Yongchao Dong, Penghui Sun, Jian Chen, Xueliang Zeng, Han Wang
A novel highly sensitive displacement sensing method based on the intensity detection of the resonant spectrum, which arises from a fiber-based surface nanoscale axial photonics (SNAP) resonator, is proposed. By means of dissipative and dispersive coupling mechanisms, the changes of the relative position between the SNAP resonator and fiber taper not only bring the shift in a resonant wavelength, but also lead to the variation of the linewidth and extinction ratio of the whispering gallery mode (WGM) in spectrum. Instead of the wavelength shift, we utilize the extinction ratio changes to realize the displacement sensing, which is robust against lasing and microresonator frequency noise in the detecting system. Using the analytical expression of the transmission spectrum, the extinction ratio as a function of the displacement for different axial modes is obtained. It is proved that a large range and high resolution displacement sensor can be achieved by simultaneously tracking the extinction ratio of multiple axial modes. The fiber-based SNAP resonator can be fabricated into a probe-type sensor, making it potential and a powerful tool for many displacement sensing applications such as microstructure measurements in both aerospace and nano-lithography fields.
{"title":"Displacement sensing based on intensity detection by a SNAP-taper coupling system","authors":"Yongchao Dong, Penghui Sun, Jian Chen, Xueliang Zeng, Han Wang","doi":"10.1117/12.2604772","DOIUrl":"https://doi.org/10.1117/12.2604772","url":null,"abstract":"A novel highly sensitive displacement sensing method based on the intensity detection of the resonant spectrum, which arises from a fiber-based surface nanoscale axial photonics (SNAP) resonator, is proposed. By means of dissipative and dispersive coupling mechanisms, the changes of the relative position between the SNAP resonator and fiber taper not only bring the shift in a resonant wavelength, but also lead to the variation of the linewidth and extinction ratio of the whispering gallery mode (WGM) in spectrum. Instead of the wavelength shift, we utilize the extinction ratio changes to realize the displacement sensing, which is robust against lasing and microresonator frequency noise in the detecting system. Using the analytical expression of the transmission spectrum, the extinction ratio as a function of the displacement for different axial modes is obtained. It is proved that a large range and high resolution displacement sensor can be achieved by simultaneously tracking the extinction ratio of multiple axial modes. The fiber-based SNAP resonator can be fabricated into a probe-type sensor, making it potential and a powerful tool for many displacement sensing applications such as microstructure measurements in both aerospace and nano-lithography fields.","PeriodicalId":236529,"journal":{"name":"International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT)","volume":"8 Suppl 2 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-12-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126139854","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Weak-rigid components have a wide range of applications in the fields of aerospace, vehicle and ship power. They have the characteristics of high accuracy, poor rigidity, and easy deformation. The uncertainty of their deformation has an important impact on the overall performance and subsequent use of the equipment. Weak-rigid plates are one of the most common types of weak-rigid components. At present, the research on weak-rigid plates mainly focuses on the deformation control of the workpiece during processing, and there are relatively few studies on the measurement of comprehensive parameters. The surface profile parameters of the weak-rigid plate will reflect the performance and processing quality of the weak-rigid plate. In this paper, a comprehensive index measuring device for weak-rigid components based on dispersion confocal sensor and a stress change test system for weak-rigid components based on dynamic interferometer are used to accurately measure the surface profile of weak-rigid plates, which provides a basis for its process parameters and subsequent assembly use. It provides a reference for the subsequent measurement of the surface profile and thickness of weak-rigid curved components.
