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Research on removal function and ion beam figuring process for ultra-precision manufacturing optical components 超精密制造光学元件的去除函数及离子束计算工艺研究
Xiaojing Li, Dasen Wang, F. Nie, Pengfei Wu, Shiyan Zhao
Surface of fused silica optical components were polished by Ion Beam Figuring (IBF) ultra-precision process. Based on the analysis of the relationship between the ion beam current density distribution parameters obtained by faraday scan and the removal function, the removal function model for IBF was established. The IBF experiment for fused silica optical materials were carried out. The experimental results show that the IBF method based on faraday scan can achieve the same figure correcting ability as the traditional IBF method based on line scan experiment. But the offline calculation time of the removal function can be reduced from 2 hours to 5minutes, which improves the efficiency of IBF greatly. After several cycles the initial surface figure error of the optical element before processing, with a PV value from more than 500 nm to less than 15nm and an RMS value from more than 120nm to less than 1.5 nm. Ultra-precision surface of fused silica optical components with nanometer scale were obtained by IBF.
采用离子束成形(IBF)超精密工艺对熔融石英光学元件进行表面抛光。在分析法拉第扫描获得的离子束电流密度分布参数与去除函数关系的基础上,建立了IBF的去除函数模型。对熔融石英光学材料进行了IBF实验。实验结果表明,基于法拉第扫描的IBF方法可以达到与基于线扫描实验的传统IBF方法相同的图形校正能力。而去除函数的离线计算时间可以从2小时缩短到5分钟,大大提高了IBF的效率。经过几个周期后,光学元件加工前的初始表面图形误差,PV值从大于500nm到小于15nm, RMS值从大于120nm到小于1.5 nm。利用IBF技术获得了纳米级熔融石英光学元件的超精密表面。
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引用次数: 0
Research on fast and accurate acquisition method of decay time constant 衰减时间常数快速准确采集方法的研究
Yucheng Ouyang, Bin Zhang, Yuchuan Quan, Z. Tan
As a parameter of the process of an event, the measurement of decay time constant has been widely used in many fields such as electronic information, economy, chemistry and biology. How to quickly and accurately obtain the decay time constant of various kinds of decay signals has always been a hot issue in the field of testing technology. In this paper, research and carding are carried out on the fast and accurate decay acquisition method of time constant of single exponential decay signal. The main purpose is to comprehensively grasp the main methods adopted in current engineering technology and scientific research, and on this basis, a set of fast and accurate acquisition scheme of attenuation time constant based on ZYNQ system is proposed, It lays a foundation for the development of cavity ring down loss measurement and spectrum measurement system.
衰减时间常数作为事件发生过程的参数,在电子信息、经济、化学、生物等诸多领域得到了广泛的应用。如何快速准确地获得各种衰减信号的衰减时间常数一直是测试技术领域的热点问题。本文对单指数衰减信号时间常数的快速准确衰减采集方法进行了研究和梳理。主要目的是综合掌握当前工程技术和科学研究中采用的主要方法,在此基础上,提出了一套基于ZYNQ系统的衰减时间常数快速准确的采集方案,为空腔衰荡损耗测量和频谱测量系统的开发奠定基础。
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引用次数: 0
Polarization-dependent, wide spectrum and wide-angle anti-reflection grating 偏振依赖,宽光谱和广角增透光栅
Yuan Li, Junhong Su
Sub-wavelength 􀀁ratings (SWGs) have the property of the laser induced damage threshold (LIDT) close to that of bulk optical medium material, which becomes the focus of research to improve the anti-laser damage properties of optical element in recent years. SWGs are the effective substitutes for the laser anti-reflection (AR) of multilayer dielectric (MLD) thin films. In this paper, a polarization-dependent SWG with anti-reflection and wide-spectrum properties based on optical glass was designed using rigorous coupled wave analysis (RCWA). Figure 1 shows the schematic of the 1D grating, h is the ridge height of the grating, w is the bottom width of the grating,Λ is the period of the grating, and θ is the incident angle. The spectral characteristics were simulated using finite element analysis (FEA). The results show that the transmittance is not less than 95% from 350 nm-2500 nm in 0°~40° incident angle when the polarization component z of the electric field (TE) is parallel to the ridge direction of the grating. And it is not less than 98.5% at 0° incident angle from 350 nm to 2500 nm. When the polarization component z of the magnetic field (TM) is parallel to the ridge direction of the grating, the transmittance is not less than 95% from 300 nm to 900 nm in 0°~40° incident angle.
