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Displacement sensing based on intensity detection by a SNAP-taper coupling system 基于snap -锥度耦合系统强度检测的位移传感
Yongchao Dong, Penghui Sun, Jian Chen, Xueliang Zeng, Han Wang
A novel highly sensitive displacement sensing method based on the intensity detection of the resonant spectrum, which arises from a fiber-based surface nanoscale axial photonics (SNAP) resonator, is proposed. By means of dissipative and dispersive coupling mechanisms, the changes of the relative position between the SNAP resonator and fiber taper not only bring the shift in a resonant wavelength, but also lead to the variation of the linewidth and extinction ratio of the whispering gallery mode (WGM) in spectrum. Instead of the wavelength shift, we utilize the extinction ratio changes to realize the displacement sensing, which is robust against lasing and microresonator frequency noise in the detecting system. Using the analytical expression of the transmission spectrum, the extinction ratio as a function of the displacement for different axial modes is obtained. It is proved that a large range and high resolution displacement sensor can be achieved by simultaneously tracking the extinction ratio of multiple axial modes. The fiber-based SNAP resonator can be fabricated into a probe-type sensor, making it potential and a powerful tool for many displacement sensing applications such as microstructure measurements in both aerospace and nano-lithography fields.
提出了一种基于光纤表面纳米轴向光子(SNAP)谐振腔共振谱强度检测的高灵敏度位移传感方法。通过耗散和色散耦合机制,SNAP谐振腔与光纤锥度之间相对位置的变化不仅会引起谐振波长的位移,还会导致谱线宽度和窃窃廊模式消光比的变化。利用消光比的变化代替波长位移实现位移传感,对检测系统中的激光和微谐振器频率噪声具有较强的鲁棒性。利用透射谱的解析表达式,得到了不同轴向模式下消光比随位移的函数。实验证明,通过同时跟踪多轴向模态的消光比,可以实现大范围、高分辨率的位移传感器。基于光纤的SNAP谐振器可以制作成探针型传感器,使其成为许多位移传感应用的潜在和强大工具,例如航空航天和纳米光刻领域的微观结构测量。
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引用次数: 0
Research on surface profile measurement of weak-rigid plate 弱刚性板表面轮廓测量方法研究
Guanyu Zhou, Wei Wang, Min Xu
Weak-rigid components have a wide range of applications in the fields of aerospace, vehicle and ship power. They have the characteristics of high accuracy, poor rigidity, and easy deformation. The uncertainty of their deformation has an important impact on the overall performance and subsequent use of the equipment. Weak-rigid plates are one of the most common types of weak-rigid components. At present, the research on weak-rigid plates mainly focuses on the deformation control of the workpiece during processing, and there are relatively few studies on the measurement of comprehensive parameters. The surface profile parameters of the weak-rigid plate will reflect the performance and processing quality of the weak-rigid plate. In this paper, a comprehensive index measuring device for weak-rigid components based on dispersion confocal sensor and a stress change test system for weak-rigid components based on dynamic interferometer are used to accurately measure the surface profile of weak-rigid plates, which provides a basis for its process parameters and subsequent assembly use. It provides a reference for the subsequent measurement of the surface profile and thickness of weak-rigid curved components.