{"title":"Research on surface profile measurement of weak-rigid plate","authors":"Guanyu Zhou, Wei Wang, Min Xu","doi":"10.1117/12.2604750","DOIUrl":"https://doi.org/10.1117/12.2604750","url":null,"abstract":"Weak-rigid components have a wide range of applications in the fields of aerospace, vehicle and ship power. They have the characteristics of high accuracy, poor rigidity, and easy deformation. The uncertainty of their deformation has an important impact on the overall performance and subsequent use of the equipment. Weak-rigid plates are one of the most common types of weak-rigid components. At present, the research on weak-rigid plates mainly focuses on the deformation control of the workpiece during processing, and there are relatively few studies on the measurement of comprehensive parameters. The surface profile parameters of the weak-rigid plate will reflect the performance and processing quality of the weak-rigid plate. In this paper, a comprehensive index measuring device for weak-rigid components based on dispersion confocal sensor and a stress change test system for weak-rigid components based on dynamic interferometer are used to accurately measure the surface profile of weak-rigid plates, which provides a basis for its process parameters and subsequent assembly use. It provides a reference for the subsequent measurement of the surface profile and thickness of weak-rigid curved components.","PeriodicalId":236529,"journal":{"name":"International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT)","volume":"43 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-12-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122315580","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Xinjian Lu, Yinghui Guo, M. Pu, Xiong Li, Xiaoliang Ma, Ping Gao, Xiangang Luo
Super-oscillation phenomenon provides an effective solution for realizing far-field non-invasive super-resolution imaging. However, most super-oscillatory lenses are challenging to balance the working bandwidth and working efficiency, which greatly limits the practical applications of super-oscillation lenses in optical systems. In this work, a broadband high-efficiency super-oscillatory metalens for sub-diffraction focusing about 0.75 times the diffraction limit based on the reflective metasurface is proposed for super-resolution imaging in the visible ranging from 400 nm to 700 nm. Moreover, another metalens with a sub-diffraction focusing spot equal to 0.6 times of the diffraction limit is also designed to prove the universal applicability of the proposed method. The proposed method provides an effective pathway for the development of microscopy, holography, and machine vision.
{"title":"Broadband high-efficiency reflective metasurfaces for sub-diffraction focusing in the visible","authors":"Xinjian Lu, Yinghui Guo, M. Pu, Xiong Li, Xiaoliang Ma, Ping Gao, Xiangang Luo","doi":"10.1117/12.2604462","DOIUrl":"https://doi.org/10.1117/12.2604462","url":null,"abstract":"Super-oscillation phenomenon provides an effective solution for realizing far-field non-invasive super-resolution imaging. However, most super-oscillatory lenses are challenging to balance the working bandwidth and working efficiency, which greatly limits the practical applications of super-oscillation lenses in optical systems. In this work, a broadband high-efficiency super-oscillatory metalens for sub-diffraction focusing about 0.75 times the diffraction limit based on the reflective metasurface is proposed for super-resolution imaging in the visible ranging from 400 nm to 700 nm. Moreover, another metalens with a sub-diffraction focusing spot equal to 0.6 times of the diffraction limit is also designed to prove the universal applicability of the proposed method. The proposed method provides an effective pathway for the development of microscopy, holography, and machine vision.","PeriodicalId":236529,"journal":{"name":"International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT)","volume":"34 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-12-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127467307","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
With the application of single point diamond ultra-precision turning technology in optical free-form surface processing, the development of high-frequency large amplitude fast tool servo system has become a research hotspot. In this paper, a double piezoelectric ceramic fast tool servo system is designed. Its performance index is 60μm stroke at 300Hz. In this paper, the structural design principle and processing technology of the system are systematically analyzed. The stiffness analysis of the system were carried out by using the finite element analysis software to verify the performance of the high-frequency response amplitude of the system. In this paper, the key technology research on the structure design of double piezoelectric ceramic fast tool servo system provides the basis for improving the machining accuracy and efficiency of the fast tool servo system.