亚波长􀀁ratings (SWGs)具有接近块状光学介质材料的激光诱导损伤阈值(LIDT)特性,是近年来提高光学元件抗激光损伤性能的研究热点。SWGs是多层介质(MLD)薄膜激光增透(AR)的有效替代品。本文采用严格耦合波分析(RCWA)方法,设计了一种基于光学玻璃的具有抗反射和广谱特性的偏振相关SWG。图1为一维光栅示意图,h为光栅脊高,w为光栅底宽,Λ为光栅周期,θ为入射角。采用有限元分析方法对其光谱特性进行了模拟。结果表明:当电场偏振分量z平行于光栅脊方向时,在0°~40°入射角范围内,在350 nm ~ 2500 nm范围内,透射率不小于95%;在350nm ~ 2500nm范围内,在0°入射角范围内,光通量不小于98.5%。当磁场偏振分量z (TM)平行于光栅脊方向时,在0°~40°入射角范围内,从300 nm到900 nm的透射率不小于95%。
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引用次数: 0
Image quality compensation via tolerance sensitivity matrix method in lithography 光刻中容差灵敏度矩阵法的图像质量补偿
Chao Yang, Xianchang Zhu, Jing Chuan, Xiaolong Cheng, H. Sun, Song Hu
This article introduces an image quality compensation method based on tolerance sensitivity matrix analysis. First, use the optical software CODE V to establish an optical system model, and add tolerances to a set of i-line projection objectives with a numerical aperture of 0.33. Then the singular value decomposition (SVD) is performed on the sensitivity matrix composed of the structural parameters of the system's sensitive components to select the image quality compensator. The image quality is compensated by coupling the determined three compensators to each other. Comparing the performance of the compensated lithography objective lens with the tolerance lithography objective lens, the system wave aberration is converged from 33.5nmRMS to 23.9nmRMS, the wave aberration PV value is reduced from 0.07λ to 0.02λ for the tolerance objective lens, and the distortion is reduced from 491nm to 48.6nm. The rate is reduced from 0.03ppm to 0.01ppm. This study uses fewer compensators to restore the system wave aberration, distortion and magnification to close to the design level, effectively reducing the manufacturing difficulty and cost of the projection lithography objective lens, and verifying the effectiveness of the compensation method and model.
介绍了一种基于容差灵敏度矩阵分析的图像质量补偿方法。首先,利用光学软件CODE V建立光学系统模型,并对一组数值孔径为0.33的i线投影物镜添加公差。然后对由系统敏感元件结构参数组成的灵敏度矩阵进行奇异值分解(SVD),选择图像质量补偿器;通过将确定的三个补偿器相互耦合来补偿图像质量。对比补偿光刻物镜与容差光刻物镜的性能,容差物镜的系统波像差从33.5nmRMS收敛到23.9nmRMS,波像差PV值从0.07λ减小到0.02λ,畸变从491nm减小到48.6nm。速率从0.03ppm降低到0.01ppm。本研究使用较少的补偿器将系统的波像差、畸变和放大率恢复到接近设计水平,有效降低了投影光刻物镜的制造难度和成本,验证了补偿方法和模型的有效性。
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引用次数: 0
Discussion on the development status of optical anti-reflective coating technology 光学增透膜技术发展现状的探讨
Yuting Wu, Zhiqiang Lin, Hao Zhang, Min Wang
The purpose of this paper is to make an overview of the development status of anti-reflective coating in optical coating. The preparation process of anti-reflective coating mainly includes the selection of coating materials and the design of the coating system based on the application requirements, and then the selection of appropriate preparation process for the preparation of the coating.Therefore, this paper first describes the principle of anti-reflective coating, then describes the design methods of single-layer and multilayer membrane systems, and compares the optical transmittance of the two methods in visible bands.Secondly, it describes the four kinds of coating preparation technology commonly used nowadays, including vacuum evaporation method, chemical vapor deposition method, sol-gel method, sputtering method, and its main application fields and advantages and disadvantages are summarized.Then the anti-reflection coating materials commonly used in coating technology and the film structures which are constantly updated and developed to adapt to different application fields are described.Finally, two applications of anti-reflective coating nowadays are listed, including multi-layer special optical coating applied by the space detection camera developed by our group and the application of the anti-reflective coating in solar cells.