弱刚性构件在航空航天、车辆、船舶动力等领域有着广泛的应用。它们具有精度高、刚性差、易变形等特点。其变形的不确定性对设备的整体性能和后续使用有着重要的影响。弱刚性板是最常见的弱刚性构件类型之一。目前对弱刚性板的研究主要集中在加工过程中工件的变形控制上,综合参数的测量研究相对较少。弱刚性板的表面轮廓参数将反映弱刚性板的性能和加工质量。本文采用基于色散共聚焦传感器的弱刚性元件综合折射率测量装置和基于动态干涉仪的弱刚性元件应力变化测试系统,对弱刚性板的表面轮廓进行了精确测量,为其工艺参数和后续装配使用提供了依据。为后续测量弱刚性弯曲构件的表面轮廓和厚度提供了参考。
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引用次数: 0
Broadband high-efficiency reflective metasurfaces for sub-diffraction focusing in the visible 用于亚衍射聚焦的宽带高效反射超表面
Xinjian Lu, Yinghui Guo, M. Pu, Xiong Li, Xiaoliang Ma, Ping Gao, Xiangang Luo
Super-oscillation phenomenon provides an effective solution for realizing far-field non-invasive super-resolution imaging. However, most super-oscillatory lenses are challenging to balance the working bandwidth and working efficiency, which greatly limits the practical applications of super-oscillation lenses in optical systems. In this work, a broadband high-efficiency super-oscillatory metalens for sub-diffraction focusing about 0.75 times the diffraction limit based on the reflective metasurface is proposed for super-resolution imaging in the visible ranging from 400 nm to 700 nm. Moreover, another metalens with a sub-diffraction focusing spot equal to 0.6 times of the diffraction limit is also designed to prove the universal applicability of the proposed method. The proposed method provides an effective pathway for the development of microscopy, holography, and machine vision.
超振荡现象为实现远场无创超分辨率成像提供了有效的解决方案。然而,大多数超振荡透镜在平衡工作带宽和工作效率方面存在挑战,这极大地限制了超振荡透镜在光学系统中的实际应用。在这项工作中,提出了一种基于反射超表面的亚衍射宽带高效超振荡超透镜,聚焦约0.75倍衍射极限,用于400 ~ 700 nm可见光超分辨成像。此外,还设计了另一种亚衍射聚焦点为衍射极限0.6倍的超构透镜,以证明所提方法的普遍适用性。该方法为显微术、全息术和机器视觉的发展提供了一条有效的途径。
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引用次数: 0
Structure design and performance analysis of double piezoelectric ceramic drive fast tool servo system 双压电陶瓷驱动快速刀具伺服系统的结构设计与性能分析
Tiancong Luo, Xiao-qiang Peng, Chao-liang Guan, Jiahao Yong, Yupeng Xiong
With the application of single point diamond ultra-precision turning technology in optical free-form surface processing, the development of high-frequency large amplitude fast tool servo system has become a research hotspot. In this paper, a double piezoelectric ceramic fast tool servo system is designed. Its performance index is 60μm stroke at 300Hz. In this paper, the structural design principle and processing technology of the system are systematically analyzed. The stiffness analysis of the system were carried out by using the finite element analysis software to verify the performance of the high-frequency response amplitude of the system. In this paper, the key technology research on the structure design of double piezoelectric ceramic fast tool servo system provides the basis for improving the machining accuracy and efficiency of the fast tool servo system.
随着单点金刚石超精密车削技术在光学自由曲面加工中的应用,高频大振幅快速刀具伺服系统的开发成为研究热点。本文设计了一种双压电陶瓷快速刀具伺服系统。其性能指标为300Hz下60μm行程。本文系统地分析了该系统的结构设计原理和加工工艺。利用有限元分析软件对系统进行刚度分析,验证系统高频响应幅值的性能。本文对双压电陶瓷快速刀具伺服系统结构设计的关键技术进行了研究,为提高快速刀具伺服系统的加工精度和效率提供了依据。
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引用次数: 0
Optical surface error analysis and compensation technique based on Zernike polynomial coefficients 基于泽尼克多项式系数的光学表面误差分析与补偿技术
Zelong Li, Chao-liang Guan, Yi-fan Dai, Jiahao Yong
Ultra-precision turning technology is widely used in the machining process of optical mirrors. Due to the influence of machine motion error, clamping error, tracking error and other factors, ultra-precision turning often deviates from the ideal position during the actual machining process. Various error factors are coupled with each other, and it is difficult to compensate by establishing an accurate error model at present. This paper proposes an optical surface error compensation method based on zernike polynomials. Firstly, the surface error is reconstructed with Zernike polynomials. Then, by analyzing the frequency distribution of the optical surface error, the error corresponding to a specific Zenick coefficient is selected. Finally, based on the fast tool servo system, the original machining path is corrected according to the error compensation strategy. By compensating a Φ100 mm mirror, the surface accuracy is improved from PV 1.83 μm, RMS 0.47 μm to PV 0.38 μm, RMS 0.04 μm. The experimental results show that the error compensation strategy proposed in this paper can significantly reduce the optical surface error and improve the machining accuracy.