{"title":"Structure design and performance analysis of double piezoelectric ceramic drive fast tool servo system","authors":"Tiancong Luo, Xiao-qiang Peng, Chao-liang Guan, Jiahao Yong, Yupeng Xiong","doi":"10.1117/12.2604485","DOIUrl":"https://doi.org/10.1117/12.2604485","url":null,"abstract":"With the application of single point diamond ultra-precision turning technology in optical free-form surface processing, the development of high-frequency large amplitude fast tool servo system has become a research hotspot. In this paper, a double piezoelectric ceramic fast tool servo system is designed. Its performance index is 60μm stroke at 300Hz. In this paper, the structural design principle and processing technology of the system are systematically analyzed. The stiffness analysis of the system were carried out by using the finite element analysis software to verify the performance of the high-frequency response amplitude of the system. In this paper, the key technology research on the structure design of double piezoelectric ceramic fast tool servo system provides the basis for improving the machining accuracy and efficiency of the fast tool servo system.","PeriodicalId":236529,"journal":{"name":"International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-12-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128772141","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Ultra-precision turning technology is widely used in the machining process of optical mirrors. Due to the influence of machine motion error, clamping error, tracking error and other factors, ultra-precision turning often deviates from the ideal position during the actual machining process. Various error factors are coupled with each other, and it is difficult to compensate by establishing an accurate error model at present. This paper proposes an optical surface error compensation method based on zernike polynomials. Firstly, the surface error is reconstructed with Zernike polynomials. Then, by analyzing the frequency distribution of the optical surface error, the error corresponding to a specific Zenick coefficient is selected. Finally, based on the fast tool servo system, the original machining path is corrected according to the error compensation strategy. By compensating a Φ100 mm mirror, the surface accuracy is improved from PV 1.83 μm, RMS 0.47 μm to PV 0.38 μm, RMS 0.04 μm. The experimental results show that the error compensation strategy proposed in this paper can significantly reduce the optical surface error and improve the machining accuracy.
{"title":"Optical surface error analysis and compensation technique based on Zernike polynomial coefficients","authors":"Zelong Li, Chao-liang Guan, Yi-fan Dai, Jiahao Yong","doi":"10.1117/12.2604688","DOIUrl":"https://doi.org/10.1117/12.2604688","url":null,"abstract":"Ultra-precision turning technology is widely used in the machining process of optical mirrors. Due to the influence of machine motion error, clamping error, tracking error and other factors, ultra-precision turning often deviates from the ideal position during the actual machining process. Various error factors are coupled with each other, and it is difficult to compensate by establishing an accurate error model at present. This paper proposes an optical surface error compensation method based on zernike polynomials. Firstly, the surface error is reconstructed with Zernike polynomials. Then, by analyzing the frequency distribution of the optical surface error, the error corresponding to a specific Zenick coefficient is selected. Finally, based on the fast tool servo system, the original machining path is corrected according to the error compensation strategy. By compensating a Φ100 mm mirror, the surface accuracy is improved from PV 1.83 μm, RMS 0.47 μm to PV 0.38 μm, RMS 0.04 μm. The experimental results show that the error compensation strategy proposed in this paper can significantly reduce the optical surface error and improve the machining accuracy.","PeriodicalId":236529,"journal":{"name":"International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT)","volume":"12071 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-12-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129146120","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
As a new generation of display technology, Laser displays a wide range of color gamut, high brightness, and other characteristics. However, as a highly coherent light source, laser speckle will be generated by the interference phenomenon of the reflected light or transmitted light of different surface elements after the incident on the surface of the object, which will seriously reduce the quality of the display image. Therefore, the suppression of laser speckle and the reduction of speckle contrast are always important problems in laser display technology. Here, we presented a speckle suppression scheme suitable for projector optical systems. Speckle suppression by spectral broadening and speckle suppression by superposition of multiple independent and unrelated speckle patterns are included in the scheme. Then, the feasibility of the scheme was verified by simulation. On this basis, the projector system was built. The speckle suppression scheme was added, and the effect of the scheme on speckle contrast was verified by actual measurement, and the speckle contrast was successfully reduced from 0.129 to 0.041, which was difficult for human eyes to distinguish.