本文的目的是概述抗反射涂层在光学涂层中的发展现状。减反射涂层的制备工艺主要包括根据应用要求选择涂层材料和设计涂层体系,然后选择合适的制备工艺进行涂层的制备。因此,本文首先介绍了增透膜的原理,然后介绍了单层和多层膜系统的设计方法,并比较了两种方法在可见光波段的透光率。其次,介绍了目前常用的四种涂层制备技术,包括真空蒸发法、化学气相沉积法、溶胶-凝胶法、溅射法,并对其主要应用领域和优缺点进行了总结。然后介绍了涂层技术中常用的增透涂层材料以及为适应不同应用领域而不断更新和发展的薄膜结构。最后,列举了目前抗反射涂层的两种应用,即本课题组研制的空间探测相机应用的多层特殊光学涂层和抗反射涂层在太阳能电池中的应用。
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引用次数: 2
Surface roughness detection method of optical elements based on region scattering 基于区域散射的光学元件表面粗糙度检测方法
Hongjun Wang, Chen Wei, A. Tian, Bingcai Liu, Xueliang Zhu
To achieve rapid and accurate detection of the surface roughness of optical elements, a surface roughness detection method based on region scattering was proposed in this paper. Firstly, starting from the basic principle of the angle-resolved scattering method, a surface roughness detection model based on the area scattering distribution is established. Then, the influence of incident angle, incident wavelength, etc. on the scattering distribution is simulated and analyzed, and the best sampling region of the scattering distribution is determined. Finally, the experiment completes the acquisition and processing of the surface scattering distribution of the optical elements, and the dynamic range of the scattering distribution is improved through the fusion of the multi-exposure scattering image, thereby realized the high-precision detection of surface roughness. Take optical components as test objects, the experimental results show that the use of regional scattering signals to characterize the surface roughness of components can improve the measurement speed while ensuring the measurement accuracy.
为了实现对光学元件表面粗糙度的快速准确检测,提出了一种基于区域散射的表面粗糙度检测方法。首先,从角度分辨散射法的基本原理出发,建立了基于区域散射分布的表面粗糙度检测模型;然后,模拟分析了入射角、入射波长等因素对散射分布的影响,确定了散射分布的最佳采样区域。最后,实验完成了光学元件表面散射分布的采集和处理,并通过多曝光散射图像的融合提高了散射分布的动态范围,从而实现了表面粗糙度的高精度检测。以光学元件为测试对象,实验结果表明,利用区域散射信号表征元件表面粗糙度可以在保证测量精度的同时提高测量速度。
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引用次数: 0
Machining approach of freeform optics via fast tool servo diamond turning 快速刀具伺服金刚石车削加工自由曲面光学元件的方法
Yansong Guo, Xiao-jing Yang, Tong Yao, G. Du, Xueying Wang
Optical freeform surfaces can provide a higher degree of freedom in optical design, compared with spherical and aspherical optical components. The application of freeform optical components in imaging optical systems is conducive to simplifying the system structure and improving imaging quality, and has wide applications in illumination, imaging and non-imaging, etc. This paper introduces the basic principle and process of fast tool servo (FTS) diamond turning, and its application in the field of optical processing. A series of machining experiment was carried out on aluminum materials by FTS diamond turning for XY polynomial freeform surface mirrors, and the surface accuracy and roughness were measured. The effects of feed rate, spindle speed, and cutting depth on surface roughness were studied and corresponding functional relationship curves were determined. The results show that the feed rate had the greatest influence on surface roughness of aluminum freeform surfaces, as the feed rate increased, the surface roughness increased gradually; the spindle speed and cutting depth have relatively little influence on surface roughness. The fitting degree of curves was very high, which can predict the surface roughness of machined freeform more accurately. The 3-D surface accuracy PV of the final processed freeform surface was 0.22μm, and the 2-D surface roughness Ra value was 3.5nm, the machined surface reached a mirror finish.
与球面和非球面光学元件相比,光学自由曲面在光学设计中具有更高的自由度。自由曲面光学元件在成像光学系统中的应用,有利于简化系统结构,提高成像质量,在照明、成像和非成像等方面有着广泛的应用。本文介绍了快速刀具伺服(FTS)金刚石车削的基本原理、加工过程及其在光学加工领域的应用。利用FTS金刚石车削技术对铝合金材料进行了一系列的加工实验,对XY多项式自由曲面反射镜进行了表面精度和粗糙度测量。研究了进给速度、主轴转速和切削深度对表面粗糙度的影响,并确定了相应的函数关系曲线。结果表明:进给量对铝自由曲面表面粗糙度的影响最大,随着进给量的增大,表面粗糙度逐渐增大;主轴转速和切削深度对表面粗糙度影响较小。曲线拟合程度高,能较准确地预测加工自由曲面的表面粗糙度。最终加工的自由曲面三维表面精度PV为0.22μm,二维表面粗糙度Ra值为3.5nm,加工表面达到镜面光洁度。
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引用次数: 0
Image enhancement of Shack-Hartmann wavefront sensor with non-uniform illumination 非均匀光照下Shack-Hartmann波前传感器的图像增强
Peijia Jiang, Mengmeng Zhao, Wang Zhao, Shuai Wang, P. Yang
The uniformity of illumination can affect the detection ability of the Shack-Hartmann wavefront sensor to a certain extent and degrade the wavefront restoration accuracy. When the intensity distribution of the incident beam is very non-uniform, it is difficult for each sub-spot image to carry out optimal signal-to-noise ratio (SNR) at the same time. The spot image may be over-exposed or too dark, and that brings about the incorrect measurements of the centroid and further influences the reconstruction accuracy of the wavefront. In the paper, we use multi-frame image information fusion to generate an enhanced spot-array image with a high dynamic range, so as to improve the accuracy of the overall centroid calculation. The simulation results show that this method is effective in the above cases.