超精密车削技术广泛应用于光学反射镜的加工过程中。由于机床运动误差、夹紧误差、跟踪误差等因素的影响,超精密车削在实际加工过程中往往会偏离理想位置。各种误差因素是相互耦合的,目前很难通过建立精确的误差模型进行补偿。提出了一种基于泽尼克多项式的光学表面误差补偿方法。首先,用Zernike多项式重构曲面误差;然后,通过分析光学表面误差的频率分布,选择特定泽尼克系数对应的误差。最后,基于快速刀具伺服系统,根据误差补偿策略对原加工路径进行修正。通过补偿Φ100 mm反射镜,将表面精度从PV 1.83 μm, RMS 0.47 μm提高到PV 0.38 μm, RMS 0.04 μm。实验结果表明,本文提出的误差补偿策略能显著降低光学表面误差,提高加工精度。
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引用次数: 1
Study on speckle problem in semiconductor laser display 半导体激光显示中散斑问题的研究
Zhihao Quan, Jie Liu, Jian-Cheng Zhong
As a new generation of display technology, Laser displays a wide range of color gamut, high brightness, and other characteristics. However, as a highly coherent light source, laser speckle will be generated by the interference phenomenon of the reflected light or transmitted light of different surface elements after the incident on the surface of the object, which will seriously reduce the quality of the display image. Therefore, the suppression of laser speckle and the reduction of speckle contrast are always important problems in laser display technology. Here, we presented a speckle suppression scheme suitable for projector optical systems. Speckle suppression by spectral broadening and speckle suppression by superposition of multiple independent and unrelated speckle patterns are included in the scheme. Then, the feasibility of the scheme was verified by simulation. On this basis, the projector system was built. The speckle suppression scheme was added, and the effect of the scheme on speckle contrast was verified by actual measurement, and the speckle contrast was successfully reduced from 0.129 to 0.041, which was difficult for human eyes to distinguish.
作为新一代的显示技术,激光显示具有色域范围广、亮度高等特点。但激光作为一种高度相干的光源,不同表面元素的反射光或透射光入射到物体表面后会产生干涉现象,会严重降低显示图像的质量。因此,抑制激光散斑和降低散斑对比度一直是激光显示技术中的重要问题。本文提出了一种适用于投影光学系统的散斑抑制方案。该方案包括通过谱展宽抑制散斑和通过叠加多个独立和不相关的散斑来抑制散斑。然后,通过仿真验证了方案的可行性。在此基础上,搭建了投影机系统。加入了散斑抑制方案,并通过实际测量验证了该方案对散斑对比度的影响,成功地将人眼难以分辨的散斑对比度从0.129降低到0.041。
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引用次数: 0
Chromatic confocal sensor with dual dispersion for extending the measuring range 具有双色散的彩色共焦传感器,可扩展测量范围
Xiaojie Wang, Tao Ma
A dual dispersion stitching method is proposed to extend the measuring range of chromatic confocal sensor without reducing the axial resolution. A novel chromatic confocal sensor with dual dispersion is presented and introduced. An X-shaped fiber coupler is employed to divide the light from light source into two beams. These two beams are used to generate two sets of staggered dispersion which extend the measuring range of chromatic confocal sensor. A dual-dispersive objective is designed with Zemax software for verifying the proposed method. The result indicates that the length of total dispersion is extended to 209.6 μm, which is 1.75 times the length of single dispersion. The coefficient of determination between the axial dispersion and wavelength is close to 1.0000.