{"title":"Study on speckle problem in semiconductor laser display","authors":"Zhihao Quan, Jie Liu, Jian-Cheng Zhong","doi":"10.1117/12.2604820","DOIUrl":"https://doi.org/10.1117/12.2604820","url":null,"abstract":"As a new generation of display technology, Laser displays a wide range of color gamut, high brightness, and other characteristics. However, as a highly coherent light source, laser speckle will be generated by the interference phenomenon of the reflected light or transmitted light of different surface elements after the incident on the surface of the object, which will seriously reduce the quality of the display image. Therefore, the suppression of laser speckle and the reduction of speckle contrast are always important problems in laser display technology. Here, we presented a speckle suppression scheme suitable for projector optical systems. Speckle suppression by spectral broadening and speckle suppression by superposition of multiple independent and unrelated speckle patterns are included in the scheme. Then, the feasibility of the scheme was verified by simulation. On this basis, the projector system was built. The speckle suppression scheme was added, and the effect of the scheme on speckle contrast was verified by actual measurement, and the speckle contrast was successfully reduced from 0.129 to 0.041, which was difficult for human eyes to distinguish.","PeriodicalId":236529,"journal":{"name":"International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT)","volume":"12074 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-12-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129442870","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
A dual dispersion stitching method is proposed to extend the measuring range of chromatic confocal sensor without reducing the axial resolution. A novel chromatic confocal sensor with dual dispersion is presented and introduced. An X-shaped fiber coupler is employed to divide the light from light source into two beams. These two beams are used to generate two sets of staggered dispersion which extend the measuring range of chromatic confocal sensor. A dual-dispersive objective is designed with Zemax software for verifying the proposed method. The result indicates that the length of total dispersion is extended to 209.6 μm, which is 1.75 times the length of single dispersion. The coefficient of determination between the axial dispersion and wavelength is close to 1.0000.
{"title":"Chromatic confocal sensor with dual dispersion for extending the measuring range","authors":"Xiaojie Wang, Tao Ma","doi":"10.1117/12.2604482","DOIUrl":"https://doi.org/10.1117/12.2604482","url":null,"abstract":"A dual dispersion stitching method is proposed to extend the measuring range of chromatic confocal sensor without reducing the axial resolution. A novel chromatic confocal sensor with dual dispersion is presented and introduced. An X-shaped fiber coupler is employed to divide the light from light source into two beams. These two beams are used to generate two sets of staggered dispersion which extend the measuring range of chromatic confocal sensor. A dual-dispersive objective is designed with Zemax software for verifying the proposed method. The result indicates that the length of total dispersion is extended to 209.6 μm, which is 1.75 times the length of single dispersion. The coefficient of determination between the axial dispersion and wavelength is close to 1.0000.","PeriodicalId":236529,"journal":{"name":"International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT)","volume":"66 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-12-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126279561","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Ultraviolet imaging technology is a non electric corona testing technology, which uses ultraviolet imager to detect ultraviolet produced by air discharge ionization, and then determine the position and intensity of corona discharge, it has high accuracy and reliability. For the detection and calibration of UV / visible image coincidence of UV imager, the LED integrating sphere light source with UV and visible light is installed to illuminate the star point hole on the focal plane of reflective collimator to simulate the discharge of infinite target. After receiving by the ultraviolet imager, the star point on the focal plane of the collimator will be imaged as a bright spot on the detector surface of the UV imager. The coincidence degree of the ultraviolet and visible light can be obtained by calculating the center position deviation of the imaging spot in two different spectral ranges. This equipment can be used for high-precision calibration of the non-coincidence of the UV imager.
{"title":"System design of spectral coincidence detection of UV imager for power detection","authors":"Ling Luo, Q. Yang, Zun Wang, Di Tao","doi":"10.1117/12.2604757","DOIUrl":"https://doi.org/10.1117/12.2604757","url":null,"abstract":"Ultraviolet imaging technology is a non electric corona testing technology, which uses ultraviolet imager to detect ultraviolet produced by air discharge ionization, and then determine the position and intensity of corona discharge, it has high accuracy and reliability. For the detection and calibration of UV / visible image coincidence of UV imager, the LED integrating sphere light source with UV and visible light is installed to illuminate the star point hole on the focal plane of reflective collimator to simulate the discharge of infinite target. After receiving by the ultraviolet imager, the star point on the focal plane of the collimator will be imaged as a bright spot on the detector surface of the UV imager. The coincidence degree of the ultraviolet and visible light can be obtained by calculating the center position deviation of the imaging spot in two different spectral ranges. This equipment can be used for high-precision calibration of the non-coincidence of the UV imager.","PeriodicalId":236529,"journal":{"name":"International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT)","volume":"199 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-12-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131424866","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Zhimin Rao, Haitao Liu, Jieli Wu, Qiang Chen, Dailu Wang
An efficient orthogonal velocity polishing tool (OVPT) was developed. The OVPT was installed on the end flange of an industry robot. The movement range of the industry robot reaches φ 1000 millimeter. The robot OVPT is a highly efficiency processing method for aspheric precision optics manufacturing. In this paper, a 360 mm diameter fused silica parabolic mirror was polished by the robot OVPT. The convergence of OVPT based on an industry robot is outstanding. After 4 times of polishing, a final surface error RMS 16.6nm was achieved, and the initial surface error RMS was 69.5nm. A polished surface roughness Ra 1.5nm was achieved by robot OVPT.
