10.1109/ICSENS.2007.355749","url":null,"abstract":"In this paper, a vision chip for edge detection based on the structure of a biological retina is introduced. The key advantage of the structure is high speed of operation. However, the charge accumulation time of a conventional active pixel sensor limits its operation speed. In order to enhance the operation speed, a logarithmic APS using a metal-oxide-semiconductor-type photodetector was applied into the vision chip. By applying a MOS-type photodetector to a logarithmic APS, we could achieve sufficient output swing for a bio-inspired vision chip. We fabricated a 160times120 bio-inspired complementary metal-oxide-semiconductor vision chip using 0.35 mum two-poly four-metal complementary metal-oxide-semiconductor technology, and then investigated.","PeriodicalId":233838,"journal":{"name":"2006 5th IEEE Conference on Sensors","volume":"28 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2006-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131264499","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2006-10-01DOI: 10.1109/ICSENS.2007.355756
Sang-Ho Seo, Sung-Ho Lee, Kyoung-Do Kim, Jang-Kyoo Shin, P. Choi
In this paper, a new CMOS image sensor is presented, which uses a PMOSFET-type photodetector with a transfer gate that has a high and variable sensitivity. The proposed CMOS image sensor has been fabricated using a 0.35 mum 2-poly 4-metal standard CMOS technology and is composed of a 256 times 256 array of 7.05 times 7.10 mum2 pixels. The unit pixel has a configuration of a pseudo 3-transistor active pixel sensor (APS) with the PMOSFET-type photodetector with a transfer gate, which has a function of conventional 4-transistor APS. The generated photocurrent is controlled by the transfer gate of the PMOSFET-type photodetector. The maximum responsivity of the photodetector is larger than 1.1 times 103 A/W without any optical lens. Fabricated 256 times 256 CMOS image sensor exhibits a good response to low-level illumination as low as 5 lux.
{"title":"256 × 256 CMOS Image Sensor Using a Pseudo 3-Transistor Active Pixel Sensor for Low-illumination Level Application","authors":"Sang-Ho Seo, Sung-Ho Lee, Kyoung-Do Kim, Jang-Kyoo Shin, P. Choi","doi":"10.1109/ICSENS.2007.355756","DOIUrl":"https://doi.org/10.1109/ICSENS.2007.355756","url":null,"abstract":"In this paper, a new CMOS image sensor is presented, which uses a PMOSFET-type photodetector with a transfer gate that has a high and variable sensitivity. The proposed CMOS image sensor has been fabricated using a 0.35 mum 2-poly 4-metal standard CMOS technology and is composed of a 256 times 256 array of 7.05 times 7.10 mum2 pixels. The unit pixel has a configuration of a pseudo 3-transistor active pixel sensor (APS) with the PMOSFET-type photodetector with a transfer gate, which has a function of conventional 4-transistor APS. The generated photocurrent is controlled by the transfer gate of the PMOSFET-type photodetector. The maximum responsivity of the photodetector is larger than 1.1 times 103 A/W without any optical lens. Fabricated 256 times 256 CMOS image sensor exhibits a good response to low-level illumination as low as 5 lux.","PeriodicalId":233838,"journal":{"name":"2006 5th IEEE Conference on Sensors","volume":"6 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2006-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127798574","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2006-10-01DOI: 10.1109/ICSENS.2007.355896
J. Kuntner, A. Jachimowicz, F. Kohl, B. Jakoby
For the determination of thermal material properties, micromachined sensors are of particular interest. Membrane-based structures facilitate an effective thermal decoupling of the actual sensing region from the sensor substrate, resulting in high sensitivity and a short response time. For some liquids, however, the remaining spurious heat flow in the membrane is still not negligible. These unwanted thermal shunts can be further decreased by utilizing structures, like cantilevers or micro-bridges. To investigate this aspect experimentally, two different sensors were designed, both intended to determine the thermal conductivity and diffusivity of liquids using a heating element and a spatially separated temperature sensor. In the former case, heater and thermistor are located on a closed membrane structure whereas in the latter case the membrane is selectively patterned yielding an individual micro-bridge for each element. The measurement results confirm, that the novel bridge-based sensor allows to determine the thermal properties more accurately and independently from the thermal properties of the membrane.
{"title":"Determining Thermal Properties of Liquids: Membrane-based versus Bridge-based Micromachined Sensors","authors":"J. Kuntner, A. Jachimowicz, F. Kohl, B. Jakoby","doi":"10.1109/ICSENS.2007.355896","DOIUrl":"https://doi.org/10.1109/ICSENS.2007.355896","url":null,"abstract":"For the determination of thermal material properties, micromachined sensors are of particular interest. Membrane-based structures facilitate an effective thermal decoupling of the actual sensing region from the sensor substrate, resulting in high sensitivity and a short response time. For some liquids, however, the remaining spurious heat flow in the membrane is still not negligible. These unwanted thermal shunts can be further decreased by utilizing structures, like cantilevers or micro-bridges. To investigate this aspect experimentally, two different sensors were designed, both intended to determine the thermal conductivity and diffusivity of liquids using a heating element and a spatially separated temperature sensor. In the former case, heater and thermistor are located on a closed membrane structure whereas in the latter case the membrane is selectively patterned yielding an individual micro-bridge for each element. The measurement results confirm, that the novel bridge-based sensor allows to determine the thermal properties more accurately and independently from the thermal properties of the membrane.","PeriodicalId":233838,"journal":{"name":"2006 5th IEEE Conference on Sensors","volume":"10 3","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2006-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132604369","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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