为了在不降低轴向分辨率的前提下扩大彩色共焦传感器的测量范围,提出了一种双色散拼接方法。介绍了一种新型的双色散彩色共焦传感器。采用x形光纤耦合器将光源发出的光分成两束。利用这两束光产生两组交错色散,扩大了彩色共聚焦传感器的测量范围。利用Zemax软件设计了双色散物镜,验证了所提出的方法。结果表明,总色散长度达到209.6 μm,是单色散长度的1.75倍。轴向色散与波长的决定系数接近1.0000。
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引用次数: 0
System design of spectral coincidence detection of UV imager for power detection 功率检测紫外成像仪光谱符合检测系统设计
Ling Luo, Q. Yang, Zun Wang, Di Tao
Ultraviolet imaging technology is a non electric corona testing technology, which uses ultraviolet imager to detect ultraviolet produced by air discharge ionization, and then determine the position and intensity of corona discharge, it has high accuracy and reliability. For the detection and calibration of UV / visible image coincidence of UV imager, the LED integrating sphere light source with UV and visible light is installed to illuminate the star point hole on the focal plane of reflective collimator to simulate the discharge of infinite target. After receiving by the ultraviolet imager, the star point on the focal plane of the collimator will be imaged as a bright spot on the detector surface of the UV imager. The coincidence degree of the ultraviolet and visible light can be obtained by calculating the center position deviation of the imaging spot in two different spectral ranges. This equipment can be used for high-precision calibration of the non-coincidence of the UV imager.
紫外成像技术是一种非电晕检测技术,利用紫外成像仪探测空气放电电离产生的紫外线,进而确定电晕放电的位置和强度,具有较高的准确性和可靠性。为了检测和标定紫外成像仪的紫外/可见光图像重合,在反射准直器焦平面上安装了具有紫外和可见光的LED积分球光源,照射星点孔,模拟无限目标放电。经紫外成像仪接收后,准直器焦平面上的星点在紫外成像仪探测器表面成像为一个亮点。通过计算成像光斑在两个不同光谱范围内的中心位置偏差,可以得到紫外与可见光的重合程度。该设备可用于紫外成像仪非重合的高精度标定。
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引用次数: 0
Aspheric surface polishing with orthogonal velocity polishing tool 用正交速度抛光工具对非球面进行抛光
Zhimin Rao, Haitao Liu, Jieli Wu, Qiang Chen, Dailu Wang
An efficient orthogonal velocity polishing tool (OVPT) was developed. The OVPT was installed on the end flange of an industry robot. The movement range of the industry robot reaches φ 1000 millimeter. The robot OVPT is a highly efficiency processing method for aspheric precision optics manufacturing. In this paper, a 360 mm diameter fused silica parabolic mirror was polished by the robot OVPT. The convergence of OVPT based on an industry robot is outstanding. After 4 times of polishing, a final surface error RMS 16.6nm was achieved, and the initial surface error RMS was 69.5nm. A polished surface roughness Ra 1.5nm was achieved by robot OVPT.