{"title":"Aspheric surface polishing with orthogonal velocity polishing tool","authors":"Zhimin Rao, Haitao Liu, Jieli Wu, Qiang Chen, Dailu Wang","doi":"10.1117/12.2604036","DOIUrl":"https://doi.org/10.1117/12.2604036","url":null,"abstract":"An efficient orthogonal velocity polishing tool (OVPT) was developed. The OVPT was installed on the end flange of an industry robot. The movement range of the industry robot reaches φ 1000 millimeter. The robot OVPT is a highly efficiency processing method for aspheric precision optics manufacturing. In this paper, a 360 mm diameter fused silica parabolic mirror was polished by the robot OVPT. The convergence of OVPT based on an industry robot is outstanding. After 4 times of polishing, a final surface error RMS 16.6nm was achieved, and the initial surface error RMS was 69.5nm. A polished surface roughness Ra 1.5nm was achieved by robot OVPT.","PeriodicalId":236529,"journal":{"name":"International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT)","volume":"14 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-12-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131802432","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
With the developments of optical design, testing and manufacturing technology, aspherical optics are applied more often. However, high precision aspherical optics are not widely used in many fields due to the high cost of manufacturing. In order to reduce the cost, an approach to realize the fast manufacturing of high precision aspherical optics is proposed. The bonnet polishing, computer controlled optical surfacing (CCOS) and magnetorheological finishing (MRF) are utilized in combination during the manufacturing process. Firstly, the rough polishing of the aspherical optics is accomplished by bonnet polishing. Secondly, the surface error are smoothed to reduce mid-frequency surface error by CCOS smoothing polishing equipment. Finally, the deterministic manufacturing is carried out by MRF equipment. The fast manufacturing technology has been applied on a paraboloidal mirror of 237mm in diameter. The experimental results show that aspherical optics can reach λ /60 (rms, @λ =632.8nm) in 33 hours by using the combined manufacturing technology. The fast manufacturing technology can provide high precision and high efficiency for aspherical optics.
{"title":"Study on fast manufacturing technology for high precision aspherical optics","authors":"Bin Xuan, Linchao Zhang","doi":"10.1117/12.2604549","DOIUrl":"https://doi.org/10.1117/12.2604549","url":null,"abstract":"With the developments of optical design, testing and manufacturing technology, aspherical optics are applied more often. However, high precision aspherical optics are not widely used in many fields due to the high cost of manufacturing. In order to reduce the cost, an approach to realize the fast manufacturing of high precision aspherical optics is proposed. The bonnet polishing, computer controlled optical surfacing (CCOS) and magnetorheological finishing (MRF) are utilized in combination during the manufacturing process. Firstly, the rough polishing of the aspherical optics is accomplished by bonnet polishing. Secondly, the surface error are smoothed to reduce mid-frequency surface error by CCOS smoothing polishing equipment. Finally, the deterministic manufacturing is carried out by MRF equipment. The fast manufacturing technology has been applied on a paraboloidal mirror of 237mm in diameter. The experimental results show that aspherical optics can reach λ /60 (rms, @λ =632.8nm) in 33 hours by using the combined manufacturing technology. The fast manufacturing technology can provide high precision and high efficiency for aspherical optics.","PeriodicalId":236529,"journal":{"name":"International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT)","volume":"17 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-12-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131068900","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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