光照的均匀性会在一定程度上影响Shack-Hartmann波前传感器的探测能力,降低波前恢复精度。当入射光束的强度分布非常不均匀时,每个子点图像很难同时实现最优信噪比。光斑图像可能曝光过深或过暗,导致质心测量不正确,进而影响波前重建精度。本文利用多帧图像信息融合,生成具有高动态范围的增强点阵图像,从而提高整体质心计算的精度。仿真结果表明,该方法在上述情况下是有效的。
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引用次数: 1
Synchronous microdeformation and first derivative dynamic measurement based on laser shearing speckle interferometry 基于激光剪切散斑干涉的同步微变形和一阶导数动态测量
Xiao-shan Huang, Ji Liu, Lixia Yu
This paper presents a multi-carrier frequency spatial phase shift digital shearing speckle interferometry method which is capable of the first derivative and microdeformation synchronously. The dynamic deformation of the composite defects is carried out by thermal loading.The shear speckle interferometry is used to locate the defect position and holography was used to measure microdeformation of the defect. In Michelson shearing device, an optical fiber is used to introduce a reference beam,two shear images form a shear fringe pattern, and the reference beam introduced is combined with one of the shear patterns to generate a hologram. The spatial phase shifting technique is used to obtain the frequency domain after Fourier transform, holograms and shearograms are obtained at the same time. In this paper, the direct synchronous measurement of microdeformation and first derivative of deformation is realized without the need of numerical integration process. Finally, the experimental results show that the proposed method can quickly obtain the shear fringe image, which represents the first derivative of the deformation to position the defect in the composite material, and the hologram is filtered, unwrapped and 3D displayed to obtain accurate micron scale deformation values.
提出了一种多载波空间移相数字剪切散斑干涉测量方法,该方法能同时实现一阶导数和微变形。复合材料缺陷的动态变形是通过热载荷进行的。采用剪切散斑干涉法定位缺陷位置,采用全息术测量缺陷微变形。在迈克尔逊剪切装置中,使用光纤引入参考光束,两个剪切图像形成剪切条纹图案,引入的参考光束与其中一个剪切图案组合生成全息图。在傅里叶变换后,利用空间相移技术获得频域,同时得到全息图和剪切图。本文实现了微变形和变形一阶导数的直接同步测量,而无需进行数值积分处理。最后,实验结果表明,该方法可以快速获得代表变形一阶导数的剪切条纹图像,用于定位复合材料中的缺陷,并对全息图进行滤波、解包裹和三维显示,以获得精确的微米尺度变形值。
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引用次数: 0
Precise adjustment for neutral ternary semitransparent organic photovoltaics by mixing an insulating polymer 通过混合绝缘聚合物对中性三元半透明有机光伏进行精确调整
Dayong Zhang, Genjie Yang, R. Wang, Junsheng Yu
Recently, ternary semi-transparent organic photovoltaics (STOPVs) have developed rapidly due to their impressive application prospect in vegetable greenhouse, smart light window, and building-integrated solar cells. However, STOPVs have special requirements for the thickness of the active layer, which will affect the performance of the solar cells. Therefore, a new method developed to trade off device performance and average transmittance (AVT) are extremely important. Herein, we used an insulating polymer poly(N-vinylcarbazole) (PVK) as a color control agent to improve the AVT without changing the power conversion efficiency (PCE) of ternary STOPVs. Through mixing of PVK, the STOPVs show remarkable enhancement of the hole mobility and visible light transmittance, which leading the AVT of the device reaches 23.2% while maintaining the PCE over 14%. This method can effectively realize the preparation of high-performance neutral STOPVs, which is worthy of further promotion and research.
近年来,三元半透明有机光伏材料在蔬菜温室、智能光窗、建筑一体化太阳能电池等领域的应用前景广阔,发展迅速。然而,stopv对有源层的厚度有特殊的要求,这将影响太阳能电池的性能。因此,开发一种新的方法来权衡器件性能和平均透射率(AVT)是非常重要的。本文采用绝缘聚合物聚(n -乙烯基咔唑)(PVK)作为色控剂,在不改变三元stopv功率转换效率(PCE)的情况下提高了AVT。通过PVK的掺入,stopv的空穴迁移率和可见光透过率显著提高,器件的AVT达到23.2%,PCE保持在14%以上。该方法可以有效地实现高性能中性stopv的制备,值得进一步推广和研究。
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引用次数: 0
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International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT)
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