研制了一种高效正交速度抛光工具(OVPT)。OVPT安装在工业机器人的端缘上。工业机器人的运动范围达到φ 1000毫米。机器人OVPT是一种高效的非球面精密光学加工方法。利用OVPT机器人对直径为360 mm的熔融石英抛物面镜进行抛光。基于工业机器人的OVPT收敛性突出。经过4次抛光,最终表面误差RMS为16.6nm,初始表面误差RMS为69.5nm。OVPT机器人抛光表面粗糙度Ra为1.5nm。
{"title":"Aspheric surface polishing with orthogonal velocity polishing tool","authors":"Zhimin Rao, Haitao Liu, Jieli Wu, Qiang Chen, Dailu Wang","doi":"10.1117/12.2604036","DOIUrl":"https://doi.org/10.1117/12.2604036","url":null,"abstract":"An efficient orthogonal velocity polishing tool (OVPT) was developed. The OVPT was installed on the end flange of an industry robot. The movement range of the industry robot reaches φ 1000 millimeter. The robot OVPT is a highly efficiency processing method for aspheric precision optics manufacturing. In this paper, a 360 mm diameter fused silica parabolic mirror was polished by the robot OVPT. The convergence of OVPT based on an industry robot is outstanding. After 4 times of polishing, a final surface error RMS 16.6nm was achieved, and the initial surface error RMS was 69.5nm. A polished surface roughness Ra 1.5nm was achieved by robot OVPT.","PeriodicalId":236529,"journal":{"name":"International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT)","volume":"14 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-12-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131802432","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Study on fast manufacturing technology for high precision aspherical optics 高精度非球面光学元件快速制造技术研究
Bin Xuan, Linchao Zhang
With the developments of optical design, testing and manufacturing technology, aspherical optics are applied more often. However, high precision aspherical optics are not widely used in many fields due to the high cost of manufacturing. In order to reduce the cost, an approach to realize the fast manufacturing of high precision aspherical optics is proposed. The bonnet polishing, computer controlled optical surfacing (CCOS) and magnetorheological finishing (MRF) are utilized in combination during the manufacturing process. Firstly, the rough polishing of the aspherical optics is accomplished by bonnet polishing. Secondly, the surface error are smoothed to reduce mid-frequency surface error by CCOS smoothing polishing equipment. Finally, the deterministic manufacturing is carried out by MRF equipment. The fast manufacturing technology has been applied on a paraboloidal mirror of 237mm in diameter. The experimental results show that aspherical optics can reach λ /60 (rms, @λ =632.8nm) in 33 hours by using the combined manufacturing technology. The fast manufacturing technology can provide high precision and high efficiency for aspherical optics.
随着光学设计、检测和制造技术的发展,非球面光学的应用越来越广泛。然而,由于制造成本高,高精度非球面光学系统在许多领域没有得到广泛应用。为了降低成本,提出了一种实现高精度非球面光学元件快速制造的方法。在制造过程中,将阀盖抛光、计算机控制光学表面处理(CCOS)和磁流变表面处理(MRF)相结合。首先,采用阀盖抛光法完成非球面光学元件的粗抛光。其次,利用CCOS光滑抛光设备对表面误差进行光滑处理,减小中频表面误差;最后,利用MRF设备进行确定性制造。将快速制造技术应用于直径为237mm的抛物面镜上。实验结果表明,采用复合制造技术,非球面光学在33小时内可达到λ /60(均方根,@λ =632.8nm)。快速制造技术可以为非球面光学提供高精度和高效率。
{"title":"Study on fast manufacturing technology for high precision aspherical optics","authors":"Bin Xuan, Linchao Zhang","doi":"10.1117/12.2604549","DOIUrl":"https://doi.org/10.1117/12.2604549","url":null,"abstract":"With the developments of optical design, testing and manufacturing technology, aspherical optics are applied more often. However, high precision aspherical optics are not widely used in many fields due to the high cost of manufacturing. In order to reduce the cost, an approach to realize the fast manufacturing of high precision aspherical optics is proposed. The bonnet polishing, computer controlled optical surfacing (CCOS) and magnetorheological finishing (MRF) are utilized in combination during the manufacturing process. Firstly, the rough polishing of the aspherical optics is accomplished by bonnet polishing. Secondly, the surface error are smoothed to reduce mid-frequency surface error by CCOS smoothing polishing equipment. Finally, the deterministic manufacturing is carried out by MRF equipment. The fast manufacturing technology has been applied on a paraboloidal mirror of 237mm in diameter. The experimental results show that aspherical optics can reach λ /60 (rms, @λ =632.8nm) in 33 hours by using the combined manufacturing technology. The fast manufacturing technology can provide high precision and high efficiency for aspherical optics.","PeriodicalId":236529,"journal":{"name":"International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT)","volume":"17 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-12-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131068900","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
期刊
International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT)
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